Wafer bearing box with antiskid structure

Abstract

The utility model discloses a wafer bearing box with an anti-skidding structure, which comprises a wafer bearing frame box, a fixed pin shaft arranged on the inner side wall of the wafer bearing frame box, an anti-skidding support plate rotationally connected with the fixed pin shaft, and a bumping post vertically arranged on the inner side wall of the wafer bearing frame box, the bottom box is arranged on the inner surface of the bottom end of the wafer bearing frame box, and a guide rail is arranged on the inner surface of the bottom box; the blocking assembly is slidably installed in the bottom box and comprises a sliding block slidably connected with the guide rail, a moving plate connected with the sliding block, an elastic plate vertically installed on the side of the moving plate and a blocking rod with the bottom end perpendicular to the center of the moving plate. The wafer bearing frame box is provided with an anti-slip design for preventing the wafer from sliding towards one side of the opening, the anti-slip support plate can rotate by a certain angle, and the wafer is blocked by the blocking rod by changing the position of the blocking rod, so that the placed wafer is prevented from sliding towards the outer side.

Description

Technical Field

[0001] The utility model belongs to the technical field of wafer carrier boxes, and particularly relates to a wafer carrier box with an anti-slip structure. Background Technique

[0002] A wafer box is a common box for packaging semiconductor substrates. A wafer carrier frame box is a frame box for storing and transporting wafer boxes. The size of the wafer carrier frame box is relatively large and is generally used for wafer storage and transportation inside a factory;

[0003] When the wafer carrier frame box is used for storing and transporting wafer chips, the wafer chips are placed flat inside the wafer carrier box. One side of the wafer carrier box with a frame structure is in an open state. During the movement of the wafer carrier box, there may be a situation where the wafer chips slide towards the open side of the wafer carrier box. The wafer chips placed flat inside the wafer carrier box are in a horizontally placed state where they are prone to sliding, which is not conducive to the stable installation of the wafer chips; when the wafer carrier frame box transports wafer chips, there is a problem of lacking an anti-slip design to prevent the wafer chips from sliding towards the open side. For this reason, this application proposes a wafer carrier box with an anti-slip structure. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a wafer carrier box with an anti-slip structure to solve the problem of lacking an anti-slip design on the wafer carrier frame box to prevent the wafer chips from sliding towards the open side as mentioned in the above background technique.

[0005] To achieve the above purpose, the utility model provides the following technical solution: A wafer carrier box with an anti-slip structure, comprising

[0006] A wafer carrier frame box, on the inner side wall of which there are fixed pin shafts, anti-slip support plates rotatably connected to the fixed pin shafts, and stop posts vertically installed on the inner side wall of the wafer carrier frame box;

[0007] A bottom box installed on the inner surface of the bottom end of the wafer carrier frame box, on the inner surface of which there are guide rails;

[0008] A blocking assembly slidably installed inside the bottom box, including a slider slidably connected to the guide rail, a moving plate connected to the slider, an elastic plate vertically installed at the side position of the moving plate, and a blocking rod vertically at the center position of the bottom end of the moving plate.

[0009] Preferably, the stop posts and the fixed pin shafts are parallel, and a placement groove is formed on the surface of the anti-slip support plate near the end.

[0010] Preferably, a rectangular activity groove for the moving plate to slide is formed on the surface of the bottom box with a cuboid structure, and the elastic plate fits with the opposite inner surface of the bottom box.

[0011] Preferably, the elastic plates on both sides of the moving plate are diagonally distributed, and damping rubber pads are arranged on the surfaces of the elastic plates facing the bottom box.

[0012] Preferably, the anti-slip support plates and the blocking posts on the inner side wall of the wafer carrier box are alternately distributed.

[0013] Preferably, a switch plate is connected to the wafer carrier box through a hinge, and a rotating column is rotatably connected to the surface of the wafer carrier box near the bottom end on one side.

[0014] Preferably, a magnet sheet is embedded in the surface of the wafer carrier box near the top end on one side, a metal bump is arranged on the surface of the switch plate close to the magnet sheet, and the magnet sheet is magnetically adsorbed and connected to the metal bump.

[0015] Preferably, a sealing plate is slidably connected to one side of the wafer carrier box, the switch plate is located between the adjacent sealing plates, the surface of the sealing plate opposite to the switch plate is fitted, and a blocking plate is arranged at the top end of the sealing plate.

[0016] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0017] In the present utility model, the wafer carrier box has an anti-slip design to prevent the wafer from sliding towards the opening side. The anti-slip support plate can rotate a certain angle. Secondly, by changing the position of the blocking rod, the wafer is blocked by the blocking rod to prevent the placed wafer from sliding outwards. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 is a schematic structural diagram of the present utility model;

[0019] Figure 2 is the Figure 1 amplified structural diagram of part C in the present utility model;

[0020] Figure 3 is a top view structural diagram of the bottom box of the present utility model;

[0021] Figure 4 is the Figure 3 side view structural diagram of the moving plate in the present utility model;

[0022] Figure 5 is the Figure 1 structural diagram of the wafer carrier box of the present utility model in the B-B direction;

[0023] Figure 6 is a rear view structural diagram of the wafer carrier box of the present utility model;

[0024] In the figure: 1. Wafer carrier box; 2. Bottom box; 4. Blocking rod; 11. Anti-slip support plate; 12. Stopper post; 13. Sealing plate; 14. Fixed pin shaft; 15. Opening and closing plate; 16. Magnet sheet; 17. Rotating column; 21. Guide rail; 31. Elastic plate; 32. Moving plate; 33. Slide block; 111. Placing groove; 151. Metal bump. Detailed implementation mode

[0025] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.

[0026] Embodiment 1

[0027] Please refer to Figures 1 to 5 , the present invention provides a technical solution: a wafer carrier box with an anti-slip structure, including a wafer carrier box 1, a fixed pin shaft 14 is provided on the inner side wall of the wafer carrier box 1, an anti-slip support plate 11 rotatably connected to the fixed pin shaft 14, and a stopper post 12 vertically installed on the inner side wall of the wafer carrier box 1. There is friction between the anti-slip support plate 11 and the fixed pin shaft 14. Without a certain external force, the anti-slip support plate 11 is in a stable state under the action of damping friction. The wafer is placed inside the wafer carrier box 1, and the side of the wafer is supported by the flush anti-slip support plate 11. Manually rotate the anti-slip support plate 11 to make the wafer in a certain inclined state. The sealing plate 13 and the opening and closing plate 15 seal the inclined wafer to prevent the horizontally placed wafer from sliding; a bottom box 2 installed on the inner surface of the bottom end of the wafer carrier box 1, the bottom box 2 and the wafer carrier box 1 are combined by conventional methods, the bottom box 2 limits the moving plate 32, and a guide rail 21 is provided on the inner surface of the bottom box 2, and the guide rail 21 plays a role in guiding the slide block 33; a blocking component slidably installed inside the bottom box 2, including a slide block 33 slidably connected to the guide rail 21, a moving plate 32 connected to the slide block 33, an elastic plate 31 vertically installed on the side of the moving plate 32, and a blocking rod 4 vertically at the center position of the bottom end of the moving plate 32. Relatively press the diagonally distributed elastic plates 31, move the slide block 33 along the linear direction of the guide rail 21, and the position of the blocking rod 4 can be changed, and the blocking rod 4 further blocks the wafer to prevent the wafer from sliding outward.

[0028] In this embodiment, the stopper post 12 and the fixed pin shaft 14 are parallel, and a placing groove 111 is opened on the surface of the anti-slip support plate 11 near the end. Move the slide block 33 to one side so that the blocking rod 4 is located in the placing groove 111, which does not affect the taking and placing of the wafer.

[0029] In this embodiment, a rectangular movable groove for the sliding of the movable plate 32 is formed on the surface of the bottom box 2 with a rectangular parallelepiped structure. The elastic plate 31 fits the inner surface opposite to the bottom box 2. The elastic plates 31 at both sides of the movable plate 32 are diagonally distributed. A damping rubber pad is arranged on the surface of the elastic plate 31 facing the bottom box 2. The elastic plate 31 is made of elastic spring steel material and can be bent. The damping rubber pad on the surface of the elastic plate 31 plays a role in increasing damping.

[0030] In this embodiment, the anti-slip support plates 11 and the stop posts 12 on the inner side wall of the wafer carrier box 1 are alternately distributed. The stop posts 12 play a role in blocking the anti-slip support plates 11 to prevent the anti-slip support plates 11 from tilting excessively.

[0031] When the wafer is placed in the wafer carrier box 1:

[0032] The wafer is horizontally placed inside the wafer carrier box 1. The side of the wafer is supported by the flush anti-slip support plates 11. The sealing plate 13 and the opening and closing plate 15 seal the inclined wafer.

[0033] Press the diagonally distributed elastic plates 31 in opposite directions, then move the slider 33 along the linear direction of the guide rail 21 to an appropriate position, change the position of the blocking rod 4, and the wafer is blocked by the blocking rod 4.

[0034] Manually rotate the anti-slip support plate 11. The anti-slip support plate 11 rotates by a certain angle around the fixed pin shaft 14 to make the wafer in a certain inclined state, preventing the placed wafer from sliding outward.

[0035] In summary: The wafer carrier box 1 has an anti-slip design to prevent the wafer from sliding towards the open side. The anti-slip support plate 11 can rotate by a certain angle. Secondly, by changing the position of the blocking rod 4, the wafer is blocked by the blocking rod 4 to prevent the placed wafer from sliding outward.

[0036] Embodiment 2

[0037] Please refer to Figures 1 to 6, which is the second embodiment of the present utility model. This embodiment is based on the previous embodiment. To facilitate the removal of the tilted wafer, a hinged opening and closing plate 15 is connected to the wafer carrier frame box 1. By opening the opening and closing plate 15 outward, the situation of the wafer can be observed. A rotating column 17 is rotatably connected to the surface of the wafer carrier frame box 1 near the bottom on one side. The rotating column 17 serves to change the blockage of the bottom end of the opening and closing plate 15. A magnet sheet 16 is embedded in the surface of the wafer carrier frame box 1 near the top on one side. A metal bump 151 is provided on the surface of the opening and closing plate 15 close to the magnet sheet 16. The magnet sheet 16 and the metal bump 151 are magnetically adsorbed and connected. When the opening and closing plate 15 is opened to the vertical state, at this time, the magnet sheet 16 and the metal bump 151 are adsorbed and connected, so that the opening and closing plate 15 is in a stable state. A blocking plate 13 is slidably connected to one side of the wafer carrier frame box 1. The blocking plate 13 serves to block the state of the wafer. The opening and closing plate 15 is located between adjacent blocking plates 13. The surface of the blocking plate 13 opposite to the opening and closing plate 15 is fitted. The blocking plate 13 is flush with the opening and closing plate 15. A blocking plate is provided at the top of the blocking plate 13.

[0038] In summary: By opening the opening and closing plate 15 outward, the situation of the wafer can be observed. When the opening and closing plate 15 is opened to the vertical state, at this time, the magnet sheet 16 and the metal bump 151 are adsorbed and connected, so that the opening and closing plate 15 is in a stable state. By vertically moving up the blocking plate 13, it is convenient to remove the tilted wafer.

[0039] Although the embodiments of the present utility model have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirits of the present utility model. The scope of the present utility model is defined by the appended claims and their equivalents.

Claims

1. A wafer carrier box with an anti-slip structure, characterized in that: include A wafer carrying frame box (1), wherein the inner side wall of the wafer carrying frame box (1) is provided with a fixing pin shaft (14), an anti-slip support plate (11) rotatably connected to the fixing pin shaft (14), and a blocking column (12) vertically mounted on the inner side wall of the wafer carrying frame box (1); A bottom box (2) mounted on the inner surface of the bottom end of the wafer carrying frame box (1), wherein a guide rail (21) is provided on the inner surface of the bottom box (2); A blocking assembly slidably mounted inside the bottom box (2) comprises a slider (33) slidably connected to the guide rail (21), a moving plate (32) connected to the slider (33), a spring plate (31) vertically mounted on the side of the moving plate (32), and a blocking rod (4) at the bottom end vertically at the center of the moving plate (32).

2. The wafer carrier box with an anti-slip structure according to claim 1, characterized in that: The blocking column (12) and the fixing pin shaft (14) are parallel, and a placement groove (111) is provided on the surface of the anti-slip support plate (11) close to the end.

3. The wafer carrier box with an anti-slip structure according to claim 1, characterized in that: A rectangular movable groove for sliding the movable plate (32) is provided on the surface of the bottom box (2) of the rectangular parallelepiped structure, and the spring plate (31) is matched with the inner surface opposite to the bottom box (2).

4. The wafer carrier box with an anti-slip structure according to claim 1, characterized in that: The spring plates (31) at both sides of the movable plate (32) are distributed diagonally, and damping rubber pads are provided on the surfaces of the spring plates (31) facing the bottom box (2).

5. The wafer carrier box with an anti-slip structure according to claim 1, characterized in that: The anti-slip support plates (11) and the blocking columns (12) on the inner side wall of the wafer carrying frame box (1) are alternately distributed.

6. The wafer carrier box with an anti-slip structure according to claim 1, characterized in that: An opening and closing plate (15) is connected to the wafer carrying frame box (1) via a hinge, and a rotating column (17) is rotatably connected to a surface of one side of the wafer carrying frame box (1) close to the bottom end.

7. The wafer carrier box with an anti-slip structure according to claim 6, characterized in that: A magnet sheet (16) is embedded on a surface of one side of the wafer carrying frame box (1) close to the top, a metal protrusion (151) is provided on a surface of the opening and closing plate (15) close to the magnet sheet (16), and the magnet sheet (16) is connected to the metal protrusion (151) by magnetic attraction.

8. The wafer carrier box with an anti-slip structure according to claim 7, characterized in that: A sealing plate (13) is slidably connected to one side of the wafer carrying frame box (1); the opening and closing plates (15) are located between adjacent sealing plates (13); the surfaces opposite to the opening and closing plates (15) are matched; and a blocking plate is provided at the top of the sealing plate (13).

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