Rotating assembly with higher stability for wafer detection equipment

Abstract

The utility model discloses a higher-stability rotating assembly for wafer detection equipment, which comprises a machine body, a control shaft is arranged on one side of the bottom of the machine body, a fixed seat is arranged at the bottom of the control shaft, a main board is arranged on one side of the fixed seat, two control boards are arranged on one side of the main board, and the number of the control boards is two. The utility model discloses a wafer detection equipment rotation assembly with higher stability, which comprises two control boards, the two control boards are in a straight board shape when closed, the two control boards are in a clamping jaw shape when separated, and the opposite sides of the two control boards are respectively provided with an arc-shaped groove. When the control plate is changed into a straight plate type, the soft cushion is controlled to be lifted through the movement of the top plate, so that the larger contact surface of the soft cushion faces upwards, the control plate in the straight plate state can be more stable when the wafer is lifted and moved, and the control plate can be changed into a clamping jaw type when encountering an open type wafer placing device.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer detection structures, in particular to a rotating component for wafer detection equipment with higher stability. Background Art

[0002] In the patent application with application number CN201810982460.7, entitled "A wafer inspection device", it includes a work platform, on which at least a macro inspection station and a micro inspection station are provided, and a transport device is also provided on the work platform, and the transport device can transport the wafer to be inspected to the macro inspection station and the micro inspection station. The advantages are: by providing a transport device, the wafer can be transported between different inspection stations, avoiding damage to the wafer during manual transportation, resulting in the detection results being affected, and then making incorrect adjustments to the processing technology.

[0003] In the prior art including the above-mentioned patents, the rotating machines for transporting wafers are mostly of straight plate type. The top of the transport straight plate is relatively smooth. During the movement and operation of the machine, the wafer may be displaced slightly due to emergency stops and the like. The stability is poor and it is easy to cause misalignment in the subsequent placement process, affecting detection. In addition, the transport straight plate has a single structure and poor adjustability and cannot be changed and adjusted according to actual conditions. Utility Model Content

[0004] The utility model aims to provide a rotating assembly for wafer inspection equipment with higher stability, so as to solve the problem that the rotating plate for moving wafers proposed in the above background technology has a simple structure and a single function, and has a smooth surface and poor stability during translation.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a rotating assembly for wafer inspection equipment with higher stability, comprising a body, a control shaft is provided on one side of the bottom of the body, a fixed seat is provided at the bottom of the control shaft, a main board is provided on one side of the fixed seat, a control board is provided on one side of the main board, there are two control boards, the two control boards are in the shape of a straight plate when closed, and in the shape of a clamp when separated, and arc-shaped grooves are provided on opposite sides of the two control boards.

[0006] Furthermore, a hydraulic cavity is provided inside the control panel, the interior of the hydraulic cavity is filled with hydraulic oil, one side of the hydraulic cavity is fixedly connected to a hydraulic oil channel, and a hydraulic rod penetrates the front side of one side of the control panel.

[0007] Furthermore, a top plate is fixedly provided on one side of the hydraulic rod, a sealing plate is provided on the other side of the hydraulic rod, a spring is fixedly provided on one side of the sealing plate, and the sealing plate can control the hydraulic oil to enter the hydraulic oil channel.

[0008] Furthermore, a rotating shaft is provided on the front and rear sides of one side of the control panel, a soft pad is rotatably provided on one side of the rotating shaft, the soft pad is made of rubber, and an arc rod is fixedly provided on the bottom of one side of the soft pad.

[0009] Furthermore, the other side of the arc rod passes through the control panel and extends to the inside of the hydraulic oil channel. The other side of the arc rod is sealed with the inside of the hydraulic oil channel. The arc rod can push the cushion to rotate with the rotating connection with the rotating shaft as the center.

[0010] Furthermore, a motor is provided on one side of the bottom of the main board, and a power wheel is fixedly provided on the output shaft of the motor. Control rods are provided on both sides of the top of the main board, and one side of the two control rods are meshed with each other, and the top of one of the control rods is meshed with the power wheel.

[0011] Furthermore, a linkage rod is rotatably provided on one side of the control rod, an auxiliary rod is rotatably connected to one side of the linkage rod, the other side of the auxiliary rod is rotatably connected to one side of the main board, and one side of the linkage rod is fixedly connected to one side of the control board.

[0012] Compared with the prior art, the utility model has the following beneficial effects: the rotating assembly of the wafer detection equipment with higher stability is reasonable and has the following advantages:

[0013] A control panel that can be transformed is provided at the bottom of the machine body. The control panel has two forms, namely straight plate type and clamping claw type. When the control panel becomes straight plate type, the soft pad will control its lifting through the movement of the top plate so that the larger contact surface of the soft pad faces upward. When the control panel is in the straight plate state, it can be more stable when lifting and moving the wafer. The soft pad will increase the contact area and friction with the bottom of the wafer so that it will not move even when it is subjected to the inertial force of emergency stop during movement. When encountering an open wafer placement device, it can be changed into a clamping claw type, which can be controlled by a motor. When the control panel is separated, the top plate will be controlled to reset due to the action of the spring. At this time, the soft pad will also return to the initial position, and cooperate with the control panel to clamp both sides of the wafer, making it more firm and stable when clamping and moving.

[0014] The soft pad has two different variations: lifting type and side type. The soft pad can change along with the changes of the control panel. The linkage that controls its changes is only a simple hydraulic oil control device, which makes the overall structure simple and durable, and further increases the overall adjustability of the device and the stability when moving wafers. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0016] Figure 2This is a schematic front view of the machine structure of the utility model;

[0017] Figure 3 This is a schematic diagram of the control shaft structure of the utility model;

[0018] Figure 4 This is a schematic diagram of the linkage rod structure of the utility model;

[0019] Figure 5 This is a schematic diagram of the power wheel structure of the utility model;

[0020] Figure 6 This is a schematic diagram of the internal structure of the control panel of the utility model;

[0021] Figure 7 This is a schematic diagram of the cushion structure of the utility model.

[0022] In the figure: 1. body; 2. control shaft; 3. control board; 4. motor; 5. fixed seat; 6. power wheel; 7. linkage rod; 8. main board; 9. control rod; 10. auxiliary rod; 11. cushion; 12. top plate; 13. arc rod; 14. hydraulic rod; 15. rotating shaft; 16. spring; 17. sealing plate; 18. hydraulic oil channel. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] See also Figure 1-7 , a technical solution provided by the utility model:

[0025] In the present embodiment, a rotating assembly for wafer inspection equipment with higher stability includes a body 1, a control shaft 2 is provided on one side of the bottom of the body 1, a fixing seat 5 is provided on the bottom of the control shaft 2, a main board 8 is provided on one side of the fixing seat 5, a control board 3 is provided on one side of the main board 8, there are two control boards 3, the two control boards 3 are in the shape of a straight plate when closed, and in the shape of a clamp when separated, and arc grooves are provided on opposite sides of the two control boards 3.

[0026] In this embodiment, a hydraulic cavity is provided inside the control panel 3 , and the interior of the hydraulic cavity is filled with hydraulic oil. One side of the hydraulic cavity is fixedly connected to a hydraulic oil passage 18 , and a hydraulic rod 14 penetrates the front side of one side of the control panel 3 .

[0027] In this embodiment, a top plate 12 is fixedly provided on one side of the hydraulic rod 14 , a sealing plate 17 is provided on the other side of the hydraulic rod 14 , a spring 16 is fixedly provided on one side of the sealing plate 17 , and the sealing plate 17 can control the hydraulic oil to enter the hydraulic oil channel 18 .

[0028] In this embodiment, a rotating shaft 15 is provided on the front and rear sides of one side of the control panel 3. A cushion 11 is rotatably provided on one side of the rotating shaft 15. The cushion 11 is made of rubber. An arc rod 13 is fixedly provided on the bottom of one side of the cushion 11.

[0029] In this embodiment, the other side of the arc rod 13 passes through the control panel 3 and extends to the interior of the hydraulic oil channel 18. The other side of the arc rod 13 is sealed with the interior of the hydraulic oil channel 18. The arc rod 13 can push the cushion 11 to rotate with the rotation connection with the rotating shaft 15 as the center.

[0030] In this embodiment, a motor 4 is provided on one side of the bottom of the main board 8, and a power wheel 6 is fixedly provided on the output shaft of the motor 4. Control rods 9 are provided on both sides of the top of the main board 8, and one side of the two control rods 9 are meshed with each other, and the top of one of the control rods 9 is meshed with the power wheel 6.

[0031] In this embodiment, a linkage rod 7 is rotatably provided on one side of the control rod 9, and an auxiliary rod 10 is rotatably connected to one side of the linkage rod 7. The other side of the auxiliary rod 10 is rotatably connected to one side of the main board 8, and one side of the linkage rod 7 is fixedly connected to one side of the control board 3.

[0032] Working principle: When in use, the form of the control board 3 is selected according to the style of the wafer placement box. When the placement box is arranged and the gap is small, the control boards 3 can be merged together. When merging, the motor 4 is started. After the motor 4 is started, it drives the power wheel 6 to rotate. The power wheel 6 drives one of the control rods 9 to rotate through engagement, and the other control rod 9 will also rotate accordingly. After the two control rods 9 are opened, the control board 3 will be controlled to move until it is closed through the cooperation between the auxiliary rod 10 and the linkage rod 7. When the two control boards 3 are completely closed, the top plate 12 will be squeezed. After the top plate 12 is stressed, it will squeeze the hydraulic rod 14. The hydraulic rod 14 will drive the sealing plate 17 to move into the hydraulic cavity and compress the spring 16. The hydraulic oil in the hydraulic cavity will be injected into the hydraulic oil channel 18 after being pressurized. The oil injected into the arc rod 13 will be pushed up and drive the soft pad 11 to rotate upward with the rotating connection with the rotating shaft 15 as the center. After the control board 3 is completely closed, the soft pad 11 is in an upward position. At this time, when lifting the wafer, the soft pad 11 contacts its bottom with a large area to increase the friction, making the wafer more stable when moving. When encountering an open placement box, a more stable clamping type can be used to pick it up. Similarly, the control board 3 is opened from a closed state through the motor 4. After opening, the spring 16 will control the sealing plate 17 to return to the initial position, and the hydraulic oil will also return to the hydraulic chamber. Then the arc rod 13 will also be sucked inward by the negative pressure to make the soft pad 11 return to the initial position, that is, stick to the edge of the inner arc groove of the control board 3. In this way, when clamping the wafer, the contact area is as large as possible, which increases the stability during clamping.

[0033] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

Claims

1. A rotating assembly for a wafer inspection device with higher stability, comprising a body (1), characterized in that: A control shaft (2) is provided on one side of the bottom of the machine body (1), a fixing seat (5) is provided on the bottom of the control shaft (2), a main board (8) is provided on one side of the fixing seat (5), a control panel (3) is provided on one side of the main board (8), two control panels (3) are provided, the two control panels (3) are in a straight plate shape when the two control panels (3) are closed, and are in a clamping claw shape when the two control panels (3) are separated, and arc-shaped grooves are provided on opposite sides of the two control panels (3).

2. The rotating assembly for wafer inspection equipment with higher stability according to claim 1, characterized in that: A hydraulic chamber is provided inside the control panel (3), the interior of the hydraulic chamber is filled with hydraulic oil, one side of the hydraulic chamber is fixedly connected to a hydraulic oil passage (18), and a hydraulic rod (14) penetrates the front side of one side of the control panel (3).

3. The rotating assembly for wafer inspection equipment with higher stability according to claim 2, characterized in that: A top plate (12) is fixedly provided on one side of the hydraulic rod (14), a sealing plate (17) is provided on the other side of the hydraulic rod (14), a spring (16) is fixedly provided on one side of the sealing plate (17), and the sealing plate (17) can control the hydraulic oil to enter the hydraulic oil channel (18).

4. The rotating assembly for wafer inspection equipment with higher stability according to claim 1, characterized in that: A rotating shaft (15) is provided on the front and rear sides of one side of the control panel (3); a soft pad (11) is rotatably provided on one side of the rotating shaft (15); the soft pad (11) is made of rubber; and an arc-shaped rod (13) is fixedly provided on the bottom of one side of the soft pad (11).

5. The rotating assembly for wafer inspection equipment with higher stability according to claim 4, characterized in that: The other side of the arc-shaped rod (13) penetrates the control panel (3) and extends to the inside of the hydraulic oil channel (18); the other side of the arc-shaped rod (13) is sealed with the inside of the hydraulic oil channel (18); the arc-shaped rod (13) can push the cushion (11) to rotate with the rotation connection with the rotating shaft (15) as the center.

6. The rotating assembly for wafer inspection equipment with higher stability according to claim 1, characterized in that: A motor (4) is provided on one side of the bottom of the main board (8), a power wheel (6) is fixedly provided on the output shaft of the motor (4), control rods (9) are provided on both sides of the top of the main board (8), one side of the two control rods (9) are meshed with each other, and the top of one of the control rods (9) is meshed with the power wheel (6).

7. The rotating assembly for wafer inspection equipment with higher stability according to claim 6, characterized in that: A linkage rod (7) is rotatably provided on one side of the control rod (9), an auxiliary rod (10) is rotatably connected to one side of the linkage rod (7), the other side of the auxiliary rod (10) is rotatably connected to one side of the main board (8), and one side of the linkage rod (7) is fixedly connected to one side of the control board (3).

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