Thickening tool for thin-wall part

By designing a thickened tooling for thin-walled parts including thickened plates, pressing sheets and pressing blocks, the problem of distortion and deformation of thin-walled parts during semiconductor processing is solved, and a more uniform stress and higher yield rate is achieved.

CN222932550UActive Publication Date: 2025-06-03SHANGHAI RUISHENG SEMICON TECH CO LTD
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Patent Information

Application Number
CN202421638705.1
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-07-11
Publication Date
2025-06-03
Estimated Expiration
2034-07-11

AI Technical Summary

Technical Problem

During semiconductor machining, thin-walled parts are prone to twist and deform during processing due to their thin thickness, resulting in low yield. The existing thickened workpieces are unevenly subjected to local distortion and deformation.

Method used

A thin-walled parts thickening tooling is designed, including thickened plates, pressing sheets and pressing blocks. The pressing sheet presses against the thin-wall bend of the part to be processed, and the shape projected on the thickened plate is consistent with the shape projected at the thin-wall bend, thereby increasing the stress area. One end of the pressing block presses against the thickened plate and the other end presses against the pressing plate, locking the part to be processed in the right position, dispersing the local load.

Benefits of technology

By evenly increasing the stress area of ​​thin-walled parts, preventing local twisting and deformation, and improving the yield rate of processing.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model belongs to the technical field of semiconductor processing, and discloses a thin-wall part thickening tool which comprises a thickening plate, an abutting piece and an abutting block. The thickening plate is provided with an alignment position; the abutting sheet is configured to abut against the thin-wall bending position of the workpiece to be machined, and the shape of the projection of the abutting sheet on the thickening plate is consistent with the shape of the projection of the thin-wall bending position on the thickening plate; one end of the abutting block abuts against the thickening plate, the other end of the abutting block abuts against the abutting piece, and the abutting block is configured to lock the thin-wall bent position on the alignment position. The abutting piece abuts against the thin-wall bending position of the workpiece to be machined, the shape of the projection of the abutting piece on the thickening plate is consistent with the shape of the projection of the thin-wall bending position on the thickening plate so that the stress area of the thin-wall bending position can be increased, one end of the abutting block abuts against the thickening plate, and the other end of the abutting block abuts against the abutting piece so that the workpiece to be machined can be locked to the alignment position of the thickening plate. The abutting piece can disperse the local load of the abutting block, the thin wall is prevented from deforming, and the machining yield is increased.
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Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing, in particular to a thickening tooling for thin-walled parts. Background Art

[0002] In the mechanical processing of semiconductors, for high-cavity thin-walled parts, due to the too thin material thickness, the strength and stiffness of the material are both low, resulting in the parts being prone to twisting and deformation during processing. Therefore, a thickening tooling is used to assist in fixing the parts to be processed to improve the yield rate of processing.

[0003] In the existing thickening tooling, multiple pressing blocks are directly pressed against the parts to be processed, resulting in the force on the parts to be processed being limited to a small area, not uniform enough, and prone to local twisting and deformation during processing, affecting the yield rate. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a thickening tooling for thin-walled parts, so that the force on the thin-walled parts is more uniform and the yield rate of processing is improved.

[0005] To achieve the above object, the utility model adopts the following technical solutions:

[0006] A thickening tooling for thin-walled parts, comprising:

[0007] A thickening plate provided with an alignment position;

[0008] A pressing piece configured to press against the thin-walled bending part of the part to be processed, and the shape of the projection of the pressing piece on the thickening plate is the same as the shape of the projection of the thin-walled bending part on the thickening plate;

[0009] A pressing block detachably connected to the thickening plate, one end of the pressing block pressing against the thickening plate and the other end pressing against the pressing piece, and the pressing block is configured to lock the part to be processed at the alignment position.

[0010] Preferably, an alignment groove is formed on the thickening plate, the alignment position is arranged in the alignment groove, and the thin-walled bending part can extend into the alignment groove and abut against the groove wall of the alignment groove.

[0011] Preferably, a through alignment hole is formed at the center position of the alignment position.

[0012] Preferably, the projected area of the pressing piece on the thickening plate is greater than or equal to the projected area of the thin-walled bending part on the thickening plate.

[0013] Preferably, a first anti-slip structure is arranged on the side of the pressing piece facing the thin-walled bending part.

[0014] Preferably, the pressing block is screwed to the thickened plate.

[0015] Preferably, one end of the pressing block away from the thin-wall bending part is provided with a bending part, and the bending part presses against the thickened plate.

[0016] Preferably, a second anti-slip structure is provided on the side of the pressing block facing the pressing piece; and / or, a second anti-slip structure is provided on the side of the pressing piece facing the pressing block.

[0017] Preferably, a plurality of pressing blocks are arranged at intervals along the extending direction of the pressing piece.

[0018] Advantages of the present utility model:

[0019] The pressing piece presses against the thin-wall bending part of the workpiece to be processed, and the shape of the projection of the pressing piece on the thickened plate is the same as the shape of the projection of the thin-wall bending part on the thickened plate, so as to increase the stress area of the thin-wall bending part. One end of the pressing block presses against the thickened plate, and the other end presses against the pressing piece, so as to lock the workpiece to be processed in the alignment position of the thickened plate. The pressing piece can disperse the local load of the pressing block, prevent the thin wall from deforming, and improve the qualified rate of processing. Description of the Drawings

[0020] Figure 1 is a schematic structural diagram of the thickening tool for thin-wall parts of the present utility model;

[0021] Figure 2 is a schematic structural diagram of the thickened plate of the present utility model;

[0022] Figure 3 is a schematic structural diagram of the workpiece to be processed of the present utility model.

[0023] In the figure:

[0024] 100. Workpiece to be processed; 101. Thin-wall bending part;

[0025] 1. Thickened plate; 10. Alignment groove; 11. Alignment hole;

[0026] 2. Pressing piece;

[0027] 3. Pressing block; 31. Bending part. Detailed Embodiments

[0028] The following details the embodiments of the present utility model. The examples of the embodiments are shown in the drawings, where the same or similar reference numerals represent the same or similar components or components with the same or similar functions throughout. The embodiments described below with reference to the drawings are exemplary and are intended to explain the present utility model and should not be construed as limiting the present utility model.

[0029] In the description of the present utility model, unless otherwise clearly defined and limited, the terms "connected", "connected to", and "fixed" shall be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, a mechanical connection, or an electrical connection. It can be directly connected or indirectly connected through an intermediate medium. It can be the communication inside two components or the interaction relationship between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0030] In the description of the present utility model, unless otherwise clearly defined and limited, the first feature being "above" or "below" the second feature may include the first feature and the second feature being in direct contact, or may include the first feature and the second feature not being in direct contact but being in contact through other features therebetween. Moreover, the first feature being "above", "over", and "on" the second feature includes the first feature being directly above and obliquely above the second feature, or merely indicating that the first feature has a higher horizontal height than the second feature. The first feature being "below", "beneath", and "under" the second feature includes the first feature being directly below and obliquely below the second feature, or merely indicating that the first feature has a lower horizontal height than the second feature.

[0031] The technical solution of the present utility model will be further described below in conjunction with the accompanying drawings and through specific embodiments.

[0032] As Figures 1 - 3 shown, the present utility model provides a thickening tooling for thin-walled parts, which is used to fix the thin-walled parts to be processed. The thickening tooling for thin-walled parts includes a thickening plate 1, a pressing piece 2, and a pressing block 3. Among them, the thickening plate 1 is provided with an alignment position; the pressing piece 2 is configured to press against the thin-walled bending part 101 of the workpiece 100 to be processed, and the shape of the projection of the pressing piece 2 on the thickening plate 1 is the same as the shape of the projection of the thin-walled bending part 101 on the thickening plate 1; the pressing block 3 is detachably connected to the thickening plate 1, one end of the pressing block 3 presses against the thickening plate 1, and the other end presses against the pressing piece 2. The pressing block 3 is configured to lock the thin-walled bending part 101 in the alignment position.

[0033] The pressing piece 2 presses against the thin-walled bending part 101 of the workpiece 100 to be processed, and the shape of the projection of the pressing piece 2 on the thickening plate 1 is the same as the shape of the projection of the thin-walled bending part 101 on the thickening plate 1 to increase the stress area of the thin-walled bending part 101. One end of the pressing block 3 presses against the thickening plate 1, and the other end presses against the pressing piece 2 to lock the workpiece 100 to be processed in the alignment position on the thickening plate 1. The pressing piece 2 can disperse the local load of the pressing block 3, prevent the thin wall from deforming, and improve the yield rate of processing.

[0034] Specifically, it can be understood that the shapes and sizes of the thickened plate 1, the pressing piece 2, and the pressing block 3 can all be customized according to the specific situation of the workpiece 100 to be processed, so as to ensure the qualified rate of processing.

[0035] Specifically, a plurality of pressing blocks 3 are arranged at intervals along the extending direction of the pressing piece 2. With the above arrangement, the force on the pressing piece 2 is more balanced, and the stability of the pressing piece 2 is improved.

[0036] In this embodiment, the workpiece 100 to be processed has a barrel structure, and the projection of the thin-walled bent portion 101 on the thickened plate 1 is circular ring-shaped. Therefore, the pressing piece 2 is also adaptively adjusted to be circular ring-shaped, and four pressing blocks 3 are arranged at intervals along the circumferential direction of the pressing piece 2.

[0037] In other embodiments, the number of the pressing blocks 3 can also be adaptively adjusted according to requirements, which is not limited herein.

[0038] Specifically, an alignment groove 10 is formed on the thickened plate 1, and the alignment position is arranged in the alignment groove 10. The thin-walled bent portion 101 can extend into the alignment groove 10 and abut against the groove wall of the alignment groove 10. With the above arrangement of the alignment groove 10, the thin-walled bent portion 101 can abut against the groove wall of the alignment groove 10 to prevent the workpiece 100 to be processed from displacing along the thickened plate 1 during the processing, thereby avoiding damage to the thin wall.

[0039] Specifically, a through alignment hole 11 is formed at the center position of the alignment position. With the above arrangement of the alignment hole 11, it is convenient for the worker to observe the workpiece 100 from one side of the thickened plate 1, which is convenient to use, and at the same time, the self-weight of the thickened plate 1 can also be reduced.

[0040] Specifically, the projected area of the pressing piece 2 on the thickened plate 1 is greater than or equal to the projected area of the thin-walled bent portion 101 on the thickened plate 1. With the above arrangement, the pressing piece 2 can completely cover the thin-walled bent portion 101, which is more firm and stable.

[0041] Specifically, a first anti-slip structure is arranged on the side of the pressing piece 2 facing the thin-walled bent portion 101. With the above arrangement, relative displacement between the pressing piece 2 and the thin-walled bent portion 101 can be prevented.

[0042] More specifically, the first anti-slip structure can be an anti-slip pad, such as a rubber pad, etc.; or, the anti-slip structure is an anti-slip protrusion, and the anti-slip protrusion can be a dot-shaped protrusion or a protrusion with any shape of pattern, as long as the contact friction between the position where it is located and the thin-walled bent portion 101 can be increased. Its specific form refers to the prior art and is not specifically limited in this embodiment.

[0043] Specifically, the pressing block 3 is screwed to the thickened plate 1. With the above arrangement, the installation and disassembly of the pressing block 3 are convenient.

[0044] In this embodiment, an M5 threaded hole is provided in one of the pressing block 3 and the thickening plate 1.

[0045] In other embodiments, the pressing block 3 can also be detachably connected to the thickening plate 1 by rivets or pins, which is not limited herein.

[0046] Specifically, a bent portion 31 is provided at one end of the pressing block 3 away from the thin-wall bending portion 101, and the bent portion 31 presses against the thickening plate 1. The provision of the bent portion 31 enables the pressing block 3 to vertically press against the thickening plate 1, making it more stable.

[0047] Specifically, a second anti-slip structure is provided on the side of the pressing block 3 facing the pressing piece 2; and / or, a second anti-slip structure is provided on the side of the pressing piece 2 facing the pressing block 3. The provision of the second anti-slip structure can prevent the relative sliding between the pressing block 3 and the pressing piece 2.

[0048] More specifically, the second anti-slip structure can be an anti-slip pad, such as a rubber pad, etc.; or, the anti-slip structure is an anti-slip protrusion, and the anti-slip protrusion can be a dot-shaped protrusion or a protrusion with a pattern of any shape, as long as it can increase the contact friction between the position where it is located and the pressing block 3 or the pressing piece 2. Its specific form refers to the prior art and is not specifically limited in this embodiment.

[0049] Obviously, the above embodiments of the present invention are merely examples for clearly explaining the present invention, and are not intended to limit the implementation manners of the present invention. For those of ordinary skill in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to enumerate all the implementation manners here. Any modifications, equivalent replacements, and improvements made within the spirit and principle of the present invention shall be included in the protection scope of the claims of the present invention.

Claims

1. Tooling for thickening thin-walled parts, characterized in that: include: The thickened plate (1) is provided with an alignment position; A pressing piece (2) is configured to press against a thin-walled bend (101) of a workpiece (100) to be processed, wherein a shape of the pressing piece (2) projected on the thickened plate (1) is consistent with a shape of the thin-walled bend (101) projected on the thickened plate (1); A pressing block (3), the pressing block (3) is detachably connected to the thickened plate (1), one end of the pressing block (3) presses against the thickened plate (1), and the other end presses against the pressing sheet (2), and the pressing block (3) is configured to lock the thin-wall bending part (101) in the alignment position.

2. The tooling for thickening thin-walled parts according to claim 1, characterized in that: The thickened plate (1) is provided with an alignment groove (10), the alignment position is arranged in the alignment groove (10), and the thin-walled bending portion (101) can extend into the alignment groove (10) and abut against the groove wall of the alignment groove (10).

3. The tooling for thickening thin-walled parts according to claim 1, characterized in that: A through alignment hole (11) is provided at the center of the alignment position.

4. The tooling for thickening thin-walled parts according to claim 1, characterized in that: The projection area of ​​the pressing piece (2) on the thickened plate (1) is greater than or equal to the projection area of ​​the thin-wall bending portion (101) on the thickened plate (1).

5. The tooling for thickening thin-walled parts according to claim 1, characterized in that: A first anti-slip structure is provided on one side of the pressing sheet (2) facing the thin-wall bending portion (101).

6. The tooling for thickening thin-walled parts according to claim 1, characterized in that: The pressing block (3) is screwed to the thickened plate (1).

7. The tooling for thickening thin-walled parts according to claim 1, characterized in that: A bending portion (31) is provided at one end of the pressing block (3) away from the thin-wall bending portion (101), and the bending portion (31) presses against the thickened plate (1).

8. The tooling for thickening thin-walled parts according to claim 1, characterized in that: A second anti-slip structure is provided on a side of the pressing block (3) facing the pressing sheet (2); and / or a second anti-slip structure is provided on a side of the pressing sheet (2) facing the pressing block (3).

9. The tooling for thickening thin-walled parts according to any one of claims 1 to 8, characterized in that: A plurality of the pressing blocks (3) are arranged at intervals along the extension direction of the pressing sheet (2).