Process chamber and roll-to-roll processing system

Abstract

The utility model relates to a process chamber and a roll-to-roll processing system. The process chamber comprises a shell, a preheating assembly, a high-temperature heating assembly, a heat preservation assembly and a heat preservation plate. The preheating assembly is used for preheating the surface of a base material to be heated, and the high-temperature heating assembly and the preheating assembly are sequentially arranged and used for heating the preheated base material. The heat preservation assembly and the high-temperature heating assembly are arranged in sequence and used for conducting heat preservation on the heated base material. The heat preservation plate is arranged towards the base material and used for conducting heat preservation on the preheating assembly area and the high-temperature heating assembly area. The preheating assembly, the high-temperature heating assembly, the heat preservation assembly and the heat preservation plate are all arranged in the shell. The shell of the process chamber seals and stores heat generated by the preheating assembly and the high-temperature assembly, at the moment, the temperature in the process chamber is in a uniform state, the upper surface and the lower surface of a base material passing through the process chamber are uniformly heated, and therefore the growth consistency of graphene on the surface of the base material is guaranteed.

Description

Technical Field

[0001] The utility model relates to the field of graphene film preparation, in particular to a process chamber and a roll-to-roll processing system. Background Art

[0002] At present, the mainstream method for preparing graphene films is to use chemical vapor deposition (CVD) synthesis technology, so CVD vacuum roll-to-roll equipment is a conventional equipment used to prepare graphene films. However, due to the complex process of CVD vacuum roll-to-roll equipment and CVD synthesis technology, and the size of CVD vacuum roll-to-roll equipment, the CVD vacuum roll-to-roll equipment grows in a tube, and the size of the tube limits the growth of the film width direction, resulting in low preparation efficiency and high cost. Secondly, due to the limitations of the heating mechanism of CVD vacuum roll-to-roll equipment, there will be local temperature differences when the temperature rises inside the cavity, and the temperature of each part of the whole is uneven, which affects the uniformity of graphene growth. In addition, since CVD synthesis technology uses carbon-containing gases such as methane as a carbon source for graphene growth, the current CVD vacuum roll-to-roll equipment is also difficult to solve the problem of uneven atmosphere, which also affects the growth quality of graphene. Utility Model Content

[0003] In order to compensate for the problem of the prior art affecting the uniformity of graphene growth and solve the problem of uneven temperature and atmosphere of the heated substrate, the embodiment of the utility model provides a process chamber and a roll-to-roll processing system. By setting up the process chamber, the substrate is heated more evenly, thereby improving the growth quality of graphene.

[0004] In order to solve the above technical problems, the embodiments of the present invention provide the following technical solutions.

[0005] In the first aspect, an embodiment of the utility model provides a process chamber. The process chamber includes: a shell, a preheating component, a high-temperature heating component, a heat-insulating component and a heat-insulating plate. The preheating component is used to preheat the surface of a substrate to be heated. The high-temperature heating component and the preheating component are arranged in sequence, and are used to heat the substrate that has been preheated. The heat-insulating component and the high-temperature heating component are arranged in sequence, and are used to keep the substrate warm after heating. The heat-insulating plate is arranged toward the substrate, and is also used to keep the preheating component area and the high-temperature heating component area warm. The preheating component, the high-temperature heating component, the heat-insulating component and the heat-insulating plate are all arranged in the shell.

[0006] In another aspect, both the preheating assembly and the high temperature heating assembly include: a first electromagnetic heating element for preheating or heating a first surface of the substrate.

[0007] In another aspect, the preheating assembly and the high temperature heating assembly further include: a second electromagnetic heating element. The second electromagnetic heating element is used to preheat or heat a second surface of the substrate that is away from the first surface.

[0008] In another aspect, the first electromagnetic heating element and the second electromagnetic heating element are both independent electromagnetic heating coils, and the radiation surfaces of the electromagnetic heating coils are arranged toward the second surface and the first surface of the substrate.

[0009] In another aspect, the preheating assembly and the high temperature heating assembly both further include: a first roller and a second roller. The substrate to be heated is wound around the first roller, the first roller is in contact with the second surface, and the first roller guides the substrate to move. The second roller and the first roller are arranged parallel to each other, the substrate after leaving the first roller is wound around the second roller, the first surface is in contact with the second roller, and the second roller guides the substrate to move.

[0010] In another aspect, electromagnetic heating coils are also disposed inside the first roller and the second roller.

[0011] In another aspect, the process chamber further comprises: a high temperature guide assembly. The high temperature guide assembly is disposed in the housing and is used to carry the substrate and guide the substrate to the preheating assembly.

[0012] In the second aspect, some embodiments of the utility model further disclose a roll-to-roll processing system, which includes the above-mentioned process chamber. In addition, the roll-to-roll processing system also includes: an unwinding chamber, a cooling chamber and a winding chamber. The unwinding chamber is used to unwind the wound substrate material and send it to the process chamber. The inlet of the cooling chamber is sealed and connected to the outlet of the process chamber. The substrate leaves the process chamber from the outlet of the process chamber and enters the cooling chamber through the inlet of the cooling chamber. The cooling chamber cools the substrate entering the cooling chamber. The winding chamber is sealed and connected to the cooling chamber to wind the cooled substrate to form a substrate roll.

[0013] Preferably, the roll-to-roll processing system further comprises: a pretreatment chamber. The pretreatment chamber is arranged between the unwinding chamber and the process chamber, and is used to perform coating treatment on the substrate before heating, and to perform carbon source layer coating and surface metallization treatment on the surface of the substrate after coating.

[0014] Preferably, a coating device or a magnetron sputtering device is provided in the pretreatment chamber for coating or metallizing the substrate entering the pretreatment chamber.

[0015] Preferably, the cooling chamber is provided with: a plurality of cooling water-cooled rollers. The plurality of cooling water-cooled rollers are arranged in parallel in the housing, and a coolant continuously flows through the cooling water-cooled rollers; after the substrate enters the cooling chamber, it is wound around the cooling water-cooled rollers, and the cooling water-cooled rollers carry and transport the substrate. The unwinding chamber is also provided with a first air extraction hole, and the first air extraction hole is used to extract air out of the unwinding chamber to form a vacuum in the unwinding chamber. The winding chamber is also provided with a second air extraction hole, and the second air extraction hole is used to extract air out of the winding chamber.

[0016] Preferably, the cooling chamber is further provided with: at least one air cooling device. The air cooling device is arranged in the cooling chamber and is used to blow air toward the surface of the substrate to reduce the temperature of the substrate surface.

[0017] Compared with the prior art, the beneficial effects of the embodiments of the utility model are:

[0018] Each chamber is independently distributed, and the temperature influence between each other is small. In addition, a preheating component and a heating component are arranged in the process chamber. The substrate is preheated by the preheating component, so that the substrate can be better heated and heated more evenly when passing through the heating component. Furthermore, thanks to the uniform heating of the substrate, the graphene on the surface of the substrate can obtain a better growth environment, and the growth process of the graphene can obtain better uniformity, thereby improving the quality and uniformity of the prepared graphene. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The embodiments of the present invention are described in conjunction with the accompanying drawings to better understand the embodiments of the present invention. In the accompanying drawings:

[0020] Figure 1 A schematic structural diagram showing a process chamber according to an implementation of the first embodiment of the utility model;

[0021] Figure 2 A schematic diagram showing the structure of a process chamber according to an implementation of the second embodiment of the utility model;

[0022] Figure 3 A schematic diagram showing the structure of a process chamber according to an implementation of the third embodiment of the utility model;

[0023] Figure 4 A schematic diagram showing the structure of an electromagnetic heating element according to a third embodiment of the present utility model;

[0024] Figure 5 A schematic structural diagram showing a roll-to-roll processing system according to an implementation mode of an embodiment of the present utility model;

[0025] Figure 6 A schematic structural diagram of a roll-to-roll processing system according to an implementation of an embodiment of the utility model is shown.

[0026] In the above drawings, the meanings of the reference numerals are as follows:

[0027] Unwinding room 1;

[0028] Pretreatment chamber 2;

[0029] Craft Room 3;

[0030] Cooling chamber 4;

[0031] Rolling room 5;

[0032] Control device 6;

[0033] First air extraction hole 7;

[0034] Unwinding roller 8;

[0035] Coating device 9;

[0036] High temperature guide assembly 10;

[0037] Preheating component 11;

[0038] High temperature heating component 12;

[0039] Insulation component 13;

[0040] Insulation board 14;

[0041] Low temperature guide roller 15;

[0042] Cooling water-cooled roller 16;

[0043] Air cooling device 17;

[0044] Second air extraction hole 18;

[0045] Winding roller 19;

[0046] A first electromagnetic heating element 100;

[0047] First roller 101;

[0048] Substrate 102;

[0049] A second roller 103;

[0050] The second electromagnetic heating element 104 . DETAILED DESCRIPTION

[0051] Unless otherwise defined, the technical terms or scientific terms used in this specification and claims shall have the common meanings understood by persons having ordinary skills in the technical field to which the present invention belongs.

[0052] All numerical values ​​from the lowest value to the highest value listed in this article refer to all numerical values ​​obtained by increments of one unit between the lowest value and the highest value when the difference between the lowest value and the highest value is more than two units.

[0053] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0054] In addition, the terms "first", "second", etc. are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, a feature defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present utility model, unless otherwise specified, "plurality" means two or more.

[0055] Example 1

[0056] like Figure 1 As shown, an embodiment of the utility model provides a process chamber 3. The process chamber 3 includes: a shell, a preheating component 11, a high-temperature heating component 12, a heat-insulating component 13 and a heat-insulating plate 14. The preheating component 11 is used to preheat the surface of a substrate 102 to be heated. The high-temperature heating component 12 and the preheating component 11 are arranged in sequence, and are used to heat the substrate 102 that has completed preheating and left the preheating component 11. The heat-insulating component 13 and the high-temperature heating component 12 are arranged in sequence to insulate the substrate 102 after heating. The heat-insulating plate 14 is used to insulate the preheating component area and the high-temperature heating component area. The preheating component 11, the high-temperature heating component 12, the heat-insulating component 13 and the heat-insulating plate 14 are all arranged in the shell.

[0057] It is not difficult to infer from the above that in the process of growing graphene on the surface of the substrate 102, the preheating component 11 in the process chamber 3 first preheats the target substrate 102 so that the temperature of the surface of the substrate 102 can be evenly heated and begins to rise. The heated substrate 102 moves to the high-temperature heating component 12, and the high-temperature heating component 12 performs high-temperature heating on the preheated substrate 102. Since the preheating component 11 and the high-temperature heating component 12 are both in the shell of the process chamber 3, the temperature inside the shell needs to be guaranteed during the heating of the substrate 102. Compared with the traditional CVD furnace that requires the overall temperature of the furnace body to rise, the space in the single shell in the present application is smaller, so the energy consumed when the temperature rises is also greatly reduced, which effectively reduces the production cost.

[0058] In addition, since the thermal expansion coefficient of the substrate 102 itself is very different from that of the graphene, cooling too quickly will also lead to the risk of the graphene film falling off and the adhesion between the substrate 102 decreasing, so it is necessary to set a heat preservation component 13 to keep the heated substrate 102 warm to prevent the surface temperature of the substrate 102 from dropping too quickly. Since the heat preservation component 13 does not need to heat up quickly and does not need to maintain a high temperature during heat preservation, a resistance heater can be used as a heating method for the heat preservation component 13. In particular, in this embodiment, the heat preservation component 13 can be a heat preservation heating roller, and the resistance heater is arranged inside the roller body. When the substrate 102 passes through the surface of the heat preservation heating roller, heat is exchanged with the substrate 102, and heat is transferred to the substrate 102 to achieve heat preservation of the substrate 102.

[0059] In some embodiments, in order to prevent heat loss on the substrate 102, the heat preservation board 14 can collect the heat generated by the preheating component 11 and the high-temperature heating component 12 to prevent the rapid loss of heat, so that the heat can better stay on the surface of the substrate 102, ensuring the surface temperature of the substrate 102. Of course, in some other embodiments, the heat preservation board can also insulate the heat preservation component 13, also to prevent heat loss in the heat preservation component 13.

[0060] In order to enable the substrate 102 to move smoothly in the process chamber, a guide assembly is also provided in the process chamber. The guide assembly can use rollers to drive the substrate 102 to move through the rotation of the rollers. At the same time, the setting direction of each roller can also guide the movement direction of the substrate 102. In order to prevent the rollers from being damaged in the high-temperature housing, the guide assembly needs to use high-temperature resistant rollers. Figure 1 As shown, in some embodiments, the preheating component 11 and the high-temperature heating component 12 only include a first electromagnetic heating element 100, and the first electromagnetic heating element 100 can uniformly preheat and heat one surface of the substrate 102 so that the surface of the substrate 102 can grow graphene normally.

[0061] Example 2

[0062] In Example 1, a solution of a process chamber 3 that can uniformly heat the surface of the substrate 102 so as to uniformly grow graphene on the surface of the substrate 102 has been provided. However, in some cases, both sides of the substrate 102 are pre-treated and used for graphene growth. In this case, in order to uniformly heat the two sides of the substrate 102, both sides of the substrate 102 need to be heated so that graphene can be uniformly grown on both sides of the substrate 102.

[0063] In view of this, in Example 2 of the present utility model, reference is made to Figure 2The preheating assembly 11 and the high temperature heating assembly 12 both include: a first electromagnetic heating element 100 and a second electromagnetic heating element 104. The first electromagnetic heating element 100 is used to preheat or heat the first surface of the substrate 102. The second electromagnetic heating element 104 is used to preheat or heat the second surface of the substrate 102, and the second surface is opposite to the first surface of the substrate.

[0064] It is not difficult to infer from the above that the guide assembly can guide and transport the substrate 102 that is about to be heated. Under the guidance of the guide assembly, the substrate 102 moves in the direction of the first electromagnetic heating element 100 and the second electromagnetic heating element 104. The substrate 102 is mostly made of various inorganic fibers such as glass fiber, quartz fiber, carbon fiber, ceramic fiber, metal fiber, etc., and also includes carbon cloth, carbon paper, graphite felt, graphite paper and other carbon material coils, various organic fibers, various metal coils, polymer material coils, etc. The second surface and the first surface of the substrate 102 will be coated for the growth of graphene. Therefore, when heating the substrate 102, it is necessary to make the second surface and the first surface evenly heated, so as to ensure that the second surface and the first surface grow graphene evenly. The first electromagnetic heating element 100 and the second electromagnetic heating element 104 can heat the second surface and the first surface of the substrate 102 respectively and simultaneously, so that the temperature distributed on the second surface and the first surface is the same at the same time, and then the second surface and the first surface The same graphene growth is ensured, ensuring the growth quality of graphene. In addition, the preheating component 11 and the high-temperature heating component 12 each include a first electromagnetic heating element 100 and a second electromagnetic heating element 104. When heating the substrate 102, the surface of the substrate 102 needs to be preheated first, so that the temperature of the surface of the substrate 102 rises, thereby increasing the temperature of the air near the surface of the substrate 102, improving the heat carrying capacity of the air on the surface of the substrate 102, and making it easier for the graphene on the surface of the substrate 102 to enter the growth temperature. After the preheating, the substrate 102 is heated by the high-temperature heating component 12, and the high-temperature heating component 12 can heat the second surface and the first surface of the substrate 102 at the same time, so that the temperature of the second surface of the substrate 102 and the temperature of the first surface rise evenly and synchronously, so as to achieve the growth of graphene on the second surface and the first surface of the substrate 102.

[0065] Further, refer to Figure 2 The first electromagnetic heating element 100 and the second electromagnetic heating element 104 are both independent electromagnetic heating coils, and the radiation surfaces of the electromagnetic heating coils are arranged toward the second surface and the first surface of the substrate 102. The maximum diameter of the electromagnetic heating coil is not less than the width of the substrate 102.

[0066] It is not difficult to conclude from the above that the first electromagnetic heating element 100 and the second electromagnetic heating element 104 need to uniformly heat the second surface and the first surface of the substrate 102. Therefore, the heat radiation of the first electromagnetic heating element 100 and the second electromagnetic heating element 104 to the surface of the substrate 102 needs to be as uniform as possible, and it is also necessary to meet the rapid heating of the first electromagnetic heating element 100 and the second electromagnetic heating element 104 to avoid the preheating component 11 and the high-temperature heating component 12 not reaching the working temperature after the substrate 102 is transported to the heating place. Therefore, an independent electromagnetic heating coil is selected, and the temperature of each part on an independent electromagnetic heating coil is the same, and the temperature of the heat radiation will not be uneven due to the temperature error between multiple coils. Further, the first electromagnetic heating element 100 and the second electromagnetic heating element 104 with independent electromagnetic heating coils can achieve rapid heating and reduce the heating time, and can reduce the loss of heat conduction and air heat convection during heating and heat conduction, so that the heat in the heating process can better act on the second surface and the first surface of the substrate 102. The diameter of the electromagnetic heating coil is not less than the width of the substrate 102 , which can ensure that the surface of the substrate 102 can be affected by the electromagnetic heating coil, thereby avoiding uneven heating of the substrate 102 .

[0067] Example 3

[0068] In Example 2, the preheating assembly 11 and the high-temperature heating assembly 12 each include a first electromagnetic heating element 100 and a second electromagnetic heating element 104 to meet the heating treatment of both sides of the substrate 102. However, the substrate 102 passes through the process chamber 3 in a straight line under the action of the guide assembly, so the substrate 102 stays in the process chamber 3 for a short time, and the advantage of the high temperature environment in the process chamber 3 is not fully utilized.

[0069] In view of this, embodiment 3 of the present utility model provides the following Figure 3 , Figure 4 , Figure 5 As shown, the preheating assembly 11 and the high-temperature heating assembly 12 both include: a first roller 101 and a second roller 103. The substrate 102 to be heated is wound around the first roller 101, the first roller 101 is in contact with the second surface, and the first roller 101 guides the substrate 102 to move. The second roller 103 and the first roller 101 are arranged parallel to each other, and the substrate 102 after leaving the first roller 101 is wound around the second roller 103, the first surface is in contact with the second roller 103, and the second roller 103 guides the substrate 102 to move. Among them, the first electromagnetic heating element 100 is arranged toward the first roller 101 to heat the first surface of the substrate 102; the second electromagnetic heating element 104 is arranged toward the second roller 103 to heat the second surface of the substrate 102. Electromagnetic induction coils are also arranged inside the first roller 101 and the second roller 103.

[0070] It is not difficult to infer from the above that the preheating component 11 has the same structure as the high-temperature heating component 12. For example, when the preheating component 11 is working, the substrate 102 will pass through the first roller 101 and the second roller 103 of the preheating component 11 in sequence. Since one side of the substrate 102 is wound around the roller when passing through the roller, the heating of the substrate 102 on the winding side is affected. Therefore, after the second surface of the substrate 102 contacts the first roller 101, the first surface of the substrate 102 leaving the first roller 101 contacts the second roller 103, and the substrate 102 forms an S-shaped motion trajectory between the first roller 101 and the second roller 103. In this state, the first electromagnetic heating element 100 faces the first roller 101 and can heat the first surface of the substrate 102 away from the first roller 101, and the heated first roller 101 can heat the second surface of the substrate 102. Similarly, the second electromagnetic heating element 104 is facing the second roller 103, and can heat the second surface of the substrate 102 away from the second roller 103, and the heated second roller 103 can heat the first surface of the substrate 102. It can be seen that the second surface and the first surface of the substrate 102 can be directly heated by the first electromagnetic heating element 100 and the second electromagnetic heating element 104, respectively, and heated by the first roller 101 and the second roller 103, and the heating time of the second surface and the first surface is exactly the same. Through the arrangement of the first roller 101 and the second roller 103, the distance that the substrate 102 passes through is increased, and because the substrate 102 is completely in contact with each other when passing through the first roller 101 and the second roller 103, the heating area of ​​the substrate 102 is increased, so that the substrate 102 is heated more evenly. The electromagnetic induction coils located inside the first roller 101 and the second roller 103 can provide the required temperature for heating the bodies of the first roller 101 and the second roller 103, and cooperate with the first electromagnetic heating element 100 and the second electromagnetic heating element 104 arranged outside, so that the first roller 101 and the second roller 103 that are evenly heated can better transfer the temperature to the substrate 102.

[0071] Of course, in other embodiments, reference Figure 3 As shown, the preheating assembly 11 and the high temperature heating assembly 12 may not be provided with the first roller 101 and the second roller 103. The first electromagnetic heating element 100 and the second electromagnetic heating element 104 are respectively arranged on the upper and lower sides of the path of the substrate 102, so that the second surface and the first surface of the substrate 102 can be heated. By setting partitions along the path direction during the path of the substrate 102, the preheating zone, high temperature heating zone and insulation zone in the heating process of the substrate 102 are realized. Thereby meeting various requirements for the heating process of the substrate 102, so that the graphene on the surface of the substrate 102 can be better grown.

[0072] Example 4

[0073] like Figure 5 and Figure 6 The partial embodiment of the utility model shown also discloses a roll-to-roll processing system, which includes the above-mentioned process chamber 3. In addition, the roll-to-roll processing system also includes: an unwinding chamber 1, a cooling chamber 4 and a winding chamber 5. The unwinding chamber 1 is sealedly connected to the process chamber 3 to unwind the wound substrate 102 raw material and send it to the process chamber 3. The inlet of the cooling chamber 4 is sealedly connected to the outlet of the process chamber 3. The substrate 102 leaves the process chamber 3 from the outlet of the process chamber 3 and enters the cooling chamber 4 through the inlet of the cooling chamber 4. The cooling chamber 4 cools down the substrate 102 entering the cooling chamber 4. The winding chamber 5 is sealedly connected to the cooling chamber 4 to wind the substrate 102 after cooling to form a substrate roll.

[0074] It is not difficult to infer from the above content that since the substrate 102 is initially in a winding state, the substrate 102 in the winding state is released through the unwinding chamber 1, so that the substrate 102 can pass through each operating room along the roller. Further, a low-temperature guide roller 15 and an unwinding roller 8 are arranged in the unwinding chamber 1. The unwinding roller 8 is used to release the wound substrate 102, and the wound substrate 102 will be transported to the low-temperature guide roller 15 and continue to move under the guidance of the low-temperature guide roller. Since the substrate 102 does not need to be heated in the unwinding chamber 1, the temperature in the unwinding chamber 1 will not be too high, and the guide roller used to guide the movement of the substrate 102 does not need to be resistant to high temperature, and the low-temperature guide roller 15 can be selected as the guide in the unwinding chamber 1. The original substrate 102 can be released from the winding state, and the unwound substrate 102 is guided to the next studio for the next step of substrate 102 processing. The unwound substrate 102 is transported to the process chamber 3, and heat treatment is performed in the process chamber 3 to heat the substrate 102. When the surface of the substrate 102 is heated, graphene begins to grow on the surface of the substrate 102. After the graphene growth is completed, the substrate 102 needs to be rewound, and the temperature of the substrate 102 after heating and heat preservation is relatively high and is not suitable for direct winding. Therefore, the cooling chamber 4 can cool down the substrate 102 after high-temperature heating and heat preservation, so that the substrate 102 can meet the winding temperature to avoid damage to the substrate 102 caused by winding under high temperature. Further, the roll-to-roll processing system is controlled by the control device 6, so that the substrate 102 can pass through each studio in a set order, realize the automation of the processing process, and improve work efficiency.

[0075] In addition, in some embodiments, since the surface of the substrate 102 is not pre-treated for coating, Figure 6As shown, in the embodiment of the utility model, the roll-to-roll processing system further includes: a pretreatment chamber 2. The pretreatment chamber 2 is arranged between the unwinding chamber 1 and the process chamber 3. The pretreatment chamber 2 is used to perform a coating treatment on the substrate 102 before heating, and to perform a carbon source layer coating and surface metallization treatment on the surface of the substrate after the coating. A coating device or a magnetron sputtering device is arranged in the pretreatment chamber 2, which is used to perform a coating or metallization treatment on the substrate entering the pretreatment chamber.

[0076] It is not difficult to infer from the above that before heating the substrate 102, it is first necessary to coat and metallize the surface of the substrate 102, and at the same time, improve the heat transfer and electrical conductivity through coating. In some embodiments of the present invention, a coating device 9 is provided in the pretreatment chamber 2. After the substrate 102 passes through the coating device 9, the coating device 9 will complete the coating on the first surface of the second surface of the substrate 102. At the same time, in order to meet the needs of metallization, a magnetron sputtering device can also be set in the pretreatment chamber 2. After the pretreatment chamber 2 is added, the substrate 102 does not need to be pre-coated before being placed in the roll-to-roll device. The uncoated substrate 102 can be directly placed in the roll-to-roll device, which reduces the pre-treatment preparation work and improves the work efficiency.

[0077] Further, refer to Figure 6 In some embodiments of the present invention, the cooling chamber 4 includes: a housing and a plurality of cooling water-cooled rollers 16. The plurality of cooling water-cooled rollers 16 are arranged in parallel in the housing, and a coolant continuously flows through the cooling water-cooled rollers 16; after the substrate 102 enters the cooling chamber 4, it is wound around the cooling water-cooled rollers 16, and the cooling water-cooled rollers 16 carry and transport the substrate 102.

[0078] It is not difficult to infer from the above that the substrate 102 after high-temperature heating and heat preservation will be cooled in the cooling chamber 4. When the substrate 102 is in a vacuum environment to grow graphene, the substrate can be cooled by water cooling at this time. The substrate 102 entering the cooling chamber 4 is guided and transported by the cooling water-cooled roller 16, and heat exchange is generated between the substrate 102 and the substrate 102, and the temperature of the substrate 102 is taken away by the cooling liquid in the cooling water-cooled roller 16. In addition, the cooling liquid in the cooling water-cooled roller 16 flows continuously, so that the cooling liquid in the cooling water-cooled roller 16 always maintains a low temperature state, ensuring heat exchange with the substrate 102 during the cooling process, so that the substrate 102 after heating and heat preservation can be fully cooled.

[0079] Also refer to Figure 6As shown, when the substrate 102 is in a non-vacuum environment to grow graphene, the cooling chamber 4 is also in a non-vacuum state. At this time, the substrate can be cooled by air cooling. The cooling chamber 4 includes: a shell and an air cooling device 17. The air cooling device 17 is arranged on the inner side of the entrance of the cooling chamber 4. The air cooling device 17 passes an inert gas to the surface of the substrate 102 to reduce the temperature of the surface of the substrate 102. In the cooling chamber 4, the inert gas can be blown toward the substrate 102 to be cooled by the air cooling device 17. The temperature of the surface of the substrate 102 is taken away by the blown inert gas, so as to achieve the cooling of the substrate 102. In addition, preferably, two air cooling devices 17 can be set. The air cooling devices 17 arranged up and down can make the inert gas act on the second surface and the first surface respectively, so that the cooling conditions of the two sides of the substrate 102 are the same. At the same time, the gas flow rate blown by the air cooling device 17 can be adjusted according to needs. When rapid cooling is required, the blowing gas flow rate of the air cooling device 17 can be increased to speed up the cooling process. Of course, in some embodiments, the cooling water-cooled roller 16 and the air-cooled device 17 may be provided together, and the state in the cooling chamber 4 may be switched between vacuum and non-vacuum according to needs, thereby improving the versatility of the cooling chamber 4.

[0080] At the same time, the unwinding chamber 1 and the winding chamber 5 are respectively provided with a first air exhaust hole 7 and a second air exhaust hole 18, and the first air exhaust hole 7 and the second air exhaust hole 18 are used to extract the air in the roll-to-roll system to form a vacuum state of the roll-to-roll system.

[0081] The specific embodiments described above further illustrate the purpose, technical solutions and beneficial effects of the present invention. It should be understood that the above description is only a specific embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A process chamber, characterized in that: The process chamber comprises: case; A preheating component, used for preheating the surface of the substrate to be heated; A high temperature heating component, arranged in sequence with the preheating component, for heating the preheated substrate; A heat preservation component, arranged in sequence with the high-temperature heating component, for keeping the substrate warm after heating; A heat preservation plate, disposed toward the substrate, for heat preservation of the preheating component area and the high-temperature heating component area; The preheating component, the high-temperature heating component, the heat-insulating component and the heat-insulating plate are all arranged in the shell.

2. The process chamber according to claim 1, characterized in that The preheating component and the high temperature heating component both include: The first electromagnetic heating element is used for preheating or heating the first surface of the substrate.

3. The process chamber according to claim 2, characterized in that The preheating component and the high temperature heating component also include: The second electromagnetic heating element is used for preheating or heating a second surface of the substrate, where the second surface is opposite to the first surface.

4. The process chamber according to claim 3, characterized in that The first electromagnetic heating element and the second electromagnetic heating element are both independent electromagnetic heating coils, and the radiation surfaces of the electromagnetic heating coils are arranged toward the second surface and the first surface of the substrate.

5. The process chamber according to claim 4, characterized in that The preheating component and the high temperature heating component also include: a first roller, the substrate to be heated is wound around the first roller, the first roller is in contact with the second surface, and the first roller guides the substrate to move; The second roller is arranged parallel to the first roller. The substrate is wound around the second roller after leaving the first roller. The first surface contacts the second roller. The second roller guides the substrate to move.

6. The process chamber according to claim 5, characterized in that Electromagnetic heating coils are also arranged inside the first roller and the second roller.

7. A roll-to-roll processing system, characterized in that: It comprises a process chamber as claimed in any one of claims 1 to 6, wherein the roll-to-roll processing system further comprises: an unwinding chamber, sealedly connected to the process chamber, for unwinding the wound substrate material and delivering it to the process chamber; A cooling chamber, wherein the inlet of the cooling chamber is sealedly connected to the outlet of the process chamber, the substrate leaves the process chamber from the outlet of the process chamber and enters the cooling chamber through the inlet of the cooling chamber, and the cooling chamber cools down the substrate entering the cooling chamber; The winding chamber is sealed and connected to the cooling chamber so as to wind the substrate after cooling to form a substrate roll.

8. The roll-to-roll processing system according to claim 7, characterized in that: The roll-to-roll processing system further comprises: A pretreatment chamber is arranged between the unwinding chamber and the process chamber, and is used to perform a coating treatment on the substrate before heating, and to perform a carbon source layer coating and surface metallization treatment on the surface of the substrate after coating; The pretreatment chamber is provided with a coating device or a magnetron sputtering device for coating or metallizing the substrate entering the pretreatment chamber.

9. The roll-to-roll processing system according to claim 7, characterized in that: The cooling chamber is provided with: A plurality of cooling water-cooled rollers are arranged in parallel in the cooling chamber, and a coolant continuously flows through the cooling water-cooled rollers; after the substrate enters the cooling chamber, it is wound around the cooling water-cooled rollers, and the cooling water-cooled rollers carry and transport the substrate; At the same time, the unwinding chamber and the winding chamber are respectively provided with a first air exhaust hole and a second air exhaust hole, and the first air exhaust hole and the second air exhaust hole are used to extract the air in the roll-to-roll system to form a vacuum state of the roll-to-roll system.

10. The roll-to-roll processing system according to claim 7, characterized in that: The cooling chamber is also provided with: At least one air cooling device is arranged in the cooling chamber, and the air cooling device is used to pass inert gas to the surface of the substrate to reduce the temperature of the surface of the substrate.

Images