Single crystal furnace charging machine with preheating structure

Abstract

The utility model discloses a single crystal furnace charging machine with a preheating structure, and belongs to the technical field of single crystal furnace charging machines. Comprising a furnace body, a material guiding mechanism is arranged on one side of the furnace body, a feeding cylinder is arranged at the upper end of the material guiding mechanism, a crucible is arranged in the furnace body, a supporting seat is fixedly arranged in the feeding cylinder, and a movable rod is arranged in the supporting seat. The feeding device for the single crystal furnace solves the problems that although the feeding device for the single crystal furnace in the prior art reduces accumulated materials, the feeding amount is inconvenient to control, a preheating function is not provided, raw materials cannot be molten in advance, and the quality of a single crystal silicon rod is reduced. The movable rod can drive the cone to move downwards, the cone originally making contact with the limiting block is separated from the limiting block at the moment, raw materials slide into the conveying barrel from the outer wall of the cone, the discharging amount can be controlled, and discharging blockage is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnace feeding machines, in particular to a single crystal furnace feeding machine with a preheating structure. Background Technique

[0002] A single crystal furnace is a device that melts polycrystalline materials such as polysilicon in an inert gas environment using a graphite heater and grows dislocation-free single crystals by the Czochralski method; after heating the silicon material at high temperature, it is directly pulled to a suitable length. When the silicon material in the single crystal furnace is prepared, in order to save energy consumption, usually unmelted silicon material is directly put in. The Chinese patent with the publication number CN205635843U discloses a single crystal furnace feeding device: this patent transports the umbrella-shaped baffle to the lower part of the diversion cylinder through a lifting mechanism, and uses the umbrella-shaped baffle for material distribution to prevent the accumulation of materials in the crucible from affecting the addition of materials, improving its practical performance; and this design also has the advantages of simple structure, easy manufacturing and high practical efficiency.

[0003] However, the above-mentioned prior art solutions still have the following defects:

[0004] Although the existing single crystal furnace feeding devices reduce material accumulation, they are inconvenient to control the feeding amount and do not have a preheating function, unable to pre-melt the raw materials, reducing the quality of the single crystal rod. Content of the Utility Model

[0005] The utility model aims to solve at least one of the technical problems existing in the prior art.

[0006] For this reason, an object of the utility model is to provide a single crystal furnace feeding machine with a preheating structure. By arranging a movable rod in the feeding cylinder, when pressing down the limiting plate, the movable rod can drive the cone to move downward. At this time, the cone that originally contacted the limiting block separates from the limiting block, and the raw materials slide down from the outer wall of the cone into the conveying cylinder, which can control the feeding amount and avoid feeding blockage.

[0007] To achieve the above object, the utility model provides the following technical solution: A single crystal furnace feeding machine with a preheating structure includes a furnace body. A feeding guide mechanism is arranged on one side of the furnace body. A feeding cylinder is arranged at the upper end of the feeding guide mechanism. A crucible is arranged inside the furnace body. A support seat is fixedly arranged inside the feeding cylinder. A movable rod is arranged inside the support seat. A limiting plate is fixedly arranged at the upper end of the movable rod. A cone is fixedly arranged at the lower end of the movable rod. A limiting block is arranged on the inner wall of the feeding cylinder. A bearing plate is arranged below the feeding guide mechanism and is fixedly connected to the furnace body.

[0008] Preferably, a spring is arranged on the outer wall of the movable rod, and both ends of the spring are fixedly connected to the limiting plate and the support seat respectively.

[0009] Preferably, the material guiding mechanism includes a conveying cylinder and a material guiding pipe. A preheating sleeve is arranged on the outer wall of the conveying cylinder, and a heating wire is arranged inside the preheating sleeve.

[0010] Preferably, the material guiding pipe is fixedly arranged on one side of the furnace body, and the material guiding pipe is flange-connected to the conveying cylinder.

[0011] Preferably, a motor is installed on one side of the conveying cylinder away from the material guiding pipe, and a spiral conveying rod is arranged on the output end of the motor.

[0012] Preferably, a fixing plate is arranged above the material guiding pipe, and the fixing plate is fixedly connected to the furnace body.

[0013] Preferably, a cylinder is arranged on the fixing plate, and a sealing plate is arranged on the push rod of the cylinder.

[0014] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0015] 1. For a single crystal furnace feeder with a preheating structure of the present utility model, by arranging a movable movable rod in the feeding cylinder, when pressing down the limiting plate, the movable rod can drive the cone to move downward. The cone that originally contacted the limiting block is separated from the limiting block at this time, and the raw material slides down from the outer wall of the cone into the conveying cylinder, which can control the feeding amount and avoid feeding blockage.

[0016] 2. For a single crystal furnace feeder with a preheating structure of the present utility model, by arranging a preheating sleeve, the raw material in the conveying cylinder can be preheated, so that the raw material can be pre-melted, further improving the quality of the single crystal rod. By starting the cylinder, its push rod can drive the sealing plate to lift and lower, thereby controlling the entry and exit of the raw material. After the feeding is completed, dropping the sealing plate can seal the furnace body. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is a schematic diagram of the overall structure of the present utility model;

[0018] Figure 2 is a schematic diagram of the internal structure of the furnace body of the present utility model;

[0019] Figure 3 is a schematic diagram of the internal structure of the conveying cylinder of the present utility model;

[0020] Figure 4 is a schematic diagram of the internal structure of the feeding cylinder of the present utility model.

[0021] In the figure: 1, furnace body; 2, feeding mechanism; 3, feeding cylinder; 4, bearing plate; 101, crucible; 102, fixing plate; 103, cylinder; 104, sealing plate; 201, conveying cylinder; 202, motor; 203, screw conveyor rod; 204, feeding pipe; 205, preheating sleeve; 301, movable rod; 302, limiting plate; 303, support seat; 304, cone; 305, limiting block; 306, spring. Detailed implementation mode

[0022] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0023] In order to solve the technical problems in the prior art that although the feeding device of the single crystal furnace reduces material accumulation, it is inconvenient to control the feeding amount, and does not have a preheating function, and cannot pre-melt the raw materials, which reduces the quality of the single crystal rod, please refer to Figures 1-4 , the following technical solutions are provided:

[0024] In this embodiment, a single crystal furnace feeder with a preheating structure includes a furnace body 1. A feeding mechanism 2 is arranged on one side of the furnace body 1. A feeding cylinder 3 is arranged at the upper end of the feeding mechanism 2. A crucible 101 is arranged inside the furnace body 1. A support seat 303 is fixedly arranged inside the feeding cylinder 3. A movable rod 301 is arranged inside the support seat 303. A limiting plate 302 is fixedly arranged at the upper end of the movable rod 301. A cone 304 is fixedly arranged at the lower end of the movable rod 301. A limiting block 305 is arranged on the inner wall of the feeding cylinder 3. A bearing plate 4 is arranged below the feeding mechanism 2, and the bearing plate 4 is fixedly connected to the furnace body 1.

[0025] A spring 306 is arranged on the outer wall of the movable rod 301, and both ends of the spring 306 are fixedly connected to the limiting plate 302 and the support seat 303 respectively. The raw materials are added into the feeding cylinder 3, and the raw materials are piled up on the upper end of the cone 304. By pressing the limiting plate 302 downward, the movable rod 301 drives the cone 304 to move downward. The cone 304 that originally contacted the limiting block 305 is separated from the limiting block 305 at this time, so that the raw materials slide down from the outer wall of the cone 304 into the conveying cylinder 201, which can control the feeding amount and avoid feeding blockage. The spring 306 plays a role in resetting. It should be noted that in this embodiment, the weight of the raw materials will not cause the cone 304 to move downward due to force, and the movement of the cone 304 needs to be controlled by manually pressing the limiting plate 302.

[0026] In this embodiment, the material guiding mechanism 2 includes a conveying cylinder 201 and a material guiding pipe 204. A preheating sleeve 205 is arranged on the outer wall of the conveying cylinder 201, and a heating wire is arranged inside the preheating sleeve 205. By arranging the preheating sleeve 205, the raw materials in the conveying cylinder 201 can be preheated, so that the raw materials can be pre-melted, further improving the quality of the single crystal silicon rod.

[0027] The material guiding pipe 204 is fixedly arranged on one side of the furnace body 1, and the material guiding pipe 204 is flange-connected to the conveying cylinder 201. A motor 202 is installed on the side of the conveying cylinder 201 away from the material guiding pipe 204, and a spiral conveying rod 203 is arranged on the output end of the motor 202. By starting the motor 202, its output end drives the spiral conveying rod 203 to drive, and then the raw materials are conveyed to the material guiding pipe 204.

[0028] In this embodiment, a fixing plate 102 is arranged above the material guiding pipe 204, and the fixing plate 102 is fixedly connected to the furnace body 1. A cylinder 103 is arranged on the fixing plate 102, and a sealing plate 104 is arranged on the push rod of the cylinder 103. By starting the cylinder 103, its push rod can drive the sealing plate 104 to move up and down, so as to control the entry and exit of the raw materials. After the feeding is completed, the sealing plate 104 is lowered to seal the furnace body 1.

[0029] Working principle: When in use, the raw materials are added into the feeding cylinder 3, and the raw materials are stacked on the upper end of the cone 304. By pressing down the limiting plate 302, the movable rod 301 drives the cone 304 to move downward. The cone 304 that originally contacted the limiting block 305 is separated from the limiting block 305 at this time, so that the raw materials slide down from the outer wall of the cone 304 into the conveying cylinder 201. By starting the motor 202, its output end drives the spiral conveying rod 203 to drive, and then the raw materials are conveyed to the material guiding pipe 204. The preheating sleeve 205 can preheat the raw materials in the conveying cylinder 201, so that the raw materials can be pre-melted. By starting the cylinder 103, its push rod can drive the sealing plate 104 to move up and down, so as to control the entry and exit of the raw materials. After the feeding is completed, the sealing plate 104 is lowered to seal the furnace body 1.

[0030] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not expressly listed, or further includes elements inherent to such process, method, article or device.

[0031] Although embodiments of the present utility model have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present utility model. The scope of the present utility model is defined by the appended claims and their equivalents.

Claims

1. A single crystal furnace charging machine with a preheating structure, comprising a furnace body (1), characterized in that: A material guiding mechanism (2) is provided on one side of the furnace body (1), a feeding barrel (3) is provided at the upper end of the material guiding mechanism (2), a crucible (101) is provided inside the furnace body (1), a support seat (303) is fixedly provided inside the feeding barrel (3), a movable rod (301) is provided inside the support seat (303), a limiting plate (302) is fixedly provided at the upper end of the movable rod (301), a cone (304) is fixedly provided at the lower end of the movable rod (301), a limiting block (305) is provided on the inner wall of the feeding barrel (3), a supporting plate (4) is provided below the material guiding mechanism (2), and the supporting plate (4) is fixedly connected to the furnace body (1).

2. The single crystal furnace charging machine with a preheating structure according to claim 1, characterized in that: A spring (306) is arranged on the outer wall of the movable rod (301), and two ends of the spring (306) are fixedly connected to the limiting plate (302) and the supporting seat (303) respectively.

3. The single crystal furnace charging machine with a preheating structure according to claim 1, characterized in that: The material guiding mechanism (2) comprises a conveying cylinder (201) and a material guiding tube (204); a preheating sleeve (205) is arranged on the outer wall of the conveying cylinder (201); and a heating wire is arranged inside the preheating sleeve (205).

4. The single crystal furnace charging machine with a preheating structure according to claim 3, characterized in that: The material guide pipe (204) is fixedly arranged on one side of the furnace body (1), and the material guide pipe (204) is flange-connected to the conveying cylinder (201).

5. The single crystal furnace charging machine with a preheating structure according to claim 3, characterized in that: A motor (202) is installed on the side of the conveying cylinder (201) away from the material guiding tube (204), and a spiral conveying rod (203) is arranged on the output end of the motor (202).

6. The single crystal furnace charging machine with a preheating structure according to claim 4, characterized in that: A fixing plate (102) is arranged above the material guiding pipe (204), and the fixing plate (102) is fixedly connected to the furnace body (1).

7. The single crystal furnace charging machine with a preheating structure according to claim 6, characterized in that: A cylinder (103) is arranged on the fixed plate (102), and a sealing plate (104) is arranged on the push rod of the cylinder (103).

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