Vacuum box helium gas detection gas path system
By adding a recycling path in the vacuum box helium leak detection circuit system, and using a recovery pump to recycle the helium-nitrogen mixture in the vacuum chamber, the problem of helium waste in the prior art is solved, and cost savings and production efficiency improvements are achieved.
Patent Information
- Application Number
- CN202421513022.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-28
- Publication Date
- 2025-06-03
- Estimated Expiration
- 2034-06-28
AI Technical Summary
In the existing vacuum box helium leakage detection system, the helium tracer gas used is not recycled after use, resulting in a large amount of helium waste.
A vacuum box helium leak detection circuit system was designed, and the recycling path was added. The helium-nitrogen mixture in the vacuum chamber was pumped back to the low-pressure tank through a recycling pump to achieve the recycling and reuse of helium.
Through the use of the recycling pump, the cost of helium used in the vacuum helium detection equipment is significantly reduced, the waste of helium is reduced, and the production efficiency is improved.
Smart Images
Figure CN222938681U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to a helium leak detection system for a vacuum chamber, and particularly to a helium leak detection gas path system for a vacuum chamber. Background Art
[0002] In the field of leak detection, the helium leak detection technology has the advantages of high precision and no pollution to workpieces, and its application field is constantly expanding. However, at present, in the helium leak detection system for a vacuum chamber, the helium tracer gas used is not recycled after use, resulting in a large amount of waste. Summary of the Utility Model
[0003] In order to solve the above-mentioned deficiencies in the prior art, the purpose of the utility model is to provide a helium leak detection gas path system for a vacuum chamber. This gas path system adds a recycling path, saves the helium usage amount, thereby saving costs and avoiding waste of resources.
[0004] The technical solution adopted by the utility model to solve its technical problems is: a helium leak detection gas path system for a vacuum chamber, including a gas mixing tank, a low-pressure tank, a high-pressure tank and a vacuum chamber. The gas mixing tank, the low-pressure tank and the high-pressure tank are sequentially connected by pipelines;
[0005] Among them, the low-pressure tank includes a first air inlet, a second air inlet and a first air outlet. The first air inlet is connected to the vacuum chamber through a pipeline and a recovery pump. The second air inlet is connected to the gas mixing tank. The first air outlet is connected to the high-pressure tank through a pressurization unit;
[0006] The high-pressure tank includes a third air inlet and a second air outlet. The third air inlet is connected to the output end of the pressurization unit, and the second air outlet is connected to the vacuum chamber.
[0007] Optionally, the gas mixing tank includes a fourth air inlet and a fifth air inlet. The fourth air inlet is connected to a nitrogen source, and the fifth air inlet is connected to a helium source.
[0008] Optionally, the pressurization unit includes a first pneumatic valve, a low-pressure filter, a compressor, a first high-pressure filter and a second pneumatic valve. The first pneumatic valve, the low-pressure filter, the compressor, the first high-pressure filter and the second pneumatic valve are sequentially connected, and the first pneumatic valve is connected to the first air outlet of the low-pressure tank, and the second pneumatic valve is connected to the third air inlet of the high-pressure tank.
[0009] Optionally, a ball valve, a second high-pressure filter and a pressure regulating valve are sequentially connected in the pipeline connecting the high-pressure tank and the vacuum chamber, and a first pressure sensor, a concentration meter and a safety valve are also installed in the high-pressure tank.
[0010] Optionally, a second pressure sensor is installed in the low-pressure tank, a third pressure sensor is installed in the gas mixing tank, a fourth pressure sensor is connected in the pipeline connecting the fourth air inlet and the nitrogen source, and a fifth pressure sensor is connected in the pipeline connecting the fifth air inlet and the helium source.
[0011] Optionally, an exhaust valve is also installed in the high-pressure tank.
[0012] With the above technical solution, the structure of the utility model is simple. The mixed gas is recycled through the recovery pump, reducing the helium usage cost of the vacuum helium leak detection equipment, reducing helium waste, and greatly improving the production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0013] Figure 1 is a schematic structural diagram of the gas circuit system of the utility model. DETAILED DESCRIPTION OF THE EMBODIMENTS
[0014] The following further describes the present application in detail with reference to the drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the related utility model, rather than limiting the utility model. Additionally, it should be noted that for the sake of description, only the parts related to the utility model are shown in the drawings.
[0015] It should be noted that, without conflict, the embodiments in the present application and the features in the embodiments can be combined with each other. The following will describe the present application in detail with reference to the drawings and embodiments.
[0016] As Figure 1 shown, the utility model discloses a vacuum chamber helium leak detection gas circuit system, which is used to provide a tracer gas to a vacuum chamber (not shown in the figure) to detect the leakage rate of a workpiece to be tested. A recovery gas circuit is added to the gas circuit system to recycle and reuse the mixed gas, thereby reducing helium waste. Specifically, the gas circuit system includes a gas mixing tank 100, a low-pressure tank 200, a high-pressure tank 300, and a vacuum chamber (not shown in the figure). The gas mixing tank 100, the low-pressure tank 200, and the high-pressure tank 300 are sequentially connected by pipelines to make the gas circuit unobstructed.
[0017] In the present utility model, the gas mixing tank 100 has a fourth air inlet 101 and a fifth air inlet 102. The fourth air inlet 101 is connected to a nitrogen source, and the fifth air inlet 102 is connected to a helium source. Nitrogen and helium are mixed inside the gas mixing tank 100. It should be noted that in the pipeline connecting the fourth air inlet 101 and the nitrogen source, a fourth pressure sensor 103 is installed to monitor the inlet pressure of nitrogen. In the pipeline connecting the fifth air inlet 102 and the helium source, a fifth pressure sensor 104 is installed to monitor the inlet pressure of helium. At the same time, a third pressure sensor 105 is also installed inside the gas mixing tank 100 to monitor the internal pressure of the gas mixing tank 100. The output end of the gas mixing tank 100 is connected to the low-pressure tank 200. Solenoid valves are respectively provided in the connecting pipeline between the gas mixing tank 100 and the low-pressure tank 200, the nitrogen source connecting pipeline, and the helium source connecting pipeline to control the on-off of the pipeline and the ratio of helium to nitrogen.
[0018] The low-pressure tank 200 includes a first air inlet 201, a second air inlet 202, and a first air outlet 203. Among them, the first air inlet 201 is connected to the vacuum chamber through a pipeline and a recovery pump 204, the second air inlet 202 is connected to the output end of the gas mixing tank 100, and the first air outlet 203 is connected to the high-pressure tank 300 through a boosting unit. A second pressure sensor 205 is installed in the low-pressure tank 200 to monitor the internal pressure of the low-pressure tank 200. After the workpiece is detected, the recovery pump 204 is started, and the recovery pump 204 can pump the helium-nitrogen mixed gas in the vacuum chamber back into the low-pressure tank 200 to prevent waste caused by the discharge of the workpiece after detection.
[0019] The high-pressure tank 300 includes a third air inlet 301 and a second air outlet 302. The third air inlet 301 is connected to the output end of the boosting unit, and the second air outlet 302 is connected to the vacuum chamber. A ball valve 303, a second high-pressure filter 304, and a pressure regulating valve 305 are sequentially connected in the pipeline connecting the high-pressure tank 300 and the vacuum chamber. A first pressure sensor 306, a concentration meter 307, and a safety valve 308 are also installed in the high-pressure tank 300.
[0020] In the present utility model, the boosting unit includes a first pneumatic valve 400, a low-pressure filter 401, a compressor 402, a first high-pressure filter 403, and a second pneumatic valve 404. Among them, the first pneumatic valve 400, the low-pressure filter 401, the compressor 402, the first high-pressure filter 403, and the second pneumatic valve 404 are sequentially connected, and the first pneumatic valve 400 is connected to the first air outlet 203 of the low-pressure tank 200, and the second pneumatic valve 404 is connected to the third air inlet 301 of the high-pressure tank 300. Through this boosting unit, the mixed gas in the low-pressure tank 200 can be boosted by the compressor 402 and then enter the high-pressure tank 300 for storage, and the high-pressure tank 300 supplies the mixed gas into the vacuum chamber.
[0021] In the present utility model, an exhaust valve 309 is further installed in the high-pressure tank 300. When the helium concentration in the high-pressure tank 300 detected by the concentration meter 307 is lower than the set value, the exhaust valve 309 opens to discharge the low-concentration helium, and then the gas is re-mixed through the gas mixing tank 100.
[0022] In the present utility model, each valve, the recovery pump 204, and the compressor 402 are all connected to the control unit of the vacuum chamber helium leak detection system. Through the parameter setting of the helium leak detection control unit, full-automatic control is achieved.
[0023] The above description is only the preferred embodiment of the present application and the explanation of the applied technical principles. Those skilled in the art should understand that the scope of the utility model involved in the present application is not limited to the technical solution formed by the specific combination of the above technical features, and should also cover other technical solutions formed by any combination of the above technical features or their equivalent features without departing from the inventive concept of the utility model. For example, the technical solution formed by the mutual replacement of the above features with the (but not limited to) technical features with similar functions disclosed in the present application.
[0024] Except for the technical features described in the specification, the remaining technical features are well-known to those skilled in the art. To highlight the innovative features of the present utility model, the remaining technical features are not described herein again.
Claims
1. A vacuum box helium leak detection gas path system, characterized in that: It includes a gas mixing tank, a low-pressure tank, a high-pressure tank and a vacuum chamber, wherein the gas mixing tank, the low-pressure tank and the high-pressure tank are connected in sequence through pipelines; Wherein, the low-pressure tank comprises a first air inlet, a second air inlet and a first air outlet, the first air inlet is connected to the vacuum chamber through a pipeline and a recovery pump, the second air inlet is connected to the gas mixing tank, and the first air outlet is connected to the high-pressure tank through a booster unit; The high-pressure tank comprises a third air inlet and a second air outlet, wherein the third air inlet is connected to the output end of the boosting unit, and the second air outlet is connected to the vacuum chamber.
2. The vacuum box helium leak detection gas path system according to claim 1, characterized in that: The gas mixing tank comprises a fourth gas inlet and a fifth gas inlet, the fourth gas inlet is connected to a nitrogen source, and the fifth gas inlet is connected to a helium source.
3. The vacuum box helium leak detection gas path system according to claim 1, characterized in that: The boosting unit includes a first pneumatic valve, a low-pressure filter, a compressor, a first high-pressure filter and a second pneumatic valve, which are connected in sequence, and the first pneumatic valve is connected to the first air outlet of the low-pressure tank, and the second pneumatic valve is connected to the third air inlet of the high-pressure tank.
4. The vacuum box helium leak detection gas path system according to claim 3, characterized in that: A ball valve, a second high-pressure filter and a pressure regulating valve are sequentially connected in the pipeline connecting the high-pressure tank and the vacuum chamber, and a first pressure sensor, a concentration meter and a safety valve are also installed in the high-pressure tank.
5. The vacuum box helium leak detection gas path system according to claim 2, characterized in that: A second pressure sensor is installed in the low-pressure tank, a third pressure sensor is installed in the gas mixing tank, a fourth pressure sensor is connected to the connecting pipeline between the fourth air inlet and the nitrogen source, and a fifth pressure sensor is connected to the connecting pipeline between the fifth air inlet and the helium source.
6. The vacuum box helium leak detection gas path system according to claim 4, characterized in that: An exhaust valve is also installed in the high-pressure tank.