Portable protective cover plate for machine table cavity

Abstract

The utility model discloses a portable protective cover plate for a machine cavity. The portable protective cover plate comprises a base, a cover plate body and a quick-release connecting mechanism, the base is installed on a machine table cavity or around the cavity, and the cover plate body can be quickly connected with or separated from the base through the quick-release connecting mechanism. An observation window and an observation window baffle are arranged on the cover plate body, and the observation window baffle can shield the observation window or expose the observation window. By redesigning and improving the structure of the cavity cover plate of the optical measurement wafer surface particle machine table, the original threads of the aluminum base of the machine table can be effectively protected from being damaged by frequent disassembly of screws, meanwhile, the convenience of maintenance, disassembly and installation is improved, the requirement for observing the operation condition of components in the cavity of the machine table in the maintenance process can be met, and the service life of the cavity cover plate of the optical measurement wafer surface particle machine table is prolonged. And great practical value and technical improvement significance are provided for prolonging the service life of the machine main body.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor production, and particularly relates to a portable protection cover for a machine cavity. Background Art

[0002] In the prior art, the protection cover of the rear cavity of the wafer surface particle measurement machine is fixed to the optical cavity base of the machine by screws. During the disassembly and maintenance process of the machine, the screws are frequently disassembled and assembled, which is likely to cause damage to the threads of the aluminum casting cavity base. Seriously, it may lead to the inability to install the protection cover and the abnormal operation of the machine. Summary of the Utility Model

[0003] The purpose of the utility model is to provide a portable protection cover for a machine cavity to solve the deficiencies of the prior art.

[0004] The purpose of the utility model is realized by the following technical solutions:

[0005] A portable protection cover for a machine cavity includes a base, a cover body and a quick-release connection mechanism;

[0006] The base is installed on or around the machine cavity, and the cover body can be quickly connected to or separated from the base through the quick-release connection mechanism;

[0007] An observation window and an observation window baffle are provided on the cover body, and the observation window baffle can block or expose the observation window.

[0008] Preferably, the quick-release connection mechanism is a compression buckle lock.

[0009] Preferably, the observation window baffle is rotatably connected or slidably connected to the cover body.

[0010] Preferably, the observation window baffle can be turned up and down;

[0011] A baffle fixing device is provided above the observation window, and the observation window baffle can be quickly connected to or separated from the baffle fixing device; when the observation window baffle is turned up and connected to the baffle fixing device, the observation window is blocked by the observation window baffle, and when the observation window baffle is turned down and separated from the baffle fixing device, the observation window is exposed.

[0012] Preferably, the baffle fixing device is a magnetic attraction component.

[0013] Preferably, the observation window baffle is connected to the cover body through a hinge located below the observation window.

[0014] Preferably, a handle is provided on the cover body.

[0015] Preferably, the base is provided with mounting holes, and the base is mounted on the machine table cavity or around the cavity through screws passing through the mounting holes.

[0016] By redesigning and improving the cavity cover structure of the optical measurement wafer surface particle machine tool in this application, it can effectively protect the original threads of the aluminum base of the machine tool from damage caused by frequent disassembly of screws. At the same time, it improves the convenience of maintenance disassembly and installation, and can meet the need to observe the operation status of the components inside the machine tool cavity during the maintenance process, which has great practical value and technical improvement significance for extending the service life of the main body of the machine tool. Description of the Drawings

[0017] Figure 1 is a schematic structural diagram of the portable cover provided by this application;

[0018] Among them, 1 - magnetic attraction component; 2 - pressing buckle lock; 3 - observation window baffle; 4 - hinge; 5 - base; 6 - cover plate body; 7 - observation window; 8 - handle; 9 - mounting hole. Detailed Embodiments

[0019] The following further illustrates this application with reference to the drawings.

[0020] The portable protective cover for the machine tool cavity provided by this application, as Figure 1 shown, includes a base 5, a cover plate body 6 and a quick-release connection mechanism;

[0021] The base 5 is mounted on the machine tool cavity or around the cavity. The cover plate body is quickly connected or separated from the base through the quick-release connection mechanism. When the cover plate body is connected to the base through the quick-release connection mechanism, the inside of the cavity can be isolated from the external environment, so as to effectively protect the components inside the cavity; when maintenance is required, the cover plate body can be quickly disassembled through the quick-release connection mechanism. This quick-release connection mechanism can adopt a mechanism in the prior art that can achieve quick disassembly and installation and will not cause damage to the machine tool body during installation and disassembly, such as a block connection mechanism. This application preferably uses a pressing buckle lock 2. As those skilled in the art can understand, the pressing buckle lock is composed of two parts of fasteners respectively provided on the base and on the cover plate body that can cooperate with each other. Just press or pull up the buckle to quickly fix or release the cover plate body. Moreover, the pressing buckle lock 2 has a certain pressing force so that the cover plate body 6 can be tightly fixed on the base 5, effectively sealing the inside of the cavity.

[0022] The shape of the cover plate body is adapted to the shape of the cavity of the optical measurement wafer surface particle machine tool. The number of pressing buckle locks can be adjusted accordingly according to the size of the cover plate body. Generally, the pressing buckle locks are evenly distributed around the cover plate body.

[0023] The cover plate body is provided with an observation window 7 and an observation window baffle 3. The observation window baffle 3 has two states, which can block the observation window 7 or expose the observation window 7. When the observation window is blocked by the observation window baffle, the core optical devices during the operation of the machine tool can be protected from external stray light interference. When the observation window is exposed, the internal operation status of the machine tool cavity can be observed through the observation window at this time.

[0024] The observation window baffle can be rotatably connected or slidably connected to the cover plate body. When it is rotatably connected, specifically, one side of the observation window baffle is rotatably connected to the cover plate body, and the other side can rotate. When rotated to the corresponding position, it can block the observation window or expose the observation window. When it is slidably connected, a slideway is provided on the cover plate body, and the observation window baffle can move along the slideway. When moved to the corresponding position, it can block the observation window or expose the observation window.

[0025] This application provides a preferred connection structure between the observation window baffle and the cover plate body. As Figure 1 shown, the observation window baffle can be turned up and down. Further, the observation window baffle is connected to the cover plate body through a hinge 4 located below the observation window, and the up and down turning of the observation window baffle is realized through the hinge. A baffle fixing device is provided above the observation window, and the observation window baffle can be quickly connected or separated from the baffle fixing device. When the observation window baffle is turned up and connected to the baffle fixing device, the observation window is blocked by the observation window baffle; when the observation window baffle is turned down and separated from the baffle fixing device, the observation window baffle naturally drops under the influence of gravity and no longer blocks the observation window.

[0026] The baffle fixing device preferably adopts a magnetic attraction component 1. When the observation window baffle is turned up, the magnetic attraction component 1 can adsorb the observation window baffle 3 to prevent it from turning down. Of course, other technologies can also be adopted for the baffle fixing device, such as a magic tape component, a buckle component, etc. As those skilled in the art can understand, a connecting component matching the baffle fixing device is provided on the observation window baffle.

[0027] Preferably, a handle 8 is provided on the cover plate body 6 to facilitate the taking and placing of the cover plate body.

[0028] Preferably, mounting holes 9 are provided on the base, and the base is mounted on the machine tool cavity or around the cavity through screws passing through the mounting holes.

[0029] The protective cover provided by this application can be applied not only to the cavity of the optical measurement wafer surface particle machine tool, but also to other scenarios with similar requirements.

[0030] This application can effectively protect the internal mechanism of the cavity while facilitating maintenance, disassembly, and test observation, and has great technical value for protecting the base of the machine tool body and improving the operation convenience.

[0031] Although the preferred embodiments of the present utility model have been described, those skilled in the art can make additional changes and modifications to these embodiments once they know the basic creative concept. Therefore, the appended claims are intended to be construed to include the preferred embodiments as well as all changes and modifications falling within the scope of the present utility model. Obviously, those skilled in the art can make various changes and variations to the present utility model without departing from the spirit and scope of the present utility model. Thus, if these modifications and variations of the present utility model fall within the scope of the claims of the present utility model and their equivalent technologies, the present utility model is also intended to include these modifications and variations.

Claims

1. A convenient protective cover for a machine cavity, characterized in that: It includes a base, a cover body and a quick-release connection mechanism; The base is installed on or around the cavity of the machine, and the cover body can be quickly connected or separated from the base through the quick-release connection mechanism; The cover plate body is provided with an observation window and an observation window baffle, and the observation window baffle can cover the observation window or expose the observation window.

2. The portable protective cover for a machine cavity according to claim 1, characterized in that: The quick-release connection mechanism is a tightening buckle lock.

3. The portable protective cover for a machine cavity according to claim 1, characterized in that: The observation window baffle is rotatably connected or slidably connected to the cover body.

4. The portable protective cover for a machine cavity according to claim 1, characterized in that: The observation window baffle can be turned up and down; A baffle fixing device is provided above the observation window, and the observation window baffle can be quickly connected or separated from the baffle fixing device; when the observation window baffle is flipped upward and connected to the baffle fixing device, the observation window is blocked by the observation window baffle, and when the observation window baffle is flipped downward and separated from the baffle fixing device, the observation window is exposed.

5. The portable protective cover for a machine cavity according to claim 4, characterized in that: The baffle fixing device is a magnetic attraction component.

6. The portable protective cover for a machine cavity according to claim 4, characterized in that: The observation window baffle is connected to the cover body via a hinge located below the observation window.

7. The portable protective cover for a machine cavity according to claim 1, characterized in that: A handle is provided on the cover plate body.

8. The portable protective cover for a machine cavity according to claim 1, characterized in that: The base is provided with a mounting hole, and the base is mounted on or around the machine cavity by means of screws passing through the mounting hole.

Images