Novel adsorption device
By designing an alternating adsorption synchronous belt structure in the silicon wafer transmission device, the problem of overlapping wear during silicon wafer transmission in the prior art is solved, and more efficient silicon wafer transmission and better production quality are achieved.
Patent Information
- Application Number
- CN202421611922.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-09
- Publication Date
- 2025-05-30
- Estimated Expiration
- 2034-07-09
AI Technical Summary
The existing adsorption devices cause partial overlap and wear of the front and rear silicon wafers during the transmission process of silicon wafers, affecting the production quality of silicon wafers.
A new type of adsorption device is designed, using a synchronous belt and a driving assembly to alternately adsorb the silicon wafer through the first through hole and the second through hole to ensure that the front and rear silicon wafers are maintained at a suitable distance and avoid overlapping wear.
It effectively avoids overlapping wear of front and rear silicon wafers, and improves the transmission effect and production quality of silicon wafers.
Smart Images
Figure CN222927462U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of silicon wafer processing, in particular to a novel adsorption device. Background Art
[0002] In the production process of silicon wafers, after the silicon wafers are degummed, a single row of silicon wafers is placed in the water tank of the slicing output device. The adsorption device sucks the silicon wafer at the forefront and transports it upward. After the silicon wafer is transported to the upper turning wheel, it is rotated from vertical to horizontal, and then is output through the output end of the slicing output device.
[0003] The existing adsorption device is in an adsorption state for a long time. As the silicon wafer is transported upward, after the bottom of the previous silicon wafer is offset from the adsorption holes by a part, the offset adsorption holes will immediately adsorb the next silicon wafer, causing partial overlap between the front and rear silicon wafers, resulting in wear between the silicon wafers and having a certain impact on the production quality of the silicon wafers. Summary of the Utility Model
[0004] In view of the above defects or deficiencies in the prior art, it is desirable to provide a novel adsorption device with good adsorption and transmission effects, which avoids the situation of overlap and wear between the front and rear silicon wafers and ensures the quality of the silicon wafers.
[0005] A novel adsorption device provided by the utility model includes a bracket; one side of the bracket is the front side, and the side opposite to the front side is the back side; vertical synchronous belts are symmetrically arranged on both sides of the bracket, and a driving component for driving the two synchronous belts to rotate synchronously is arranged on the bracket; a plurality of first through holes are formed on the belt surface of the front side of the synchronous belt, and the plurality of first through holes are equidistantly distributed in the vertical direction; a plurality of second through holes are formed on the belt surface of the back side of the synchronous belt, and the plurality of second through holes are equidistantly distributed in the vertical direction;
[0006] Water absorption components are arranged in the synchronous belts on the same side on both sides of the bracket, and a plurality of water absorption holes evenly distributed in the vertical direction are arranged on the front side of the water absorption components; the first through holes, the second through holes and the water absorption holes distributed on the same side of the bracket are located in the same vertical plane.
[0007] Further, the bracket is made of aluminum alloy material.
[0008] Further, 4-6 first through holes are formed on the belt surface of the front side of the synchronous belt; 4-6 second through holes are formed on the belt surface of the back side of the synchronous belt; 10-12 water absorption holes are arranged on the front side of the water absorption component; the distances between adjacent first through holes, the distances between adjacent second through holes, and the distances between adjacent water absorption holes are all the same.
[0009] Further, the driving assembly includes a main synchronous pulley symmetrically arranged on both sides of the bracket and a driven synchronous pulley symmetrically arranged on both sides of the bracket. The two main synchronous pulleys are rotationally connected to the bracket through a driving shaft, and the two driven synchronous pulleys are rotationally connected to the bracket through a driven shaft. A synchronous belt is sleeved on the main synchronous pulley and the driven synchronous pulley on the same side. One end of the driving shaft is provided with a waterproof motor for driving its rotation.
[0010] Further, the water absorption assembly includes water absorption blocks symmetrically arranged on both sides of the bracket. The water absorption blocks are respectively located inside the synchronous belts on the same side. A plurality of water absorption holes are uniformly distributed in the vertical direction on the front surface of the water absorption blocks. A connection hole communicating with a plurality of the water absorption holes thereon is formed on one side of the water absorption block. The connection hole is connected with a connector, and the connector is connected to a water suction pump through a hose.
[0011] Further, a support assembly is arranged below the synchronous belt on the bracket; the support assembly includes a plurality of shaft rods arranged in parallel on the bracket, and a plurality of support wheels are symmetrically arranged on both sides of the bracket on the shaft rods.
[0012] Compared with the prior art, the beneficial effects of the present utility model are as follows:
[0013] The adsorption device of the present utility model is provided with a synchronous belt, a driving assembly and a water absorption assembly; a first through hole is formed on the front surface of the synchronous belt, and a second through hole is formed on the back surface; the synchronous belt is driven to rotate by the driving assembly. As the synchronous belt rotates, the first through hole rotates to the front surface and aligns with the water absorption hole. At this time, suction force is generated on the first through hole, sucking the silicon wafer at the front end of the material basket. The silicon wafer rises together with the synchronous belt. After the silicon wafer rises, the water absorption holes below the silicon wafer of the water absorption assembly are blocked by the synchronous belt, and no adsorption force will be generated on the subsequent silicon wafers. Until the first silicon wafer is completely lifted and conveyed away, the second through hole rotates to the front surface and aligns with the water absorption hole. At this time, suction force is generated on the second through hole, sucking the second silicon wafer and causing it to rise with the synchronous belt. In this way, the first through hole and the second through hole alternately adsorb the silicon wafers, keeping a proper interval between the front and rear silicon wafers. The adsorption and transmission effect is good, avoiding the situation of overlapping and abrasion between the front and rear silicon wafers, and ensuring the quality of the silicon wafers.
[0014] It should be understood that the content described in the utility model content part is not intended to limit the key or important features of the embodiments of the present utility model, nor to limit the scope of the present utility model. Other features of the present utility model will become easily understood through the following description. Description of the Drawings
[0015] By reading the detailed description of the non-restrictive embodiments with reference to the following drawings, other features, purposes and advantages of the present utility model will become more obvious:
[0016] Figure 1 It is a schematic structural view of the front of the adsorption device;
[0017] Figure 2 It is a schematic structural view of the back of the adsorption device;
[0018] Figure 3 It is a schematic structural view of the front of the water absorption block.
[0019] Reference numerals in the figure: 1, bracket; 2, synchronous belt; 3, drive assembly; 4, water absorption assembly; 5, support assembly;
[0020] 11, front; 12, back;
[0021] 21, first through hole; 22, second through hole;
[0022] 31, main synchronous belt pulley; 32, driven synchronous belt pulley; 33, driving shaft; 34, driven shaft;
[0023] 41, water absorption block; 42, water absorption hole; 43, connection hole;
[0024] 51, shaft rod; 52, support wheel. Specific embodiments
[0025] The following further details the present utility model in conjunction with the drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the related utility model and not to limit the utility model. Additionally, it should be noted that for ease of description, only parts related to the utility model are shown in the drawings.
[0026] It should be noted that, without conflict, the embodiments in the present utility model and the features in the embodiments can be combined with each other. The following will detail the present utility model with reference to the drawings and in conjunction with the embodiments.
[0027] Please refer to Figures 1 to 2 , an embodiment of the present utility model provides a novel adsorption device, including a bracket 1; one side of the bracket 1 is the front 11, and the side opposite to the front 11 is the back 12; vertical synchronous belts 2 are symmetrically arranged on both sides of the bracket 1, and a drive assembly 3 for driving the two synchronous belts 2 to rotate synchronously is arranged on the bracket 1; a plurality of first through holes 21 are formed on the belt surface of the synchronous belt 2 on the front 11, and the plurality of first through holes 21 are equally spaced along the vertical direction; a plurality of second through holes 22 are formed on the belt surface of the synchronous belt 2 on the back 12, and the plurality of second through holes 22 are equally spaced along the vertical direction;
[0028] On both sides of the bracket 1 and within the same-side synchronous belts 2, a water absorption component 4 is provided. On the front surface 11 of the water absorption component 4, a number of water absorption holes 42 are evenly distributed in the vertical direction; the first through hole 21, the second through hole 22, and the water absorption holes 42 distributed on the same side of the bracket 1 are located in the same vertical plane.
[0029] In this embodiment, when slicing the silicon wafer, the slicing output device pushes the material basket in the water tank to move it in the direction close to the adsorption device, and at the same time, the driving component 3 drives the two synchronous belts 2 to rotate synchronously. When the first silicon wafer in the material basket adheres to the two synchronous belts 2 and the first through hole 21 rotates to the front surface 11 and aligns with the water absorption hole 42, the water absorption hole 42 sucks the first silicon wafer through the first through hole 21, and the silicon wafer rises together with the synchronous belt 2. After the silicon wafer rises, the water absorption holes 42 of the water absorption component 4 located below the silicon wafer are blocked by the synchronous belt 2 and will not generate an adsorption force on the subsequent silicon wafers.
[0030] When the first silicon wafer is completely lifted and conveyed away, when the second through hole 22 rotates to the front surface 11 and aligns with the water absorption hole 42, the water absorption hole 42 sucks the second silicon wafer through the second through hole 22, sucks the second silicon wafer and makes it rise with the synchronous belt 2, and conveys it away. In this way, the first through hole 21 and the second through hole 22 alternately adsorb the silicon wafers, so that an appropriate interval is maintained between the front and rear silicon wafers, and the adsorption and transmission effect is good, avoiding the situation of overlapping and wearing of the front and rear silicon wafers, and ensuring the quality of the silicon wafers.
[0031] In a preferred embodiment, the bracket 1 is made of aluminum alloy material, is not easily corroded and rusted in water, and has a long service life.
[0032] In a preferred embodiment, as Figures 1 to 3 shown, there are 4 - 6 first through holes 21 on the belt surface of the front surface 11 of the synchronous belt 2; there are 4 - 6 second through holes 22 on the belt surface of the back surface 12 of the synchronous belt 2; there are 10 - 12 water absorption holes 42 on the front surface 11 of the water absorption component 4; the distances between adjacent first through holes 21, between adjacent second through holes 22, and between adjacent water absorption holes 42 are all the same.
[0033] In this embodiment, multiple first through holes 21 or multiple second through holes 22 are simultaneously aligned with the corresponding number of water absorption holes 42, and the adsorption force is strong, ensuring that the silicon wafer is sucked and driven to rise by the synchronous belt 2.
[0034] The distances between the first through holes 21 and the second through holes 22 at the top and the first through holes 21 and the second through holes 22 at the bottom along the synchronous belt 2 are the same, that is, the alternating adsorption intervals of the conversion of the first through hole 21 to the second through hole 22 and the conversion of the second through hole 22 to the first through hole 21 are the same, ensuring the uniformity of the slicing output of the silicon wafers.
[0035] In a preferred embodiment, as Figure 1and Figure 3 As shown in Figure 3 , the driving assembly 3 includes a main synchronous pulley 31 symmetrically arranged on both sides of the bracket 1 and a driven synchronous pulley 32 symmetrically arranged on both sides of the bracket 1. The two main synchronous pulleys 31 are rotationally connected to the bracket 1 through a driving shaft 33, and the two driven synchronous pulleys 32 are rotationally connected to the bracket 1 through a driven shaft 34. A synchronous belt 2 is sleeved on the main synchronous pulley 31 and the driven synchronous pulley 32 on the same side. One end of the driving shaft 33 is provided with a waterproof motor for driving its rotation.
[0036] In this embodiment, the waterproof motor drives the driving shaft 33 to rotate, driving the two main synchronous pulleys 31 to rotate synchronously, thereby driving the two synchronous belts 2 to rotate synchronously, so that the first through holes 21 or the second through holes 22 on both sides of the bracket 1 are synchronously aligned with the water absorption holes 42, ensuring that the adsorption forces on both sides of the silicon wafer are the same, with good driving effect and ensuring the smooth slicing and transmission of the silicon wafer.
[0037] In a preferred embodiment, as Figure 1 and Figure 3 shown, the water absorption assembly 4 includes water absorption blocks 41 symmetrically arranged on both sides of the bracket 1. The water absorption blocks 41 are respectively located inside the synchronous belts 2 on the same side. A plurality of water absorption holes 42 are evenly distributed along the vertical direction on the front surface of the water absorption block 41. A connection hole 43 communicating with the plurality of water absorption holes 42 thereon is opened on one side of the water absorption block 41. The connection hole 43 is connected with a connector, and the connector is connected to a water suction pump through a hose.
[0038] In this embodiment, the water absorption blocks 41 with water absorption holes 42 are arranged inside the synchronous belts 2, cooperating with the first through holes 21 and the second through holes 22 on the synchronous belts 2, realizing the spaced adsorption of adjacent silicon wafers, with reasonable structural design and avoiding the wear between adjacent silicon wafers.
[0039] In a preferred embodiment, as Figure 1 shown, a support assembly 5 is arranged below the synchronous belt 2 on the bracket 1; the support assembly 5 includes a plurality of shaft rods 51 arranged in parallel on the bracket 1, and a plurality of support wheels 52 are symmetrically arranged on both sides of the bracket 1 on the shaft rods 51.
[0040] In this embodiment, when the silicon wafer is adsorbed on the two conveyor belts 2, the lower part of the silicon wafer is supported by the support wheels 52, keeping the silicon wafer in a vertical state and ensuring the adsorption effect. When the silicon wafer rises, the support wheels 52 rotate accordingly, with good support effect.
[0041] In the description of this specification, terms such as "connection", "installation", "fixation", etc. should all be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.
[0042] In the description of this specification, the descriptions of terms such as "one embodiment" and "some embodiments" mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or instance. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.
[0043] The above are only the preferred embodiments of the present application and are not used to limit the present application. For those skilled in the art, various changes and modifications can be made to the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included within the protection scope of the present application.
Claims
1. A novel adsorption device, characterized in that: The invention comprises a bracket (1); one side of the bracket (1) is a front side (11), and the side opposite to the front side (11) is a back side (12); vertical synchronous belts (2) are symmetrically arranged on both sides of the bracket (1), and a driving assembly (3) for driving the two synchronous belts (2) to rotate synchronously is arranged on the bracket (1); a plurality of first through holes (21) are provided on the belt surface of the front side (11) of the synchronous belt (2), and the plurality of first through holes (21) are evenly spaced along the vertical direction; a plurality of second through holes (22) are provided on the belt surface of the back side (12) of the synchronous belt (2), and the plurality of second through holes (22) are evenly spaced along the vertical direction; A water absorption component (4) is provided in the synchronous belt (2) located on the same side of both sides of the bracket (1), and a front side (11) of the water absorption component (4) is provided with a plurality of water absorption holes (42) evenly distributed in the vertical direction; the first through hole (21), the second through hole (22) and the water absorption hole (42) distributed on the same side of the bracket (1) are located on the same vertical plane.
2. The novel adsorption device according to claim 1 is characterized in that: The bracket (1) is made of aluminum alloy material.
3. The novel adsorption device according to claim 1 is characterized in that: The front surface (11) of the synchronous belt (2) is provided with 4-6 first through holes (21); the back surface (12) of the synchronous belt (2) is provided with 4-6 second through holes (22); the front surface (11) of the water absorption component (4) is provided with 10-12 water absorption holes (42); the spacing between adjacent first through holes (21), the spacing between adjacent second through holes (22) and the spacing between adjacent water absorption holes (42) are all the same.
4. The novel adsorption device according to claim 1 is characterized in that: The driving assembly (3) comprises a main synchronous belt pulley (31) symmetrically arranged on both sides of the bracket (1) and a slave synchronous belt pulley (32) symmetrically arranged on both sides of the bracket (1); the two main synchronous belt pulleys (31) are rotatably connected to the bracket (1) via a driving shaft (33); the two slave synchronous belt pulleys (32) are rotatably connected to the bracket (1) via a driven shaft (34); the synchronous belt (2) is sleeved on the main synchronous belt pulley (31) and the slave synchronous belt pulley (32) on the same side; and a waterproof motor for driving the driving shaft (33) is arranged at one end thereof.
5. The novel adsorption device according to claim 1 is characterized in that: The water absorption component (4) comprises water absorption blocks (41) symmetrically arranged on both sides of the bracket (1), the water absorption blocks (41) are respectively located in the synchronous belt (2) on the same side, the front side of the water absorption block (41) is evenly distributed with a plurality of water absorption holes (42) in the vertical direction, and one side of the water absorption block (41) is provided with a connecting hole (43) connected to the plurality of water absorption holes (42) thereon, the connecting hole (43) is connected to an adapter, and the adapter is connected to a water absorption pump via a hose.
6. The novel adsorption device according to claim 1 is characterized in that: A support assembly (5) is arranged on the bracket (1) below the synchronous belt (2); the support assembly (5) comprises a plurality of shafts (51) arranged in parallel on the bracket (1), and a plurality of support wheels (52) are symmetrically arranged on the shafts (51) on both sides of the bracket (1).