Film coating device with uniform gas distribution

Abstract

The utility model discloses a coating device with uniform gas distribution, comprising: a coating chamber, the left and right sides of which are respectively provided with an inlet and an outlet for transferring a workpiece to be coated; a plurality of cathode target materials parallel to the to-be-plated workpiece are arranged in the cathode chamber, the cathode chamber is provided with a front side and a rear side which are opposite to each other, the front side is open and communicated with the coating chamber, and an extraction opening is formed in the chamber wall of the rear side; the gas distribution pipe assembly is arranged in a space between two adjacent cathode target materials, and is provided with a gas outlet hole which is formed towards the rear side chamber wall; the blocking piece comprises a main body part and wing parts, the main body part is arranged between the rear side chamber wall and the gas distribution pipe assembly, the wing parts are located on the two sides of the main body part and extend towards the coating chamber in a bent mode, and the space defined by the blocking piece basically surrounds the cathode target material. Compared with the prior art, the distribution uniformity of gas in the coating device can be improved.

Description

Technical Field

[0001] The present application relates to the technical field of film coating devices, and in particular to a film coating device with uniform gas distribution. Background Art

[0002] The coating device usually includes a coating chamber and a rotating cathode target arranged in the coating chamber. During operation, the magnetic field and plasma gas are used to impact the surface of the cathode target so that the sputtered material is impacted and flies away from the target surface and deposited on the workpiece to be plated to form a thin film. The uniformity of the distribution of process gas in the coating chamber is one of the key factors affecting the uniformity of the coating thickness.

[0003] In existing coating devices, the conventional gas distribution method is to supply gas directly into the coating chamber from the air outlet of the gas distribution pipe toward the workpiece to be plated. However, the rotation of the cathode target, the movement of the workpiece carrier in the coating chamber and the exhaust during the coating process will cause the gas flow in the coating chamber to be turbulent, resulting in uneven coating thickness of the workpiece and affecting the quality of the plated workpiece. Utility Model Content

[0004] In view of the problems in the prior art, the present application provides a coating device with uniform gas distribution.

[0005] The coating device provided in the present application comprises:

[0006] The coating chamber has an inlet and an outlet for transferring the workpiece to be plated, respectively, on its left and right sides;

[0007] A cathode chamber, in which a plurality of cathode targets are arranged parallel to the workpiece to be plated are arranged, the cathode chamber has a front side and a rear side opposite to each other, the front side is open and connected to the coating chamber, and a chamber wall of the rear side is provided with an exhaust port;

[0008] An air distribution pipe assembly, the air distribution pipe assembly is arranged in the space between two adjacent cathode targets and has an air outlet arranged toward the rear chamber wall;

[0009] The blocking member includes a main body portion arranged between the rear chamber wall and the gas distribution pipe assembly and wing portions located on both sides of the main body portion and bent and extended toward the coating chamber. The space enclosed by the blocking member basically surrounds the cathode target.

[0010] Several optional methods are also provided below, but they are not intended to be additional limitations on the above-mentioned overall solution, but are merely further supplements or preferences. Under the premise that there are no technical or logical contradictions, each optional method can be combined with the above-mentioned overall solution separately, and multiple optional methods can also be combined.

[0011] Optionally, the gas distribution pipe assembly includes a main gas pipe extending in the same direction as the cathode target material and auxiliary gas pipes arranged on both sides of the main gas pipe.

[0012] Optionally, the auxiliary air pipe is a multi-section structure along the extension direction of the main air pipe.

[0013] Optionally, the auxiliary gas pipe is a three-section structure, corresponding to the top area, bottom area and middle area of ​​the cathode target material respectively.

[0014] Optionally, the angle between each section of the auxiliary air pipe and the main air pipe is adjustable.

[0015] Optionally, the main air pipe and each section of the auxiliary air pipe are independently configured with an air intake pipe.

[0016] Optionally, the air distribution pipe assembly is fixedly mounted on the inner side of the blocking member via a connecting assembly.

[0017] Optionally, the main body portion is arranged substantially parallel to the rear side chamber wall.

[0018] Compared with the prior art, the air distribution pipe assembly in the present application blows air away from the workpiece to be plated, and the provided blocking member can, on the one hand, allow the blown gas to diffuse into the coating chamber in a circuitous manner, and on the other hand, can reduce the interference of exhaust gas on the air flow diffusion in the coating chamber, which is beneficial to improving the uniformity of gas distribution in the coating chamber, thereby improving the coating effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a schematic structural diagram of a coating device in one embodiment of the present application;

[0020] Figure 2 A schematic diagram of a partial structure of a coating device in one embodiment;

[0021] Figure 3 is a cross-sectional view of a coating device in one embodiment;

[0022] Figure 4 It is the air flow diffusion diagram after the air distribution pipe assembly in the coating device is blown;

[0023] Figure 5 This is a schematic diagram of the structure of an air distribution pipe assembly in one embodiment;

[0024] Figure 6 This is a structural diagram of an intake pipe in which the main air pipe and each section of the auxiliary air pipe are independently configured in one embodiment.

[0025] The reference numerals in the figures are described as follows:

[0026] 100, coating room; 110, import; 120, export;

[0027] 200, cathode chamber; 210, cathode target; 220, front side; 230, rear side; 240, gas extraction port;

[0028] 300, air distribution pipe assembly; 310, main air pipe; 320, auxiliary air pipe; 321, first section of auxiliary air pipe; 322, second section of auxiliary air pipe; 323, third section of auxiliary air pipe;

[0029] 400, air intake pipe; 410, first air intake pipe; 420, second air intake pipe; 430, third air intake pipe; 440, fourth air intake pipe;

[0030] 500, blocking member; 510, main body; 520, wing;

[0031] 600, connection components;

[0032] 700. Bracket. DETAILED DESCRIPTION

[0033] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0034] It should be noted that when a component is referred to as being "connected" to another component, it may be directly connected to the other component or there may be a central component. When a component is referred to as being "disposed on" another component, it may be directly disposed on the other component or there may be a central component at the same time.

[0035] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those generally understood by those skilled in the art to which this application belongs. The terms used herein in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0036] See also Figures 1 to 6In one embodiment of the present application, a coating device is provided, including a coating chamber 100, a cathode chamber 200, an air distribution pipe assembly 300 and a blocking member 500, wherein the coating chamber 100 is provided with an inlet 110 and an outlet 120 on the left and right sides thereof for transferring the workpiece to be plated; a plurality of cathode targets 210 arranged parallel to the workpiece to be plated are provided inside the cathode chamber 200, and the cathode chamber 200 has a front side 220 and a rear side 230 opposite to each other, the front side 220 is open and connected to the coating chamber 100, and a chamber wall of the rear side 230 is provided with an air extraction port 240 for arranging An exhaust device such as a molecular pump is installed to exhaust air from the coating chamber 100; the air distribution pipe assembly 300 is arranged in the space between two adjacent cathode targets 210, and has an air outlet arranged toward the rear side 230 of the chamber wall; the blocking member 500 includes a main body 510 and a wing 520, wherein the main body is arranged between the rear side 230 of the chamber wall and the air distribution pipe assembly 300, and the wing 520 is located on both sides of the main body 510 and is bent and extended toward the coating chamber 100, and the space enclosed by the blocking member 500 basically surrounds the cathode target 210 and the air distribution pipe assembly 300.

[0037] In this embodiment, the cathode target 210 is usually a rotating target, and the air outlet of the gas distribution pipe assembly 300 faces the rear side 230 of the chamber wall. Compared with the conventional gas distribution method, it is beneficial to reduce the influence of the transfer of the workpiece carrier on the gas diffusion and improve the uniformity of gas distribution. The blocking member 500 is arranged to surround the cathode target 210 and the gas distribution pipe assembly 300, which can not only make the gas blown out of the gas distribution pipe assembly 300 diffuse into the coating chamber 100 through a circuitous way, but also can reduce the interference of the workpiece carrier movement and exhaust on the airflow diffusion in the coating chamber 100, which are all beneficial to improve the uniformity of gas distribution in the coating chamber 100, thereby improving the coating effect.

[0038] See also Figure 2 The blocking member 500 is fixed in the cathode chamber 200 through the bracket 700. Specifically, the bracket 700 has a slot that matches the outer contour of the main part 510. One side of the bracket 700 is fixed to the chamber wall of the rear side 230, and the main part 510 is engaged in the slot to achieve fixation. The main part 510 of the blocking member 500 is basically arranged parallel to the chamber wall of the rear side 230, so that most of the gas blown toward the rear side can be evenly diffused along the main part 510 and diffused to the front through the wing 520.

[0039] See also Figure 4 , 5In the illustrated embodiment, the gas distribution pipe assembly 300 includes a main gas pipe 310 and an auxiliary gas pipe 320, wherein the main gas pipe 310 and the cathode target 210 extend in the same direction, and the auxiliary gas pipe 320 is arranged on both sides of the main gas pipe 310. The auxiliary gas pipe 320 can improve the local gas non-uniformity in the coating chamber 100, such as the thin gas concentration in the top area of ​​the coating chamber 100 and the high gas concentration in the bottom area, so as to meet the requirements of the coating process, thereby improving the coating effect. Specifically, an auxiliary gas pipe 320 is arranged on both sides of the main gas pipe 310.

[0040] Furthermore, the auxiliary air pipe 320 is a multi-section structure extending along the main air pipe 310. Figure 5 The cathode target 210 is divided into a top area, a bottom area and a middle area, and the auxiliary gas pipe 320 is a three-section structure, namely the first section auxiliary gas pipe 321, the second section auxiliary gas pipe 322 and the third section auxiliary gas pipe 323, and the three sections of the auxiliary gas pipe correspond to the top area, the bottom area and the middle area of ​​the cathode target 210 respectively.

[0041] See also Figure 3 , 5 In the illustrated embodiment, the air distribution pipe assembly 300 is fixedly mounted on the inner side of the blocking member 500 through the connecting assembly 600. Specifically, the main air pipe 310 is vertically fixed between the top wall and the bottom wall of the coating chamber 100. The main air pipe 310 is provided with a plurality of air outlets at intervals along the extension direction. The auxiliary air pipe 320 is connected to the main air pipe 310 through the connecting assembly 600 and is fixedly mounted on the inner side of the blocking member 500. The connecting assembly 600 includes a connecting plate, and the connecting plate is provided with through holes for the main air pipe 310 and each section of the auxiliary air pipe 320 to pass through.

[0042] The angles of each section of the auxiliary gas pipe 320 relative to the main gas pipe 310 are adjustable, which is beneficial for effectively adjusting the local gas in the coating chamber 100 according to the actual coating working conditions, thereby facilitating improving the uniformity of the coating thickness.

[0043] In addition, the main air pipe 310 and each section of the auxiliary air pipe 320 are independently configured with an air intake pipe 400, for example Figure 6 The first air inlet pipe 410 is connected to the first section of the auxiliary air pipe 321, the second air inlet pipe 420 is connected to the main air pipe 310, the third air inlet pipe 430 is connected to the second section of the auxiliary air pipe 322, and the fourth air inlet pipe 440 is connected to the third section of the auxiliary air pipe 323, so as to facilitate the control of the operation of each air path and meet the requirements of different coating processes.

[0044] In the coating device of the present application, the air distribution pipe assembly 300 blows air in a direction away from the workpiece to be plated, and diffuses air into the coating chamber 100 through the blocking member 500, which can reduce the interference of the movement of the workpiece carrier on the airflow; the blocking member 500 blocks the exhaust port 240 to prevent the exhaust from directly affecting the gas diffusion; the above-mentioned structural designs are all conducive to improving the uniformity of gas distribution in the coating chamber 100, thereby improving the uniformity of the coating thickness.

[0045] The technical features of the above-mentioned embodiments can be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification. When the technical features in different embodiments are embodied in the same figure, it can be regarded that the figure also discloses the combination examples of the various embodiments involved.

[0046] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the present application. It should be noted that, for a person of ordinary skill in the art, several modifications and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the present application shall be subject to the attached claims.

Claims

1. A coating device with uniform gas distribution, characterized in that: include: The coating chamber has an inlet and an outlet for transferring the workpiece to be plated, respectively, on its left and right sides; A cathode chamber, in which a plurality of cathode targets are arranged parallel to the workpiece to be plated are arranged, the cathode chamber has a front side and a rear side opposite to each other, the front side is open and connected to the coating chamber, and a chamber wall of the rear side is provided with an exhaust port; An air distribution pipe assembly, the air distribution pipe assembly is arranged in the space between two adjacent cathode targets and has an air outlet arranged toward the rear chamber wall; The blocking member includes a main body portion arranged between the rear chamber wall and the gas distribution pipe assembly and wing portions located on both sides of the main body portion and bent and extended toward the coating chamber. The space enclosed by the blocking member basically surrounds the cathode target.

2. The coating device according to claim 1, characterized in that: The gas distribution pipe assembly includes a main gas pipe extending in the same direction as the cathode target material and auxiliary gas pipes arranged on both sides of the main gas pipe.

3. The coating device according to claim 2, characterized in that: The auxiliary air pipe is a multi-section structure along the extension direction of the main air pipe.

4. The coating device according to claim 3, characterized in that: The auxiliary gas pipe is a three-section structure, corresponding to the top area, the bottom area and the middle area of ​​the cathode target material respectively.

5. The coating device according to claim 3, characterized in that: The angle between each section of the auxiliary air pipe and the main air pipe is adjustable.

6. The coating device according to claim 3, characterized in that: The main air pipe and each section of the auxiliary air pipe are independently configured with an air intake pipe.

7. The coating device according to claim 1, characterized in that: The air distribution pipe assembly is fixedly installed on the inner side of the blocking member through a connecting assembly.

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