Machine block welding positioning device for upper cover of semiconductor source bottle

Abstract

The utility model relates to the field of semiconductor manufacturing, and discloses a machine block welding positioning device of a semiconductor source bottle upper cover, which comprises a source bottle, an upper cover, a positioning clamping block and a machine block, the machine block is a square block body, and a pipeline through hole is formed in the machine block; the upper cover is arranged at the top of the source bottle and covers partial area of the top of the source bottle, the rest area of the top of the source bottle is an exposed area, and the gas outlet of the source bottle is located at the exposed area; the positioning clamping block is arranged in the exposed area of the source bottle and is respectively connected with the upper cover and the source bottle; and the pipeline is arranged in the exposed area of the source bottle through the positioning clamping block, so that the pipeline through hole of the machine block is aligned and communicated with the source bottle air outlet in the source bottle. The problem that manual positioning is not reliable can be solved, and the auxiliary pipeline and the source bottle can be reliably positioned.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor manufacturing, in particular to a machine block welding positioning device for a semiconductor source bottle upper cover. Background Art

[0002] As device size continues to shrink to 45nm and below, the thickness of the gate dielectric layer SiON is reduced to below 2nm. In order to improve the gate leakage current, the semiconductor industry uses high-K dielectric material HfO 2 And HfSiON replaces SiON as the gate oxide layer. 2 It is composed of a layer of HfCl on the atomic layer. 4 and a layer of H 2 O produced by reaction. HfCl 4 The source bottle is used to store and transport HfCl 4 The three blocks welded on the upper cover of the apparatus are connected to the machine through pipelines on the outside, and the inside is in direct or indirect contact with the container chamber, so its positioning is very important. If the angle of the outside cannot be guaranteed, it will be greatly affected when connected to the machine.

[0003] Semiconductor source bottles are used to sublimate or evaporate precursor sources, and to transport the sublimated or evaporated gas to external machines through welded pipes. If there is a large deviation in the welding of such pipes, it is likely to affect the positioning of the machine and the transportation of sublimated gas. In traditional pipe welding processes, manual welding or mechanical welding is generally used, and manual fixation may be used during the process, which is not reliable enough.

[0004] Therefore, there is a need for a device that can assist in positioning the pipeline and the source bottle. Summary of the invention

[0005] In view of the above problems, the purpose of the utility model is to provide a machine block welding positioning device for a semiconductor source bottle upper cover, which can solve the problem of unreliable manual positioning and reliably position the auxiliary pipeline and the source bottle.

[0006] To achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a machine block welding positioning device for a semiconductor source bottle upper cover, characterized in that it includes: a source bottle, an upper cover, a positioning card block and a machine block; the machine block is a square block with a pipeline through hole opened inside; the upper cover is arranged on the top of the source bottle, and the upper cover covers a partial area of ​​the top of the source bottle, and the remaining area of ​​the top of the source bottle is an exposed area, and the source bottle outlet is located in the exposed area; the positioning card block is arranged in the exposed area of ​​the source bottle, and is connected to the upper cover and the source bottle respectively; the machine block is arranged in the exposed area of ​​the source bottle through the positioning card block to align and connect the pipeline through hole of the machine block with the source bottle outlet on the source bottle.

[0007] Furthermore, an arc-shaped groove is provided on the side of the upper cover at the exposed area for installing the positioning block.

[0008] Furthermore, the arc-shaped groove is a U-shaped groove.

[0009] Furthermore, a clamping spring for fixing the positioning block is provided at the notch of the arc-shaped groove.

[0010] Furthermore, the positioning card block includes a card block body, a first groove and a quick plug-in unit;

[0011] A first groove is provided at the bottom center of the block body for accommodating the block to position it;

[0012] Quick plug-ins are respectively arranged on both sides of the card block body, and the card block body is connected to the upper cover through the quick plug-ins.

[0013] Furthermore, the height of the card block body is greater than the height above the upper cover and protrudes from the upper cover; the length of the card block body is greater than the width of the exposed area.

[0014] Furthermore, bolt holes are respectively provided at both ends of the block body, and bolts pass through the bolt holes to fix the block body on the source bottle.

[0015] Furthermore, the block body is composed of three layers of plywood; the first layer of plywood and the second layer of plywood are fixedly arranged as a whole; the third layer of plywood is used as a pad to fix the entire block body to the source bottle via bolts.

[0016] Furthermore, the first groove and the machine block are arranged correspondingly to limit the machine block in the first groove.

[0017] Furthermore, the quick plug-in unit adopts a U-shaped spring or a U-shaped spring sheet with an arc-shaped protrusion, and the arc-shaped protrusion is arranged corresponding to the arc-shaped groove of the upper cover.

[0018] The utility model adopts the above technical solution, which has the following advantages:

[0019] 1. The utility model provides positioning blocks at the exposed areas of the upper cover and the source bottle, limits the pipeline by the positioning blocks, and ensures the accuracy of the circumferential angle and longitudinal position of the pipeline, so as to accurately connect the source bottle with the external machine through the pipeline for gas transmission.

[0020] 2. The positioning block of the utility model can be quickly installed and disassembled with the upper cover through a quick plug-in, without any damage to the structure of the upper cover itself. While ensuring the airtightness of the upper cover, the pipeline can be reliably positioned. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the overall structure of the machine block welding positioning device of the upper cover of the semiconductor source bottle in the embodiment of the utility model;

[0022] Figure 2 yes Figure 1 Top view;

[0023] Figure 3 yes Figure 2 AA section view in the figure;

[0024] Figure 4 yes Figure 3 A partial enlarged view of point B in the middle;

[0025] Figure 5 This is a rendering of the embodiment of the utility model after assembly;

[0026] The accompanying drawings are marked as follows:

[0027] 100-source bottle;

[0028] 200-upper cover, 210-arc groove;

[0029] 300 - positioning block, 310 - block body, 320 - first groove, 330 - quick plug-in, 331 - arc-shaped protrusion, 340 - bolt;

[0030] 400-Pipeline. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution of the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings of the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. Based on the described embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field belong to the scope of protection of the utility model.

[0032] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0033] Example: Figures 1 to 5As shown, this embodiment provides a semiconductor source bottle upper cover machine block welding positioning device, which is used to assist the source bottle in the High-k Metal Gate process in the integrated circuit to add chemicals. In this embodiment, the device includes: a source bottle 100, an upper cover 200, a positioning block 300 and a machine block 400; wherein the machine block 400 is a square block with a pipeline through hole opened inside.

[0034] The upper cover 200 is arranged on the top of the source bottle 100, and the upper cover 200 covers a part of the top area of ​​the source bottle 100, and the rest of the top area of ​​the source bottle 100 is an exposed area, and the gas outlet of the source bottle is located in the exposed area;

[0035] The positioning block 300 is disposed in the exposed area of ​​the source bottle 100 and is connected to the upper cover 200 and the source bottle 100 respectively;

[0036] The machine block 400 is disposed in the exposed area of ​​the source bottle 100 through the positioning block 300 so as to align and communicate the pipeline through hole of the machine block 400 with the source bottle gas outlet on the source bottle 100 .

[0037] When in use, the machine block 400 is placed at the source bottle outlet on the source bottle 100, and the machine block 400 is positioned on the source bottle 100 by the positioning block 300, and the positioning block 300 is positioned between the upper cover 200 and the source bottle 100 to ensure that the installation position of the machine block 400 is accurate, and gas is transported between the source bottle 100 and the external machine through the machine block 400.

[0038] In the above embodiment, at the exposed area for mounting the positioning block 300 , an arc-shaped groove 210 is provided on the side of the upper cover 200 (close to the exposed area).

[0039] Optionally, the arc-shaped groove 210 is a U-shaped groove so as to cooperate with the positioning block 300 to achieve a quick plug-in function without damaging the sealing of the upper cover 200 itself.

[0040] Optionally, a retaining spring is provided at the notch of the arc-shaped groove 210 to further secure the positioning block 300 in the arc-shaped groove 210 .

[0041] In the above embodiment, the positioning block 300 includes a block body 310 , a first groove 320 and a quick-insertion plug-in 330 .

[0042] A first groove 320 is provided at the bottom center of the card block body 310 for accommodating the machine block 400 to position it;

[0043] The two sides of the block body 310 are respectively provided with quick plugs 330, and the block body 310 is connected to the upper cover 200 through the quick plugs 330. Specifically, the two ends of the block body 310 are embedded in the arc groove 210 of the upper cover 200 through the quick plugs 330, and are tightly fixed in position.

[0044] In this embodiment, the height of the block body 310 is greater than the height of the upper cover 200 and protrudes from the upper cover 200. The length of the block body 310 is greater than the width of the exposed area to ensure that both ends of the block body 310 are limited by the arc groove 210 of the upper cover.

[0045] Optionally, bolt holes are respectively provided at both ends of the block body 310 , so that bolts 340 pass through the bolt holes to fix the block body 310 on the source bottle 100 , further ensuring the stability of the position of the block body 310 .

[0046] Optionally, the block body 310 is formed of three layers of plywood. The first layer of plywood and the second layer of plywood are fixedly arranged as one body; the third layer of plywood is used as a pad to fix the entire block body 310 on the source bottle 100 via bolts 340 .

[0047] In this embodiment, the first groove 320 is disposed corresponding to the machine block 400 to limit the machine block 400 in the first groove 320 , thereby ensuring the accuracy of the circumferential angle and longitudinal position of the machine block 400 .

[0048] In this embodiment, the quick plug-in 330 may be a U-shaped spring or a U-shaped spring sheet having an arc-shaped protrusion 331 . The arc-shaped protrusion 331 is arranged corresponding to the arc-shaped groove 210 of the upper cover 200 to cooperate in realizing the quick plug-in and limit functions.

[0049] In the above embodiments, the bottom of the machine block 400 is connected to the source bottle outlet on the source bottle 100, and the top of the machine block 400 cooperates with the first groove 320 on the positioning block 300 for positioning.

[0050] The machine block 400 is laser welded on the source bottle 100 after the height and circumferential angle positioning.

[0051] In summary, when the present invention is used, the following steps are performed to position the machine block 400 at a preset height and circumferential angle so as to be fixed and connected with an external machine platform. The specific installation steps are:

[0052] 1) Place the machine block 400 on the source bottle 100;

[0053] 2) If Figure 4 As shown, the positioning block 300 is clamped on the upper cover 200 through the quick plug-in 330, and the machine block 400 is embedded in the first groove 320 to limit the machine block 400;

[0054] Specifically, the arc-shaped protrusion 331 of the quick plug-in unit 330 is inserted into the arc-shaped groove 210 of the upper cover 200, so as to realize the pre-positioning of the positioning block 300 before the bolt 340 is tightened, so that the machine block 400 is first positioned at the set height and circumferential angle position by the positioning block 300;

[0055] 3) Fix the block 300 to the source bottle 100 by means of bolts 340 to achieve a more stable positioning of the machine block 400, that is, the machine block 400 can be welded to the source bottle 100;

[0056] 4) Remove the bolt 340 and pull out the block 300. Figure 5 As shown, the positioning and installation of the machine block 400 is completed.

[0057] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.

Claims

1. A machine block welding positioning device for a semiconductor source bottle cover, characterized in that: include: A source bottle (100), an upper cover (200), a positioning block (300) and a machine block (400); the machine block (400) is a square block having a pipeline through hole opened therein; The upper cover (200) is arranged on the top of the source bottle (100), and the upper cover (200) covers a part of the top area of ​​the source bottle (100), and the rest of the top area of ​​the source bottle (100) is an exposed area, and the gas outlet of the source bottle is located in the exposed area; The positioning block (300) is arranged in the exposed area of ​​the source bottle (100) and is connected to the upper cover (200) and the source bottle (100) respectively; The machine block (400) is arranged in the exposed area of ​​the source bottle (100) through the positioning block (300) so as to align and communicate the pipeline through hole of the machine block (400) with the source bottle gas outlet on the source bottle (100).

2. The machine block welding positioning device for the upper cover of the semiconductor source bottle as claimed in claim 1, characterized in that: An arc-shaped groove (210) is provided on the side of the upper cover (200) at the exposed area for installing the positioning block (300).

3. The machine block welding positioning device for the upper cover of the semiconductor source bottle as claimed in claim 2, characterized in that: The arc-shaped groove (210) is a U-shaped groove.

4. The machine block welding positioning device for the upper cover of the semiconductor source bottle as claimed in claim 2, characterized in that: A clamping spring for fixing the positioning clamping block (300) is arranged at the notch of the arc-shaped groove (210).

5. The machine block welding positioning device for the upper cover of the semiconductor source bottle as claimed in claim 1, characterized in that: The positioning block (300) comprises a block body (310), a first groove (320) and a quick plug-in unit (330); A first groove (320) is provided at the center of the bottom of the card block body (310) for accommodating the machine block (400) to position it; Quick plug-ins (330) are respectively provided on both sides of the card block body (310), and the card block body (310) is connected to the upper cover (200) through the quick plug-ins (330).

6. The machine block welding positioning device for the upper cover of the semiconductor source bottle as claimed in claim 5, characterized in that: The height of the card block body (310) is greater than the height above the upper cover (200) and protrudes from the upper cover (200); the length of the card block body (310) is greater than the width of the exposed area.

7. The machine block welding positioning device for the upper cover of the semiconductor source bottle as claimed in claim 5, characterized in that: Bolt holes are respectively provided at both ends of the block body (310), and bolts (340) pass through the bolt holes to fix the block body (310) on the source bottle (100).

8. The machine block welding positioning device for the upper cover of a semiconductor source bottle as claimed in claim 5, characterized in that: The block body (310) is composed of three layers of plywood (311); the first layer of plywood (311) and the second layer of plywood (311) are fixedly arranged as one body; the third layer of plywood (311) is used as a pad to fix the entire block body (310) on the source bottle (100) via bolts (340).

9. The machine block welding positioning device for the upper cover of a semiconductor source bottle as claimed in claim 5, characterized in that: The first groove (320) and the machine block (400) are arranged correspondingly to limit the machine block (400) in the first groove (320).

10. The machine block welding positioning device for the upper cover of a semiconductor source bottle as claimed in claim 5, characterized in that: The quick-plug (330) adopts a U-shaped spring or a U-shaped spring sheet with an arc-shaped protrusion (331), and the arc-shaped protrusion (331) is arranged corresponding to the arc-shaped groove (210) of the upper cover (200).

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