Galvanometer testing device

Abstract

The utility model relates to the technical field of MEMS galvanometer testing, in particular to a galvanometer testing device. The galvanometer testing device comprises a charging tray, a charging tray driving module, a laser, a galvanometer driving module, a light beam receiving screen and an image acquisition module. The charging tray is used for bearing at least two galvanometer modules, and each galvanometer module comprises a galvanometer. And the charging tray driving module is connected with the charging tray and is used for driving the charging tray to move, so that any one of the at least two galvanometer modules moves to a preset position. The laser is used for generating laser beams, and the preset position is located on the light path of the laser beams. The galvanometer driving module is used for being electrically connected with the galvanometer module located at the preset position so as to drive the galvanometer to rotate. And the light beam receiving screen is used for receiving the laser beam reflected by the galvanometer. The image acquisition module is used for acquiring a pattern formed by the laser beam on the light beam receiving screen. Through the mode, the test efficiency of the galvanometer module can be improved, and the problem that the test efficiency of the galvanometer module is low is solved.

Description

Technical Field

[0001] This application relates to the technical field of MEMS galvanometer testing, and particularly to a galvanometer testing device. Background Art

[0002] A micro-electro-mechanical system (MEMS) galvanometer is a micro-optical element fabricated using microelectronic manufacturing processes, with dimensions typically ranging from a few millimeters to a few hundred micrometers. MEMS galvanometers have the advantages of small size, fast response speed, and low power consumption, and are thus widely used in fields such as optical imaging, optical fiber communication, laser printing, and biomedicine. The packaging and testing cost of MEMS galvanometers accounts for a relatively large proportion of the total MEMS cost. If the chip's specifications are found to be unqualified after packaging and testing, it will not only cause waste of materials but also increase a large amount of production costs.

[0003] Based on this, in related technologies, a galvanometer testing device is generally used to test the scanning function of the galvanometer before packaging. Specifically, the galvanometer testing device includes a stage, a laser, a galvanometer drive module, a light beam receiving screen, and an image acquisition module. The stage is used to carry the galvanometer module; the laser is used to generate a laser beam so that the laser beam is directed at the galvanometer; the galvanometer drive module is used to drive the galvanometer to rotate so that the reflected laser beam falls on the light beam receiving screen and forms a corresponding scanning pattern on the light beam receiving screen; and the image acquisition module is used to obtain the above scanning pattern. By analyzing the scanning pattern, the scanning performance of the galvanometer can be determined. Summary of the Utility Model

[0004] The galvanometer testing device in related technologies generally uses a stage to carry a galvanometer module. Therefore, after each test of the galvanometer module, it is necessary to re-clamp the next galvanometer module, which leads to low testing efficiency of the galvanometer module.

[0005] The embodiments of this application aim to provide a galvanometer testing device that can at least improve the problem of low testing efficiency of the galvanometer module.

[0006] The embodiments of this application solve the above technical problems by adopting the following technical solutions:

[0007] An embodiment of the present application provides a galvanometer testing device, which includes a material tray, a material tray driving module, a laser, a galvanometer driving module, a light beam receiving screen, and an image acquisition module. The material tray is used to carry at least two galvanometer modules, and each galvanometer module includes a galvanometer. The material tray driving module is connected to the material tray and is used to drive the material tray to move so that any one of the at least two galvanometer modules moves to a preset position. The laser is used to generate a laser beam, and the preset position is located on the optical path of the laser beam. The galvanometer driving module is used to be electrically connected to the galvanometer module located at the preset position to drive the galvanometer to rotate. The light beam receiving screen is used to receive the laser beam reflected by the galvanometer. The image acquisition module is used to obtain the pattern formed by the laser beam on the light beam receiving screen.

[0008] In some embodiments, the material tray is provided with at least two mounting parts, and the galvanometer modules are mounted on the mounting parts. Each of the mounting parts is arranged in an array along a first direction and a second direction, and the first direction is perpendicular to the second direction.

[0009] In some embodiments, one of the galvanometer module and the material tray is provided with a first positioning post, and the other is provided with a first positioning hole. The first positioning post and the first positioning hole are used to cooperate together to realize the positioning and installation of the galvanometer module.

[0010] In some embodiments, the material tray driving module includes a first driving module and a second driving module. The first driving module includes a first slide rail, a first slider, and a first driving unit. The first slide rail extends along the first direction, and the first slider is slidably connected to the first slide rail along the first direction. The first driving unit is used to drive the first slider to move along the first direction. The second driving module includes a second slide rail, a second slider, and a second driving unit. The second slide rail is mounted on the first slider and extends along the second direction. The second slider is slidably connected to the second slide rail along the second direction. The second driving unit is used to drive the second slider to move along the second direction, and the material tray is mounted on the second slider. Wherein, the first direction is perpendicular to the second direction.

[0011] In some embodiments, the material tray driving module further includes a carrier table, and the carrier table includes a fixing part, a carrying part, and an adjusting part. The fixing part is mounted on the second slider. The carrying part is rotatably connected to the fixing part and can rotate relative to the fixing part around a preset axis, and the preset axis is perpendicular to the first direction and the second direction respectively. The adjusting part is connected to the fixing part and the carrying part respectively. The adjusting part is used to adjust the angle of the carrying part relative to the fixing part and to lock the carrying part. The material tray is mounted on the carrying part.

[0012] In some embodiments, one of the tray and the tray driving module is provided with a second positioning post, and the other is provided with a second positioning hole. The second positioning post and the second positioning hole are used to cooperate together to realize the positioning and installation of the tray.

[0013] In some embodiments, it further includes a fixing member, and the fixing member is used to press the galvanometer module tightly against the tray. Each of the galvanometer modules is arranged in an array in a first direction and a second direction, and the first direction is perpendicular to the second direction. The fixing member satisfies one of the following conditions:

[0014] a) Each fixing member correspondingly presses each of the galvanometer modules arranged in the first direction;

[0015] b) Each fixing member correspondingly presses each of the galvanometer modules arranged in the second direction;

[0016] c) The fixing member and the tray are fixed by magnetic attraction.

[0017] In some embodiments, the tray driving module further includes a first sensor and a second sensor. The first sensor is arranged on the first slide rail, and the first sensor is used to detect the position of the first slider relative to the first slide rail. The second sensor is arranged on the second slide rail, and the second sensor is used to detect the position of the second slider relative to the second slide rail.

[0018] In some embodiments, the galvanometer testing device further includes a tray identification module and a controller. The tray identification module is used to obtain relevant information of the tray. The controller is respectively connected to the tray identification module and the tray driving module. The controller is used to determine the displacement compensation amount of the tray according to the relevant information, and when controlling the tray driving module to drive the tray to move, control the tray driving module to drive the tray to perform displacement compensation based on the position compensation amount, so that the galvanometer module moves to the preset position. The tray is provided with a radio frequency transmitter, and the radio frequency transmitter is used to transmit the relevant information of the tray. The tray identification module includes a radio frequency receiver, and the radio frequency receiver is used to receive the relevant information of the tray.

[0019] In some embodiments, the galvanometer testing device further includes a beam splitter. The beam splitter is arranged between the laser and the preset position. The beam splitter is used to transmit the laser beam emitted from the laser so that the laser beam is directed to the galvanometer, and is used to reflect the laser beam reflected from the galvanometer so that the laser beam is directed to the beam receiving screen.

[0020] In the galvanometer testing device according to the embodiment of the present application, the material tray can clamp multiple galvanometer modules at one time to complete the testing of multiple galvanometer modules, which is beneficial to shortening the testing cycle of batch testing of galvanometer modules and improving the testing efficiency of galvanometer modules. And by moving the galvanometer module to a preset position through the material tray driving module, compared with manual adjustment, it can also improve the testing efficiency of the galvanometer module and solve the problem of low testing efficiency of the galvanometer module.

[0021] The above description is only an overview of the technical solution of the present application. In order to be able to understand the technical means of the present application more clearly, it can be implemented according to the content of the specification. And in order to make the above and other purposes, features and advantages of the present application more obvious and understandable, the following specifically gives the specific implementation manners of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] One or more embodiments are exemplarily illustrated by corresponding drawings. These exemplary illustrations do not constitute limitations on the embodiments. Elements with the same reference numerals in the drawings are represented as similar elements, unless otherwise stated, and the drawings in the drawings do not constitute a proportional limitation.

[0023] Figure 1 is a three-dimensional schematic diagram of the galvanometer testing device in some embodiments of the present application;

[0024] Figure 2 is a three-dimensional schematic diagram of the galvanometer module in the embodiment of the present application;

[0025] Figure 3 is Figure 1 an exploded view of a part of the structure of the galvanometer testing device in ;

[0026] Figure 4 is Figure 3 an exploded view of another perspective of the galvanometer testing device in ;

[0027] Figure 5 is Figure 1 a three-dimensional schematic diagram of a part of the structure of the galvanometer driving module in ;

[0028] Figure 6 is Figure 1 a three-dimensional schematic diagram of the material tray driving module in ;

[0029] Figure 7 is Figure 6 a three-dimensional schematic diagram of the carrier table in ;

[0030] Figure 8 is a structural block diagram of a part of the structure of the galvanometer testing device in some embodiments of the present application.

[0031] The reference numerals in the specific implementation manners are as follows:

[0032] 100. Galvanometer testing device;

[0033] 1. Tray; 11. Installation part; 111. Groove; 112. First positioning post; 12. Second positioning hole; 13. Third positioning post; 14. Radio frequency transmitter;

[0034] 2. Laser; 3. Beam receiving screen; 4. Image acquisition module; 5. Galvo driving module; 51. Probe; 6. Base;

[0035] 7. Tray driving module;

[0036] 71. First driving module; 711. First slide rail; 712. First slider; 7121. First stop piece; 713. First driving unit; 7131. First motor; 7132. First lead screw;

[0037] 72. Second driving module; 721. Second slide rail; 722. Second slider; 7221. Second stop piece; 723. Second driving unit; 7231. Second motor; 7232. Second lead screw;

[0038] 73. First sensor; 74. Second sensor;

[0039] 75. Carrying platform; 751. Fixing part; 752. Carrying part; 7521. Second positioning post; 753. Adjusting part; 7531. Stress member; 7532. Adjusting screw;

[0040] 8. Fixing piece; 81. Third positioning hole; 82. Rod body; 821. Installation groove; 83. Magnetic attracting part; 84. Screw;

[0041] 9. Beam splitter;

[0042] 10. Tray identification module; 101. Radio frequency receiver;

[0043] 20. Controller;

[0044] 200. Galvo module; 210. Housing; 211. Installation groove; 212. Connection part; 2121. First positioning hole; 220. Galvo; 221. Fixing part; 2211. Electrode; 222. Movable part; 2221. Reflector; 2222. Coil; 230. Magnet;

[0045] X. First direction; Y. Second direction; Z. Third direction. Detailed implementation manners

[0046] For the convenience of understanding the present application, the present application will be described in more detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application. It should be noted that when an element is described as "fixed to" another element, it can be directly on the other element, or there can be one or more intermediate elements therebetween. When an element is described as "connected to" another element, it can be directly connected to the other element, or there can be one or more intermediate elements therebetween.

[0047] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those of ordinary skill in the technical field to which this application belongs; the terms used herein are only for the purpose of describing specific embodiments and are not intended to limit this application; the terms "including" and "having" and any variations thereof in the specification and claims of this application and the above drawings are intended to cover non-exclusive inclusion.

[0048] In the description of the embodiments of this application, the orientation or positional relationship indicated by technical terms such as "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the embodiments of this application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the embodiments of this application.

[0049] In the description of the embodiments of this application, the use of words such as "first" and "second" to limit components is only for the convenience of distinguishing the corresponding components. Without otherwise stating, the above words have no special meaning, and therefore cannot be understood as a limitation on the protection scope of this application. In the description of the embodiments of this application, "a plurality of" means two or more, unless otherwise specifically defined.

[0050] Unless otherwise defined, all technical and scientific terms used in this specification have the same meaning as commonly understood by those of ordinary skill in the technical field to which this application belongs. The terms used in the specification of this application are only for the purpose of describing specific embodiments and are not used to limit this application. The term "and / or" used in this specification includes any and all combinations of one or more of the related listed items.

[0051] In addition, the technical features involved in different embodiments of the present application described below can be combined with each other as long as they do not conflict with each other.

[0052] In the related art, a galvanometer test device generally uses a stage to carry a galvanometer module. Therefore, after each test of the galvanometer module, it is necessary to re-clamp the next galvanometer module, which results in low test efficiency of the galvanometer module.

[0053] Based on this, an embodiment of the present application provides a galvanometer test device for testing a galvanometer module and improving the test efficiency of the galvanometer module.

[0054] Please refer to Figure 1 , which shows a schematic structural diagram of a galvanometer test device 100 provided by some embodiments of the present application. The galvanometer test device 100 includes a turntable 1, a turntable drive module 7, a laser 2, a galvanometer drive module 5, a beam receiving screen 3, and an image acquisition module 4. Among them, the turntable 1 is used to carry at least two galvanometer modules 200, and each galvanometer module 200 includes a galvanometer. The turntable drive module 7 is connected to the turntable 1 and is used to drive the turntable 1 to move so that any one of the at least two galvanometer modules 200 moves to a preset position. The laser 2 is used to generate a laser beam, and the preset position is located on the optical path of the laser beam. The galvanometer drive module 5 is used to be electrically connected to the galvanometer module 200 located at the preset position to drive the galvanometer to rotate. The beam receiving screen 3 is used to receive the laser beam reflected by the galvanometer. The image acquisition module 4 is used to obtain the pattern formed by the laser beam on the beam receiving screen 3. It should be noted that the "preset position" described in the present application document means a position set in advance, and this position falls on the propagation path of the laser beam so that the galvanometer module 200 can receive and reflect the laser beam.

[0055] To facilitate understanding of the technical solution and working principle of the galvanometer test device 100, the structure of the galvanometer module 200 will be briefly described below.

[0056] Please refer to Figure 2, which shows a three-dimensional schematic diagram of the galvanometer module 200 according to an embodiment of the present application. The galvanometer module 200 includes a housing 210, a galvanometer 220, and a magnet 230. The housing 210 is provided with a mounting groove 211, and both the galvanometer 220 and the magnet 230 are disposed in the mounting groove 211. The galvanometer 220 includes a fixed portion 221 and a movable portion 222; the fixed portion 221 is mounted on the housing 210, the movable portion 222 is connected to the fixed portion 221 and can rotate relative to the fixed portion 221; the movable portion 222 includes a reflecting mirror 2221, so as to realize the reflection of the laser beam. In addition, the movable portion 222 is further provided with a coil 2222, and the fixed portion 221 is provided with an electrode 2211 electrically connected to the coil 2222; when the galvanometer 220 is energized through the electrode 2211, the movable portion 222 will rotate under the drive of the magnet 230, and then realize the scanning of the laser beam by the reflecting mirror 2221. The rotation of the galvanometer 220 and the reflection of the laser beam by the galvanometer 220 described below actually refer to the rotation of the reflecting mirror 2221 relative to the housing 210 and the reflection of the laser beam by the reflecting mirror 2221.

[0057] In this embodiment, the galvanometer testing device 100 further includes a base 6. Please refer to Figure 1 , the above-mentioned material tray 1, material tray driving module 7, laser 2, galvanometer driving module 5, beam receiving screen 3, and image acquisition module 4 are all directly or indirectly mounted on the base 6, that is, the base 6 is the mounting base for the remaining modules in the galvanometer testing device 100. It can be understood that in some other embodiments of the present application, the base 6 can be omitted, and the above-mentioned modules are independently arranged, which does not affect the testing function of the galvanometer testing device 100. Next, the specific structures of the above-mentioned material tray 1, material tray driving module 7, laser 2, galvanometer driving module 5, beam receiving screen 3, and image acquisition module 4 will be described in detail.

[0058] For the above-mentioned material tray 1, please refer to Figure 3 and Figure 4 , Figure 3 shows Figure 1 an exploded view of a part of the structure of the galvanometer testing device 100 in Figure 4 shows Figure 3Exploded view of the middle galvanometer test device 100 from another perspective. The material tray 1 can be in the shape of a rectangular plate, and it is provided with a mounting portion 11 for carrying the galvanometer module 200. In this embodiment, the mounting portion 11 includes a groove 111 adapted to the shape of the galvanometer module 200, and the galvanometer module 200 is mounted in this groove 111. A part of the galvanometer module 200 protrudes from the top surface of the material tray 1; a part of the galvanometer module 200 extends out of the groove 111 to form a connecting portion 212, and this connecting portion 212 is carried on the area of the material tray 1 outside the groove 111. In this embodiment, the galvanometer module 200 is provided with a first positioning hole 2121, and the material tray 1 is provided with a first positioning post 112. The shape of the first positioning post 112 is adapted to the first positioning hole 2121, and the first positioning post 112 and the first positioning hole 2121 are used to cooperate together to achieve the positioning and installation of the galvanometer module 200. Among them, the first positioning hole 2121 can be provided in the connecting portion 212, and the first positioning post 112 is provided at the corresponding position on the material tray 1.

[0059] Optionally, each galvanometer module 200 is provided with a plurality of first positioning holes 2121, and the material tray 1 is provided with a plurality of first positioning posts 112 adapted to the respective first positioning holes 2121. Each first positioning hole 2121 is in shaft-hole fit with a first positioning post 112, thereby realizing the positioning of the galvanometer module 200. Of course, in other embodiments of the present application, the galvanometer module 200 may also be provided with only one first positioning hole 2121. At this time, in combination with the groove 111 or other structures, the positioning of the galvanometer module 200 in two directions can be realized. The present application does not specifically limit the positioning method of the galvanometer module 200. In addition, in some other embodiments, the first positioning hole 2121 may also be provided on the material tray 1, and correspondingly, the first positioning post 112 is provided on the galvanometer module 200.

[0060] In this embodiment, the material tray 1 is provided with at least two mounting portions 11, and the mounting portions 11 are arranged in a two-dimensional array along the illustrated first direction X and the second direction Y. Each mounting portion 11 is respectively used to mount a galvanometer module 200. Among them, the first direction X is the direction parallel to the top surface of the material tray 1, and the second direction Y is also the direction parallel to the top surface of the material tray 1. The first direction X is perpendicular to the second direction Y; that is, the mounting portions 11 are generally distributed in a rectangular shape. This embodiment takes the first direction X as the width direction of the material tray 1 and the second direction Y as the length direction of the material tray 1 as an example for illustration; it can be understood that in other embodiments of the present application, the first direction X and the second direction Y can also be adjusted adaptively on this basis. The setting of the material tray 1 having a plurality of mounting portions 11 is beneficial to clamping a plurality of galvanometer modules 200 at one time, that is, completing the testing of a plurality of galvanometer modules 200, which is beneficial to shortening the testing cycle of batch testing of the galvanometer modules 200 and improving the testing efficiency of the galvanometer modules 200.

[0061] Further, for the convenience of fixing the galvanometer module 200, please continue to refer to Figure 3 and Figure 4 , the galvanometer testing device 100 further includes a fixing member 8, and the fixing member 8 is used to press the galvanometer module 200 against the material tray 1. Since the mounting portions 11 are arranged in an array in the first direction X and the second direction Y, the galvanometer modules 200 are arranged in an array in the first direction X and the second direction Y. Optionally, the fixing member 8 is strip-shaped, and the fixing member 8 extends along the first direction X.

[0062] Wherein, each fixing member 8 can correspondingly press the galvanometer modules 200 arranged in the first direction X. Exemplarily, the fixing member 8 extends across a plurality of galvanometer modules 200 in the first direction X to press the plurality of galvanometer modules 200 arranged in the first direction X against the material tray 1. And the number of the fixing members 8 is plural, and the plural fixing members 8 are arranged at intervals in the second direction Y. Therefore, each fixing member 8 presses the plurality of galvanometer modules 200 arranged in the first direction X against the material tray 1. It can be understood that the fixing member 8 can also be installed on the material tray 1 parallel to the second direction Y, then the fixing member 8 presses the plurality of galvanometer modules 200 arranged in the second direction Y against the material tray 1, that is, each fixing member 8 correspondingly presses the galvanometer modules 200 arranged in the second direction Y.

[0063] In some embodiments, please continue to refer to Figure 3 and Figure 4 , the material tray 1 is provided with a third positioning post 13, and the fixing member 8 is provided with a third positioning hole 81 adapted to the third positioning post 13. When the third positioning post 13 passes through the third positioning hole 81, the position of the fixing member 8 relative to the material tray 1 can be defined, that is, the third positioning post 13 and the third positioning hole 81 are used in cooperation to realize the positioning installation of the fixing member 8. It can be understood that the number of the third positioning posts 13 and the third positioning holes 81 is at least two, so as to define the position and angle of the fixing member 8 relative to the material tray 1. It can be understood that the positions of the third positioning post 13 and the third positioning hole 81 can be interchanged. For example, the material tray 1 is provided with the third positioning hole 81, and the fixing member 8 is provided with the third positioning post 13.

[0064] The fixing member 8 can be installed on the material tray 1 by relying on gravity. However, when the material tray 1 shakes during transportation, the fixing member 8 will jump relative to the material tray 1, which easily causes the fixing member 8 to break away from the material tray 1. And when the fixing member 8 jumps relative to the material tray 1, the fixing member 8 will hit the galvanometer module 200, which easily causes damage to the galvanometer module 200. To improve this deficiency, in some embodiments, the fixing member 8 and the material tray 1 can be magnetically fixed to enhance the connection strength between the fixing member 8 and the material tray 1, thereby improving the problem that the fixing member 8 jumps relative to the material tray 1. Exemplarily, please continue to refer to Figure 4, the fixing member 8 includes a rod body 82 and a magnetic member 83. The magnetic member 83 is made of magnetic materials such as iron, cobalt, and / or nickel. The rod body 82 is provided with a mounting groove 821, and the magnetic member 83 is embedded in the mounting groove 821. The material of the material tray 1 includes magnetic metals such as iron, cobalt, and nickel. Thus, when the fixing member 8 is positioned and installed on the material tray 1, the fixing member 8 is magnetically connected to the material tray 1.

[0065] In some embodiments, please continue to refer to Figure 4 , the fixing member 8 further includes a screw 84. The screw 84 passes through the magnetic member 83 and is threadedly connected to the rod body 82, thereby fixing the magnetic member 83 to the rod body 82 and improving the problem that the magnetic member 83 is easily detached from the rod body 82.

[0066] For the above-mentioned laser 2, please specifically refer to Figure 1 , the laser 2 is used to generate a laser beam and direct the laser beam towards a preset position, and then the laser beam is received and reflected by the galvanometer module 200 located at the preset position. In this embodiment, the laser 2 can be an edge laser; of course, in other embodiments of the present application, the laser 2 can also be other lasers such as a vertical cavity surface laser. Exemplarily, please continue to refer to Figure 1 , the laser 2 can be located above the material tray 1, and it is used to emit a laser beam downward so that when the galvanometer module 200 moves with the material tray to the above-mentioned preset position, it receives and reflects the laser beam.

[0067] For the above-mentioned galvanometer driving module 5, the galvanometer driving module 5 is used to be electrically connected to the galvanometer module 200 located at the preset position to drive the galvanometer 220 to rotate. Exemplarily, please refer to Figure 2 and Figure 5 , Figure 2 shows a three-dimensional schematic diagram of the galvanometer module 200 according to an embodiment of the present application. Figure 5 shows Figure 1 a three-dimensional schematic diagram of a partial structure of the galvanometer driving module 5 in. The galvanometer module 200 includes a plurality of electrodes 2211, and the galvanometer driving module 5 includes a plurality of probes 51. The plurality of probes 51 are used to be electrically connected to the plurality of electrodes 2211 respectively to transmit a test signal to the galvanometer module 200. The test signal excites the coil 2222 to generate a changing electromagnetic field, and then drives the galvanometer 220 to rotate relative to the housing 210 according to the test signal.

[0068] For the above-mentioned light beam receiving screen 3, please continue to refer to Figure 1, which is located downstream of the optical path of the galvanometer module 200 for receiving the laser beam reflected by the galvanometer 220. Considering that if the beam receiving screen 3 is on the path from the laser 2 to the above preset position, it will block the laser beam, thus affecting the propagation of the laser beam to the galvanometer module 200; therefore, the beam receiving screen 3 needs to be set outside the above path. For this purpose, the laser 2 or the material tray 1 can be rotated so that the reflected laser beam does not return along the original path, but this will increase the difficulty of positioning between modules. To overcome this deficiency, the galvanometer test device 100 further includes a beam splitter 9 to separate the laser beam before and after reflection by the galvanometer module 200, and there is no need to additionally rotate the above laser 2 or the material tray 1.

[0069] Specifically, please continue to refer to Figure 1 , the beam splitter 9 is arranged between the laser 2 and the above preset position. It is used for the laser beam emitted from the laser 2 to transmit through it so that the laser beam is directed to the galvanometer 220, and for reflecting the laser beam reflected by the galvanometer 220 so that the laser beam does not return to the laser 2 along the original path, but is directed to the beam receiving screen 3 along another path. It should be noted that since the galvanometer 220 rotates, the beam splitter 9 cannot be too far away from the galvanometer 220 to avoid the laser beam reflected by the galvanometer 220 deviating from the beam splitter 9. By reflecting the laser beam reflected by the galvanometer 220 again through the beam splitter 9, the final emission direction of the laser beam can be changed. For example, continue to refer to Figure 1 , if the final emission direction of the laser beam is the horizontal direction, then the beam receiving screen 3 can be located on one side of the material tray 1 along the above second direction Y, so that the beam receiving screen 3 can be spaced from the laser 2, improving the problem of interference between the beam receiving screen 3 and the laser 2. And the beam receiving screen 3 can be set vertically for easy observation by the staff. The beam splitter 9 can adopt elements such as a polarization beam splitter, a pore mirror, etc. that can achieve optical path separation.

[0070] For the above image acquisition module 4, please continue to refer to Figure 1 , the image acquisition module 4 is used to obtain the pattern formed by the laser beam on the beam receiving screen 3. Exemplarily, the image acquisition module 4 is a camera, and the image acquisition module 4 faces the beam receiving screen 3 to take pictures, so that the pattern formed by the laser beam on the beam receiving screen 3 can be obtained. By analyzing the pattern obtained by the image acquisition module 4 by a computer, such as comparing the pattern with a standard pattern, it can be determined whether the scanning function of the galvanometer module meets the standard.

[0071] The image acquisition module 4 can take pictures or record videos. When the image acquisition module 4 records videos, the image acquisition module 4 can obtain richer information, such as information about the deflection speed and delay of the galvanometer 220 relative to the housing 210, enriching the detection indexes of the galvanometer module 200.

[0072] Finally, a supplementary description of the above-mentioned tray driving module 7 will be given. Please continue to refer to Figure 1 The tray driving module 7 is connected to the tray 1 and is used to drive the tray 1 to move so that any one of the galvanometer modules 200 moves to the above-mentioned preset position. As described above, this preset position is located on the propagation path of the laser beam. Therefore, when a certain galvanometer module 200 moves to the preset position, the galvanometer of this galvanometer module 200 will receive and reflect the laser beam. By moving the galvanometer module 200 to the above-mentioned preset position through the tray driving module 7, compared with manual adjustment, the testing efficiency of the galvanometer module 200 can be improved, and the problem of low testing efficiency of the galvanometer module 200 can be improved.

[0073] Please refer to Figure 6 , Figure 6 shows Figure 1 a three-dimensional schematic diagram of the tray driving module 7 in

[0074] Specifically, please continue to refer to Figure 6 The first driving module 71 includes a first slide rail 711, a first slider 712 and a first driving unit 713. The first slide rail 711 is arranged on the base 6 of the galvanometer testing device 100 and extends along the first direction X. The first slider 712 is slidably connected to the first slide rail 711 along the first direction X; the first driving unit 713 is arranged on the base 6 and is in transmission connection with the first slider 712. The first driving unit 713 is used to drive the first slider 712 to slide along the first slide rail 711. Optionally, the first driving unit 713 includes a first motor 7131 and a first lead screw 7132. Among them, the first lead screw 7132 extends along the first direction X, is connected to the output shaft of the first motor 7131, and is threadedly connected to the first slider 712; thus, the first motor 7131 can drive the first lead screw 7132 to rotate, and further drive the first slider 712 to slide along the first direction X.

[0075] Please continue to refer to Figure 6, the second driving module 72 includes a second slide rail 721, a second slider 722, and a second driving unit 723. The second slide rail 721 is installed on the first slider 712 and extends along the second direction Y. The second slider 722 is slidably connected to the second slide rail 721 along the second direction Y. The second driving unit 723 is installed on the first slider 712 and is drivingly connected to the second slider 722; the second driving unit 723 is used to drive the second slider 722 to slide along the second slide rail 721. Optionally, the second driving unit 723 includes a second motor 7231 and a second lead screw 7232. Among them, the second lead screw 7232 extends along the second direction Y, is connected to the output shaft of the second motor 7231, and is threadedly connected to the second slider 722; thus, the second motor 7231 can drive the second lead screw 7232 to rotate, and further drive the second slider 722 to slide along the second direction Y.

[0076] The material tray 1 is installed on the second slider 722. In this way, the first driving module 71 and the second driving module 72 can cooperate with each other to drive the material tray 1 to move relative to the base 6 along the first direction X and the second direction Y, so as to adjust the position of the galvanometer module 200 relative to the base 6, and further move each galvanometer module 200 to the preset position in turn for testing.

[0077] In some embodiments, please continue to refer to Figure 6 , the material tray driving module 7 further includes a first sensor 73, and the first sensor 73 is used to detect the position of the first slider 712 relative to the first slide rail 711. Exemplarily, the first sensor 73 is arranged on the first slide rail 711. The first sensor 73 is a photoelectric sensor. The first slider 712 is provided with a first baffle 7121. When the first baffle 7121 passes through the first sensor 73, the first sensor 73 is triggered, and thus the position of the first slider 712 relative to the first slide rail 711 can be detected. The setting of the first sensor 73 is beneficial to realizing the monitoring of the position of the first slider 712. For example, the first slider 712 can be reset in the first direction X according to the detection value of the first sensor 73 and in cooperation with the first driving unit 713, that is, the material tray 1 is reset in the first direction X.

[0078] Similarly, please also refer to Figure 6, the tray driving module 7 further includes a second sensor 74 for detecting the position of the second slider 722 relative to the second slide rail 721. Exemplarily, the second sensor 74 is disposed on the second slide rail 721. The second sensor 74 is a photoelectric sensor. The second slider 722 is provided with a second baffle 7221. When the second baffle 7221 passes through the second sensor 74, the second sensor 74 is triggered, and thus the position of the second slider 722 relative to the second slide rail 721 can be detected. The setting of the second sensor 74 is beneficial to realizing the monitoring of the position of the second slider 722. For example, the second slider 722 can be reset in the second direction Y according to the cooperation of the second sensor 74 and the second driving unit 723, that is, the tray 1 is reset in the second direction Y.

[0079] It can be understood that the number of the first sensors 73 can be multiple, and the multiple first sensors 73 are arranged at intervals along the first direction X on the first slide rail 711. The number of the second sensors 74 can be multiple, and the multiple second sensors 74 are arranged at intervals along the second direction Y on the second slide rail 721.

[0080] In some embodiments, please continue to refer to Figure 6 , the tray driving module 7 further includes a carrier 75. The carrier 75 mounts the tray 1 on the second slider 722. The carrier 75 is used to rotate the tray 1 around a preset axis to adjust the angle of the tray 1 relative to the base 6. Specifically, please refer to Figure 7 , Figure 7 shows Figure 6 a three-dimensional schematic diagram of the carrier in

[0081] For the above manner in which the adjusting portion 753 drives the carrying portion 752 to rotate relative to the fixing portion 751, exemplarily, please continue to refer to Figure 7, the adjusting part 753 includes a force-receiving member 7531 and two adjusting screws 7532. The force-receiving member 7531 is arranged on the bearing part 752, and the two adjusting screws 7532 are threadedly connected to the fixing part 751. The two adjusting screws 7532 are respectively located on opposite sides of the force-receiving member 7531. The adjusting screw 7532 is used to rotate relative to the fixing part 751 and approach or move away from the force-receiving member 7531 when rotating. When the adjusting screw 7532 moves closer to and contacts the force-receiving member 7531, it can apply a thrust to the force-receiving member 7531, thereby driving the bearing part 752 to rotate relative to the fixing part 751 around a preset axis. Since the two adjusting screws 7532 are respectively located on opposite sides of the force-receiving member 7531, the two adjusting screws 7532 can drive the bearing part 752 to rotate relative to the fixing part 751 in two directions respectively. And the threaded connection has a locking effect. When both adjusting screws 7532 contact the force-receiving member 7531, the bearing part 752 cannot rotate relative to the fixing part 751 around the preset axis, that is, the adjusting part 753 is used to lock the bearing part 752.

[0082] In this embodiment, the tray 1 is detachably mounted on the tray driving module 7. Exemplarily, please refer to Figure 4 and Figure 6 , the tray driving module 7 is provided with a second positioning post 7521, and the second positioning post 7521 can be specifically arranged on the bearing part 752. The tray 1 is provided with a second positioning hole 12. When the second positioning post 7521 passes through the second positioning hole 12, the position of the tray 1 relative to the bearing part 752 can be defined. That is, the second positioning post 7521 and the second positioning hole 12 are used in cooperation to achieve the positioning and installation of the tray 1. It can be understood that the number of the second positioning posts 7521 and the second positioning holes 12 is at least two, so as to define the position and angle of the tray 1 relative to the bearing part 752. It can be understood that the positions of the second positioning post 7521 and the second positioning hole 12 can be interchanged. For example, the tray 1 is provided with the second positioning post 7521, and the tray driving module 7 is provided with the second positioning hole 12.

[0083] In some embodiments, the second positioning post 7521 is adapted to the second positioning hole 12. Exemplarily, when observed along the third direction Z, the shape and size of the second positioning post 7521 are the same as those of the second positioning hole 12, improving the positioning accuracy of the tray 1 positioned and installed on the tray driving module 7. Optionally, the second positioning hole 12 is a circular hole, and the second positioning post 7521 is a cylinder.

[0084] In some embodiments, please refer to Figure 6 , the number of the second positioning posts 7521 is multiple. When observed along the third direction Z, the multiple second positioning posts 7521 are arranged in a non-rotationally symmetric manner. Exemplarily, please refer to Figure 6, the number of the second positioning posts 7521 is three, and the three second positioning posts 7521 are arranged in a right triangle. Among them, the tray 1 is correspondingly provided with three second positioning holes 12. When the tray 1 is positioned and installed on the tray driving module 7, if the tray 1 is rotated by any angle around the third direction Z, the tray 1 cannot be installed on the tray driving module 7. That is, when the tray 1 is positioned and installed on the tray driving module 7, the angle of the tray 1 relative to the tray driving module 7 is unique, which is beneficial to improving the problem of incorrect installation angle when the tray 1 is installed on the tray driving module 7.

[0085] Similarly, the plurality of first positioning posts 112 can also be arranged in a non-rotationally symmetric manner to improve the problem of incorrect installation angle when the galvanometer module 200 is installed on the tray 1; the plurality of third positioning posts 13 can also be arranged in a non-rotationally symmetric manner to improve the problem of incorrect installation angle when the fixing member 8 is installed on the tray 1.

[0086] It is worth mentioning that after a certain galvanometer module 200 is tested, the tray driving module 7 can drive the tray 1 to move a spacing period of one installation part 11 along the first direction X or the second direction Y, so that another adjacent galvanometer module 200 moves to the above preset position, thereby realizing the test of the adjacent galvanometer module 200. However, each tray 1 will have different errors due to manufacturing precision problems, which will cause the feed amounts of the installation parts 11 at the same row and column serial number positions of different trays 1 to be different when feeding according to the above spacing period; if the same feed amount is used for feeding, it will cause the galvanometer modules 200 in the installation parts 11 of some trays 1 not to be accurately located at the above preset position. To overcome this deficiency, in this embodiment, please refer to Figure 8 , Figure 8 shows a structural block diagram of a partial structure of the galvanometer test device 100 according to some embodiments of the present application. The galvanometer test device 100 further includes a tray identification module 10 and a controller 20; wherein, the tray identification module 10 is used to obtain relevant information of the tray 1; the controller 20 is respectively connected to the tray identification module 10 and the tray driving module 7, and the controller 20 is used to determine the displacement compensation amount of the tray 1 according to the relevant information, and when controlling the tray driving module 7 to drive the tray 1 to move, control the tray driving module 7 to drive the tray 1 to perform displacement compensation based on the position compensation amount, so that the galvanometer module 200 moves to the preset position, reducing the error caused by the manufacturing precision of the tray 1.

[0087] In some embodiments, please continue to refer to Figure 8 and can refer to Figure 3, the tray 1 is provided with a radio frequency transmitter 14, and the radio frequency transmitter 14 is used to transmit the relevant information of the tray 1; the above-mentioned tray identification module 10 may include a radio frequency receiver 101, and the radio frequency receiver 101 is used to receive the relevant information of the tray 1. Among them, the model of the radio frequency transmitter 14 may be an RFM110 wireless transmitter, and the model of the radio frequency receiver 101 may be an RFX2402E radio frequency transceiver.

[0088] Here, taking the relevant information of the tray 1 as the tray number as an example, the displacement compensation process of the tray 1 will be described; it can be understood that in other embodiments of the present application, the relevant information of the tray 1 may also be other information that can distinguish the tray 1, such as tray barcodes, etc. The controller 20 pre-stores the tray number of each tray 1 and the position deviation information of each mounting part 11 corresponding to the tray 1. The controller 20 can obtain the position deviation information of each mounting part 11 of the current tray 1 according to the number of the tray 1, and thus calculate the position compensation amount required for each mounting part 11 to move to the preset position along the first direction X or the second direction Y; that is to say, each tray 1 will have multiple position compensation amounts. When the controller 20 controls the tray driving module 7 to drive the tray 1 to move at the above interval period, it is specifically fed based on the interval period and the position compensation amount, thereby reducing the offset amount of the galvanometer module 200 relative to the preset position caused by the manufacturing error of the tray 1 and improving the reliability of the test of the galvanometer module 200.

[0089] It can be understood that even though this embodiment is described with the tray identification module 10 including a radio frequency receiver 101, it should be understood that the present application is not limited thereto, and the tray identification module 10 may be any device that can obtain distinguishable tray information; for example, in other embodiments of the present application, the tray identification module 10 may also be a device such as a camera or an infrared scanning gun.

[0090] In the galvanometer test device 100 of the embodiment of the present application, the setting that the tray 1 has multiple mounting parts 11 is beneficial to clamping the tray 1 at one time, that is, completing the test of multiple galvanometer modules 200, which is beneficial to shortening the test cycle of batch testing of the galvanometer modules 200 and improving the test efficiency of the galvanometer modules 200. And by moving the galvanometer module 200 to the preset position through the tray driving module 7, compared with manual adjustment, it can also improve the test efficiency of the galvanometer module 200 and improve the problem of low test efficiency of the galvanometer module 200. The tray identification module 10 and the controller 20 can obtain the displacement compensation amount of the tray 1 and drive the tray 1 to perform displacement compensation through the tray driving module 7, which can reduce the error caused by the manufacturing accuracy of the tray 1 and improve the reliability of the test of the galvanometer module 200.

[0091] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them; under the idea of the present application, the technical features in the above embodiments or different embodiments can also be combined, and the steps can be implemented in any order, and there are many other changes in different aspects of the present application as described above. For the sake of brevity, they are not provided in detail; although the present application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A galvanometer testing device, characterized in that: include: A material tray, used to carry at least two galvanometer modules, wherein the galvanometer modules include galvanometers; A tray driving module, connected to the tray, and used to drive the tray to move so as to move any one of the at least two galvanometer modules to a preset position; A laser, used to generate a laser beam, wherein the preset position is located on an optical path of the laser beam; A galvanometer driving module, used for electrically connecting to the galvanometer module at the preset position to drive the galvanometer to rotate; A beam receiving screen, used for receiving the laser beam reflected by the galvanometer; as well as The image acquisition module is used to acquire the pattern formed by the laser beam on the beam receiving screen.

2. The galvanometer testing device according to claim 1, characterized in that: The material tray is provided with at least two mounting parts, and the galvanometer module is mounted on the mounting parts; The mounting portions are arranged in an array along a first direction and a second direction, and the first direction is perpendicular to the second direction.

3. The galvanometer testing device according to claim 2, characterized in that: One of the galvanometer module and the material tray is provided with a first positioning column, and the other is provided with a first positioning hole. The first positioning column and the first positioning hole are used to cooperate with each other to achieve the positioning installation of the galvanometer module.

4. The galvanometer testing device according to claim 1, characterized in that: The tray driving module comprises: A first driving module comprises a first slide rail, a first slider and a first driving unit, wherein the first slide rail extends along a first direction, the first slider is slidably connected to the first slide rail along the first direction, and the first driving unit is used to drive the first slider to move along the first direction; A second driving module, comprising a second slide rail, a second slider and a second driving unit, wherein the second slide rail is mounted on the first slider and extends along a second direction, the second slider is slidably connected to the second slide rail along the second direction, the second driving unit is used to drive the second slider to move along the second direction, and the material tray is mounted on the second slider; The first direction is perpendicular to the second direction.

5. The galvanometer testing device according to claim 4, characterized in that: The tray driving module further includes a bearing platform, and the bearing platform includes: A fixing portion, mounted on the second sliding block; a bearing portion, rotatably connected to the fixing portion and rotatable relative to the fixing portion around a preset axis, wherein the preset axis is respectively perpendicular to the first direction and the second direction; and an adjusting portion, the adjusting portion being connected to the fixing portion and the bearing portion respectively, the adjusting portion being used to adjust an angle of the bearing portion relative to the fixing portion, and to lock the bearing portion; The material tray is installed on the bearing portion.

6. The galvanometer testing device according to claim 4, characterized in that: One of the material tray and the material tray driving module is provided with a second positioning column, and the other is provided with a second positioning hole, and the second positioning column and the second positioning hole are used to cooperate with each other to achieve the positioning installation of the material tray.

7. The galvanometer testing device according to claim 6, characterized in that: It also includes a fixing member, which is used to press the galvanometer module onto the material tray; Each of the galvanometer modules is arranged in an array along a first direction and a second direction, the first direction is perpendicular to the second direction, and the fixing member satisfies one of the following conditions: a) Each of the fixing members correspondingly presses each of the galvanometer modules arranged along the first direction; b) each of the fixing members correspondingly presses each of the galvanometer modules arranged along the second direction; c) The fixing member and the material tray are fixed by magnetic attraction.

8. The galvanometer testing device according to claim 4, characterized in that: The tray driving module also includes: a first sensor, disposed on the first slide rail, and configured to detect a position of the first slider relative to the first slide rail; and The second sensor is disposed on the second slide rail, and is used to detect the position of the second sliding block relative to the second slide rail.

9. The galvanometer testing device according to claim 1, characterized in that: The galvanometer testing device also includes a tray identification module and a controller; The tray identification module is used to obtain relevant information of the tray; The controller is connected to the tray identification module and the tray driving module respectively, and the controller is used to determine the displacement compensation amount of the tray according to the relevant information, and when controlling the tray driving module to drive the tray to move, the controller controls the tray driving module to drive the tray to perform displacement compensation based on the position compensation amount, so that the galvanometer module moves to the preset position; The material tray is provided with a wireless radio frequency transmitter, and the wireless radio frequency transmitter is used to transmit the relevant information of the material tray. The material tray identification module includes a wireless radio frequency receiver, and the wireless radio frequency receiver is used to receive the relevant information of the material tray.

10. The galvanometer testing device according to any one of claims 1 to 9, characterized in that: Also includes a beam splitter; The beam splitter is arranged between the laser and the preset position, and is used for transmitting the laser beam emitted from the laser so that the laser beam is directed toward the galvanometer, and for reflecting the laser beam reflected from the galvanometer so that the laser beam is directed toward the beam receiving screen.

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