Assembled wafer bearing box

Abstract

The utility model discloses an assembly type wafer bearing box which comprises two supporting plates and two slot plates symmetrically arranged between the two supporting plates, a plurality of wafer slots are formed in the inner side surfaces of the slot plates, two column slots are formed in the upper surface and the lower surface of each slot plate respectively, and the upper surface and the lower surface of each slot plate are respectively provided with a groove. Four inserting columns corresponding to the column grooves are fixed to the surface of the supporting plate, and the inserting columns are inserted into the column grooves. The inserting structure is arranged between the slot plate and the inserting column and comprises a T-shaped slot formed in the outer side surface of the slot plate and an inserting hole formed in the surface of the inserting column; according to the utility model, the wafer bearing box in the prior art is improved and optimized, and the structures such as the insertion columns, the column grooves and the insertion structures are designed between the supporting plate and the slot plate, so that the supporting plate and the slot plate can be quickly assembled together, the assembling convenience of the whole wafer bearing box is improved, and meanwhile, the wafer bearing box has good stability after being assembled; and splitting of the wafer bearing box after subsequent use is also facilitated.

Description

Technical Field

[0001] The utility model belongs to the technical field of wafer carrier boxes, and particularly relates to an assembled wafer carrier box. Background Technique

[0002] The wafer carrier box mainly plays the role of placing and transporting wafers in semiconductor production. In order to simplify transportation and minimize the risk of contamination as much as possible, chip manufacturers use wafer carrier boxes to carry and store wafers. For example, in the existing patent with the publication number CN209401599U, "a wafer carrier box, in which first slots for carrying wafers are arranged on the inner sides of the left and right side plates of the wafer carrier box. When the wafer carrier box is placed horizontally, the first slots form a certain angle θ with the horizontal direction, so that the carried wafers are inclined upward on one side of the mouth of the wafer carrier box", it can be seen that what is described in this application is exactly a common wafer carrier box;

[0003] In actual use, in this kind of wafer carrier box in the prior art, the upper and lower support plates and the slot plates on both sides are mostly fixed together by a large number of screws, resulting in low assembly convenience of the entire wafer carrier box and inability to quickly disassemble or assemble the wafer carrier box during actual use. For this reason, the present utility model proposes an assembled wafer carrier box. Summary of the Utility Model

[0004] The purpose of the present utility model is to provide an assembled wafer carrier box to solve the problems raised in the above background technique.

[0005] To achieve the above purpose, the present utility model provides the following technical solution: an assembled wafer carrier box, including

[0006] two support plates and two slot plates symmetrically arranged between the two support plates. A plurality of wafer slots are opened on the inner surface of the slot plates, and two column slots are opened on both the upper and lower surfaces of the slot plates. Four insertion columns corresponding to the column slots are fixed on the surface of the support plates, and the insertion columns are inserted into the column slots;

[0007] and a plugging structure arranged between the slot plates and the insertion columns, including a T-shaped slot opened on the outer surface of the slot plates, a jack opened on the surface of the insertion columns, a T-shaped plug inserted into the T-shaped slot and the jack, and a limiting baffle slidably arranged on the outer surface of the slot plates and covering the T-shaped slot.

[0008] Preferably, the plugging structure further includes a T-shaped sliding groove opened on the outer surface of the slot plates and a T-shaped sliding block slidably arranged in the T-shaped sliding groove. One end of the T-shaped sliding block extends to the outer surface of the slot plates and is fixed to the limiting baffle.

[0009] Preferably, a rectangular strip is fixed on the surface of the limiting baffle.

[0010] Preferably, the plugging structure further includes an inner groove formed inside the T-shaped plug, a spring and a semi-circular telescopic clamping block installed in the inner groove, and a limit clamping hole formed on the surface of the limit baffle and corresponding to the semi-circular telescopic clamping block. The semi-circular telescopic clamping block is movably installed in the inner groove through the spring, and the end of the semi-circular telescopic clamping block pops out into the limit clamping hole.

[0011] Preferably, one end of the spring is fixed to the inner wall of the inner groove, and the other end of the spring is fixed to the semi-circular telescopic clamping block.

[0012] It further includes a positioning structure, and the positioning structure is arranged in the column groove. The positioning structure includes a rubber side pad embedded in one inner wall of the column groove. The surface of the rubber side pad is provided with arc-shaped protrusions, and the arc-shaped protrusions are embedded into the jacks. The rubber side pad and the arc-shaped protrusions are of an integral structure, and a rectangular cavity is formed inside the rubber side pad.

[0013] Compared with the prior art, the beneficial effects of the present utility model are as follows: By improving and optimizing the wafer carrier box in the prior art, the present utility model designs structures such as plug posts, column grooves and plugging structures between the tray and the slot plate, so that the tray and the slot plate can be quickly assembled together, improving the assembly convenience of the entire wafer carrier box. At the same time, after assembly, it has good stability and also facilitates the disassembly of the wafer carrier box after subsequent use. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 is a schematic structural diagram of the present utility model;

[0015] Figure 2 is of the present utility model Figure 1 partial enlarged view of area A therein;

[0016] Figure 3 is a cross-sectional view of the connection between the slot plate and the tray of the present utility model;

[0017] In the figure: 1, tray; 11, plug post; 2, slot plate; 21, wafer groove; 22, column groove; 221, rubber side pad; 222, arc-shaped protrusion; 3, plugging structure; 31, limit baffle; 32, semi-circular telescopic clamping block; 33, limit clamping hole; 34, T-shaped plug; 35, jack; 36, T-shaped slot; 37, inner groove; 38, spring; 39, T-shaped slider; 310, T-shaped chute. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0018] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0019] Embodiment 1

[0020] Please refer to Figures 1 to 3 , which is the first embodiment of the present invention. This embodiment provides a technical solution: an assembled wafer carrier box, including

[0021] Two pallet boards 1 and two slot boards 2 symmetrically arranged between the two pallet boards 1. A plurality of wafer slots 21 are opened on the inner surface of the slot board 2 for the subsequent insertion of wafers. Two column slots 22 are opened on both the upper and lower surfaces of the slot board 2. Four insertion posts 11 corresponding to the column slots 22 are fixedly welded on the surface of the pallet board 1, and the insertion posts 11 are inserted into the column slots 22;

[0022] And a plugging structure 3 arranged between the slot board 2 and the insertion posts 11, including a T-shaped slot 36 opened on the outer surface of the slot board 2, a jack 35 opened on the surface of the insertion post 11, a T-shaped plug 34 inserted into the T-shaped slot 36 and the jack 35, and a limit baffle 31 slidably arranged on the outer surface of the slot board 2 and covering the T-shaped slot 36, realizing the rapid assembly between the pallet board 1 and the slot board 2.

[0023] Among them, the plugging structure 3 further includes a T-shaped sliding groove 310 opened on the outer surface of the slot board 2 and a T-shaped sliding block 39 slidably arranged in the T-shaped sliding groove 310. One end of the T-shaped sliding block 39 extends to the outer surface of the slot board 2 and is fixed to the limit baffle 31, so that the limit baffle 31 can slide smoothly on the outer surface of the slot board 2.

[0024] Among them, a rectangular strip is fixedly welded on the surface of the limit baffle 31, which is convenient for subsequent operators to push the limit baffle 31.

[0025] Among them, the plugging structure 3 further includes an inner groove 37 opened inside the T-shaped plug 34, a spring 38 and a semi-circular telescopic clamping block 32 installed in the inner groove 37, and a limit clamping hole 33 opened on the surface of the limit baffle 31 and corresponding to the semi-circular telescopic clamping block 32. The semi-circular telescopic clamping block 32 is movably installed in the inner groove 37 through the spring 38, and the end of the semi-circular telescopic clamping block 32 pops out into the limit clamping hole 33, realizing the clamping and limiting of the limit baffle 31, ensuring that the limit baffle 31 can stably block and limit the T-shaped plug 34 during daily use, and guaranteeing the overall stability of the wafer carrier box after assembly.

[0026] One end of the spring 38 is fixed to the inner wall of the inner groove 37, and the other end of the spring 38 is fixed to the semi-circular telescopic clamping block 32 to ensure the stable installation of the spring 38.

[0027] It further includes a positioning structure, and the positioning structure is arranged in the column groove 22. The positioning structure includes a rubber side pad 221 embedded in one inner wall of the column groove 22. An arc-shaped protrusion 222 is provided on the surface of the rubber side pad 221, and the arc-shaped protrusion 222 is embedded in the jack 35. After the plug post 11 is inserted into the column groove 22, the arc-shaped protrusion 222 will also be squeezed into the jack 35, realizing the auxiliary positioning of the slot board 2 and the support board 1, and facilitating the subsequent insertion operation of the T-shaped plug 34 by the operator.

[0028] Among them, the rubber side pad 221 and the arc-shaped protrusion 222 are of an integral structure, and both are made of rubber material and will undergo elastic deformation when being squeezed. A rectangular cavity is opened in the rubber side pad 221, so that the arc-shaped protrusion 222 has sufficient deformation space when being squeezed.

[0029] In summary, when assembling the wafer carrier box, only need to place the slot board 2 between the upper and lower support boards 1, insert the plug post 11 into the column groove 22, and make the arc-shaped protrusion 222 be squeezed into the jack 35 to play a certain auxiliary positioning role and prevent the support board 1 and the slot board 2 from being easily separated. At this time, insert the T-shaped plug 34 into the T-shaped slot 36, so that the inner end of the T-shaped plug 34 penetrates into the jack 35, while the outer end of the T-shaped plug 34 is located in the T-shaped slot 36. Then, push the limit baffle 31 forcefully, so that the limit baffle 31 covers the T-shaped slot 36 and plays a role of blocking and limiting the T-shaped plug 34, and make the end of the semi-circular telescopic clamping block 32 be stuck into the limit card hole 33 under the action of the spring 38, then the limit baffle 31 can be limited, ensuring the stable blocking of the limit baffle 31 on the T-shaped plug 34, and the assembly of the wafer carrier box can be quickly completed, and it is also convenient for the subsequent disassembly of the wafer carrier box.

[0030] Although the embodiments of the present invention have been shown and described (see the above detailed description), for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An assembled wafer carrier box, characterized in that: include Two support plates (1) and two slot plates (2) symmetrically arranged between the two support plates (1), the inner surface of the slot plate (2) being provided with a plurality of wafer slots (21), the upper and lower surfaces of the slot plate (2) being provided with two column slots (22), the surface of the support plate (1) being fixed with four plugging columns (11) corresponding to the column slots (22), and the plugging columns (11) being inserted into the column slots (22); And a plug-in structure (3) arranged between the slot plate (2) and the plug post (11), comprising a T-shaped slot (36) provided on the outer surface of the slot plate (2), a plug hole (35) provided on the surface of the plug post (11), a T-shaped plug block (34) inserted into the T-shaped slot (36) and the plug hole (35), and a limit baffle (31) slidably arranged on the outer surface of the slot plate (2) and covering the T-shaped slot (36).

2. The assembled wafer carrier according to claim 1, characterized in that: The plug-in structure (3) further comprises a T-shaped slide groove (310) provided on the outer surface of the slot plate (2) and a T-shaped slider (39) slidably arranged in the T-shaped slide groove (310), wherein one end of the T-shaped slider (39) extends to the outer surface of the slot plate (2) and is fixed to the limit baffle (31).

3. The assembled wafer carrier according to claim 1, characterized in that: A rectangular strip is fixed on the surface of the limit baffle (31).

4. The assembled wafer carrier according to claim 1, characterized in that: The plug-in structure (3) further comprises an inner groove (37) provided inside the T-shaped plug-in block (34), a spring (38) and a semicircular telescopic block (32) installed in the inner groove (37), and a limiting clamping hole (33) provided on the surface of the limiting baffle (31) and corresponding to the semicircular telescopic block (32); the semicircular telescopic block (32) is movably installed in the inner groove (37) by means of the spring (38), and an end of the semicircular telescopic block (32) pops out into the limiting clamping hole (33).

5. The assembled wafer carrier box according to claim 4, characterized in that: One end of the spring (38) is fixed to the inner wall of the inner groove (37), and the other end of the spring (38) is fixed to the semicircular telescopic block (32).

6. The assembled wafer carrier according to claim 1, characterized in that: It also includes a positioning structure, and the positioning structure is arranged in the column groove (22).

7. The assembled wafer carrier according to claim 6, characterized in that: The positioning structure comprises a rubber side pad (221) embedded in an inner wall of one side of the column slot (22), the surface of the rubber side pad (221) is provided with an arc-shaped protrusion (222), and the arc-shaped protrusion (222) is embedded in the insertion hole (35).

8. The assembled wafer carrier according to claim 7, characterized in that: The rubber side pad (221) and the arc-shaped protrusion (222) are an integrated structure, and a rectangular cavity is provided in the rubber side pad (221).

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