Ejector pin assembly, ejector pin device, jacking device and electrostatic chuck device

Abstract

The utility model provides an ejector pin assembly, an ejector pin device, a jacking device and an electrostatic chuck device. The ejector pin assembly comprises a fixing base and an ejector pin. Wherein the fixed seat comprises a fixed part and an inserting part arranged on the fixed part, the inserting part comprises a plurality of separating parts which are fixed on the fixed part and are distributed circumferentially, and an inserting hole with an upward opening is formed in the middle of the inserting part formed by the plurality of separating parts in a surrounding manner; a separation gap is formed between every two adjacent separation parts in the circumferential direction of the insertion hole; annular limiting parts arranged in the axial direction are arranged on the inner wall of the inserting hole. An annular matching part is axially arranged on the outer wall of the bottom end of the ejector pin; the bottom end of the ejector pin is inserted into the inserting hole of the fixing base, and the annular matching part and the annular limiting part in the inserting hole are in mutual limiting nesting fit. The ejector pin of the ejector pin assembly and the insertion hole in the fixed seat form a nested fastening matching structure, so that the ejector pin is not easy to fall off from the fixed seat, and the service life of the ejector pin assembly is prolonged.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to an ejector pin assembly, an ejector pin device, a lifting device and an electrostatic chuck device. Background Art

[0002] With the rapid development of semiconductor technology, high-density plasma chemical vapor deposition (HDP CVD) technology plays an increasingly important role in the field of integrated circuit manufacturing. This technology achieves uniform deposition of materials on the surface of silicon wafers through plasma excitation of chemical gases in a chamber, which is a key step in manufacturing high-quality semiconductor devices.

[0003] In the HDP CVD process, the transfer and positioning accuracy of silicon wafers have a decisive influence on the stability of the entire process and the quality of the final product. The traditional silicon wafer transfer system usually uses a ceramic pin to lift the silicon wafer on the electrostatic chuck, and then cooperates with a buffer blade to receive the silicon wafer to achieve the transfer of the silicon wafer.

[0004] However, the lift pins in the existing silicon wafer transfer system are usually fixed on the holder by means of a tight fit, relying on the friction between them. Although this fixing method is simple, as the use time increases, due to mechanical wear and environmental factors, the tight fit may become loose, the friction force decreases, and the clamping force gradually decreases, which in turn causes the lift pin to be unable to be fixed, or anomalies occur during the movement process, resulting in the inability to smoothly lift the silicon wafer from the surface of the electrostatic chuck, affecting the smooth transfer of the silicon wafer, causing anomalies in the process, and may also cause the buffer thin blade to scratch the surface of the silicon wafer. Utility Model Content

[0005] The purpose of the embodiments of the present application is to provide a pin assembly, a pin device, a lifting device and an electrostatic suction cup device, wherein the pin of the pin assembly and the plug-in hole in the fixing seat form a nested and fastened fitting structure, so that the pin will not easily fall off the fixing seat, which is beneficial to improving the service life of the pin assembly.

[0006] In the first aspect, a pin assembly is provided for an electrostatic suction cup, wherein the pin assembly comprises a fixed seat and a pin. The fixed seat comprises a fixed portion and a plug-in portion arranged on the fixed portion, wherein the plug-in portion comprises a plurality of separation portions fixed on the fixed portion and forming a circumferential distribution, wherein a plug-in hole with an opening facing upward is arranged in the middle of the plug-in portion formed by the plurality of separation portions; separation gaps are arranged between adjacent separation portions along the circumferential direction of the plug-in hole; and an annular limiting portion arranged axially is arranged on the inner wall of the plug-in hole. An annular matching portion arranged axially is arranged on the outer wall of the bottom end of the pin; the bottom end of the pin is inserted into the plug-in hole of the fixed seat, and the annular matching portion and the annular limiting portion in the plug-in hole form a mutually limiting nested fit.

[0007] In an operative solution, the annular limiting portion of the fixing seat includes a plurality of first annular protrusions, which are arranged on the inner wall of the plug-in hole and arranged axially, and a limiting gap is formed between adjacent first annular protrusions and between the bottommost first annular protrusion and the bottom surface of the plug-in hole;

[0008] The annular matching portion of the ejector pin includes a plurality of second annular protrusions arranged axially and arranged on the outer wall of the bottom end of the ejector pin; when the bottom end of the ejector pin is inserted into the plug hole of the fixing seat, the second annular protrusions cooperate with the limit gap of the plug hole.

[0009] In an implementable solution, the annular mating portion of the ejector pin further includes a second annular recess provided on the outer wall of the bottom end of the ejector pin, and the second annular recess is located on the upper side and / or the lower side of the second annular protrusion;

[0010] After the bottom end of the ejector pin is inserted into the plug-in hole of the fixing seat, the first annular protrusion and the second annular recess on the inner wall of the plug-in hole cooperate with each other.

[0011] In an operative solution, the annular limiting portion of the fixing seat includes a plurality of first annular recesses, which are arranged on the inner wall of the plug hole and arranged along the axial direction;

[0012] The annular matching portion of the ejector pin includes a plurality of second annular protrusions arranged axially and arranged on the outer wall of the bottom end of the ejector pin; when the bottom end of the ejector pin is inserted into the plug hole of the fixing seat, the second annular protrusions cooperate with the first annular recess of the plug hole.

[0013] In an implementable solution, the outer wall of the plug-in portion is a tapered outer wall that is smaller at the top and larger at the bottom, and the tapered outer wall is provided with a tapered thread;

[0014] The ejector assembly also includes a cone nut. After the bottom end of the ejector is inserted into the plug hole of the fixing seat, the cone nut passes through the ejector and cooperates with the cone thread on the outer wall of the plug part.

[0015] According to a second aspect of the present application, there is also provided a pin device for an electrostatic chuck, the pin device comprising a base and a pin assembly disposed on the base, the pin assembly being the pin assembly in the aforementioned solution.

[0016] In an implementable solution, at least three evenly distributed mounting positions are provided on the base, and a ejector assembly is installed on each mounting position, and the heights of the multiple ejector assemblies are completely consistent;

[0017] The fixing seat of the ejector assembly is fixed on the installation position of the base, and the bottom end of the ejector of the ejector assembly is inserted into the plug-in hole of the fixing seat.

[0018] According to the second aspect of the present application, a lifting device is also provided for an electrostatic suction cup. The lifting device includes the ejector pin device in the aforementioned scheme, and also includes a connecting rod and a driving device. One end of the connecting rod is connected to the base of the ejector pin device, and the other end is connected to the driving device. The driving device is used to drive the base to rise and fall through the connecting rod.

[0019] According to a second aspect of the present application, an electrostatic chuck device is further provided, the electrostatic chuck device comprising the lifting device in the aforementioned solution, and further comprising an electrostatic chuck, wherein a pin device of the lifting device is arranged below the electrostatic chuck, and a through hole penetrating from top to bottom is arranged on the electrostatic chuck, and a pin of the pin device is inserted into the through hole;

[0020] When the base of the ejector device rises to a predetermined height, all the ejectors rise synchronously and penetrate through the through-holes to a predetermined height.

[0021] Compared with the prior art, the beneficial effects of the present application include at least:

[0022] In the ejector assembly of the present application, during the process of inserting the bottom of the ejector into the plug-in hole of the fixing seat, the extrusion force when the bottom of the ejector is inserted into the plug-in hole causes the separation portion to produce separation deformation toward the circumferential outer side, so that the bottom of the ejector is smoothly inserted into the plug-in hole. When the annular matching portion of the ejector and the annular limiting portion in the plug-in hole form a mutually limited nesting fit, the ejector no longer squeezes the plug-in hole or the extrusion force becomes smaller. At this time, the separation portion restores its initial shape or the separation deformation toward the circumferential outer side is reduced, so that the annular limiting portion in the plug-in hole can form a stable nesting fit with the annular matching portion of the ejector, thereby fixing the ejector more firmly.

[0023] The annular mating portion of the ejector pin and the annular limiting portion in the plug-in hole are nested and cooperate with each other, and no longer rely on friction to fasten the ejector pin. Therefore, even if the friction weakens in the later stage, the nested cooperation can still ensure that the ejector pin is stably plugged into the fixing seat, so that the ejector pin will not fall off from the fixing seat easily, thereby ensuring that the ejector pin can stably play a lifting role over a longer service life, which is beneficial to prolonging the service life of the ejector pin assembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0025] Figure 1 is a stereoscopic diagram of an ejector pin assembly according to an embodiment of the present application;

[0026] Figure 2 for Figure 1 A three-dimensional view of the fixing seat of the middle ejector assembly;

[0027] Figure 3 for Figure 1 A stereoscopic view of the ejector pin of the middle ejector pin assembly;

[0028] Figure 4 A structural diagram showing the separation of the fixing seat and the ejector pin of the first ejector pin assembly according to an embodiment of the present application;

[0029] Figure 5 for Figure 4 The cross-sectional view of the middle fixing seat and the ejector pin after they are matched;

[0030] Figure 6 A structural diagram showing the separation of the fixing seat and the ejector pin of the second ejector pin assembly according to an embodiment of the present application;

[0031] Figure 7 for Figure 6 The cross-sectional view of the middle fixing seat and the ejector pin after they are matched;

[0032] Figure 8 A structural diagram of a third ejector assembly with a fixed seat and ejector separated according to an embodiment of the present application;

[0033] Fig. 9 for Figure 8 The cross-sectional view of the middle fixing seat and the ejector pin after they are matched;

[0034] Fig.10 A three-dimensional diagram of a pin assembly with an external thread provided on a fixing seat according to an embodiment of the present application;

[0035] Fig.11 for Fig.10 Schematic diagram of partial structure explosion of the ejector pin assembly;

[0036] Fig.12 is a three-dimensional diagram of an ejector device according to an embodiment of the present application;

[0037] Fig.13is a schematic diagram of a lifting device according to an embodiment of the present application;

[0038] Fig.14 Schematic diagram of an electrostatic chuck device according to an embodiment of the present application.

[0039] In the figure: 100, ejector device; 10, ejector assembly; 1, fixing seat; 11, plug-in portion; 111, separation portion; 12, fixing portion; 13, plug-in hole; 14, separation gap; 15, annular limiting portion; 151, first annular protrusion; 1511, limiting gap; 152, first annular recess; 16, tapered thread; 2, ejector; 21, annular matching portion; 211, second annular protrusion; 212, second annular recess; 3, tapered nut; 20, base; 30, connecting rod; 40, driving device; 50, electrostatic suction cup; 51, through hole; 200, lifting device; 300, electrostatic suction cup device. DETAILED DESCRIPTION

[0040] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0041] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0042] like Figures 1 to 3 As shown, firstly, a pin assembly 10 is provided for an electrostatic chuck. The pin assembly 10 includes a fixing seat 1 and a pin 2 .

[0043] The fixing seat 1 includes a fixing portion 12 and a plug-in portion 11 arranged on the fixing portion 12. The plug-in portion 11 includes a plurality of separation portions 111 fixed on the fixing portion 12 and distributed in a circumferential manner. A plug-in hole 13 with an opening facing upward is arranged in the middle of the plug-in portion 11 surrounded by the plurality of separation portions 111. A separation gap 14 is arranged between adjacent separation portions 111 along the circumferential direction of the plug-in hole 13. An annular limiting portion 15 arranged along the axial direction is arranged on the inner wall of the plug-in hole 13. An annular matching portion 21 arranged along the axial direction is arranged on the outer wall of the bottom end of the ejector pin 2. The bottom end of the ejector pin 2 is inserted into the plug-in hole 13 of the fixing seat 1, and the annular matching portion 21 forms a mutually limiting nested fit with the annular limiting portion 15 in the plug-in hole 13. It should be noted that the separation portion 111 has a certain elasticity and can produce a certain separation deformation under the insertion and extrusion of the ejector pin 2. When the ejector pin 2 is not extruded, the separation portion 111 recovers.

[0044] In the ejector assembly 10 of the present embodiment, during the process of inserting the bottom of the ejector 2 into the plug hole 13 of the fixing seat 1, the extrusion force when the bottom of the ejector 2 is inserted into the plug hole 13 causes the separation portion 111 to produce separation deformation toward the circumferential outer side, so that the bottom of the ejector 2 is smoothly inserted into the plug hole 13. When the annular matching portion 21 of the ejector 2 and the annular limiting portion 15 in the plug hole 13 form a mutually limited nesting fit, the ejector 2 no longer squeezes the plug hole 13 or the extrusion force becomes smaller. At this time, the separation portion 111 restores its initial shape or the separation deformation toward the circumferential outer side is reduced, so that the annular limiting portion 15 in the plug hole 13 can form a stable nesting fit with the annular matching portion 21 of the ejector 2, so that the ejector 2 is fixed more firmly.

[0045] The nested cooperation between the annular matching portion 21 of the ejector pin 2 and the annular limiting portion 15 in the plug-in hole 13 no longer relies on the friction force to fasten the ejector pin 2. Therefore, even if the friction force weakens in the later stage, the nested cooperation can still ensure that the ejector pin 2 is stably plugged into the fixing seat 1, so that the ejector pin 2 will not fall off from the fixing seat 1 easily, thereby ensuring that the ejector pin 2 can stably play a lifting role in a longer service life, which is beneficial to prolonging the service life of the ejector pin assembly.

[0046] In one embodiment, if Figure 4 and Figure 5As shown, the annular limiting portion 15 of the fixing seat 1 may include a plurality of first annular protrusions 151, which are arranged on the inner wall of the plug hole 13 and arranged in the axial direction, and a limiting gap 1511 is formed between adjacent first annular protrusions 151 and between the bottommost first annular protrusion 151 and the bottom surface of the plug hole 13. The annular matching portion 21 of the ejector pin 2 may include a plurality of second annular protrusions 211 arranged in the axial direction and arranged on the outer wall of the bottom end of the ejector pin 2; when the bottom end of the ejector pin 2 is inserted into the plug hole 13 of the fixing seat 1, the second annular protrusion 211 cooperates with the limiting gap 1511 of the plug hole 13, thereby achieving the fastening effect on the ejector pin 2.

[0047] for Figure 4 The matching structure of the annular matching portion 21 and the annular limiting portion 15 shown in the figure realizes the axial fastening of the ejector pin by providing a plurality of first annular protrusions 151 on the inner wall of the plug hole 13 of the fixing seat and providing a plurality of second annular protrusions 211 on the annular matching portion 21 of the ejector pin. The limiting gap 1511 formed by the axial arrangement of the first annular protrusions 151 provides a precise positioning point for the second annular protrusion 211 of the ejector pin 2, ensuring that the ejector pin can be accurately aligned when inserted. The matching of the second annular protrusion 211 and the limiting gap 1511 realizes the reliable fastening of the ejector pin 2, reduces the loosening of the ejector pin 2 caused by vibration or external force, and improves the stability and durability of the overall structure.

[0048] In one embodiment, if Figure 6 and Figure 7 As shown, the annular mating portion 21 of the ejector pin 2 may further include a second annular recess 212 disposed on the outer wall of the bottom end of the ejector pin 2, and the second annular recess 212 is located on the upper side and / or the lower side of the second annular protrusion 211. After the bottom end of the ejector pin 2 is inserted into the plug hole 13 of the fixing seat 1, the first annular protrusion 151 on the inner wall of the plug hole 13 cooperates with the second annular recess 212, thereby achieving a better nested limiting effect.

[0049] for Figure 6 The matching structure of the annular matching portion 21 and the annular limiting portion 15 shown in FIG. Figure 4The fixing seat 1 and the ejector pin 2 shown in the figure are further refined by adding a second annular recess 212 to the annular matching portion 21 of the ejector pin 2, thereby further improving the matching accuracy and fastening effect between the two. On the basis of the matching between the second annular protrusion 211 and the limit gap 1511, the matching between the second annular recess 212 and the first annular protrusion 151 is added, which increases the contact points and improves the tightness and stability of the nesting. By providing the second annular recess 212 on the ejector pin 2, the stress can be distributed more evenly, the local stress concentration can be reduced, and the service life can be extended. The addition of the second annular recess 212 makes the fastening of the ejector pin 2 in the fixing seat 1 more reliable, reduces the loosening or falling off caused by external force, and makes the nesting of the ejector pin 2 in the fixing seat 1 more stable, and can maintain a good fixing effect even under dynamic load or vibration environment.

[0050] In one embodiment, if Figure 8 and Fig. 9 As shown, the annular limiting portion 15 of the fixing seat 1 may include a plurality of first annular recesses 152, but does not include Figure 4 or Figure 6 The first annular protrusion 151 and the first annular recess 152 are arranged on the inner wall of the plug hole 13 and arranged in the axial direction. The annular matching portion 21 of the ejector pin 2 includes a plurality of second annular protrusions 211 arranged in the axial direction and arranged on the outer wall of the bottom end of the ejector pin 2; when the bottom end of the ejector pin 2 is inserted into the plug hole 13 of the fixing seat 1, the second annular protrusion 211 and the first annular recess 152 of the plug hole 13 cooperate with each other.

[0051] for Figure 8 In the matching structure of the annular matching portion 21 and the annular limiting portion 15 shown, the annular limiting portion 15 of the fixing seat adopts a plurality of first annular recesses 152 to replace the original first annular protrusion 151, while the annular matching portion 21 of the ejector pin 2 maintains the configuration of the second annular protrusion 211. The use of the first annular recess 152 to replace the first annular protrusion 151 may reduce the friction and wear between the ejector pin 2 and the internal contact surface of the plug hole 13 when inserting and removing it, thereby extending the service life of the components.

[0052] In one embodiment, if Fig.10 and Fig.11 As shown, the outer wall of the plug-in portion 11 may be a tapered outer wall with a small top and a large bottom, and the tapered outer wall may be provided with a tapered thread 16. The ejector assembly 10 may further include a tapered nut 3, and after the bottom end of the ejector 2 is inserted into the plug-in hole 13 of the fixing seat 1, the tapered nut 3 passes through the ejector 2 and cooperates with the tapered thread 16 of the outer wall of the plug-in portion 11.

[0053] Fig.10The scheme further increases the matching structure of the plug-in portion 11 and the cone nut 3. In this structural design, the matching of the cone thread 16 of the cone outer wall and the cone nut 3 can provide a greater tightening force through the rotation of the cone nut 3, ensuring that the ejector pin 2 is stably fixed in the fixing seat 1. The structural design of the cone thread 16 of the cone outer wall and the cone nut 3 helps to distribute the tightening force more evenly, reduce local stress concentration, and improve the durability of the overall structure. The cone nut 3 can be tightened or loosened by a simple rotation operation, which is convenient for installation and maintenance and improves the convenience of operation.

[0054] The cooperation between the tapered thread 16 and the tapered nut 3 provides a reliable fastening effect, reducing the possibility of the ejector pin 2 loosening or falling off due to vibration or external force. Specifically, the cooperation between the tapered thread 16 of the tapered outer wall and the tapered nut 3 makes the separation portion 111 of the plug-in portion 11 tend to move toward the center, thereby further clamping the ejector pin 2, making the ejector pin 2 more stably fixed in the fixing seat 1, and improving the stability and durability of the overall structure.

[0055] like Fig.12 As shown, an embodiment of the present application further provides a pin device 100 for an electrostatic chuck, wherein the pin device 100 comprises a base 20 and a pin assembly disposed on the base 20, wherein the pin assembly is the pin assembly 10 in the aforementioned solution.

[0056] In this embodiment, if Fig.12 As shown, at least three evenly distributed mounting positions are arranged on the base 20 of the ejector device 100, and an ejector assembly 10 is mounted on each mounting position, and the heights of the plurality of ejector assemblies 10 are completely consistent. Among them, the fixing seat 1 of the ejector assembly 10 is fixed on the mounting position of the base 20, and the bottom end of the ejector 2 of the ejector assembly 10 is inserted into the plug hole 13 of the fixing seat 1.

[0057] like Fig.13 As shown, an embodiment of the present application further provides a lifting device 200 for an electrostatic suction cup. The lifting device 200 includes the ejector pin device 100 in the aforementioned scheme, and also includes a connecting rod 30 and a driving device 40. One end of the connecting rod 30 is connected to the base 20 of the ejector pin device, and the other end is connected to the driving device 40. The driving device 40 is used to drive the base 20 to rise and fall through the connecting rod 30.

[0058] like Fig.14As shown, the embodiment of the present application further provides an electrostatic chuck device 300, which includes the lifting device 200 in the aforementioned solution, and also includes an electrostatic chuck 50, the ejector device 100 of the lifting device 200 is arranged below the electrostatic chuck 50, and the electrostatic chuck 50 is provided with a through hole 51 that runs through from top to bottom, and the ejector pin 2 of the ejector pin device 100 is inserted into the through hole 51. When the base 20 of the ejector pin device 100 is raised to a predetermined height, all the ejector pins 2 are synchronously raised and pass through the through hole 51 to a predetermined height.

[0059] The above description is only the preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A pin assembly for an electrostatic chuck, characterized in that: The ejector assembly includes: A fixing seat, comprising a fixing portion and a plug-in portion arranged on the fixing portion, wherein the plug-in portion comprises a plurality of separation portions fixed on the fixing portion and arranged in a circumferential distribution, a plug-in hole with an opening facing upward is arranged in the middle of the plug-in portion formed by the plurality of separation portions; separation gaps are arranged between adjacent separation portions along the circumferential direction of the plug-in hole; and an annular limiting portion arranged in the axial direction is arranged on the inner wall of the plug-in hole; The ejector pin has an outer wall at the bottom end provided with an annular matching portion arranged along its axial direction; the bottom end of the ejector pin is inserted into the plug-in hole of the fixing seat, and the annular matching portion and the annular limiting portion in the plug-in hole form a mutually limiting nested match.

2. The ejector pin assembly according to claim 1, characterized in that: The annular limiting portion of the fixing seat includes a plurality of first annular protrusions, which are arranged on the inner wall of the plug hole and arranged in the axial direction, and a limiting gap is formed between adjacent first annular protrusions and between the bottommost first annular protrusion and the bottom surface of the plug hole; The annular mating portion of the ejector pin includes a plurality of second annular protrusions arranged axially and provided on the outer wall of the bottom end of the ejector pin; when the bottom end of the ejector pin is inserted into the plug-in hole of the fixing seat, the second annular protrusions cooperate with the limit stop of the plug-in hole.

3. The ejector pin assembly according to claim 2, characterized in that: The annular matching portion of the ejector pin further comprises a second annular recess provided on the outer wall of the bottom end of the ejector pin, wherein the second annular recess is located on the upper side and / or the lower side of the second annular protrusion; After the bottom end of the ejector pin is inserted into the plug-in hole of the fixing seat, the first annular protrusion on the inner wall of the plug-in hole cooperates with the second annular recess.

4. The ejector pin assembly according to claim 1, characterized in that: The annular limiting portion of the fixing seat includes a plurality of first annular recesses, which are arranged on the inner wall of the plug hole and arranged along the axial direction; The annular mating portion of the ejector pin includes a plurality of second annular protrusions arranged axially and provided on the outer wall of the bottom end of the ejector pin; when the bottom end of the ejector pin is inserted into the plug-in hole of the fixing seat, the second annular protrusions cooperate with the first annular recess of the plug-in hole.

5. The ejector pin assembly according to any one of claims 1 to 4, characterized in that: The outer wall of the plug-in portion is a tapered outer wall that is smaller at the top and larger at the bottom, and the tapered outer wall is provided with a tapered thread; The ejector assembly further comprises a conical nut. After the bottom end of the ejector is inserted into the plug hole of the fixing seat, the conical nut passes through the ejector and cooperates with the conical thread of the outer wall of the plug portion.

6. A pin device for an electrostatic chuck, characterized in that: The ejector device comprises a base and an ejector assembly arranged on the base, and the ejector assembly is the ejector assembly according to any one of claims 1 to 4.

7. The ejector device according to claim 6, characterized in that: At least three evenly distributed installation positions are arranged on the base, one ejector assembly is installed on each installation position, and the heights of the plurality of ejector assemblies are completely consistent; Wherein, the fixing seat of the ejector assembly is fixed on the mounting position of the base, and the bottom end of the ejector of the ejector assembly is inserted into the plug-in hole of the fixing seat.

8. A lifting device for an electrostatic chuck, characterized in that: The lifting device includes the ejector device as described in claim 6 or 7, and also includes a connecting rod and a driving device, one end of the connecting rod is connected to the base of the ejector device, and the other end is connected to the driving device, and the driving device is used to drive the base to rise and fall through the connecting rod.

9. An electrostatic chuck device, characterized in that: The electrostatic chuck device comprises the lifting device as claimed in claim 8, and further comprises an electrostatic chuck, wherein a pin device of the lifting device is arranged below the electrostatic chuck, and a through hole is arranged on the electrostatic chuck extending vertically, and a pin of the pin device is inserted into the through hole; When the base of the ejector device rises to a predetermined height, all the ejectors rise synchronously and pass through the through holes to a predetermined height.

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