Ion source operation temperature adjusting mechanism

Abstract

The utility model provides an ion source operation temperature adjusting mechanism, which comprises a bearing heat conduction assembly, a switching circulation assembly, a support assembly assembly, a switching conductive assembly, a conductive connection and leading assembly and an insulation isolation assembly, and is characterized in that the conductive connection and leading assembly of the ion source operation temperature adjusting mechanism is connected with power supply equipment through a conductive clamping block; power supply equipment can supply power to the conductive core column through the conductive clamping block, the power supply reliability is guaranteed, the connection mode of the power supply cable can be adjusted according to needs, heat on the bearing seat block and the switching conductive assembly can be rapidly taken away through the cooling liquid containing space in the bearing heat conduction assembly and the switching circulation assembly, and the cooling efficiency is improved. The ion source is ensured to operate in a stable low-temperature environment, the working efficiency and stability of the ion source are improved, the supporting assembly component and the insulating isolation component are both made of insulating materials, the electric connection among the bearing heat conduction component, the ion source rack and the external environment is effectively isolated, and the operation safety and the equipment reliability are ensured.

Description

Technical Field

[0001] The utility model relates to ion implantation equipment, in particular to a temperature regulating mechanism for the operation of an ion source. Background Art

[0002] Patent document CN219575557U discloses an ion source, which includes a filament assembly. The filament assembly is composed of a filament clamp, a filament, a heat-resistant bolt and a filament energy supply rod. The main function of the filament assembly is to generate an original electron source under the action of a filament power supply, so as to bombard the cathode assembly. The main material of the filament is high-temperature-resistant tungsten. The heat-resistant bolt fixes a pair of filament clamps to the outside of the cathode insulator. The filament is connected to the filament clamp, and corresponding energy is applied to the filament through the filament energy supply rod to complete filament heating and generate electrons. However, a temperature regulating mechanism is not provided at the power supply part of this ion source, so that it is prone to overheating after long-term operation, affecting the temperature distribution of the entire ion source and reducing the operation performance of the ion source. Therefore, it is necessary to optimize the structure of this ion source to overcome the above defects. Content of the Utility Model

[0003] The purpose of the utility model is to provide a temperature regulating mechanism for the operation of an ion source to improve the operation stability of the ion source.

[0004] The technical solution adopted by the utility model to solve its technical problems is:

[0005] A temperature regulating mechanism for the operation of an ion source, which includes:

[0006] A load-bearing heat conduction component, which is made of a heat-conducting material and has a coolant accommodation space inside;

[0007] A transfer and circulation component, which is installed on the load-bearing heat conduction component, communicates with the coolant accommodation space and is connected to a coolant supply device. The coolant supply device supplies coolant to the coolant accommodation space to cool the load-bearing heat conduction component;

[0008] A support and assembly component, which is made of an insulating material, is installed in the ion source frame through a connecting piece and is joined to the load-bearing heat conduction component. The support and assembly component supports the load-bearing heat conduction component and insulates between the load-bearing heat conduction component and the ion source frame;

[0009] A transfer and conductive component, which is made of a conductive material, is installed in the load-bearing heat conduction component and the support and assembly component and is joined to the power supply end of the ion source to supply power to the power supply end of the ion source. The load-bearing heat conduction component cools the transfer and conductive component;

[0010] A conductive connecting component is installed on the transfer conductive component and is connected to the power supply device through a line. The power supply device can supply power to the transfer conductive component through the conductive connecting component;

[0011] The insulating isolation component is installed between the conductive connecting component and the load-bearing heat-conducting component, and can perform insulation isolation between the conductive connecting component and the load-bearing heat-conducting component.

[0012] Specifically, the load-bearing heat-conducting component includes:

[0013] The bearing seat block is made of a copper block, a mounting opening penetrating through both ends is opened in the middle thereof, a heat conducting coil is arranged inside the bearing seat block, transfer ports are respectively opened at both ends of the bearing seat block, and each transfer port is respectively connected to the heat conducting coil.

[0014] The transfer flow components include:

[0015] A pair of adapter end pipes are provided, the inner ends of each adapter end pipe are respectively screwed into the adapter port through threads, so that the heat transfer coil is connected with the adapter end pipe, and the outer ends thereof extend to the outside of the bearing seat block and are engaged with the guide hose. The adapter end pipe is connected with the coolant supply device through the guide hose, and the coolant supply device circulates and supplies coolant into the heat transfer coil through the guide hose and the adapter end pipe to cool the bearing seat block;

[0016] A locking end cap is provided with a pair of locking end caps, each locking end cap is screwed onto the adapter end pipe through a thread and is adapted to the shape of the diversion hose. The locking end cap locks the joint between the diversion hose and the adapter end pipe.

[0017] The support assembly components include:

[0018] The support pad is made of alumina ceramics, is installed in the ion source frame through connecting bolts, and is engaged with the bottom of the bearing seat block. The support pad supports the bearing seat block and insulates the bearing seat block from the ion source frame.

[0019] The transfer conductive components include:

[0020] The conductive core column is made of a cylindrical copper column and installed in the supporting pad. The inner end of the conductive core column is provided with a wiring flat plate, which is connected to the power supply end of the ion source through a connecting bolt to supply power to the power supply end of the ion source. The outer end of the conductive core column passes through the assembly opening of the supporting seat block, and the conductive core column is cooled by the supporting seat block.

[0021] The conductive connection assembly includes:

[0022] A conductive clamp block is made of a copper block, a clamping opening running through both ends is provided in the middle thereof, the outer end of the conductive core column extends into the clamping opening, an adjustment slot and a locking bolt hole are provided at the locking end of the conductive clamp block, and the connecting end is connected with the power supply equipment through a power supply cable, the adjustment slot is connected with the clamping opening, the locking bolt hole runs through both ends of the conductive clamp block and is connected with the adjustment slot, a locking bolt can be screwed into the locking bolt hole to adjust the width of the adjustment slot so that the conductive clamp block can be locked or loosened on the conductive core column, and the power supply equipment can supply power to the conductive core column through the conductive clamp block.

[0023] The insulation isolation components include:

[0024] Isolation end blocks, which are provided with a group, each isolation end block is made of alumina ceramics and is screwed to the top of the bearing seat block through threads, and the top thereof protrudes above the bearing seat block and abuts against the bottom of the conductive clamping block, and the isolation end blocks isolate the conductive clamping block from the bearing seat block;

[0025] The isolation cover is made of alumina ceramics and covers the outer wall of the conductive clamp to isolate the conductive clamp.

[0026] The advantages of the utility model are:

[0027] The conductive connection component of the ion source operating temperature adjustment mechanism is connected to the power supply equipment through the conductive clamp block. The power supply equipment can supply power to the conductive core column through the conductive clamp block, which not only ensures the reliability of power supply, but also has certain flexibility. The connection method of the power supply cable can be adjusted as needed. The coolant accommodating space inside the bearing heat-conducting component and the adapter circulation component can realize effective circulation of the coolant, which can quickly take away the heat on the bearing seat block and the adapter conductive component, ensure that the ion source operates in a stable low-temperature environment, and improve the working efficiency and stability of the ion source. The supporting assembly component and the insulating isolation component are both made of insulating materials, which effectively isolate the electrical connection between the bearing heat-conducting component and the ion source frame and the external environment, ensuring the safety of operation and the reliability of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a structural schematic diagram of the ion source operating temperature regulating mechanism proposed by the utility model;

[0029] Figure 2 Here is an exploded view of the agency. DETAILED DESCRIPTION

[0030] To make the objectives, technical solutions, and advantages of the embodiments of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Apparently, the described embodiments are some, but not all, of the embodiments of the present utility model. The components of the embodiments of the present utility model usually described and illustrated in the accompanying drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present utility model provided in the accompanying drawings is not intended to limit the scope of the present utility model claimed, but merely represents selected embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts fall within the scope of protection of the present utility model.

[0031] As Figure 1 , Figure 2 shown, the ion source operating temperature adjustment mechanism proposed by the present utility model includes a load-bearing heat-conducting component, a transfer and circulation component, a support and assembly component, a transfer and conductive component, a conductive connection component, and an insulation and isolation component. The load-bearing heat-conducting component is made of a heat-conducting material and has a coolant accommodation space inside. The transfer and circulation component is installed on the load-bearing heat-conducting component, communicates with the coolant accommodation space, and communicates with a coolant supply device. The coolant supply device supplies coolant to the coolant accommodation space to cool the load-bearing heat-conducting component. The support and assembly component is made of an insulating material, is installed in the ion source frame through a connecting member, and engages with the load-bearing heat-conducting component. The support and assembly component supports the load-bearing heat-conducting component and insulates between the load-bearing heat-conducting component and the ion source frame. The transfer and conductive component is made of a conductive material, is installed in the load-bearing heat-conducting component and the support and assembly component, and engages with the power supply end of the ion source to supply power to the power supply end of the ion source. The load-bearing heat-conducting component cools the transfer and conductive component. The conductive connection component is installed on the transfer and conductive component and communicates with a power supply device through a circuit. The power supply device can supply power to the transfer and conductive component through the conductive connection component. The insulation and isolation component is installed between the conductive connection component and the load-bearing heat-conducting component to insulate and isolate between the conductive connection component and the load-bearing heat-conducting component.

[0032] In this embodiment, the load-bearing heat-conducting component includes a load-bearing seat block 100. The load-bearing seat block is made of a copper block, has an assembly through-hole penetrating both ends in the middle, and has a heat-conducting coil inside. Transfer ports 110 are respectively opened at both ends of the load-bearing seat block, and each transfer port communicates with the heat-conducting coil.

[0033] The adapter circulation component includes an adapter end tube 210 and a locking end cover 220. A pair of adapter end tubes are provided. The inner end of each adapter end tube is screwed into the adapter port through a thread to connect the heat transfer coil with the adapter end tube. The outer end thereof extends to the outside of the support seat block and is connected with the flow guide hose. The adapter end tube is connected with the coolant supply device through the flow guide hose. The coolant supply device circulates and supplies coolant to the heat transfer coil through the flow guide hose and the adapter end tube to cool the support seat block. A pair of locking end covers are provided. Each locking end cover is screwed onto the adapter end tube through a thread and is adapted to the shape of the flow guide hose. The locking end cover locks the joint between the flow guide hose and the adapter end tube.

[0034] The support assembly component includes a support pad 300, which is made of alumina ceramics and is installed in the ion source frame through connecting bolts and engaged with the bottom of the bearing seat block. The support pad supports the bearing seat block and insulates the bearing seat block from the ion source frame.

[0035] The transfer conductive component includes a conductive core column 400, which is made of a cylindrical copper column and installed in a supporting pad. A wiring flat plate 410 is provided at the inner end thereof. The wiring flat plate is connected to the power supply end of the ion source through a connecting bolt and can supply power to the power supply end of the ion source. The outer end thereof passes through the assembly opening of the supporting seat block, and the conductive core column is cooled by the supporting seat block.

[0036] The conductive connection assembly includes a conductive clamp 500, which is made of a copper block, and has a clamping opening 510 running through both ends in the middle thereof, the outer end of the conductive core column extends into the clamping opening, and an adjustment slot 520 and a locking bolt hole 530 are provided at the locking end of the conductive clamp. The connection end is connected to the power supply equipment through a power supply cable, and the adjustment slot is connected to the clamping opening. The locking bolt hole runs through both ends of the conductive clamp and is connected to the adjustment slot. A locking bolt can be screwed into the locking bolt hole to adjust the width of the adjustment slot so that the conductive clamp can be locked or loosened on the conductive core column, and the power supply equipment can supply power to the conductive core column through the conductive clamp.

[0037] The insulating isolation component includes an isolation end block 610 and an isolation cover shell 620. A group of isolation end blocks are provided. Each isolation end block is made of alumina ceramics and is screwed to the top of the supporting seat block through a thread. The top thereof protrudes above the supporting seat block and abuts against the bottom of the conductive clamp block. The isolation end block isolates the conductive clamp block from the supporting seat block. The isolation cover shell is made of alumina ceramics and covers the outer wall of the conductive clamp block to isolate the conductive clamp block.

[0038] In the description of the present utility model, it should be noted that when terms indicating orientation or positional relationship such as "upper", "lower", "inner", "outer", "left", "right", etc. appear, they should be understood as based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of the present utility model is customarily placed during use, or the orientation or positional relationship commonly understood by those skilled in the art. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be construed as a limitation on the present utility model. In addition, when terms such as "first" and "second" appear, they are only used for distinguishing descriptions and cannot be understood as indicating or implying relative importance. In the description of the present utility model, it should also be noted that unless otherwise clearly specified and defined, terms such as "installation", "setting", "connection", etc. should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

Claims

1. An ion source operating temperature adjustment mechanism, characterized in that: include: A load-bearing heat-conducting component, which is made of a heat-conducting material and has a cooling liquid accommodating space inside; A transfer circulation component is installed on the load-bearing heat-conducting component, is communicated with the cooling liquid containing space, and is communicated with the cooling liquid supply device, and the cooling liquid supply device supplies cooling liquid to the cooling liquid containing space to cool the load-bearing heat-conducting component; A support assembly component, which is made of insulating material, is installed in the ion source frame through a connector and is connected to the load-bearing heat-conducting component. The support assembly component supports the load-bearing heat-conducting component and insulates the load-bearing heat-conducting component from the ion source frame; A transfer conductive component, which is made of conductive material, is installed in the load-bearing heat-conducting component and the supporting assembly component, and is connected to the power supply end of the ion source, and can supply power to the power supply end of the ion source, and the load-bearing heat-conducting component cools the transfer conductive component; A conductive connecting component is installed on the transfer conductive component and is connected to the power supply device through a line. The power supply device can supply power to the transfer conductive component through the conductive connecting component; The insulating isolation component is installed between the conductive connecting component and the load-bearing heat-conducting component, and can perform insulation isolation between the conductive connecting component and the load-bearing heat-conducting component.

2. An ion source operating temperature adjustment mechanism according to claim 1, characterized in that: The load-bearing heat-conducting components include: The bearing seat block is made of a copper block, a mounting opening penetrating through both ends is opened in the middle thereof, a heat conducting coil is arranged inside the bearing seat block, transfer ports are respectively opened at both ends of the bearing seat block, and each transfer port is respectively connected to the heat conducting coil.

3. An ion source operating temperature adjustment mechanism according to claim 2, characterized in that: The transfer flow components include: A pair of adapter end pipes are provided, the inner ends of each adapter end pipe are respectively screwed into the adapter port through threads, so that the heat transfer coil is connected with the adapter end pipe, and the outer ends thereof extend to the outside of the bearing seat block and are connected with the guide hose, and the adapter end pipe is connected with the coolant supply device through the guide hose; A locking end cap is provided with a pair, each locking end cap is screwed onto the adapter end pipe through a thread and is adapted to the shape of the diversion hose.

4. The ion source operating temperature regulating mechanism according to claim 2, characterized in that: The support assembly components include: The support pad is made of alumina ceramics, is installed in the ion source frame through connecting bolts, and is connected to the bottom of the bearing seat block.

5. An ion source operating temperature regulating mechanism according to claim 4, characterized in that: The transfer conductive components include: The conductive core column is made of a cylindrical copper column and installed in the support pad. The inner end of the conductive core column is provided with a wiring flat plate, which is connected to the power supply end of the ion source through a connecting bolt, and the outer end of the conductive core column passes through the assembly opening of the bearing seat block.

6. The ion source operating temperature regulating mechanism according to claim 5, characterized in that: The conductive connection assembly includes: A conductive clamp block is made of a copper block, with a clamping opening running through both ends in the middle, the outer end of the conductive core column extends into the clamping opening, an adjustment slot and a locking bolt hole are provided at the locking end of the conductive clamp block, and the connecting end is connected to the power supply equipment through a power supply cable, the adjustment slot is connected to the clamping opening, the locking bolt hole runs through both ends of the conductive clamp block and is connected to the adjustment slot, and a locking bolt can be screwed into the locking bolt hole.

7. An ion source operating temperature regulating mechanism according to claim 6, characterized in that: The insulation isolation components include: Isolation end blocks, which are provided in a group, are made of alumina ceramics and are screwed to the top of the bearing seat block through threads, and the top of the isolation end block protrudes above the bearing seat block and abuts against the bottom of the conductive clamp block; The isolation cover is made of alumina ceramics and covers the outer wall of the conductive clamping block.

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