Lam-series lower electrode hole interior cleaning jig
By designing the cleaning fixture in the lower electrode hole of the Lam series, using a pneumatic diaphragm pump to drive the cleaning liquid and gas flow, the problems of poor cleaning effect and low efficiency in traditional cleaning methods are solved, and efficient and economical cleaning effects are achieved, improving the product yield and electrode protection.
Patent Information
- Application Number
- CN202422339199.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-25
- Publication Date
- 2025-06-06
- Estimated Expiration
- 2034-09-25
AI Technical Summary
When cleaning the electrode holes on the lower electrode of the semiconductor dry-etching device in the traditional method, the cleaning effect is poor and the efficiency is low, which affects the stability of the wafer quality.
A Lam series of lower electrode hole cleaning fixture is designed, including the electrode bottom plate and cover plate. Cleaning liquid and gas are injected through the through hole of the electrode bottom plate and the quick insertion interface hole on the cover plate, and the cleaning liquid and gas flow is driven by a pneumatic diaphragm pump to achieve efficient cleaning.
The cleaning efficiency and effect of the electrode holes on the lower electrode are improved, cleaning time and energy consumption are reduced, production costs are reduced, and the product yield is significantly improved. The residual cleaning liquid is blown away by gas injection to protect the lower electrode.
Smart Images
Figure CN222944057U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of semiconductor dry etching equipment, and in particular relates to a Lam series lower electrode hole cleaning jig. Background Art
[0002] Semiconductor dry etching equipment is affected by etching in the reactive plasma etching process. The lower electrode is an important part of the vacuum processing chamber and is in direct contact with the wafer. The cleanliness of the lower electrode plays a role in stabilizing the quality of the wafer. This involves cleaning the through hole on the bottom electrode. The traditional method is usually to manually hold a cleaning tube and spray cleaning liquid for flushing, which has poor cleaning effect and low efficiency. Utility Model Content
[0003] In view of this, the purpose of the utility model is to provide a Lam series lower electrode hole cleaning jig to improve the cleaning effect and efficiency of the upper electrode hole of the lower electrode.
[0004] In order to achieve the above object, the utility model provides the following technical solutions:
[0005] The utility model discloses a Lam series lower electrode hole cleaning jig, which is used for cleaning the electrode hole on the lower electrode, and comprises an electrode bottom plate and a cover plate, wherein the middle part of the electrode bottom plate is provided with a through hole matching the lower electrode, the edge of one side of the cover plate is provided with a sealing boss in contact with the electrode bottom plate, the inside of the sealing boss is provided with an abutting boss for squeezing the lower electrode, the middle part of the cover plate is provided with two penetrating quick-insert interface holes, the two quick-insert interface holes are respectively provided with a cleaning liquid injection joint and a gas injection joint, and the cover plate and the electrode bottom plate are detachably connected.
[0006] Furthermore, support legs are provided at the four corners of the electrode bottom plate, and the support legs are fixedly connected to the electrode bottom plate.
[0007] Furthermore, the cleaning liquid injection joint and the gas injection joint are both provided with a driving device for driving the flow of the cleaning liquid and the gas.
[0008] Furthermore, the driving device is a pneumatic diaphragm pump.
[0009] Furthermore, the electrode bottom plate is provided with a first annular sealing groove at a contact position of the sealing boss, and an annular sealing ring is provided in the first annular sealing groove.
[0010] Furthermore, a second annular sealing groove is provided at a portion of the abutting boss that contacts the lower electrode, and an annular sealing ring is also provided in the second annular sealing groove.
[0011] Furthermore, the cover plate and the electrode bottom plate may be connected by snap-fit connection or by thread connection.
[0012] The beneficial effects of the utility model are:
[0013] 1. Improved cleaning efficiency: After using this fixture, the cleaning time is reduced compared to traditional methods.
[0014] 2. Cost reduction: The use of this fixture reduces production costs due to the reduction of cleaning time and energy consumption.
[0015] 3. Improve the yield rate: After using this fixture, the product yield rate has been significantly improved.
[0016] 4. Gas injection can blow away the residual cleaning liquid in the electrode hole to avoid the penetration of the cleaning liquid and protect the lower electrode.
[0017] Other advantages, objectives and features of the utility model will be described in the following description and will be apparent to those skilled in the art to some extent, or those skilled in the art can be taught from the practice of the utility model. The objectives and other advantages of the utility model can be realized and obtained through the following description. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] In order to make the purpose, technical solution and beneficial effects of the utility model clearer, the utility model is described with the following drawings:
[0019] Figure 1 It is a three-dimensional schematic diagram of the cleaning fixture of the utility model;
[0020] Figure 2 It is a three-dimensional schematic diagram of the electrode bottom plate in the cleaning fixture of the utility model;
[0021] Figure 3 It is a three-dimensional schematic diagram of the cover plate in the cleaning fixture of the utility model;
[0022] Figure 4 This is a schematic diagram of an exploded view of the cleaning fixture of the utility model;
[0023] Figure 5 This is a schematic cross-sectional view of the cleaning fixture of the utility model
[0024] Figure 6 It is a plan view schematic diagram of the structure of a pneumatic diaphragm pump in the prior art;
[0025] Figure 7 It is a schematic diagram of an exploded view of the structure of a pneumatic diaphragm pump in the prior art.
[0026] The following are marked in the accompanying drawings:
[0027] Support leg 1, electrode base plate 2, through hole 3, cover plate 4, sealing boss 5, abutting boss 6, quick-insert interface hole 7, first annular sealing groove 8, annular sealing ring 9, second annular sealing groove 10, lower electrode 11, electrode hole 12, cleaning liquid injection joint 13, gas injection joint 14. DETAILED DESCRIPTION
[0028] like Figure 1 to Figure 5 As shown, the utility model is a Lam series lower electrode hole cleaning jig for cleaning the electrode hole 12 on the lower electrode 11, comprising an electrode base plate 2 and a cover plate 4, a through hole 3 matching the lower electrode 11 is provided in the middle of the electrode base plate 2, a sealing boss 5 in contact with the electrode base plate 2 is provided at the edge of one side of the cover plate 4, an abutment boss 6 for squeezing the lower electrode 11 is provided inside the sealing boss 5, two penetrating quick-plug interface holes 7 are provided in the middle of the cover plate 4, a cleaning liquid injection joint 13 and a gas injection joint 14 are respectively provided in the two quick-plug interface holes 7, and the cover plate 4 and the electrode base plate 2 are detachably connected.
[0029] Electrode bottom plate 2: A metal electrode bottom plate 2 with a circular through hole 3 in the center is designed at the bottom of the fixture body, and the through hole 3 is connected to the cavity inside the electrode body.
[0030] Cleaning liquid injection system: A cleaning liquid injection system is designed on the top of the fixture body, including a cleaning liquid storage chamber, an infusion tube and a regulating valve. The system is used to connect the cleaning liquid through the infusion tube and the cleaning liquid injection connector 13, inject the cleaning liquid into the fixture body, and control the injection flow rate.
[0031] Gas injection system: A gas injection system is designed on the top of the fixture body, including a gas input device, a gas pipe and a regulating valve. The system is used to connect the gas through the gas pipe and the gas injection joint 14, inject the gas into the fixture body, and control the injection pressure.
[0032] Cover plate 4: A removable sealing cover is designed on the top of the fixture body to close the top opening of the fixture body so as to maintain the pressure and liquid level during the cleaning process.
[0033] The cleaning steps are as follows:
[0034] The lower electrode 11 to be cleaned is placed on the electrode bottom plate 2 , ensuring that the hole to be cleaned is located in the through hole 3 of the electrode bottom plate 2 .
[0035] The sealing cover is installed on the top of the electrode bottom plate 2 to close the through hole 3.
[0036] Connect the cleaning liquid injection system to the top of the fixture body, open the regulating valve, and inject the cleaning liquid into the fixture body.
[0037] Connect the gas injection system to the top of the fixture body, open the regulating valve, and inject gas into the interior of the fixture body until the desired gas pressure and liquid level are reached.
[0038] Start the driving device, and pass the cleaning liquid into the hole to be cleaned through the electrode plate to perform chemical cleaning. It should be noted that the electrode hole 12 on the lower electrode 11 is a through hole. The cleaning liquid flows out from the through hole 3 under pressure to perform cleaning. The diameter of the motor hole is generally 1-2 mm. The hole diameter is small, and it is difficult for water to enter the electrode hole 12 without pressure. Therefore, the hand-held flushing method is not effective.
[0039] After cleaning is completed, turn off the gas and cleaning fluid drive devices, remove the connecting pipes, and remove the sealing cover.
[0040] Remove the electrode plate from the fixture body and observe the cleanliness of the hole. If further cleaning is required, repeat the above steps.
[0041] Preferably, after cleaning is completed, the cleaning liquid driving device can be turned off first. After turning off, the separate input of gas will purge and dry the cleaning liquid on the lower electrode 11, avoiding long-term contact between the cleaning liquid and the lower electrode 11, which may cause penetration problems.
[0042] In an practicable manner, support legs 1 are provided at four corners of the electrode bottom plate 2 , and the support legs 1 are fixedly connected to the electrode bottom plate 2 .
[0043] In an operative manner, both the cleaning liquid injection joint 13 and the gas injection joint 14 are provided with a driving device for driving the cleaning liquid and the gas to flow, and the driving device is a pneumatic diaphragm pump, and the pneumatic diaphragm pump is a prior art, such as Figure 6 and Figure 7 shown.
[0044] In one feasible manner, the electrode bottom plate 2 is provided with a first annular sealing groove 8 at the contact portion of the sealing boss 5, an annular sealing ring 9 is provided in the first annular sealing groove 8, a second annular sealing groove 10 is provided at the portion where the abutting boss 6 contacts the lower electrode 11, an annular sealing ring 9 is also provided in the second annular sealing groove 10, and the annular sealing ring 9 is further ensured to be airtight by contact-extruding the annular sealing ring 9.
[0045] In one practicable manner, the cover plate and the electrode bottom plate may be connected by a snap connection or by a thread connection.
[0046] Finally, it should be noted that the above preferred embodiments are only used to illustrate the technical solution of the utility model rather than to limit it. Although the utility model has been described in detail through the above preferred embodiments, those skilled in the art should understand that various changes can be made in form and details without departing from the scope defined by the claims of the utility model.
Claims
1. A Lam series lower electrode hole cleaning jig, used for cleaning the electrode hole on the lower electrode, characterized in that: It comprises an electrode bottom plate and a cover plate, wherein a through hole matching the lower electrode is provided in the middle of the electrode bottom plate, a sealing boss in contact with the electrode bottom plate is provided at the edge of one side of the cover plate, an abutment boss for squeezing the lower electrode is provided inside the sealing boss, two penetrating quick-insert interface holes are provided in the middle of the cover plate, a cleaning liquid injection joint and a gas injection joint are provided in the two quick-insert interface holes respectively, and the cover plate and the electrode bottom plate are detachably connected.
2. A Lam series lower electrode hole cleaning jig according to claim 1, characterized in that: Support legs are provided at the four corners of the electrode bottom plate, and the support legs are fixedly connected to the electrode bottom plate.
3. A Lam series lower electrode hole cleaning jig according to claim 1, characterized in that: The cleaning liquid injection joint and the gas injection joint are both provided with driving devices for driving the cleaning liquid and gas to flow.
4. A Lam series lower electrode hole cleaning jig according to claim 3, characterized in that: The driving device is a pneumatic diaphragm pump.
5. A Lam series lower electrode hole cleaning jig according to claim 1, characterized in that: The electrode bottom plate is provided with a first annular sealing groove at the contact position of the sealing boss, and an annular sealing ring is provided in the first annular sealing groove.
6. A Lam series lower electrode hole cleaning jig according to claim 1, characterized in that: A second annular sealing groove is provided at the position where the abutting boss contacts the lower electrode, and an annular sealing ring is also provided in the second annular sealing groove.
7. A Lam series lower electrode hole cleaning jig according to claim 1, characterized in that: The cover plate and the electrode bottom plate can be connected by snap-fit connection or by thread connection.