Bearing device and chip packaging inspection equipment

Abstract

The utility model discloses a bearing device and chip packaging inspection equipment, and belongs to the technical field of chip packaging inspection. The bearing device comprises a base, a bearing piece, a clamping piece and an adjusting piece. The bearing part is rotationally connected with the base, a clamping part and a guiding part are arranged on the side, away from the base, of the bearing part, and the guiding part is perpendicular to the clamping part; the clamping piece is in sliding connection with the guide part, and a first adjusting screw hole is formed in the clamping piece in the direction perpendicular to the clamping part and the guide part; the adjusting piece is arranged in the first adjusting screw hole in a penetrating mode and abuts against the guide part. According to the bearing device provided by the invention, the convenience and efficiency of chip packaging inspection are improved, the operation is simple and convenient, and the clamping requirements of chips of different specifications can be met.

Description

Technical Field

[0001] The present application relates to the technical field of chip package inspection, and particularly to a carrying device and a chip package inspection apparatus. Background Art

[0002] A chip package structure is a casing for mounting semiconductor integrated circuit chips. It not only plays roles in security, fixing, sealing, protecting the chips, and enhancing heat conduction performance, but also serves as a bridge connecting the internal world of the chips and the external circuit.

[0003] After chip packaging is completed, the packaged chips need to be placed on a carrying fixture and observed under a microscope to inspect the packaging quality of the chips. However, the structure of the existing carrying fixtures is fixed and single, and can only fix chips with fixed specifications. When inspecting chips with different specifications, different specifications of carrying fixtures need to be replaced, which is cumbersome to operate and cannot meet the inspection requirements of chips with various specifications. Summary of the Utility Model

[0004] In view of this, the purpose of the present application is to overcome the deficiencies in the prior art and provide a carrying device.

[0005] To solve the above technical problems, the present application provides:

[0006] A carrying device, comprising:

[0007] A base;

[0008] A carrier, rotatably connected to the base, with a clamping portion and a guiding portion provided on a side of the carrier away from the base, and the guiding portion is perpendicular to the clamping portion;

[0009] A clamping member, slidably connected to the guiding portion, and the clamping member is provided with a first adjusting screw hole along a direction perpendicular to the clamping portion and the guiding portion;

[0010] An adjusting member, the adjusting member passes through the first adjusting screw hole and abuts against the guiding portion.

[0011] In addition, according to the carrying device of the present application, it may further have the following additional technical features:

[0012] In some embodiments of the present application, the carrying device further includes a sliding member, the guiding portion is a guiding groove, and the clamping member is slidably connected to the guiding groove through the sliding member.

[0013] In some embodiments of the present application, the sliding member is provided with a second adjusting screw hole along a direction perpendicular to the clamping portion and the guiding groove, and the adjusting member passes through the first adjusting screw hole and the second adjusting screw hole in sequence and abuts against the bottom wall of the guiding groove.

[0014] In some embodiments of the present application, the guiding portion is a guiding protrusion, the clamping member is provided with a sliding groove adapted to the guiding protrusion, the clamping member is slidably connected to the guiding protrusion through the sliding groove, and the adjusting member passes through the first adjusting screw hole and abuts against the guiding protrusion.

[0015] In some embodiments of the present application, there are two guiding portions and two adjusting members. The two guiding portions and the two adjusting members are spaced apart along a direction parallel to the clamping portion.

[0016] In some embodiments of the present application, the carrying device further includes a connecting member, and the connecting member is rotatably connected to the base and the carrying member respectively.

[0017] In some embodiments of the present application, the carrying device further includes a first rotating shaft and a second rotating shaft. One end of the connecting member is rotatably connected to the base through the first rotating shaft, and the end of the connecting member away from the base is rotatably connected to the carrying member through the second rotating shaft.

[0018] In some embodiments of the present application, the carrying device further includes a connecting member. One end of the connecting member is connected to the base, and a connecting ball socket is provided at the end of the connecting member away from the base. The carrying member is provided with a connecting ball head that cooperates with the connecting ball socket.

[0019] In some embodiments of the present application, the carrying device further includes a connecting member. One end of the connecting member is connected to the base, and a connecting ball head is provided at the end of the connecting member away from the base. The carrying member is provided with a connecting ball socket that cooperates with the connecting ball head.

[0020] In a second aspect, the present application further provides a chip packaging inspection device, including an inspection device and the carrying device described in any of the above embodiments.

[0021] Compared with the prior art, the beneficial effects of the present application are:

[0022] The present application provides a carrying device, which includes a base, a carrying member, a clamping member and an adjusting member. By rotatably connecting the carrying member to the base, the carrying member can rotate relative to the base, so that when inspecting the packaging of the chip, the inspector can conveniently and flexibly rotate the carrying member to adjust the orientation and angle of the chip on the carrying member, thereby facilitating the all-round observation and inspection of the packaging of the chip, and effectively improving the convenience and efficiency of chip packaging inspection.

[0023] By providing a clamping portion and a guiding portion perpendicular to the clamping portion on the side of the carrier away from the base, and slidably connecting the clamping member to the guiding portion, the clamping member can reciprocally slide along the guiding portion, thereby adjusting the distance between the clamping member and the clamping portion, and further adapting to the clamping requirements of chips of different specifications. At the same time, by providing a first adjusting screw hole on the clamping member in a direction perpendicular to the clamping portion and the guiding portion, and passing the adjusting member through the first adjusting screw hole and abutting against the guiding portion, when it is necessary to adjust the distance between the clamping member and the clamping portion, the inspector can loosen the adjusting member to separate the adjusting member from the guiding portion, so that the clamping member can slide along the guiding portion, and further the distance between the clamping member and the clamping portion can be adjusted to adapt to the clamping requirements of chips of different specifications. After the adjustment is completed, the inspector can tighten the adjusting member to make the adjusting member abut against the guiding portion, thereby fixing the relative position between the clamping member and the guiding portion, and further maintaining the distance between the clamping member and the clamping portion, ensuring the clamping stability of the chip. Brief Description of the Drawings

[0024] To more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present application, and thus should not be regarded as limiting the scope. For those of ordinary skill in the art, other related drawings can be obtained based on these drawings without creative efforts.

[0025] Figure 1 Shows a three-dimensional schematic of the carrier device in some embodiments of the present application Figure 1 ;

[0026] Figure 2 Shows a three-dimensional schematic of the carrier device in some embodiments of the present application Figure 2 ;

[0027] Figure 3 Shows an exploded view of the carrier device in some embodiments of the present application.

[0028] Main Element Symbol Description:

[0029] 100 - Carrier device; 110 - Base; 120 - Carrier; 121 - Clamping portion; 122 - Guiding portion; 130 - Clamping member; 131 - First adjusting screw hole; 140 - Adjusting member; 150 - Sliding member; 151 - Second adjusting screw hole; 160 - Connecting member; 170 - First rotating shaft; 180 - Second rotating shaft. Detailed Embodiments

[0030] Embodiments of the present application will be described in detail below. Examples of the embodiments are shown in the accompanying drawings, where the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application and should not be construed as a limitation of the present application.

[0031] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation of the present application.

[0032] In addition, the terms "first" and "second" are only used for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the number of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present application, "a plurality" means two or more unless otherwise specifically defined.

[0033] In the present application, unless otherwise clearly defined and limited, the terms "mounted", "connected", "coupled", "fixed", etc. should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral body; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the internal communication of two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0034] In the present application, unless otherwise clearly defined and limited, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on" the second feature may be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "under" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0035] As Figure 1As shown in the figure, an embodiment of the present application provides a carrying device 100. The carrying device 100 includes a base 110, a carrier 120, a clamping member 130, and an adjusting member 140.

[0036] Referring together to Figure 2 and Figure 3 , wherein the carrier 120 is rotatably connected to the base 110. On one side of the carrier 120 away from the base 110, a clamping portion 121 and a guiding portion 122 are provided. The guiding portion 122 is perpendicular to the clamping portion 121. The clamping member 130 is slidably connected to the guiding portion 122. The clamping member 130 is provided with a first adjusting screw hole 131 along a direction perpendicular to the clamping portion 121 and the guiding portion 122. The adjusting member 140 passes through the first adjusting screw hole 131 and abuts against the guiding portion 122.

[0037] In the carrying device 100 provided by the embodiment of the present application, by rotatably connecting the carrier 120 to the base 110, the carrier 120 can rotate relative to the base 110. Thus, when inspecting the encapsulation of the chip, the inspector can conveniently and flexibly rotate the carrier 120 to adjust the orientation and angle of the chip on the carrier 120, thereby facilitating the all-round observation and inspection of the chip encapsulation situation, effectively improving the convenience and efficiency of chip encapsulation inspection.

[0038] By providing the clamping portion 121 and the guiding portion 122 perpendicular to the clamping portion 121 on one side of the carrier 120 away from the base 110, and slidably connecting the clamping member 130 to the guiding portion 122, the clamping member 130 can reciprocally slide along the guiding portion 122, thereby adjusting the distance between the clamping member 130 and the clamping portion 121, and further adapting to the clamping requirements of chips of different specifications.

[0039] Meanwhile, by providing the first adjusting screw hole 131 in the clamping member 130 along a direction perpendicular to the clamping portion 121 and the guiding portion 122, and passing the adjusting member 140 through the first adjusting screw hole 131 and abutting it against the guiding portion 122, when it is necessary to adjust the distance between the clamping member 130 and the clamping portion 121, the inspector can loosen the adjusting member 140 to separate the adjusting member 140 from the guiding portion 122, so that the clamping member 130 can slide along the guiding portion 122, and further adjust the distance between the clamping member 130 and the clamping portion 121 to adapt to the clamping requirements of chips of different specifications. After the adjustment is completed, the inspector can tighten the adjusting member 140 to make the adjusting member 140 abut against the guiding portion 122, thereby fixing the relative position between the clamping member 130 and the guiding portion 122, and further maintaining the distance between the clamping member 130 and the clamping portion 121, ensuring the clamping stability of the chip.

[0040] Exemplarily, the adjusting member 140 can be an adjusting bolt.

[0041] As Figure 1 and Figure 3 shown, in an embodiment of the present application, the carrying device 100 further includes a sliding member 150, the guiding portion 122 is a guiding groove, and the clamping member 130 is slidably connected to the guiding groove through the sliding member 150.

[0042] In this embodiment, the guiding portion 122 is a guiding groove, and the clamping member 130 is slidably connected to the guiding groove through the sliding member 150. In this way, the contact area between the clamping member 130 and the guiding portion 122 can be effectively reduced, thereby reducing the friction force between the clamping member 130 and the guiding portion 122, and further improving the sliding smoothness and stability between the clamping member 130 and the guiding portion 122, and reducing the probability of jamming of the clamping member 130 during the sliding process.

[0043] Exemplarily, the sliding member 150 can be a slider.

[0044] As Figure 1 and Figure 3 shown, in the above embodiment of the present application, the sliding member 150 is provided with a second adjusting screw hole 151 along a direction perpendicular to the clamping portion 121 and the guiding groove, and the adjusting member 140 sequentially passes through the first adjusting screw hole 131 and the second adjusting screw hole 151 and abuts against the bottom wall of the guiding groove.

[0045] In this embodiment, by providing the second adjusting screw hole 151 on the sliding member 150 along a direction perpendicular to the clamping portion 121 and the guiding groove, and sequentially passing the adjusting member 140 through the first adjusting screw hole 131 and the second adjusting screw hole 151 and abutting against the bottom wall of the guiding groove, when it is necessary to adjust the distance between the clamping member 130 and the clamping portion 121, the inspector can loosen the adjusting member 140 to separate the adjusting member 140 from the bottom wall of the guiding groove, so that the clamping member 130 can slide along the guiding groove through the sliding member 150, and then the distance between the clamping member 130 and the clamping portion 121 can be adjusted to meet the clamping requirements of different specifications of chips. After the adjustment is completed, the inspector can tighten the adjusting member 140 to make the adjusting member 140 abut against the bottom wall of the guiding groove, thereby fixing the relative position between the clamping member 130 and the guiding groove, and further maintaining the distance between the clamping member 130 and the clamping portion 121, ensuring the clamping stability of the chip.

[0046] In an embodiment of the present application, the guiding portion 122 is a guiding protrusion, the clamping member 130 is provided with a sliding groove adapted to the guiding protrusion, the clamping member 130 is slidably connected to the guiding protrusion through the sliding groove, and the adjusting member 140 passes through the first adjusting screw hole 131 and abuts against the guiding protrusion.

[0047] In this embodiment, the guiding portion 122 is a guiding protrusion. By providing a sliding groove adapted to the guiding protrusion on the clamping member 130, and the clamping member 130 is slidably connected to the guiding protrusion through the sliding groove, the contact area between the clamping member 130 and the guiding portion 122 can be effectively reduced, thereby reducing the frictional force between the clamping member 130 and the guiding portion 122, and further improving the sliding smoothness and stability between the clamping member 130 and the guiding portion 122, and reducing the probability of jamming of the clamping member 130 during sliding.

[0048] By passing the adjusting member 140 through the first adjusting screw hole 131 and abutting against the guiding protrusion, when it is necessary to adjust the distance between the clamping member 130 and the clamping portion 121, the inspector can loosen the adjusting member 140 to separate the adjusting member 140 from the guiding protrusion, so that the clamping member 130 can slide along the guiding protrusion through the sliding groove, and then the distance between the clamping member 130 and the clamping portion 121 can be adjusted to meet the clamping requirements of different specifications of chips. After the adjustment is completed, the inspector can tighten the adjusting member 140 to abut the adjusting member 140 against the guiding protrusion, thereby fixing the relative position between the clamping member 130 and the guiding protrusion, and further maintaining the distance between the clamping member 130 and the clamping portion 121, ensuring the clamping stability of the chip.

[0049] As Figure 1 and Figure 3 shown, in an embodiment of the present application, two guiding portions 122 and two adjusting members 140 are provided, and the two guiding portions 122 and the two adjusting members 140 are spaced apart along a direction parallel to the clamping portion 121.

[0050] In this embodiment, by setting the number of the guiding portion 122 and the adjusting member 140 to two each, and spacing the two guiding portions 122 and the two adjusting members 140 apart along a direction parallel to the clamping portion 121, the sliding smoothness and stability between the clamping member 130 and the guiding portion 122 can be further improved, the probability of jamming of the clamping member 130 during sliding can be further reduced, and the clamping stability of the chip can be further improved.

[0051] As Figure 1 、 Figure 2 and Figure 3 shown, in any of the above embodiments of the present application, the carrying device 100 further includes a connecting member 160, and the connecting member 160 is rotatably connected to the base 110 and the carrying member 120 respectively.

[0052] In this embodiment, by rotatably connecting the connecting member 160 to the base 110 and the carrier 120 respectively, the carrier 120 can rotate relative to the connecting member 160, and the connecting member 160 can rotate relative to the base 110, so that the carrier 120 can rotate relative to the base 110. Furthermore, the inspector can conveniently and flexibly rotate the carrier 120 to adjust the orientation and angle of the chip on the carrier 120, so as to facilitate the all-round observation and inspection of the chip packaging situation.

[0053] As Figure 1 , Figure 2 and Figure 3 shown, in the above-mentioned embodiment of the present application, the carrying device 100 further includes a first rotating shaft 170 and a second rotating shaft 180. One end of the connecting member 160 is rotatably connected to the base 110 through the first rotating shaft 170, and the end of the connecting member 160 far from the base 110 is rotatably connected to the carrier 120 through the second rotating shaft 180.

[0054] In this embodiment, one end of the connecting member 160 is rotatably connected to the base 110 through the first rotating shaft 170, so that one end of the connecting member 160 is hinged to the base 110 through the first rotating shaft 170. The end of the connecting member 160 far from the base 110 is rotatably connected to the carrier 120 through the second rotating shaft 180, so that the end of the connecting member 160 far from the base 110 is hinged to the carrier 120 through the second rotating shaft 180, thereby realizing the function of the carrier 120 rotating relative to the base 110.

[0055] It should be noted that there can be a clearance fit between the first rotating shaft 170 and the base 110 and the connecting member 160, as well as between the second rotating shaft 180 and the connecting member 160 and the carrier 120. In this way, there is a certain adjustment torque between the first rotating shaft 170 and the base 110 and the connecting member 160, as well as between the second rotating shaft 180 and the connecting member 160. Thus, after the inspector manually adjusts the carrier 120 to a suitable angle, the carrier 120 can maintain this angle and will not rotate or shake randomly, which is convenient for the inspector to observe and inspect the chip packaging situation under the microscope.

[0056] In any of the above embodiments of the present application, the carrying device 100 further includes a connecting member. One end of the connecting member is connected to the base 110, and a connecting ball socket is provided at the end of the connecting member far from the base 110. The carrier 120 is provided with a connecting ball head that cooperates with the connecting ball socket.

[0057] In this embodiment, one end of the connecting member is connected to the base 110, a connecting ball socket is formed at the end of the connecting member away from the base 110, and a connecting ball head matching the connecting ball socket is arranged on the bearing member 120, so that the bearing member 120 can rotate relative to the base 110 in any direction under the cooperation of the connecting ball head and the connecting ball socket, effectively expanding the angle adjustment range of the bearing member 120, thereby facilitating the all-round observation and inspection of the chip packaging situation.

[0058] It should be noted that the connecting ball head and the connecting ball socket can be in a transition fit, so that there is a certain adjustment torque between the bearing member 120 and the connecting member. Thus, after the inspector manually adjusts the bearing member 120 to a suitable angle, the bearing member 120 can maintain this angle and will not rotate or shake randomly, which is convenient for the inspector to observe and inspect the chip packaging situation under the microscope.

[0059] In any of the above embodiments of the present application, the carrying device 100 further includes a connecting member, one end of the connecting member is connected to the base 110, a connecting ball head is arranged at the end of the connecting member away from the base 110, and the bearing member 120 is provided with a connecting ball socket matching the connecting ball head.

[0060] In this embodiment, one end of the connecting member is connected to the base 110, a connecting ball head is arranged at the end of the connecting member away from the base 110, and a connecting ball socket matching the connecting ball head is formed on the bearing member 120, so that the bearing member 120 can rotate relative to the base 110 in any direction under the cooperation of the connecting ball socket and the connecting ball head, effectively expanding the angle adjustment range of the bearing member 120, thereby facilitating the all-round observation and inspection of the chip packaging situation.

[0061] It should be noted that the connecting ball socket and the connecting ball head can be in a transition fit, so that there is a certain adjustment torque between the bearing member 120 and the connecting member. Thus, after the inspector manually adjusts the bearing member 120 to a suitable angle, the bearing member 120 can maintain this angle and will not rotate or shake randomly, which is convenient for the inspector to observe and inspect the chip packaging situation under the microscope.

[0062] The embodiment of the present application further provides a chip packaging inspection device, including an inspection device and the carrying device 100 in the above embodiments. Among them, the inspection device can be a microscope.

[0063] This chip packaging inspection device has the carrying device 100 in any of the above embodiments, so it has all the beneficial effects of the carrying device 100, which will not be elaborated here one by one.

[0064] In the description of this specification, the description referring to terms such as "one embodiment", "some embodiments", "examples", "specific examples", or "some examples", etc. means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of this application. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0065] Although the embodiments of this application have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limitations on this application. Those of ordinary skill in the art can make changes, modifications, substitutions, and variations to the above embodiments within the scope of this application.

Claims

1. A carrying device, characterized in that: include: Base; A bearing member is rotatably connected to the base, and a clamping portion and a guide portion are provided on a side of the bearing member away from the base, wherein the guide portion is perpendicular to the clamping portion; A clamping member is slidably connected to the guide portion, and the clamping member is provided with a first adjusting screw hole in a direction perpendicular to the clamping portion and the guide portion; An adjusting member is inserted into the first adjusting screw hole and abuts against the guide portion.

2. The carrying device according to claim 1, characterized in that: The bearing device further comprises a sliding member, the guiding portion is a guiding groove, and the clamping member is slidably connected to the guiding groove via the sliding member.

3. The carrying device according to claim 2, characterized in that: The sliding member is provided with a second adjusting screw hole in a direction perpendicular to the clamping portion and the guide groove. The adjusting member is sequentially inserted into the first adjusting screw hole and the second adjusting screw hole and abuts against the bottom wall of the guide groove.

4. The carrying device according to claim 1, characterized in that: The guide portion is a guide protrusion, the clamping member is provided with a slide groove matched with the guide protrusion, the clamping member is slidably connected with the guide protrusion through the slide groove, and the adjusting member is penetrated through the first adjusting screw hole and abuts against the guide protrusion.

5. The carrying device according to claim 1, characterized in that: The guide parts and the adjusting parts are both provided with two, and the two guide parts and the two adjusting parts are both arranged at intervals along a direction parallel to the clamping part.

6. The carrying device according to any one of claims 1 to 5, characterized in that: The bearing device further comprises a connecting member, and the connecting member is rotatably connected to the base and the bearing member respectively.

7. The carrying device according to claim 6, characterized in that: The bearing device further comprises a first rotating shaft and a second rotating shaft, one end of the connecting member is rotatably connected to the base via the first rotating shaft, and one end of the connecting member away from the base is rotatably connected to the bearing member via the second rotating shaft.

8. The carrying device according to any one of claims 1 to 5, characterized in that: The bearing device also includes a connecting member, one end of which is connected to the base, an end of the connecting member away from the base is provided with a connecting ball socket, and the bearing member is provided with a connecting ball head matched with the connecting ball socket.

9. The carrying device according to any one of claims 1 to 5, characterized in that: The bearing device also includes a connecting member, one end of which is connected to the base, an end of the connecting member away from the base is provided with a connecting ball head, and the bearing member is provided with a connecting ball socket matched with the connecting ball head.

10. A chip packaging inspection device, characterized in that: The invention comprises an inspection device and the carrying device according to any one of claims 1 to 9.

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