Device for simultaneously producing silane, monochlorosilane and dichlorosilane

Abstract

The utility model provides a device for producing silane, monochlorosilane and dichlorosilane at the same time. The device comprises a first reactor, a second reactor, a trichlorosilane first separation tower, a trichlorosilane second separation tower, a silane crude separation tower, a silane rectification tower, a silane purification tower, a dichlorosilane buffer tank, a dichlorosilane delivery pump, a booster pump, a monochlorine / dichlorosilane crude separation tower, a dichlorosilane purification tower and a monochlorosilane purification tower. The trichlorosilane first separation tower / the trichlorosilane second separation tower is used for recovering trichlorosilane in circulating material flow, a booster pump is arranged at the bottom of the trichlorosilane first separation tower, and due to the fact that different rectification pressures are adopted and the two towers are coupled for heat exchange, energy consumption of the whole system is reduced; the operation is flexible and convenient; and the product at the bottom of the silane coarse separation tower is circulated to the trichlorosilane first separation tower for cyclic utilization, so that the utilization rate of by-products is improved, and the cost is saved.

Description

Technical Field

[0001] The utility model relates to the field of silane preparation devices, in particular to a device for simultaneously producing silane, monochlorosilane and dichlorosilane. Background Art

[0002] Silane is a compound of silicon and hydrogen. It is a general term for a series of compounds, including monosilane (SiH 4 ), disilane (Si 2 H 6 ) and some higher silicon hydride compounds, with the general formula Si n H 2n+2 Among them, monosilane is the most common, and is sometimes referred to as silane.

[0003] Silane is widely used in high technology and is becoming more and more important. First of all, it is related to its characteristics, and also to the special needs of modern high technology. Through thermal decomposition or chemical reaction with other gases, silane can be used to produce a series of silicon-containing materials such as single crystal silicon, polycrystalline silicon, amorphous silicon, metal silicide, silicon nitride, silicon carbide, silicon oxide, etc. Silane can be used to produce a series of silicon-containing materials such as single crystal silicon, polycrystalline silicon, amorphous silicon, metal silicide, silicon nitride, silicon carbide, silicon oxide, etc. Silane can achieve the highest purity, the most precise (up to atomic size) control and the most flexible and changeable chemical reaction. Thus, various silicon-containing materials can be made into complex and delicate structures according to various needs, which is exactly the basic condition required by modern materials and devices with various special functions. The earliest practical and largest application of silane is as an intermediate product for the production of high-purity silicon, generally known as the silane method. Silane has become the most important special gas used in semiconductor microelectronics technology, used for the preparation of various microelectronic thin films, including single crystal films, microcrystals, polycrystalline, silicon oxide, silicon nitride, metal silicide, etc. The microelectronic application of silane is still developing in depth: low-temperature epitaxy, selective epitaxy, heterogeneous epitaxy. It is not only used for silicon devices and silicon integrated circuits, but also for compound semiconductor devices (gallium arsenide, silicon carbide, etc.). It is also used in the preparation of superlattice quantum well materials. It can be said that silane is needed in almost all advanced integrated circuit production lines today. The purity of silane is extremely important for device performance and yield rate. More advanced devices require silane of higher purity (including disilane and trisilane). The application of silane as silicon-containing films and coatings has expanded from the traditional microelectronics industry to various fields such as steel, machinery, chemicals and optics. Silicon-containing coatings can increase the high-temperature oxidation resistance of ordinary steel by more than 100,000 times, and can also greatly improve the high-temperature chemical stability of other metals, significantly enhance the corrosion resistance of internal combustion engine blades, greatly improve the bonding strength between various materials and parts, and extend the life of automobile engine parts. It can also change the reflection and transmission properties of glass, thereby achieving significant energy saving and decorative effects. Its application field is extremely wide.

[0004] Therefore, the utility model discloses a device for simultaneously producing silane, monochlorosilane and dichlorosilane to meet the market demand for silane. Utility Model Content

[0005] The utility model aims to provide a device for simultaneously producing silane, monochlorosilane and dichlorosilane, so as to realize the synchronous production of silane, monochlorosilane and dichlorosilane. To achieve the above purpose, the technical solution adopted by the utility model is:

[0006] A device for simultaneously producing silane, monochlorosilane and dichlorosilane, the device comprising: a first reactor (1), a second reactor (2), a first trichlorosilane separation tower (3), a second trichlorosilane separation tower (4), a silane crude fractionation tower (5), a silane rectification tower (6), a silane purification tower (7), a dichlorosilane buffer tank (8), a dichlorosilane delivery pump (9), a booster pump (10), a monochloro / dichlorosilane crude fractionation tower (11), a dichlorosilane purification tower (12) and a monochlorosilane purification tower (13).

[0007] Preferably, the first reactor (1) comprises a trichlorosilane feedstock and an inlet connected to a top outlet pipeline of a second trichlorosilane separation tower (4), and is arranged at the top of an outlet to the first trichlorosilane separation tower (3).

[0008] Preferably, the first trichlorosilane separation tower (3) comprises an inlet connected to the outlet pipe at the top of the first reactor (1), an inlet connected to the outlet pipe at the bottom of the silane crude separation tower (5), an outlet arranged at the top of the tower to the dichlorosilane buffer tank (8) and the monochlorosilane / dichlorosilane crude separation tower (11), and an outlet arranged at the bottom of the tower to the booster pump (10).

[0009] Preferably, the second trichlorosilane separation tower (4) comprises an inlet connected to the outlet pipe of the booster pump (10), an outlet to the first reactor (1) arranged at the top of the tower, and an outlet for silicon tetrachloride arranged at the bottom of the tower.

[0010] Preferably, the dichlorosilane buffer tank (8) comprises an inlet connected to the top outlet pipeline of the trichlorosilane first separation tower (3), an inlet connected to the bottom outlet pipeline of the monochlorosilane / dichlorosilane crude separation tower (11), and an outlet arranged at the bottom of the tank to the dichlorosilane delivery pump (9).

[0011] Preferably, the second reactor (2) comprises an inlet connected to an outlet pipeline of a dichlorosilane delivery pump (9) and an outlet arranged at the top to a silane crude fractionation tower (5).

[0012] Preferably, the crude silane fractionation tower (5) comprises an inlet connected to the top outlet pipe of the second reactor (2), an outlet arranged at the top of the tower to the silane distillation tower (6), and an outlet arranged at the bottom of the tower to the first trichlorosilane separation tower (3).

[0013] Preferably, the silane distillation tower (6) comprises an inlet connected to the outlet pipe at the top of the silane crude fractionation tower (5), and an outlet arranged at the top of the tower to the silane purification tower (7); the silane purification tower (7) comprises an inlet connected to the outlet pipe of the silane distillation tower (6), and an outlet for the silane product arranged at the bottom of the tower.

[0014] Preferably, the monochlorosilane / dichlorosilane crude fractionation tower (11) comprises an inlet connected to the top outlet pipeline of the trichlorosilane first separation tower (3), an outlet arranged at the top of the tower to the dichlorosilane purification tower (12), and an outlet arranged at the bottom of the tower to the dichlorosilane buffer tank (8).

[0015] Preferably, the dichlorosilane purification tower (12) comprises an inlet connected to the outlet pipeline at the top of the monochlorosilane / dichlorosilane crude fractionation tower (11), an outlet arranged at the top of the tower to the monochlorosilane purification tower (13), and an outlet for the dichlorosilane product arranged at the bottom of the tower; the monochlorosilane purification tower (13) comprises an inlet connected to the outlet pipeline at the top of the dichlorosilane purification tower (12), and an outlet for the monochlorosilane product arranged at the top of the tower.

[0016] Preferably, the trichlorosilane first separation tower (3) / trichlorosilane second separation tower (4) is used to recover trichlorosilane in the circulating flow, and a booster pump (10) is arranged at the bottom of the trichlorosilane first separation tower (3). Due to the use of different distillation pressures, the two towers are coupled for heat exchange to reduce the energy consumption of the entire system.

[0017] Preferably, the production of dichlorosilane / monochlorosilane is extracted from the top of the first trichlorosilane separation tower (3). When the production of dichlorosilane and monochlorosilane products is not needed, the extraction of dichlorosilane from the top of the first trichlorosilane separation tower (3) can be cut off, which is flexible and convenient to operate.

[0018] Preferably, the top of the first trichlorosilane separation tower (3) is connected to a dichlorosilane buffer tank (8), and the dichlorosilane buffer tank (8) is connected to a dichlorosilane delivery pump (9), so as to increase the pressure of the second reactor (2) and the subsequent silane crude fractionation tower (5), the silane distillation tower (6), and the silane purification tower (7), thereby reducing the quality of the cold source required for silane production, thereby reducing the overall energy consumption of the system.

[0019] Preferably, the bottom product of the crude silane fractionation tower (5) is recycled to the first trichlorosilane separation tower (3) for recycling.

[0020] Due to the application of the above technical solution, the utility model has the following advantages compared with the prior art:

[0021] 1. In the utility model, the first trichlorosilane separation tower / the second trichlorosilane separation tower are used to recover trichlorosilane in the circulating flow, and a booster pump is arranged at the bottom of the first trichlorosilane separation tower. Due to the use of different distillation pressures, the two towers are coupled for heat exchange, thereby reducing the energy consumption of the entire system;

[0022] 2. In the utility model, the production of dichlorosilane / monochlorosilane is extracted from the top of the first trichlorosilane separation tower. When it is not necessary to produce dichlorosilane and monochlorosilane products, the extraction of dichlorosilane from the top of the first trichlorosilane separation tower can be cut off, and the operation is flexible and convenient;

[0023] 3. In the utility model, the top of the first trichlorosilane separation tower is connected to a dichlorosilane buffer tank, and the dichlorosilane buffer tank is connected to a dichlorosilane delivery pump, which increases the pressure of the second reactor and the subsequent silane crude separation tower, silane distillation tower, and silane purification tower, reduces the quality of the cold source required for silane production, and thus reduces the overall energy consumption of the system;

[0024] 4. In the utility model, the product at the bottom of the crude silane separation tower is recycled to the first trichlorosilane separation tower for recycling, thereby improving the utilization rate of by-products and saving costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 This is a schematic diagram of the production device structure of Example 1 of the utility model;

[0026] Among them, 1. the first reactor; 2. the second reactor; 3. the first trichlorosilane separation tower; 4. the second trichlorosilane separation tower; 5. the silane crude fractionation tower; 6. the silane distillation tower; 7. the silane purification tower; 8. the dichlorosilane buffer tank; 9. the dichlorosilane delivery pump; 10. the booster pump; 11. the monochloro / dichlorosilane crude fractionation tower; 12. the dichlorosilane purification tower; 13. the monochlorosilane purification tower. DETAILED DESCRIPTION

[0027] In order to more clearly understand the above-mentioned purposes, features and advantages of the utility model, the utility model is further described in detail below in conjunction with the accompanying drawings and specific implementation methods. These drawings are all simplified schematic diagrams, which only illustrate the basic structure of the utility model in a schematic manner. Therefore, they only show the structures related to the utility model. It should be noted that the embodiments in this application and the features in the embodiments can be combined with each other without conflict.

[0028] In the following description, many specific details are set forth to facilitate a full understanding of the present invention, but the present invention may also be implemented in other ways different from those described herein. Therefore, the protection scope of the present invention is not limited to the specific embodiments disclosed below.

[0029] Example 1

[0030] As attached Figure 1 As shown, this embodiment provides a device for simultaneously producing silane, monochlorosilane and dichlorosilane, the device comprising: a first reactor (1), a second reactor (2), a first trichlorosilane separation tower (3), a second trichlorosilane separation tower (4), a silane crude fractionation tower (5), a silane rectification tower (6), a silane purification tower (7), a dichlorosilane buffer tank (8), a dichlorosilane delivery pump (9), a booster pump (10), a monochloro / dichlorosilane crude fractionation tower (11), a dichlorosilane purification tower (12), and a monochlorosilane purification tower (13).

[0031] Furthermore, the first reactor (1) comprises a trichlorosilane raw material and an inlet connected to a top outlet pipeline of a second trichlorosilane separation tower (4), and is arranged at the top of an outlet to the first trichlorosilane separation tower (3).

[0032] Furthermore, the trichlorosilane first separation tower (3) comprises an inlet connected to the outlet pipe at the top of the first reactor (1), an inlet connected to the outlet pipe at the bottom of the silane crude separation tower (5), an outlet arranged at the top of the tower to the dichlorosilane buffer tank (8) and the monochlorosilane / dichlorosilane crude separation tower (11), and an outlet arranged at the bottom of the tower to the booster pump (10).

[0033] Furthermore, the second trichlorosilane separation tower (4) comprises an inlet connected to the outlet pipeline of the booster pump (10), an outlet to the first reactor (1) arranged at the top of the tower, and an outlet for silicon tetrachloride arranged at the bottom of the tower.

[0034] Furthermore, the dichlorosilane buffer tank (8) comprises an inlet connected to the top outlet pipeline of the trichlorosilane first separation tower (3), an inlet connected to the bottom outlet pipeline of the monochlorosilane / dichlorosilane crude separation tower (11), and an outlet arranged at the bottom of the tank to the dichlorosilane delivery pump (9).

[0035] Furthermore, the second reactor (2) comprises an inlet connected to an outlet pipeline of a dichlorosilane delivery pump (9) and an outlet arranged at the top to a silane crude fractionation tower (5).

[0036] Furthermore, the crude silane fractionation tower (5) comprises an inlet connected to the top outlet pipe of the second reactor (2), an outlet arranged at the top of the tower to the silane distillation tower (6), and an outlet arranged at the bottom of the tower to the first trichlorosilane separation tower (3).

[0037] Furthermore, the silane distillation tower (6) comprises an inlet connected to the outlet pipeline at the top of the silane crude fractionation tower (5), and an outlet arranged at the top of the tower to the silane purification tower (7); the silane purification tower (7) comprises an inlet connected to the outlet pipeline of the silane distillation tower (6), and an outlet for the silane product arranged at the bottom of the tower.

[0038] Furthermore, the monochlorosilane / dichlorosilane crude fractionation tower (11) comprises an inlet connected to the top outlet pipeline of the trichlorosilane first separation tower (3), an outlet arranged at the top of the tower to the dichlorosilane purification tower (12), and an outlet arranged at the bottom of the tower to the dichlorosilane buffer tank (8).

[0039] Furthermore, the dichlorosilane purification tower (12) comprises an inlet connected to the outlet pipeline at the top of the monochlorosilane / dichlorosilane crude fractionation tower (11), an outlet arranged at the top of the tower to the monochlorosilane purification tower (13), and an outlet for the dichlorosilane product arranged at the bottom of the tower; the monochlorosilane purification tower (13) comprises an inlet connected to the outlet pipeline at the top of the dichlorosilane purification tower (12), and an outlet for the monochlorosilane product arranged at the top of the tower.

[0040] In this embodiment, the first trichlorosilane separation tower / the second trichlorosilane separation tower are used to recover trichlorosilane in the circulating flow, and a booster pump is arranged at the bottom of the first trichlorosilane separation tower. Due to the use of different distillation pressures, the two towers are coupled for heat exchange, thereby reducing the energy consumption of the entire system; the production of dichlorosilane / monochlorosilane is extracted from the top of the first trichlorosilane separation tower. When there is no need to produce dichlorosilane and monochlorosilane products, the extraction of dichlorosilane from the top of the first trichlorosilane separation tower can be cut off, and the operation is flexible and convenient; the top of the first trichlorosilane separation tower is connected to a dichlorosilane buffer tank, and the dichlorosilane buffer tank is connected to a dichlorosilane delivery pump, thereby increasing the pressure of the second reactor and the subsequent silane crude fractionation tower, silane distillation tower, and silane purification tower, thereby reducing the quality of the cold source required for silane production, thereby reducing the overall energy consumption of the system; the product at the bottom of the silane crude fractionation tower is circulated to the first trichlorosilane separation tower for recycling, thereby increasing the utilization rate of by-products and saving costs.

[0041] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood by specific circumstances.

[0042] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to the above embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the above embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A device for simultaneously producing silane, monochlorosilane and dichlorosilane, characterized in that: The device comprises: a first reactor (1), a second reactor (2), a first trichlorosilane separation tower (3), a second trichlorosilane separation tower (4), a silane crude fractionation tower (5), a silane rectification tower (6), a silane purification tower (7), a dichlorosilane buffer tank (8), a dichlorosilane delivery pump (9), a booster pump (10), a monochloro / dichlorosilane crude fractionation tower (11), a dichlorosilane purification tower (12), and a monochlorosilane purification tower (13).

2. The device for simultaneously producing silane, monochlorosilane and dichlorosilane according to claim 1, characterized in that: The first reactor (1) comprises a trichlorosilane raw material and an inlet connected to the top outlet pipeline of the second trichlorosilane separation tower (4), and is arranged at the top of the outlet to the first trichlorosilane separation tower (3).

3. The device for simultaneously producing silane, monochlorosilane and dichlorosilane as claimed in claim 1, characterized in that: The trichlorosilane first separation tower (3) comprises an inlet connected to the outlet pipeline at the top of the first reactor (1), an inlet connected to the outlet pipeline at the bottom of the silane crude separation tower (5), an outlet arranged at the top of the tower to the dichlorosilane buffer tank (8) and the monochlorosilane / dichlorosilane crude separation tower (11), and an outlet arranged at the bottom of the tower to the booster pump (10).

4. The device for simultaneously producing silane, monochlorosilane and dichlorosilane as claimed in claim 1, characterized in that: The second trichlorosilane separation tower (4) comprises an inlet connected to the outlet pipeline of the booster pump (10), an outlet arranged at the top of the tower to the first reactor (1), and an outlet for silicon tetrachloride arranged at the bottom of the tower.

5. The device for simultaneously producing silane, monochlorosilane and dichlorosilane as claimed in claim 1, characterized in that: The dichlorosilane buffer tank (8) comprises an inlet connected to the top outlet pipeline of the trichlorosilane first separation tower (3), an inlet connected to the bottom outlet pipeline of the monochlorosilane / dichlorosilane crude separation tower (11), and an outlet arranged at the bottom of the tank to the dichlorosilane delivery pump (9).

6. The device for simultaneously producing silane, monochlorosilane and dichlorosilane as claimed in claim 1, characterized in that: The second reactor (2) comprises an inlet connected to the outlet pipeline of the dichlorosilane delivery pump (9) and an outlet arranged at the top to the silane crude fraction tower (5).

7. The device for simultaneously producing silane, monochlorosilane and dichlorosilane as claimed in claim 1, characterized in that: The crude silane fractionation tower (5) comprises an inlet connected to the top outlet pipe of the second reactor (2), an outlet arranged at the top of the tower to the silane distillation tower (6), and an outlet arranged at the bottom of the tower to the first trichlorosilane separation tower (3).

8. The device for simultaneously producing silane, monochlorosilane and dichlorosilane as claimed in claim 1, characterized in that: The silane distillation tower (6) comprises an inlet connected to the outlet pipeline at the top of the silane crude fractionation tower (5), and an outlet arranged at the top of the tower to the silane purification tower (7); the silane purification tower (7) comprises an inlet connected to the outlet pipeline of the silane distillation tower (6), and an outlet for the silane product arranged at the bottom of the tower.

9. The device for simultaneously producing silane, monochlorosilane and dichlorosilane as claimed in claim 1, characterized in that: The monochlorosilane / dichlorosilane crude separation tower (11) comprises an inlet connected to the top outlet pipeline of the trichlorosilane first separation tower (3), an outlet arranged at the top of the tower to the dichlorosilane purification tower (12), and an outlet arranged at the bottom of the tower to the dichlorosilane buffer tank (8).

10. The device for simultaneously producing silane, monochlorosilane and dichlorosilane according to claim 1, characterized in that: The dichlorosilane purification tower (12) comprises an inlet connected to the outlet pipeline at the top of the monochlorosilane / dichlorosilane crude fractionation tower (11), an outlet arranged at the top of the tower to the monochlorosilane purification tower (13), and an outlet for the dichlorosilane product arranged at the bottom of the tower; the monochlorosilane purification tower (13) comprises an inlet connected to the outlet pipeline at the top of the dichlorosilane purification tower (12), and an outlet for the monochlorosilane product arranged at the top of the tower.

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