Detector adjusting mechanism

Abstract

The utility model belongs to the technical field of wafer detection devices, and discloses a detector adjusting mechanism, which comprises a base and a fixed seat. The base comprises an adjusting rod which can rotate around the axis of the adjusting rod and can be locked, the adjusting rod is provided with a marking line extending in the axial direction of the adjusting rod, the base is fixedly provided with an annular marking plate, the adjusting rod is arranged on the marking plate in a penetrating mode, a plurality of scale marks are arranged on the marking plate in the circumferential direction at intervals, and the marking line can be aligned with any scale mark; the fixed seat is configured to be detachably connected to the detector, the fixed seat can be locked on the adjusting rod, while the adjusting rod is rotated, scale line numerical values corresponding to the identification lines on the identification plate are recorded, meanwhile, measurement values of the detector are recorded in a one-to-one correspondence mode, and after the optimal measurement position of the detector is found, the adjusting rod is rotated again, and the fixed seat is locked. And finally, the adjusting rod is locked, the debugging operation is simple, and the working efficiency is high.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer detection devices, in particular to an adjustment mechanism for a detector. Background Art

[0002] The circumferential cutting operation refers to cutting a circular groove along the edge of a wafer, which can effectively reduce the probability that the outer edge of the wafer cracks and then causes the overall rupture during the subsequent substrate thinning process. Therefore, it is necessary to use a detector in the circumferential cutting equipment to evaluate whether the depth after circumferential cutting of the wafer is qualified.

[0003] In the existing circumferential cutting operation detector, it needs to be installed within a certain angle range to reach the best working state. It is necessary to install it manually at multiple different angles for measurement work, and then analyze the data quality to evaluate whether the current installation angle is the best angle. Moreover, this installation angle cannot be recorded and is difficult to reproduce, resulting in a large amount of manpower and time being consumed for the installation and debugging of this detector. Summary of the Utility Model

[0004] The purpose of the utility model is to provide an adjustment mechanism for a detector, which is convenient for recording and reproducing the debugging angle, and saves labor costs.

[0005] To achieve this purpose, the utility model adopts the following technical solutions:

[0006] The adjustment mechanism for a detector includes:

[0007] A base, including an adjusting rod that can rotate around its own axis and can also be locked. A marking line extending along the axial direction of the adjusting rod is provided on the adjusting rod. A marking plate is fixedly arranged on the base. The adjusting rod passes through the marking plate. A plurality of scale lines are circumferentially spaced on the marking plate. The marking line can be aligned with any one of the scale lines;

[0008] A fixing seat, configured to be detachably connected to the detector, and the fixing seat can be locked to the adjusting rod.

[0009] Preferably, the base further includes:

[0010] A positioning rod, extending in the vertical direction;

[0011] An adjusting block, which can slide along the positioning rod and be locked to the positioning rod; and / or the adjusting rod is slidably connected to the adjusting block and can be locked to the adjusting block.

[0012] Preferably, the base further includes a first locking member. The adjusting block is provided with a vertical adjusting hole penetrating in the vertical direction. The positioning rod passes through the vertical adjusting hole. A vertical locking notch is formed on the outer wall of the vertical adjusting hole. The first locking member is screwed to the opening of the vertical locking notch and can lock the adjusting block to the positioning rod.

[0013] Preferably, the base further includes a second locking member. The adjusting block is provided with a horizontal adjusting hole penetrating in the horizontal direction. The adjusting rod passes through the horizontal adjusting hole. A horizontal locking notch is formed on the outer wall of the horizontal adjusting hole. The second locking member is screwed to the opening of the horizontal locking notch and can lock the adjusting rod to the adjusting block.

[0014] Preferably, the base further includes a bottom plate, and the positioning rod is detachably connected to the bottom plate.

[0015] Preferably, a supporting platform is convexly provided on the bottom plate. An installation groove is formed in the supporting platform, and the positioning rod can be inserted into the installation groove.

[0016] Preferably, the bottom plate is provided with a third locking member. An installation notch is formed on the groove wall of the installation groove, and the third locking member can horizontally penetrate through the installation notch.

[0017] Preferably, a fourth locking member is further included. The fixing seat can be sleeved on the adjusting rod. A first locking hole is formed in the fixing seat, and a second locking hole is formed in the adjusting rod. The fourth locking member can pass through the first locking hole and extend into the second locking hole.

[0018] Preferably, the fourth locking member is configured to be screwed to any one of the fixing seat and the adjusting rod.

[0019] Preferably, the range of the scale line is 0° - 360°.

[0020] The beneficial effects of the present utility model are as follows:

[0021] First, connect the fixing seat to the detector, and then lock the fixing seat to the adjusting rod. While ensuring that the detector can perform measurement operations, rotate the adjusting rod while reading the scale line value corresponding to the marking line on the marking plate, and at the same time, check the current detection signal quality of the detector one by one. When the detection signal quality is the best, that is, when the best measurement position of the detector is found, record the scale line value corresponding to the current marking line. Finally, lock the adjusting rod so that it cannot rotate around its own axis. For subsequent installations of all detectors, there is no need to try to rotate the adjusting rod and check the detection signal quality one by one. Just reproduce the previously recorded scale line value directly. The debugging operation is simple, the operation efficiency is high, and the labor cost is saved. Brief Description of the Drawings

[0022] Figure 1 is a schematic structural view of the adjustment mechanism of the detector described in the present utility model;

[0023] Figure 2 is a schematic structural view of the adjustment mechanism of the detector described in the present utility model with some structures omitted;

[0024] Figure 3 is a schematic structural view of the identification plate described in the present utility model;

[0025] Figure 4 is a schematic structural view during the operation of the adjustment mechanism of the detector described in the present utility model.

[0026] In the figure:

[0027] 100, detector;

[0028] 1, base; 11, adjusting rod; 111, marking line; 12, identification plate; 121, scale line; 13, positioning rod; 14, adjusting block; 15, first locking member; 16, second locking member; 17, bottom plate; 171, supporting platform; 172, third locking member;

[0029] 2, fixing seat;

[0030] 3, fourth locking member. Detailed Embodiment

[0031] The embodiments of the present utility model will be described in detail below. The examples of the embodiments are shown in the drawings, where the same or similar reference numerals represent the same or similar components or components with the same or similar functions from beginning to end. The embodiments described below with reference to the drawings are exemplary and are intended to explain the present utility model, and should not be construed as a limitation to the present utility model.

[0032] In the description of the present utility model, unless otherwise clearly defined and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, a mechanical connection, an electrical connection, a direct connection, or an indirect connection through an intermediate medium. It can be the communication inside two components or the interaction relationship between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0033] In the description of the present utility model, unless otherwise clearly specified and defined, the first feature being "above" or "below" the second feature may include the first feature and the second feature being in direct contact, or may include the first feature and the second feature not being in direct contact but being in contact through additional features therebetween. Moreover, the first feature being "above", "over" and "on top of" the second feature includes the first feature being directly above and obliquely above the second feature, or merely indicating that the first feature has a higher horizontal height than the second feature. The first feature being "below", "under" and "beneath" the second feature includes the first feature being directly below and obliquely below the second feature, or merely indicating that the first feature has a lower horizontal height than the second feature.

[0034] The technical solution of the present utility model will be further described below with reference to the accompanying drawings and through specific embodiments.

[0035] As Figures 1 - 4 shown, the present utility model provides a detector adjustment mechanism for detecting a wafer after a circumcision operation. The detector adjustment mechanism includes a base 1 and a fixing seat 2. Among them, the base 1 includes an adjusting rod 11 that can rotate around its own axis and can be locked. An identification line 111 extending along the axial direction of the adjusting rod 11 is provided on the adjusting rod 11. A circular identification plate 12 is fixedly provided on the base 1. The adjusting rod 11 passes through the identification plate 12. A plurality of scale lines 121 are circumferentially spaced on the identification plate 12. The identification line 111 can be aligned with any one of the scale lines 121; the fixing seat 2 is configured to be detachably connected to the detector 100, and the fixing seat 2 can be locked to the adjusting rod 11.

[0036] First, connect the fixing seat 2 to the detector 100, and then lock the fixing seat 2 to the adjusting rod 11. While ensuring that the detector 100 can perform measurement operations, rotate the adjusting rod 11 while reading the value of the scale line 121 corresponding to the identification line 111 on the identification plate 12, and at the same time check the current detection signal quality of the detector 100 one by one. When the detection signal quality is the best, that is, when the best measurement position of the detector 100 is found, record the value of the scale line 121 corresponding to the current identification line 111. Finally, lock the adjusting rod 11 so that it cannot rotate around its own axis. For subsequent installations of all detectors 100, there is no need to try to rotate the adjusting rod 11 and check the detection signal quality one by one. Just reproduce the previously recorded value of the scale line 121. The debugging operation is simple, the operation efficiency is high, and the labor cost is saved.

[0037] Specifically, the base 1 further includes a positioning rod 13 and an adjusting block 14. Among them, the positioning rod 13 extends in the vertical direction; the adjusting block 14 can slide along the positioning rod 13 and be locked to the positioning rod 13; and / or, the adjusting rod 11 is slidably connected to the adjusting block 14 and can be locked to the adjusting block 14. With the above settings, the position adjustment of the detector 100 in the vertical and horizontal directions can be realized, so that the detector adjustment mechanism can be applied to a variety of different working conditions, with stronger practicability.

[0038] In this embodiment, the identification plate 12 is screwed to the side of the adjusting block 14 close to the detector 100, which is convenient for reading during operation.

[0039] In this embodiment, one side of the fixed seat 2 is screwed to the detector 100, so as to realize the detachable connection between the detector 100 and the fixed seat 2. The other side is provided with an insertion slot, and one end of the adjusting rod 11 away from the adjusting block 14 is inserted into the insertion slot.

[0040] More specifically, the base 1 further includes a first locking member 15. The adjusting block 14 is provided with a vertical adjusting hole that penetrates in the vertical direction. The positioning rod 13 passes through the vertical adjusting hole. The outer wall of the vertical adjusting hole is provided with a vertical locking notch. The first locking member 15 is screwed to the opening of the vertical locking notch and can lock the adjusting block 14 to the positioning rod 13. With the above settings, by screwing the first locking member 15 to the opening of the locking notch, the vertical locking notch can be gradually driven to close, so that the vertical adjusting hole locks the positioning rod 13 to achieve the locking effect. The structure is simple and reliable, and the manufacturing cost is low.

[0041] More specifically, the base 1 further includes a second locking member 16. The adjusting block 14 is provided with a horizontal adjusting hole that penetrates in the horizontal direction. The adjusting rod 11 passes through the horizontal adjusting hole. The outer wall of the horizontal adjusting hole is provided with a horizontal locking notch. The second locking member 16 is screwed to the opening of the horizontal locking notch and can lock the adjusting rod 11 to the adjusting block 14. With the above settings, by screwing the second locking member 16 to the opening of the locking notch, the horizontal locking notch can be gradually driven to close, so that the horizontal adjusting hole locks the adjusting rod 11 to achieve the locking effect. The structure is simple and reliable, and the manufacturing cost is low.

[0042] Specifically, the base 1 further includes a bottom plate 17, and the positioning rod 13 is detachably connected to the bottom plate 17. With the above setting of the bottom plate 17, the contact area between the base 1 and the working plane can be increased, making the base 1 more stable during operation.

[0043] More specifically, a supporting platform 171 protrudes from the bottom plate 17, and the supporting platform 171 is provided with an installation slot, and the positioning rod 13 can be inserted into the installation slot. With the above setting of the installation slot, it can prevent the positioning rod 13 from tipping over as a whole due to the excessive weight of the detector 100, improving the safety of the equipment.

[0044] More specifically, the bottom plate 17 is provided with a third locking member 172, and a mounting notch is provided on the groove wall of the mounting groove, and the third locking member 172 can be horizontally penetrated on the mounting notch. With the above arrangement, the mounting notch can be gradually closed by twisting the third locking member 172, so that the groove wall of the mounting groove can clamp the positioning rod 13, thereby achieving the locking of the positioning rod 13.

[0045] Specifically, it also includes a fourth locking member 3, the fixed seat 2 can be sleeved on the adjusting rod 11, the fixed seat 2 is provided with a first locking hole, the adjusting rod 11 is provided with a second locking hole, and the fourth locking member 3 can pass through the first locking hole and extend into the second locking hole. The above arrangement can achieve the locking of the fixed seat 2. In this embodiment, the fourth locking member 3 is configured to be screwed to either the fixed seat 2 or the adjusting rod 11. With the above arrangement, the locking and unlocking of the fixed seat 2 can be completed by twisting the fourth locking member 3, and the operation is simple.

[0046] In this embodiment, the first locking member 15, the second locking member 16, the third locking member 172 and the fourth locking member 3 are all bolt structures commonly used in the art.

[0047] In this embodiment, an anti-skid structure is provided on the adjustment rod 11, and the anti-skid structure can be an anti-skid pad, such as a rubber pad, or the anti-skid structure is an anti-skid protrusion, and the anti-skid protrusion can be a dot-shaped protrusion, or a pattern protrusion of any shape, as long as the contact friction between the position where it is located and the worker's hand can be increased. The specific form thereof is referred to the prior art and is not specifically limited in this embodiment.

[0048] In this embodiment, the range of the scale line 121 is 0°-360°. In other embodiments, the range of the scale line 121 can also be adjusted according to the actual needs of the operation, which is not limited here.

[0049] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included in the protection scope of the claims of the present invention.

Claims

1. The detector adjustment mechanism is characterized by: include: A base (1) comprises an adjusting rod (11) which can rotate around its own axis and can also be locked, the adjusting rod (11) is provided with a marking line (111) extending along its own axial direction, the base (1) is fixedly provided with a marking plate (12), the adjusting rod (11) is passed through the marking plate (12), a plurality of scale lines (121) are provided on the marking plate (12) at intervals along the circumferential direction, and the marking line (111) can be aligned with any of the scale lines (121); The fixing base (2) is configured to be detachably connected to the detector (100), and the fixing base (2) can be locked to the adjusting rod (11).

2. The detector adjustment mechanism according to claim 1, characterized in that: The base (1) further comprises: A positioning rod (13) extending in a vertical direction; An adjusting block (14), wherein the adjusting block (14) can slide along the positioning rod (13) and be locked to the positioning rod (13); and / or the adjusting rod (11) is slidably connected to the adjusting block (14) and can be locked to the adjusting block (14).

3. The detector adjustment mechanism according to claim 2, characterized in that: The base (1) further comprises a first locking member (15); the adjusting block (14) is provided with a vertical adjusting hole extending in a vertical direction; the positioning rod (13) passes through the vertical adjusting hole; the outer wall of the vertical adjusting hole is provided with a vertical locking notch; the first locking member (15) is screwed to the opening of the vertical locking notch and is capable of locking the adjusting block (14) to the positioning rod (13).

4. The detector adjustment mechanism according to claim 2, characterized in that: The base (1) further comprises a second locking member (16); the adjusting block (14) is provided with a transverse adjusting hole extending in a horizontal direction; the adjusting rod (11) passes through the transverse adjusting hole; an outer wall of the transverse adjusting hole is provided with a transverse locking notch; the second locking member (16) is screwed to an opening of the transverse locking notch and is capable of locking the adjusting rod (11) to the adjusting block (14).

5. The detector adjustment mechanism according to claim 2, characterized in that: The base (1) also includes a bottom plate (17), and the positioning rod (13) is detachably connected to the bottom plate (17).

6. The detector adjustment mechanism according to claim 5, characterized in that: A supporting platform (171) is protrudingly provided on the bottom plate (17), and the supporting platform (171) is provided with a mounting groove, and the positioning rod (13) can be inserted into the mounting groove.

7. The detector adjustment mechanism according to claim 6, characterized in that: The bottom plate (17) is provided with a third locking piece (172), a groove wall of the installation groove is provided with an installation notch, and the third locking piece (172) can be passed through the installation notch in a horizontal direction.

8. The detector adjustment mechanism according to claim 1, characterized in that: It also comprises a fourth locking piece (3), the fixing seat (2) can be sleeved on the adjusting rod (11), the fixing seat (2) is provided with a first locking hole, the adjusting rod (11) is provided with a second locking hole, and the fourth locking piece (3) can pass through the first locking hole and extend into the second locking hole.

9. The detector adjustment mechanism according to claim 8, characterized in that: The fourth locking member (3) is configured to be screwed to any one of the fixing seat (2) and the adjusting rod (11).

10. The detector adjustment mechanism according to any one of claims 1 to 9, characterized in that: The scale line (121) ranges from 0° to 360°.

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