Wafer gap positioning structure for ion implanter

Abstract

The utility model discloses a wafer gap positioning structure for an ion implanter, which belongs to the technical field of ion implanters and comprises a base, a mounting seat is arranged at the top of the base, rotating rods are rotatably connected to the front side and the rear side of an inner cavity of the mounting seat, rotating seats are fixedly sleeved on the outer sides of the rotating rods, and the rotating seats are fixedly sleeved on the outer sides of the rotating rods. Connecting rods are rotatably connected to the top and the bottom of the front side of the rotating seat, moving plates are rotatably connected to the sides, away from each other, of the connecting rods, clamping plates are fixedly connected to the sides, away from each other, of the moving plates, and positioning rods are fixedly connected to the corresponding sides of the clamping plates; a first motor is fixedly mounted on the right side of the top of the inner cavity of the base. According to the utility model, the tray can be quickly replaced, wafers of different specifications can be processed, the use diversity of the device is improved, the device can be conveniently moved, the carrying by a worker is avoided, and the moving convenience of the device is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of ion implanters, in particular to a wafer notch positioning structure for an ion implanter. Background Technique

[0002] An ion implanter is a key device used in the doping process of semiconductor manufacturing. It uses a high-energy ion beam to implant impurity atoms into a wafer to change its electrical properties, so a positioning structure is required.

[0003] The existing device is not convenient for replacing the tray and can only process wafers of one specification, which has certain limitations in actual use. Moreover, it is not convenient to move the device, and it requires manual handling by staff, increasing the workload of the staff. Therefore, we propose a wafer notch positioning structure for an ion implanter to solve this problem. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a wafer notch positioning structure for an ion implanter to solve the problems raised in the above background technique.

[0005] To achieve the above purpose, the utility model adopts the following technical scheme:

[0006] A wafer notch positioning structure for an ion implanter, including a base. A mounting seat is arranged on the top of the base. The front and rear sides of the inner cavity of the mounting seat are rotatably connected with rotating rods. A rotating seat is fixedly sleeved on the outer side of the rotating rod. The top and bottom of the front side of the rotating seat are rotatably connected with connecting rods. The connecting rods are rotatably connected with moving plates on the far sides. The moving plates are fixedly connected with clamping plates on the far sides. Positioning rods are fixedly connected to the corresponding sides of the clamping plates. A first motor is fixedly installed on the right side of the top of the inner cavity of the base. The output end of the first motor is fixedly connected with a first runner. A lead screw is rotatably connected to the top of the inner cavity of the base. A second runner is fixedly sleeved on the top of the outer side of the lead screw. A cross plate is screwed on the bottom of the outer side of the lead screw. Moving wheels are fixedly installed at the four corners of the bottom of the cross plate.

[0007] Preferably, a tray is provided at the top of the mounting base. The bottom of the tray extends into the interior of the mounting base. The corresponding sides of the positioning rods all extend into the interior of the tray. Vertical plates are fixedly installed on the left and right sides of the top and bottom of the inner cavity of the mounting base. Limiting rods are fixedly connected to the sides of the vertical plates away from each other. The sides of the limiting rods away from each other are fixedly connected to the interior of the mounting base. The clamping plates are sleeved on the outer sides of the limiting rods. The outer side of the moving plate is in sliding contact with the inner cavity of the vertical plate. A push rod is fixedly connected to the left side of the left clamping plate. The left side of the push rod penetrates through the mounting base. A spring is fixedly connected to the side of the clamping plate away from each other. One side of the spring is fixedly connected to the inner wall of the mounting base. The spring is sleeved on the outer side of the limiting rod.

[0008] Preferably, a belt is drivingly connected to the outer sides of the first runner and the second runner. A bottom plate is fixedly installed in the inner cavity of the base. The top of the bottom plate is rotatably connected to the bottom of the lead screw. The bottom of the moving wheel movably penetrates through the bottom plate.

[0009] Preferably, a cushion block and an injection machine main body are respectively fixedly installed on the left and right sides of the top of the base. A cylinder is fixedly installed on the left side of the cushion block. The right side of the cylinder penetrates through the cushion block and is fixedly connected to a moving frame. A second motor is fixedly installed at the bottom of the inner cavity of the moving frame. The output end of the second motor penetrates through the moving frame and is fixedly connected to the bottom of the mounting base.

[0010] Preferably, cross bars are fixedly installed on the front and rear sides of the right side of the cushion block. The right sides of the cross bars movably penetrate through the moving frame and are fixedly connected to the left side of the injection machine main body.

[0011] Preferably, feet are fixedly installed at the four corners of the bottom of the base.

[0012] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0013] 1. In the present utility model, by pulling the push rod to move to the left, the push rod drives the left moving plate to move to the left through the left clamping plate. The left moving plate drives the left connecting rod to move to the left. The left connecting rod drives the right connecting rod to move to the right through the rotating seat. The right connecting rod drives the right clamping plate to move to the right through the right moving plate. The clamping plates on the left and right sides drive the positioning rods to move away from each other, and at the same time compress the spring, so that the positioning rods are away from the tray, and then the tray is removed upward, which can quickly replace the tray, can process wafers of different specifications, and improves the use diversity of the device.

[0014] 2. In the present utility model, by starting the first motor, the first motor drives the first runner to rotate. The first runner drives the second runner to rotate through a belt. The second runner drives the lead screw to rotate. The lead screw drives the moving wheel to move downward through the cross plate, so that the moving wheel contacts the ground, which facilitates the movement of the device, avoids the need for staff to carry it, and improves the mobility of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 FIG. is a three-dimensional structural schematic diagram of a wafer notch positioning structure for an ion implanter proposed by the present utility model;

[0016] Figure 2 FIG. is a sectional view of the base structure of a wafer notch positioning structure for an ion implanter proposed by the present utility model;

[0017] Figure 3 FIG. is a partial structural schematic diagram of a wafer notch positioning structure for an ion implanter proposed by the present utility model;

[0018] Figure 4 is Figure 3 a partial enlarged view of part A in

[0019] In the figure: 1, base; 2, moving frame; 3, mounting seat; 4, tray; 5, rotating rod; 6, rotating seat; 7, connecting rod; 8, moving plate; 9, clamping plate; 10, positioning rod; 11, vertical plate; 12, limiting rod; 13, spring; 14, first motor; 15, first runner; 16, lead screw; 17, second runner; 18, belt; 19, bottom plate; 20, cross plate; 21, moving wheel; 22, foot pad; 23, cushion block; 24, cylinder; 25, implanter main body; 26, cross bar; 27, push rod; 28, second motor. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0020] The following will clearly and completely describe the technical solutions in the embodiments of the present utility model with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments.

[0021] Refer to Figures 1-4, a wafer notch positioning structure for an ion implanter, comprising a base 1. A mounting seat 3 is arranged on the top of the base 1. Rotating rods 5 are rotatably connected to the front and rear sides of the inner cavity of the mounting seat 3. A rotating seat 6 is fixedly sleeved on the outer side of the rotating rod 5. Connecting rods 7 are rotatably connected to the top and bottom of the front side of the rotating seat 6. Moving plates 8 are rotatably connected to the sides of the connecting rods 7 far away from each other. Clamping plates 9 are fixedly connected to the sides of the moving plates 8 far away from each other. Positioning rods 10 are fixedly connected to the corresponding sides of the clamping plates 9. A first motor 14 is fixedly installed on the right side of the top of the inner cavity of the base 1. The output end of the first motor 14 is fixedly connected to a first runner 15. A lead screw 16 is rotatably connected to the top of the inner cavity of the base 1. A second runner 17 is fixedly sleeved on the top of the outer side of the lead screw 16. A cross plate 20 is screwed to the bottom of the outer side of the lead screw 16. Moving wheels 21 are fixedly installed at the four corners of the bottom of the cross plate 20.

[0022] In this embodiment, a tray 4 is arranged on the top of the mounting seat 3. The bottom of the tray 4 extends into the interior of the mounting seat 3. The corresponding sides of the positioning rods 10 all extend into the interior of the tray 4. Vertical plates 11 are fixedly installed on the left and right sides of the top and bottom of the inner cavity of the mounting seat 3. Limit rods 12 are fixedly connected to the sides of the vertical plates 11 far away from each other. The sides of the limit rods 12 far away from each other are fixedly connected to the interior of the mounting seat 3. The clamping plates 9 are sleeved on the outer sides of the limit rods 12. The outer sides of the moving plates 8 are in sliding contact with the inner cavities of the vertical plates 11. A push rod 27 is fixedly connected to the left side of the left clamping plate 9. The left side of the push rod 27 penetrates through the mounting seat 3. A spring 13 is fixedly connected to the side of the clamping plate 9 far away from each other. One side of the spring 13 is fixedly connected to the inner wall of the mounting seat 3. The spring 13 is sleeved on the outer side of the limit rod 12. A belt 18 is in transmission connection with the outer sides of the first runner 15 and the second runner 17. A bottom plate 19 is fixedly installed in the inner cavity of the base 1. The top of the bottom plate 19 is rotatably connected to the bottom of the lead screw 16. The bottoms of the moving wheels 21 movably penetrate through the bottom plate 19. Through the spring 13, the positioning rod 10 can be reset, improving the positioning effect of the positioning rod 10 on the tray 4.

[0023] In this embodiment, a cushion block 23 and an implanter main body 25 are respectively fixedly installed on the left and right sides of the top of the base 1. A cylinder 24 is fixedly installed on the left side of the cushion block 23. The right side of the cylinder 24 penetrates through the cushion block 23 and is fixedly connected to a moving frame 2. A second motor 28 is fixedly installed at the bottom of the inner cavity of the moving frame 2. The output end of the second motor 28 penetrates through the moving frame 2 and is fixedly connected to the bottom of the mounting seat 3. Cross bars 26 are fixedly installed on the front and rear sides of the right side of the cushion block 23. The right sides of the cross bars 26 movably penetrate through the moving frame 2 and are fixedly connected to the left side of the implanter main body 25. Foot pads 22 are fixedly installed at the four corners of the bottom of the base 1. Through the cross bars 26, the moving frame 2 can be limited, improving the stability of the left and right movement of the moving frame 2.

[0024] In this embodiment, during use, the wafer material is placed on the tray 4, and then the cylinder 24 is started through an external controller. The cylinder 24 drives the moving frame 2 to move to the right, enabling the tray 4 to enter the injection machine main body 25. Then, the second motor 28 is started through the external controller. The second motor 28 drives the tray 4 to rotate through the mounting seat 3, and the wafer material can be processed in sequence. When the tray 4 needs to be replaced, the push rod 27 is pulled to move to the left. The push rod 27 drives the left moving plate 8 to move to the left through the left clamping plate 9. The left moving plate 8 drives the left connecting rod 7 to move to the left. The left connecting rod 7 drives the right connecting rod 7 to move to the right through the rotating seat 6. The right connecting rod 7 drives the right clamping plate 9 to move to the right through the right moving plate 8. The clamping plates 9 on both the left and right sides drive the positioning rods 10 to move away from each other, and at the same time compress the spring 13, causing the positioning rods 10 to move away from the tray 4. Then, the tray 4 is removed upward, and the tray 4 can be replaced quickly. When the device needs to be moved, the first motor 14 is started through the external controller. The first motor 14 drives the first runner 15 to rotate. The first runner 15 drives the second runner 17 to rotate through the belt 18. The second runner 17 drives the lead screw 16 to rotate. The lead screw 16 drives the moving wheel 21 to move downward through the cross plate 20, making the moving wheel 21 contact the ground, which facilitates the movement of the device.

[0025] The above has introduced in detail a wafer notch positioning structure for an ion implanter provided by the present utility model. Specific embodiments are applied herein to elaborate on the principle and implementation manner of the present utility model. The description of the above embodiments is only used to help understand the method and its core idea of the present utility model. It should be noted that for those of ordinary skill in the art in this technical field, without departing from the principle of the present utility model, several improvements and modifications can still be made to the present utility model, and these improvements and modifications also fall within the protection scope of the claims of the present utility model.

Claims

1. A wafer notch positioning structure for an ion implanter, comprising a base (1), characterized in that: A mounting seat (3) is arranged at the top of the base (1), and a rotating rod (5) is rotatably connected to the front and rear sides of the inner cavity of the mounting seat (3), and a rotating seat (6) is arranged on the outer fixed sleeve of the rotating rod (5), and a connecting rod (7) is rotatably connected to the top and bottom of the front side of the rotating seat (6), and a moving plate (8) is rotatably connected to the side away from the connecting rod (7), and a clamping plate (9) is fixedly connected to the side opposite to the moving plate (8), and a clamping plate (9) is fixedly connected to the side opposite to the clamping plate (9). A positioning rod (10) is connected, a first motor (14) is fixedly installed on the right side of the top of the inner cavity of the base (1), the output end of the first motor (14) is fixedly connected to a first rotating wheel (15), the top of the inner cavity of the base (1) is rotatably connected to a screw rod (16), the top of the outer side of the screw rod (16) is fixedly sleeved with a second rotating wheel (17), the bottom of the outer side of the screw rod (16) is screwed with a horizontal plate (20), and the four corners of the bottom of the horizontal plate (20) are fixedly installed with moving wheels (21).

2. The wafer notch positioning structure for an ion implanter according to claim 1, characterized in that: A tray (4) is arranged on the top of the mounting seat (3), the bottom of the tray (4) extends into the interior of the mounting seat (3), the corresponding side of the positioning rod (10) extends into the interior of the tray (4), vertical plates (11) are fixedly installed on the left and right sides of the top and bottom of the inner cavity of the mounting seat (3), the side of the vertical plates (11) away from each other is fixedly connected to a limiting rod (12), and the side of the limiting rod (12) away from each other is fixedly connected to the interior of the mounting seat (3), The clamping plate (9) is sleeved on the outer side of the limiting rod (12), the outer side of the movable plate (8) is in sliding contact with the inner cavity of the vertical plate (11), the left side of the left clamping plate (9) is fixedly connected with a push rod (27), the left side of the push rod (27) passes through the mounting seat (3), the side of the clamping plate (9) away from the clamping plate (9) is fixedly connected with a spring (13), one side of the spring (13) is fixedly connected to the inner wall of the mounting seat (3), and the spring (13) is sleeved on the outer side of the limiting rod (12).

3. The wafer notch positioning structure for an ion implanter according to claim 1, characterized in that: The outer sides of the first rotating wheel (15) and the second rotating wheel (17) are connected to each other by a belt (18); a bottom plate (19) is fixedly mounted in the inner cavity of the base (1); the top of the bottom plate (19) is rotatably connected to the bottom of the screw rod (16); and the bottom of the moving wheel (21) movably passes through the bottom plate (19).

4. The wafer notch positioning structure for an ion implanter according to claim 1, characterized in that: A cushion block (23) and an injection machine body (25) are fixedly mounted on the left and right sides of the top of the base (1), respectively; a cylinder (24) is fixedly mounted on the left side of the cushion block (23); the right side of the cylinder (24) passes through the cushion block (23) and is fixedly connected to a movable frame (2); a second motor (28) is fixedly mounted on the bottom of the inner cavity of the movable frame (2); an output end of the second motor (28) passes through the movable frame (2) and is fixedly connected to the bottom of the mounting seat (3).

5. The wafer notch positioning structure for an ion implanter according to claim 4, characterized in that: Cross bars (26) are fixedly installed on both the front and rear sides of the right side of the cushion block (23), and the right side of the cross bar (26) movably penetrates the movable frame (2) and is fixedly connected to the left side of the injection machine body (25).

6. The wafer notch positioning structure for an ion implanter according to claim 1, characterized in that: Foot pads (22) are fixedly mounted at the four corners of the bottom of the base (1).

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