Box-type annealing furnace

Abstract

The utility model relates to the field of annealing furnaces, and discloses a box type annealing furnace which comprises a box body, a base is fixedly connected to the bottom of the box body, a sealing door is hinged to the front face of the box body, a handle is fixedly connected to the front face of the sealing door, and the front face of the sealing door is connected with the front face of the box body through a lock catch. A plurality of heating pipes are fixedly connected to the interior of the box body, the plurality of heating pipes are symmetrically arranged on the inner wall of the box body, a rotating mechanism is arranged in the box body, a temperature sensor is fixedly connected to the inner wall of the box body, and a control panel is fixedly connected to the right side of the box body. According to the utility model, by starting the power supply of the stepping motor, the plurality of placing boxes can revolve around the central axis of the disc while rotating, so that the irradiation dead angle is reduced to a certain extent, the heating uniformity of the heating pipe to the component is improved, the manual secondary heating is not needed, and the working efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the field of annealing furnaces, in particular to a box-type annealing furnace. Background Art

[0002] An annealing furnace is a process used in manufacturing, which includes heating multiple semiconductor wafers to affect their electrical properties. It is designed for different effects, and can heat the wafers to activate, convert a thin film into a thin film or convert a thin film into a wafer substrate interface, make a densely deposited thin film, change the state of the grown thin film, repair implanted damage, move dopants or transfer dopants from one thin film to another thin film or from the thin film into the wafer substrate.

[0003] After retrieval, Chinese Patent Publication No.: CN220624875U discloses a box-type annealing furnace, including: an annealing furnace, a door frame, a temperature sensor, heat dissipation fins, and upper-layer heating tubes; the door frame is installed at one end of the annealing furnace, and electric sliding rails are fixedly installed on both sides of the door frame, and a sealing door is movably connected to one side of the electric sliding rail. This patent can heat the devices on the storage grid in all directions through the upper and lower layers of heating tubes, making the heating area of the devices more uniform. However, there are many grooves on the surface of the components, so when the heating tubes heat the surface of the components, the temperature rises differently on the surfaces of different regions of the components, resulting in a decrease in the heating uniformity. After the first heating is completed, it is necessary to manually take out the components, change the placement angle, and then place them back in the box for secondary heating to achieve better results. This operation increases the workload of the personnel and reduces the work efficiency. Therefore, a box-type annealing furnace is proposed to solve the above problems. Summary of the Utility Model

[0004] In order to make up for the above deficiencies, the utility model provides a box-type annealing furnace, aiming to improve the problem of "increasing the workload of personnel due to the need for secondary heating of components" in the prior art.

[0005] In order to achieve the above purpose, the utility model adopts the following technical scheme: a box-type annealing furnace, including a box body, the bottom of the box body is fixedly connected with a base, the front of the box body is hinged with a sealing door, the front of the sealing door is fixedly connected with a handle, the front of the sealing door is connected with the front of the box body through a lock, the inside of the box body is fixedly connected with heating tubes, the number of the heating tubes is set to be multiple, and the multiple heating tubes are symmetrically arranged on the inner wall of the box body. A rotating mechanism is arranged inside the box body, a temperature sensor is fixedly connected to the inner wall of the box body, and a control panel is fixedly connected to the right side of the box body.

[0006] As a further description of the above technical solution:

[0007] The rotating mechanism includes a stepper motor, and the stepper motor is fixed to the bottom of the inner wall of the box body.

[0008] As a further description of the above technical solution:

[0009] The rotating mechanism further includes a first rotating shaft, and the first rotating shaft is fixedly installed at the top of the output shaft of the stepper motor. The first rotating shaft is rotatably installed on the inner wall of the box body.

[0010] As a further description of the above technical solution:

[0011] The rotating mechanism further includes a disc, and the disc is fixedly installed on the circumferential surface of the first rotating shaft. The number of the discs is set to two groups.

[0012] As a further description of the above technical solution:

[0013] The rotating mechanism further includes a second rotating shaft, and the second rotating shaft penetrates and is rotatably installed on the inner wall of the disc. A gear is fixedly connected to the circumferential surface of the second rotating shaft.

[0014] As a further description of the above technical solution:

[0015] The rotating mechanism further includes an internal gear ring, and the internal gear ring meshes with the gear. Fixed blocks are fixedly connected to the left and right sides of the internal gear ring, and the fixed blocks are fixedly installed on the inner wall of the box body.

[0016] As a further description of the above technical solution:

[0017] The rotating mechanism further includes a placement box, and the placement box is fixedly installed on the circumferential surface of the second rotating shaft. The number of the placement boxes is set to be multiple, and the multiple placement boxes are arranged in a straight line at equal intervals on the surface of the second rotating shaft.

[0018] As a further description of the above technical solution:

[0019] The rotating mechanism further includes a protrusion, and the protrusion is fixedly installed at the bottom of the inner wall of the placement box. The number of the protrusions is set to be multiple, and the multiple protrusions are arranged in a ring at the bottom of the inner wall of the placement box.

[0020] The utility model has the following beneficial effects:

[0021] 1. In the utility model, by starting the power supply of the stepper motor, multiple placement boxes will rotate around the central axis of the disc while rotating on their own axes. To a certain extent, the irradiation dead angle is reduced, the heating uniformity of the heating tube for the components is improved, and there is no need for manual secondary heating, thus improving the work efficiency.

[0022] 2. In the present utility model, by providing the protrusions, while the placement box rotates around its own axis and revolves around the central axis of the disc, the components inside the placement box will be subject to centrifugal forces with continuously changing directions, so that the components collide with the protrusions and tumble slightly, and the bottom of the components can also be heated, further improving the heating uniformity. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic three-dimensional structure diagram of the whole when the sealing door is closed in the present utility model;

[0024] Figure 2 It is a schematic three-dimensional structure diagram of the whole when the sealing door is opened in the present utility model;

[0025] Figure 3 It is a schematic three-dimensional structure diagram of the rotating mechanism in the present utility model;

[0026] Figure 4 It is a schematic three-dimensional structure diagram of the second rotating shaft, the placement box and the protrusions in the present utility model.

[0027] LEGEND DESCRIPTION:

[0028] 1. Box body; 2. Base; 3. Sealing door; 4. Handle; 5. Lock catch; 6. Heating tube; 7. Stepper motor; 8. First rotating shaft; 9. Disc; 10. Second rotating shaft; 11. Gear; 12. Internal gear ring; 13. Fixed block; 14. Placement box; 15. Protrusion; 16. Temperature sensor; 17. Control panel. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0029] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0030] Refer to Figure 1 - Figure 2, An embodiment provided by the present utility model: A box-type annealing furnace includes a box body 1. A base 2 for supporting and stabilizing is fixedly connected to the bottom of the box body 1 to improve the stability of the box body 1 during operation. A sealing door 3 is hinged to the front of the box body 1. A handle 4 for conveniently opening the sealing door 3 is fixedly connected to the front of the sealing door 3. The front of the sealing door 3 is connected to the front of the box body 1 through a lock catch 5 to ensure the sealing performance of the sealing door 3 during operation. A heating pipe 6 for heating components is fixedly connected inside the box body 1. The number of the heating pipes 6 is set to be multiple, and the multiple heating pipes 6 are symmetrically arranged on the inner wall of the box body 1 to improve the uniformity of heat transfer. A rotating mechanism is arranged inside the box body 1. A temperature sensor 16 is fixedly connected to the inner wall of the box body 1. A control panel 17 is fixedly connected to the right side of the box body 1.

[0031] Refer to Figure 2 - Figure 3 , The rotating mechanism includes a stepping motor 7. The stepping motor 7 can precisely control the rotation angle of its output shaft, facilitate adjusting the rotation speed and rotation angle of its rotating shaft, and can be adjusted adaptively according to different working requirements to improve the control accuracy. The stepping motor 7 is fixed to the bottom of the inner wall of the box body 1. The rotating mechanism further includes a first rotating shaft 8 arranged vertically. The first rotating shaft 8 is fixedly installed at the top of the output shaft of the stepping motor 7. The first rotating shaft 8 is rotatably installed on the inner wall of the box body 1 to improve the stability of the first rotating shaft 8 during rotation. The rotating mechanism further includes a disc 9 with a circular cross-section. The disc 9 is fixedly installed on the circumferential surface of the first rotating shaft 8. The number of the discs 9 is set to be two groups.

[0032] Refer to Figure 2 - Figure 3 , The rotating mechanism further includes a second rotating shaft 10 arranged vertically. The second rotating shaft 10 penetrates and is rotatably installed on the inner wall of the disc 9. A gear 11 is fixedly connected to the circumferential surface of the second rotating shaft 10. The gear 11 is located below the disc 9. The rotating mechanism further includes an internal gear ring 12. The internal gear ring 12 meshes with the gear 11. The number of both the gear 11 and the internal gear ring 12 is set to be multiple and equal. Fixed blocks 13 are fixedly connected to the left and right sides of the internal gear ring 12 to improve the stability during operation. The fixed blocks 13 are fixedly installed on the inner wall of the box body 1.

[0033] Refer to Figure 4, the rotating mechanism further includes a placement box 14 for placing components. The placement box 14 is fixedly installed on the circumferential surface of the second rotating shaft 10. The number of placement boxes 14 is set to be multiple, and the multiple placement boxes 14 are arranged in a straight line at equal intervals on the surface of the second rotating shaft 10. Annealing operations can be performed on multiple components simultaneously, which is beneficial to efficiently utilize the space inside the box body 1 and improve the space utilization rate. The rotating mechanism further includes protrusions 15. The protrusions 15 are fixedly installed at the bottom of the inner wall of the placement box 14. The number of protrusions 15 is set to be multiple, and the multiple protrusions 15 are arranged in a ring at the bottom of the inner wall of the placement box 14. By providing the protrusions 15, when the component collides with the protrusions 15, the component will flip slightly, further improving the heating uniformity of the surfaces of the component in all directions.

[0034] Working principle: When in use, first check whether the working state of the equipment is good, then open the sealing door 3 by unlocking the lock 5 and pulling the handle 4, and then evenly place the components to be annealed inside the placement box 14. Then turn on the power supply of the heating tube 6 through the control panel 17 to heat the components, and control the temperature inside the box body 1 through the temperature sensor 16 to avoid adverse effects on the components caused by excessive temperature inside the box body 1.

[0035] Start the power supply of the stepping motor 7. The stepping motor 7 works to drive the first rotating shaft 8 to rotate. The rotation of the first rotating shaft 8 drives the disc 9 to rotate. When the disc 9 rotates, it drives the second rotating shaft 10 to revolve around the central axis of the disc 9. At the same time, through the cooperation between the gear 11 and the internal gear ring 12, the second rotating shaft 10 also rotates around its own central axis. The rotation of the second rotating shaft 10 also drives the components inside the placement box 14 to rotate, so that each angle of the components has the opportunity to be irradiated by the heating tube 6, improving the heating uniformity. At the same time, the placement box 14 also drives the components to revolve around the central axis of the disc 9, further improving the heating uniformity.

[0036] When the placement box 14 drives the components to revolve and rotate, due to the influence of centrifugal force, the components will have a small displacement and then collide with the protrusions 15 inside the placement box 14, so that the components rotate slightly, and then the positions at the bottom of the components can also be irradiated, further improving the heating uniformity.

[0037] Finally, it should be noted that the above are only the preferred embodiments of the present invention and are not used to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, for those skilled in the art, they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A box-type annealing furnace, comprising a box body (1), characterized in that: The bottom of the box (1) is fixedly connected to a base (2); the front of the box (1) is hingedly connected to a sealed door (3); the front of the sealed door (3) is fixedly connected to a handle (4); the front of the sealed door (3) is connected to the front of the box (1) via a lock (5); the interior of the box (1) is fixedly connected to a heating tube (6); the number of the heating tubes (6) is set to be multiple, and the multiple heating tubes (6) are symmetrically arranged on the inner wall of the box (1); a rotating mechanism is arranged inside the box (1); the inner wall of the box (1) is fixedly connected to a temperature sensor (16); and the right side of the box (1) is fixedly connected to a control panel (17).

2. A box-type annealing furnace according to claim 1, characterized in that: The rotating mechanism comprises a stepping motor (7), and the stepping motor (7) is fixed to the bottom of the inner wall of the box body (1).

3. A box-type annealing furnace according to claim 2, characterized in that: The rotating mechanism further comprises a rotating shaft 1 (8), wherein the rotating shaft 1 (8) is fixedly mounted on the top end of the output shaft of the stepping motor (7), and the rotating shaft 1 (8) is rotatably mounted on the inner wall of the box body (1).

4. A box-type annealing furnace according to claim 3, characterized in that: The rotating mechanism further comprises a disc (9), wherein the disc (9) is fixedly mounted on the circumferential surface of the rotating shaft (8), and the number of the discs (9) is set to two groups.

5. A box-type annealing furnace according to claim 4, characterized in that: The rotating mechanism further comprises a second rotating shaft (10), the second rotating shaft (10) passing through and rotatably mounted on the inner wall of the disc (9), and a gear (11) is fixedly connected to the circumferential surface of the second rotating shaft (10).

6. A box-type annealing furnace according to claim 5, characterized in that: The rotating mechanism further comprises an inner gear ring (12), the inner gear ring (12) meshing with the gear (11), and fixed blocks (13) are fixedly connected to the left and right sides of the inner gear ring (12), and the fixed blocks (13) are fixedly mounted on the inner wall of the box body (1).

7. A box-type annealing furnace according to claim 5, characterized in that: The rotating mechanism further comprises a placement box (14), wherein the placement box (14) is fixedly mounted on the circumferential surface of the second rotating shaft (10), the number of the placement boxes (14) is set to be multiple, and the multiple placement boxes (14) are arranged in a straight line and at equal intervals on the surface of the second rotating shaft (10).

8. A box-type annealing furnace according to claim 7, characterized in that: The rotating mechanism further comprises a protrusion (15), wherein the protrusion (15) is fixedly mounted on the bottom of the inner wall of the placement box (14), the number of the protrusions (15) is set to be multiple, and the multiple protrusions (15) are arranged in a ring shape on the bottom of the inner wall of the placement box (14).

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