Vacuum pump temperature and pressure testing device

Abstract

The utility model provides a vacuum pump temperature and pressure testing device, and belongs to the technical field of vacuum pumps. The vacuum pump temperature and pressure testing device comprises a plurality of groups of pressure sensors and a plurality of groups of temperature sensors which are arranged on the side wall of a vacuum pump shell; any one group of pressure sensors and any one group of temperature sensors correspond to any stage of cavity in the vacuum pump shell, and the pressure sensors and the temperature sensors are located on the different sides of the cavity so as to detect the temperature and the pressure in each stage of cavity. The temperature and pressure of different cavities in the vacuum pump shell can be independently detected, so that the distribution values of the temperature and pressure in all the cavities in the vacuum pump under different working conditions are obtained, and effective data support can be provided for theoretical gap design between rotors and between rotors and stators.

Description

Technical Field

[0001] The present disclosure belongs to the technical field of vacuum pumps, and particularly relates to a temperature and pressure testing device for a vacuum pump. Background Art

[0002] In a vacuum pump, there is a certain gap between the rotors and between the rotor and the stator, so that there is no contact and no friction between them, and no lubricant is used, thus ensuring a clean vacuum environment and reducing the driving power to achieve a higher rotational speed. Among them, the theoretically designed gap values between the rotors and between the rotor and the stator are crucial for the performance of the vacuum pump. An overly large gap design affects the ultimate vacuum and pumping speed performance of the vacuum pump, and an overly small gap may cause the machine to shut down due to thermal expansion.

[0003] For the distribution of the temperature and pressure inside the working pump body cavity of the existing vacuum pump under different working conditions, it is generally simulated and analyzed by software such as ANSYS or other software, and there are errors between the analyzed simulation data and the data values in the actual operation process. In addition, a pressure sensor is set at the exhaust port of the vacuum pump to collect the pressure at the exhaust port of the vacuum pump in real time, and it is impossible to separately measure the pressure and temperature of multiple chambers inside the vacuum pump. Summary of the Utility Model

[0004] The present disclosure aims to at least solve one of the technical problems existing in the prior art, and provides a temperature and pressure testing device for a vacuum pump.

[0005] The present disclosure provides a temperature and pressure testing device for a vacuum pump, including: multiple groups of pressure sensors and multiple groups of temperature sensors located on the side wall of the vacuum pump housing; wherein,

[0006] Any group of the pressure sensors and any group of the temperature sensors respectively correspond to any stage of the chamber inside the vacuum pump housing, and the pressure sensor and the temperature sensor are located on different sides of the chamber to detect the temperature and pressure inside the chamber.

[0007] Optionally, multiple groups of pressure sensor mounting holes corresponding to the multiple groups of pressure sensors are provided on the side wall of the vacuum pump housing; wherein,

[0008] The pressure sensor mounting hole includes a connected mounting hole and a communication hole. The mounting hole is used to mount the pressure sensor, and the communication hole is used to communicate the pressure sensor with the corresponding chamber.

[0009] Optionally, a pressure sensor carrier is provided in at least one of the mounting holes, and the pressure sensor is mounted on the pressure sensor carrier.

[0010] Optionally, when a plurality of pressure sensor carriers are correspondingly arranged in the plurality of mounting holes, the lengths of the plurality of pressure sensor carriers are the same or different; and / or,

[0011] The pressure sensor carriers are arranged in parallel or obliquely along the length direction of the chamber.

[0012] Optionally, the diameter of the carrier mounting hole is 15 mm, and the diameter of the chamber communication hole is 5 mm.

[0013] Optionally, the carrier mounting hole is a G3 / 8 threaded hole.

[0014] Optionally, a plurality of temperature sensor mounting holes are provided on the side wall of the vacuum pump housing facing away from the chamber; wherein,

[0015] Multiple groups of the temperature sensors are installed in the corresponding multiple temperature sensor mounting holes and correspond to the multiple-stage chambers in the vacuum pump housing.

[0016] Optionally, the thickness of the side wall of the housing between the bottom of the temperature sensor mounting hole and the chamber is 1-2 mm.

[0017] Optionally, a temperature sensor carrier is arranged in at least one of the temperature sensor mounting holes, and the temperature sensor is mounted on the temperature sensor carrier.

[0018] Optionally, the multiple groups of pressure sensors and the multiple groups of temperature sensors are respectively located on different side walls of the vacuum pump housing.

[0019] The present disclosure provides a vacuum pump temperature and pressure testing device, including: multiple groups of pressure sensors and multiple groups of temperature sensors located on the side wall of the vacuum pump housing; wherein, any one group of the pressure sensors and any one group of the temperature sensors respectively correspond to any one stage of the chamber inside the vacuum pump housing, and the pressure sensor and the temperature sensor are located on different sides of the chamber to detect the temperature and pressure inside the chamber. The present disclosure can separately detect the temperature and pressure of different chambers in the vacuum pump housing to obtain the distribution values of the temperature and pressure inside each chamber of the vacuum pump under different working conditions, which is beneficial to providing effective data support for the theoretical gap design between the rotor and the rotor, and the rotor and the stator in the vacuum pump. Description of the Drawings

[0020] Figure 1 is a top view of the vacuum pump temperature and pressure testing device according to an embodiment of the present disclosure;

[0021] Figure 2 is a three-dimensional structural schematic diagram of the vacuum pump temperature and pressure testing device according to another embodiment of the present disclosure;

[0022] Figure 3 The front view of the vacuum pump temperature and pressure testing device according to another embodiment of the present disclosure;

[0023] Figure 4 According to the present disclosure Figure 3 The sectional view taken along the A-A direction. Specific embodiments

[0024] To enable those skilled in the art to better understand the technical solutions of the present disclosure, the present disclosure will be further described in detail below with reference to the accompanying drawings and specific embodiments. Obviously, the described embodiments are part of the embodiments of the present disclosure, rather than all of the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the described embodiments of the present disclosure without creative efforts shall fall within the protection scope of the present disclosure.

[0025] Unless otherwise specifically stated, the technical terms or scientific terms used in the present disclosure shall have the ordinary meaning understood by those of ordinary skill in the art belonging to the field of the present disclosure. The "including" or "comprising" used in the present disclosure neither limits the mentioned shapes, numbers, steps, actions, operations, components, elements and / or their groups, nor excludes the presence or addition of one or more other different shapes, numbers, steps, actions, operations, components, elements and / or their groups. In addition, the terms "first", "second", "third", "fourth", "fifth" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity and order of the indicated technical features.

[0026] In some descriptions of the present disclosure, unless otherwise clearly specified and limited, terms such as "installation", "connection", "coupling" or "fixing" and the like do not limit to physical or mechanical connections, but may include electrical connections, whether direct or indirectly through an intermediate medium, and may be the internal communication of two elements or the interaction relationship between two elements. Also, the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the drawings, and are only used to represent the relative position relationship. When the absolute position of the described object changes, the relative position relationship may also change accordingly.

[0027] Such as Figures 1 to 4As shown in the figure, the present disclosure provides a temperature and pressure testing device for a vacuum pump, including: multiple groups of pressure sensors 130 and multiple groups of temperature sensors 120 located on the side wall of the vacuum pump housing 110; wherein, any group of pressure sensors and any group of temperature sensors respectively correspond to any stage chamber inside the vacuum pump housing 110, and the pressure sensor and the temperature sensor are located on different sides of the chamber to detect the pressure and temperature inside different chambers.

[0028] In this embodiment, by arranging multiple groups of temperature sensors and multiple groups of pressure sensors on the side wall of the vacuum pump housing, the temperature and pressure of different chambers inside the vacuum pump housing can be separately detected, and further the distribution values of the temperature and pressure inside each chamber of the vacuum pump under different working conditions can be obtained, so as to provide effective data support for the theoretical gap design between the rotors and between the rotor and the stator inside the vacuum pump.

[0029] It should be noted that the number of multiple groups of pressure sensors and multiple groups of temperature sensors in this embodiment is not specifically limited, and should be the same as the number of multiple-stage chambers inside the vacuum pump, where each group of pressure sensors and each group of temperature sensors correspond to one chamber, that is, a one-to-one correspondence is formed among the pressure sensors, temperature sensors and chambers.

[0030] Furthermore, it should be noted that due to the limitation of the spatial position of each stage chamber inside the housing, the temperature sensor and the pressure sensor corresponding to any chamber can be arranged on different sides of the chamber to prevent the installation interference between the temperature sensor and the pressure sensor.

[0031] Still, it should be noted that the specific installation positions of multiple groups of pressure sensors and multiple groups of temperature sensors in this embodiment are not specifically limited, as long as the temperature sensor and the pressure sensor corresponding to any chamber are arranged on different sides of the chamber. For example, multiple groups of pressure sensors can be arranged on the first side of the vacuum pump housing, and multiple groups of temperature sensors can be arranged on the second side of the vacuum pump housing. For another example, several groups of pressure sensors are arranged on the first side of the vacuum pump housing, and several other groups of pressure sensors are arranged on the second side of the vacuum pump housing. In this case, the temperature sensors corresponding to several groups of pressure sensors should be arranged on the second side of the vacuum pump housing, and the temperature sensors corresponding to several other groups of pressure sensors should be arranged on the first side of the vacuum pump housing.

[0032] It should be understood that since the upper side wall and the lower side wall of the vacuum pump housing are provided with an air inlet and an air outlet, the first side or the second side of the housing mentioned above can be the left side wall of the housing or the right side wall of the housing, and no specific limitation is made thereto.

[0033] It should still be noted that this embodiment does not specifically limit the way of installing the pressure sensor and the temperature sensor on the vacuum pump housing. For example, the pressure sensor and the temperature sensor are fixed on the housing by means of threaded connection or welding. Of course, they can also be installed on the vacuum pump housing with the help of other carriers.

[0034] Specifically, as Figures 1 to 4 shown, multiple groups of pressure sensor mounting holes penetrating through the thickness are provided on the first side wall of the vacuum pump housing 110; among them, multiple groups of pressure sensors 130 are installed in the corresponding multiple pressure sensor mounting holes to be correspondingly communicated with the multi-stage chambers in the vacuum pump housing 110, and are used to detect the real-time pressures of different chambers during the operation of the operating pump body.

[0035] Specifically, each group of pressure sensor mounting holes includes a connected mounting hole and a communication hole; among them, the mounting hole is used to mount the pressure sensor, and the communication hole is used to communicate the pressure sensor with the corresponding chamber. That is to say, the pressure sensor mounting hole includes two parts. One part is the mounting hole located towards the outside of the housing, which is used to mount the pressure sensor, and the other part is the communication hole located towards the inside of the housing, which is used to communicate the pressure sensor with the chamber to realize the measurement of the pressure in the chamber.

[0036] In some preferred embodiments, in order to prevent installation interference between the pressure sensors, the pressure sensors can be installed on the housing through their carriers. That is to say, a pressure sensor carrier is provided in at least one of the above mounting holes, and the pressure sensor is installed on the pressure sensor carrier. In this way, not only can space be saved, but also the heat of the housing can be prevented from being transmitted to the pressure sensor, thereby avoiding damage to the pressure sensor.

[0037] It should be noted that a pressure sensor carrier can be provided in each pressure sensor mounting hole, or a pressure sensor carrier can be provided in the pressure sensor mounting holes arranged at intervals, as long as it is ensured that the adjacent pressure sensors are in different installation positions, saving installation space and meeting the installation requirements of multiple pressure sensors.

[0038] It should be further noted that when multiple pressure sensor carriers are provided, the lengths of the multiple pressure sensor carriers can be the same or different. By setting pressure sensor carriers with different lengths, the installation positions of the pressure sensors are staggered from each other. Of course, the pressure sensor carriers can also be arranged in parallel along the length direction of the internal chamber of the housing, or can be arranged obliquely. That is to say, the pressure sensor carrier can be on the same horizontal plane as its corresponding chamber, or the pressure sensor carrier can be arranged obliquely upward or downward, and the installation positions of the pressure sensors can also be staggered from each other.

[0039] In some preferred embodiments, in two adjacent pressure sensor mounting holes, a pressure sensor is directly mounted in one of the pressure sensor mounting holes, and a pressure sensor is mounted in the other pressure sensor mounting hole through a pressure sensor carrier, so that the mounting positions of two adjacent pressure sensors are staggered from each other to meet the mounting requirements.

[0040] In some other preferred embodiments, when a pressure sensor carrier is provided in each pressure sensor mounting hole, the lengths of two adjacent pressure sensor carriers are different, that is, one of the two adjacent pressure sensor carriers is longer and the other is shorter, so as to meet the requirement of mounting the required number of pressure sensors in a limited mounting space.

[0041] In some other preferred embodiments, when a pressure sensor carrier is provided in each pressure sensor mounting hole, one of the two adjacent pressure sensor carriers is arranged parallel to the length direction of the chamber corresponding to the inside of the housing, and the other pressure sensor carrier is arranged obliquely to the length direction of the chamber corresponding to the inside of the housing.

[0042] It should be understood that multiple stages of chambers are provided in the length direction of the vacuum pump housing. In each stage of chamber, two meshing rotors are accommodated. The rotating shafts corresponding to the rotors are arranged along the length direction of the housing, and the rotating shafts penetrate through each stage of chamber. The length direction of the chamber should be the width direction of the housing, such as Figure 3 and Figure 4 in the direction of A-A.

[0043] It still needs to be noted that the dimensions of the mounting holes and the communication holes are not specifically limited in this embodiment. When selecting pressure sensors of different specifications, pressure sensor mounting holes of different sizes can be provided on the vacuum pump housing. For example, the diameter of the mounting hole is 15 mm and the diameter of the communication hole is 5 mm, as long as the pressure sensor is communicated with the chamber.

[0044] In some preferred embodiments, since the mounting hole communicates with the corresponding chamber through the communication hole, the above mounting hole can preferably be a G3 / 8 threaded hole. In this way, the pressure sensor carrier is mounted on the housing through the G3 / 8 threaded hole opened on the side of the housing, and the pressure sensor is mounted on the pressure sensor carrier, and the gas in the chamber is sealed by pipe threads.

[0045] Furthermore, as Figures 1 to 4 shown, a plurality of temperature sensor mounting holes are provided on the side of the second side wall of the vacuum pump housing 110 away from the chamber; wherein, multiple groups of temperature sensors 120 are mounted in the corresponding plurality of temperature sensor mounting holes to correspond to the multiple stages of chambers in the vacuum pump housing 110, so as to detect the real-time temperature of different chambers during the operation of the running pump body.

[0046] It should be noted that the foregoing description is given by taking the example that multiple groups of pressure sensors are all arranged on the first side wall of the housing, and multiple groups of temperature sensors are all arranged on the second side wall of the housing. Of course, those skilled in the art should know that one group, two groups, three groups or other numbers of pressure sensors can also be arranged on the second side wall of the housing, and the corresponding number of temperature sensors can be arranged on the first side wall of the housing.

[0047] It should be further noted that the temperature sensor mounting holes described above are not communicated with the chamber, and the thickness of the side wall of the housing between the bottom of the temperature sensor mounting hole and the chamber is 1-2 mm. That is, the temperature sensor mounting holes are opened on the outer side of the housing, and the inner side of the housing is not communicated with the chamber, so as to reserve a fitting position for the temperature probe and avoid damaging the probe of the temperature sensor.

[0048] In some preferred embodiments, the thickness of the side wall reserved between the bottom of the temperature sensor mounting hole and the chamber is preferably 1.5 mm, which can reduce the error between the detected temperature and the actual temperature in the chamber.

[0049] It should still be noted that since the distances between the chambers at all levels inside the housing are relatively close and the installation positions of the temperature sensors are small, in order to avoid interference between the temperature sensors, a temperature sensor mounting carrier can be arranged in one group, several groups or all of the temperature sensor mounting holes, and the temperature sensor is mounted in the corresponding temperature sensor mounting hole through the temperature sensor carrier, so as to save the installation space.

[0050] In some preferred embodiments, among two adjacent temperature sensors, one temperature sensor is directly mounted in the temperature sensor mounting hole, and the other temperature sensor is mounted in the temperature sensor mounting hole through the temperature sensor carrier, so that the mounting positions of the two adjacent temperature sensors are staggered from each other to meet the installation requirements.

[0051] It should be understood that when temperature sensors are installed in multiple temperature sensor mounting holes, the lengths of the multiple temperature sensor carriers can be the same or different, and the temperature sensor carriers can also be arranged parallel to the length direction of the chambers inside the housing or obliquely.

[0052] In some other preferred embodiments, when temperature sensors are installed in each temperature sensor mounting hole, the lengths of two adjacent temperature sensor carriers are different, that is, one of the two adjacent temperature sensor carriers is longer and the other is shorter, so that the installation positions of the two adjacent temperature sensors are different, saving the installation space.

[0053] In some other preferred embodiments, when temperature sensors are installed in each temperature sensor mounting hole, one of the two adjacent temperature sensor carriers is arranged parallel to the length direction of the chamber corresponding to the inside of the housing, and the other temperature sensor carrier is arranged obliquely to the length direction of the chamber corresponding to the inside of the housing.

[0054] It should still be noted that the size of the temperature sensor mounting hole is not specifically limited in this embodiment. When selecting temperature sensors of different specifications, temperature sensor mounting holes of different sizes can be provided on the vacuum pump housing. For example, the diameter of the temperature sensor mounting hole is 10 mm, and the temperature sensor mounting hole is an M10 threaded hole. The corresponding temperature sensor can be a PT100 temperature sensor with M10 threads.

[0055] It is not difficult to understand that since the temperature sensor is not communicated with the chamber, the installation of the temperature sensor can be achieved through metric threads (M10). That is to say, the temperature sensor or the temperature sensor carrier is installed on the housing through the M10 threaded hole. When the temperature sensor is directly installed in the M10 threaded hole, the probe of the temperature sensor is directly attached to the bottom of the hole. When the temperature sensor is installed in the M10 threaded hole through the temperature sensor carrier, the probe of the temperature sensor is attached to the bottom of the hole through the temperature sensor carrier to detect the real-time temperature of each stage of the chamber during the operation of the pump body.

[0056] In some preferred embodiments, an M10 * 30 bolt is used to install the temperature sensor or the temperature sensor carrier.

[0057] The vacuum pump temperature and pressure testing device of the present disclosure can simultaneously detect the temperature and pressure of each stage of the chamber under different working conditions inside the vacuum pump housing and the corresponding relationship between the two. The temperature measurement values under different working conditions can provide a reference for the theoretical clearance design value, and the pressure measurement values can provide a favorable guidance for the compression ratio and internal leakage of each stage of the theoretical design.

[0058] The structure of the vacuum pump temperature and pressure testing device will be specifically described below with specific embodiments:

[0059] Embodiment 1

[0060] As Figures 1 to 4As shown, the vacuum pump housing 110 has five chambers inside, namely the first chamber 111, the second chamber 112, the third chamber 113, the fourth chamber 114 and the fifth chamber 115, wherein the first temperature sensor mounting hole, the second temperature sensor mounting hole, the third temperature sensor mounting hole, the fourth temperature sensor mounting hole and the fifth temperature sensor mounting hole are opened on the side away from the chamber corresponding to the second side wall of the housing of the first chamber 111, the second chamber 112, the third chamber 113, the fourth chamber 114 and the fifth chamber 115, and the temperature sensor mounting hole is set in the first chamber 111, the second chamber 112, the third chamber 113, the fourth chamber 114 and the fifth chamber 115. A first temperature sensor carrier 141, a second temperature sensor carrier 142, a third temperature sensor carrier 143, a fourth temperature sensor carrier 144, and a fifth temperature sensor carrier 145 are installed in sequence in the temperature sensor installation holes, and a first group of temperature sensors 121, a second group of temperature sensors 122, a third group of temperature sensors 123, a fourth group of temperature sensors 124, and a fifth group of temperature sensors 125 are installed in the above five temperature sensor carriers, respectively, and the above five temperature sensors correspond to the five chambers in the vacuum pump housing 110, respectively.

[0061] Please continue to refer to Figures 1 to 4 , the first temperature sensor carrier 141, the second temperature sensor carrier 142, the third temperature sensor carrier 143, and the fourth temperature sensor carrier 144 are all arranged parallel to the length direction of the corresponding chamber, and the fifth temperature sensor carrier 145 is arranged obliquely upward to the length direction of the corresponding chamber, so that the fifth group of temperature sensors 125 and the fourth group of temperature sensors 124 are alternately staggered. In addition, the first temperature sensor carrier 141 and the third temperature sensor carrier 143 have the same length, and the second temperature sensor carrier 142 and the fourth temperature sensor carrier 144 have the same length, so that the installation positions of the first group of temperature sensors 121, the second group of temperature sensors 122, the third group of temperature sensors 123, and the fourth group of temperature sensors 124 are staggered.

[0062] Furthermore, if Figures 1 to 4As shown, on the second side wall of the vacuum pump housing 110 corresponding to the first chamber 111, the second chamber 112, the third chamber 113, the fourth chamber 114, and the fifth chamber 115, there are provided a first pressure sensor mounting hole, a second pressure sensor mounting hole, a third pressure sensor mounting hole, a fourth pressure sensor mounting hole, and a fifth pressure sensor mounting hole that penetrate through its thickness. And in the second pressure sensor mounting hole, the fourth pressure sensor mounting hole, and the fifth pressure sensor mounting hole, there are respectively provided a first pressure sensor carrier 151, a second pressure sensor carrier 152, and a third pressure sensor carrier 153. In this way, the first group of pressure sensors 131 is installed in the first pressure sensor mounting hole, the second group of pressure sensors 132 is installed in the first pressure sensor carrier 151, the third group of pressure sensors 133 is installed in the third pressure sensor mounting hole, the fourth group of pressure sensors 134 is installed in the second pressure sensor carrier 152, and the fifth group of pressure sensors 135 is installed in the third pressure sensor carrier 153.

[0063] Among them, please continue to refer to Figures 1 to 4 , the first pressure sensor carrier 151 and the second pressure sensor carrier 152 are both arranged parallel to the length direction of the corresponding chamber and have the same length, so that the installation positions of the first group of pressure sensors to the fourth group of pressure sensors are staggered in sequence. The third pressure sensor carrier 153 is arranged obliquely upward along the length direction of the corresponding chamber, so that the installation position of the fifth group of pressure sensors 135 is also different from that of the fourth group of pressure sensors 134, meeting the installation requirements.

[0064] Based on the above structure, the first group of pressure sensors 131 and the first group of temperature sensors 121 are used to measure the pressure and temperature inside the first chamber 111 of the vacuum pump housing 110. The second group of pressure sensors 132 and the second group of temperature sensors 122 are used to measure the pressure and temperature inside the second chamber 112 of the vacuum pump housing 110. The third group of pressure sensors 133 and the third group of temperature sensors 123 are used to measure the pressure and temperature inside the third chamber 113 of the vacuum pump housing 110. The fourth group of pressure sensors 134 and the fourth group of temperature sensors 124 are used to measure the pressure and temperature inside the fourth chamber 114 of the vacuum pump housing 110. The fifth group of pressure sensors 135 and the fifth group of temperature sensors 125 are used to measure the pressure and temperature inside the fifth chamber 115 of the vacuum pump housing 110, thereby obtaining the corresponding relationship between temperature and pressure in different chambers.

[0065] It should be noted that this embodiment only takes the vacuum pump including five - stage chambers as an example for illustration. According to different vacuum pump structures, different numbers of pressure sensors and temperature sensors can also be set, and no specific limitation is made in this regard.

[0066] The present disclosure provides a temperature and pressure testing device for a vacuum pump, which has the following beneficial effects compared with the prior art: The device of the present disclosure can measure the temperature and pressure of each stage chamber of the vacuum pump in real time, and thus can obtain the corresponding relationship between the temperature and pressure of the vacuum pump in different working modes in real time, providing data reference for the theoretical clearance design between the rotor and rotor, and between the rotor and stator of the vacuum pump. At the same time, it can also provide data reference for the compression ratio and internal leakage design of each stage chamber of the vacuum pump.

[0067] It can be understood that the above embodiments are merely exemplary embodiments adopted to illustrate the principle of the present disclosure. However, the present disclosure is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the present disclosure, and these modifications and improvements are also regarded as the protection scope of the present disclosure.

Claims

1. A vacuum pump temperature and pressure testing device, characterized in that: include: Multiple groups of pressure sensors and multiple groups of temperature sensors are located on the side wall of the vacuum pump housing; wherein, Any group of the pressure sensors and any group of the temperature sensors respectively correspond to any level of the multi-stage chambers inside the vacuum pump housing, and two mutually meshing rotors are accommodated in each level of the chamber. The number of the multiple groups of pressure sensors and the multiple groups of temperature sensors is the same as the number of the multi-stage chambers inside the vacuum pump, and the pressure sensors and the temperature sensors are located on different sides of the chamber to detect the pressure and temperature inside the chamber.

2. The vacuum pump temperature and pressure testing device according to claim 1, characterized in that: The side wall of the vacuum pump housing is provided with a plurality of pressure sensor mounting holes corresponding to the plurality of pressure sensors; wherein, The pressure sensor mounting hole comprises a mounting hole and a communicating hole which are connected to each other. The mounting hole is used to mount the pressure sensor, and the communicating hole is used to connect the pressure sensor with a corresponding chamber.

3. The vacuum pump temperature and pressure testing device according to claim 2, characterized in that: A pressure sensor carrier is arranged in at least one of the mounting holes, and the pressure sensor is mounted on the pressure sensor carrier.

4. The vacuum pump temperature and pressure testing device according to claim 3, characterized in that: When a plurality of pressure sensor carriers are correspondingly arranged in the plurality of mounting holes, the lengths of the plurality of pressure sensor carriers are the same or different; and / or, The pressure sensor carrier is arranged parallel to or inclined along the length direction of the chamber.

5. The vacuum pump temperature and pressure testing device according to claim 2, characterized in that: The diameter of the mounting hole is 15 mm, and the diameter of the communicating hole is 5 mm.

6. The vacuum pump temperature and pressure testing device according to claim 5, characterized in that: The mounting hole is a G3 / 8 threaded hole.

7. The vacuum pump temperature and pressure testing device according to claim 1, characterized in that: The side wall of the vacuum pump housing is provided with a plurality of temperature sensor mounting holes on the side away from the chamber; wherein, A plurality of groups of the temperature sensors are installed in corresponding plurality of the temperature sensor installation holes and correspond to the multi-stage chambers in the vacuum pump housing.

8. The vacuum pump temperature and pressure testing device according to claim 7, characterized in that: The thickness of the shell side wall between the bottom of the temperature sensor installation hole and the chamber is 1 to 2 mm.

9. The vacuum pump temperature and pressure testing device according to claim 7, characterized in that: A temperature sensor carrier is arranged in at least one of the temperature sensor mounting holes, and the temperature sensor is mounted on the temperature sensor carrier.

10. The vacuum pump temperature and pressure testing device according to any one of claims 1 to 9, characterized in that: The multiple groups of pressure sensors and the multiple groups of temperature sensors are respectively located on different side walls of the vacuum pump housing.

Images