Radial sensor mounting assembly for molecular pump and molecular pump

Abstract

The utility model relates to the technical field of magnetic suspension motors, in particular to a radial sensor mounting assembly for a molecular pump and the molecular pump. The radial sensor mounting assembly for the molecular pump comprises a first mounting base, a second mounting base and a radial sensor, the first mounting base is fixed to a shell of the molecular pump, and the first mounting base is of an annular structure; the second mounting seat is arranged on the radial inner side of the first mounting seat; the radial sensor is arranged on the second mounting seat and is suitable for detecting the radial deviation state of the rotating shaft of the molecular pump; wherein the first mounting seat is a heat conducting piece, and the second mounting seat is a non-magnetic conducting piece. The utility model further provides a molecular pump. According to the radial sensor mounting assembly, the technical problem that the heat dissipation performance of the molecular pump is poor is solved, the heat dissipation performance of the molecular pump is improved, and then the performance stability of the molecular pump is improved.

Description

Technical Field

[0001] The present application relates to the technical field of magnetic levitation motors, and in particular to a radial sensor mounting assembly for a molecular pump and a molecular pump. Background Art

[0002] The radial sensor in the magnetic levitation molecular pump must conduct signals, so the radial sensor cannot come into contact with magnetic materials. At present, the radial sensor support in the molecular pump is commonly made of polyetheretherketone, which is a kind of plastic. The radial sensor is usually fixed to the radial sensor support by glue. However, the radial sensor support made of polyetheretherketone is not conducive to the heat dissipation of the magnetic levitation molecular pump, which in turn affects the performance of the magnetic levitation molecular pump. Utility Model Content

[0003] The present application provides a radial sensor mounting assembly for a molecular pump and a molecular pump, which solves the technical problem of poor heat dissipation performance of the molecular pump, improves the heat dissipation performance of the molecular pump, and further improves the stability of the performance of the molecular pump.

[0004] In order to achieve the above objectives, the main technical solutions adopted in this application include:

[0005] In a first aspect, an embodiment of the present application provides a radial sensor mounting assembly for a molecular pump, comprising a first mounting seat, a second mounting seat and a radial sensor, wherein the first mounting seat is fixed to the housing of the molecular pump, and the first mounting seat is constructed in a ring shape; the second mounting seat is arranged radially inwardly of the first mounting seat; the radial sensor is arranged on the second mounting seat, and the radial sensor is suitable for detecting the radial offset state of the rotating shaft of the molecular pump; wherein the first mounting seat is a heat conductive member, and the second mounting seat is a non-magnetic conductive member.

[0006] The radial sensor mounting assembly for a molecular pump proposed in an embodiment of the present application includes a first mounting seat and a second mounting seat, the first mounting seat is a heat conductive member, the second mounting seat is a non-magnetic member, the second mounting seat is arranged radially inwardly of the first mounting seat, and the radial sensor is arranged on the second mounting seat, and the non-magnetic second mounting seat can ensure that the radial sensor signal is not interfered with; the first mounting seat is a heat conductive member, which can assist in heat dissipation and export part of the heat from the motor stator and the magnetic bearing to the outside, thereby reducing the probability of deformation of the first mounting seat due to long-term high temperature, thereby reducing the impact on the position of the radial sensor, and further improving the performance of the molecular pump.

[0007] Optionally, the first mounting seat is any one of an aluminum alloy and a magnesium alloy. The first mounting seat is a heat-conducting member such as an aluminum alloy or a magnesium alloy, which improves the thermal conductivity of the radial sensor mounting assembly, thereby improving the heat dissipation performance of the molecular pump and reducing the probability of deformation of the first mounting seat due to long-term high temperature.

[0008] Optionally, the second mounting base is any one of ceramic, polyetheretherketone and nylon. The second mounting base is a non-magnetic member such as ceramic, polyetheretherketone or nylon to ensure that the signal of the radial sensor is not disturbed.

[0009] Optionally, the inner diameter of the first mounting seat is provided with a mounting groove, and an adhesive layer is provided between the second mounting seat and the inner wall of the mounting groove. The second mounting seat is mounted in the mounting groove of the first mounting seat, and the second mounting seat is bonded and fixed to the mounting groove, and the position of the radial sensor is fixed by determining the position of the second mounting seat.

[0010] Optionally, along the radial inner side of the first mounting seat, the radial sensor does not extend out of the mounting groove, thereby ensuring that the radial sensor is located at a desired design position, thereby improving the stability and accuracy of the radial sensor detection data. At the same time, when the shaft is installed or in a non-working state, the probability of the shaft colliding with the radial sensor is reduced, thereby improving the service life of the radial sensor.

[0011] Optionally, the second mounting seat and the radial sensor are both multiple, and along the circumference of the first mounting seat, multiple second mounting seats are arranged at intervals on the radial inner side of the first mounting seat, and each radial sensor is arranged on the corresponding second mounting seat. Multiple radial sensors are provided to more accurately detect the radial offset of the rotating shaft.

[0012] Optionally, there are four of the second mounting seat and four of the radial sensors, and the four radial sensors include a first radial sensor, a second radial sensor, a third radial sensor and a fourth radial sensor arranged in sequence along the circumference of the first mounting seat; the connecting line between the first radial sensor and the third radial sensor and the connecting line between the second radial sensor and the fourth radial sensor are orthogonal to each other.

[0013] In a second aspect, an embodiment of the present application provides a molecular pump, comprising a housing, a rotating shaft, a motor stator assembly, a first magnetic bearing, a second magnetic bearing, and a radial sensor mounting assembly as described in any of the above embodiments, wherein the rotating shaft is arranged in the housing; along the radial direction of the rotating shaft, the motor stator assembly is arranged between the housing and the rotating shaft; along the axial direction of the rotating shaft, the first magnetic bearing and the second magnetic bearing are respectively located on both sides of the motor stator assembly; along the axial direction of the rotating shaft, the radial sensor mounting assembly is arranged on a side of the first magnetic bearing away from the second magnetic bearing or on a side of the second magnetic bearing away from the first magnetic bearing.

[0014] The molecular pump proposed in the embodiment of the present application includes a radial sensor mounting assembly, which includes a first mounting seat and a second mounting seat. The second mounting seat is a non-magnetic component. When the radial sensor detects the radial offset of the rotating shaft, the non-magnetic second mounting seat can ensure that the radial sensor signal is not interfered with; the first mounting seat is a heat-conducting component, which can assist in heat dissipation and reduce the probability of deformation of the first mounting seat due to long-term high temperature, thereby reducing the impact on the position of the radial sensor, and further improving the stability of the molecular pump performance.

[0015] Optionally, there are two radial sensor mounting assemblies including a first radial sensor mounting assembly and a second radial sensor mounting assembly. Along the axial direction of the rotating shaft, the first radial sensor mounting assembly is arranged on the side of the first magnetic bearing away from the second magnetic bearing, and the second radial sensor mounting assembly is arranged on the side of the second magnetic bearing away from the first magnetic bearing.

[0016] Optionally, the first mounting seat is provided with a plurality of through holes, the plurality of through holes are spaced apart along the circumference of the first mounting seat, and each through hole penetrates the first mounting seat along the axial direction of the rotating shaft. The provision of a plurality of through holes can enhance the fluidity of the glue and reduce the formation of pores during the glue pouring process of the molecular pump assembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the specific implementation methods of the present application or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0018] Figure 1 This is a schematic diagram of the structure of a radial sensor mounting assembly for a molecular pump in this application;

[0019] Figure 2 This is a schematic diagram of the structure of the first mounting base of this application;

[0020] Figure 3 This is a schematic diagram of the structure of the second mounting base of this application;

[0021] Figure 4 This is a schematic diagram of the pump core assembly structure of the molecular pump of this application.

[0022] [Description of Reference Numerals]

[0023] 1: first mounting seat; 11: first part; 12: second part; 13: mounting groove; 14: supporting surface; 15: limiting part; 16: through hole;

[0024] 2: second mounting seat; 21: groove; 22: mounting column; 23: wiring trough;

[0025] 3: Adhesive layer;

[0026] 4: Radial sensor;

[0027] 5: housing; 6: motor stator assembly; 7: first magnetic bearing; 8: second magnetic bearing; 100: first radial sensor mounting assembly; 200: second radial sensor mounting assembly. DETAILED DESCRIPTION

[0028] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present application.

[0029] Unless otherwise defined, all technical and scientific terms used in this application have the same meaning as those commonly understood by technicians in the technical field of this application; the terms used in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application; the terms "including" and "having" in the specification and claims of this application and the above-mentioned drawings and any variations thereof are intended to cover non-exclusive inclusions. The terms "first", "second", etc. in the specification and claims of this application or the above-mentioned drawings are used to distinguish different objects, rather than to describe a specific order or a primary and secondary relationship.

[0030] Reference to "embodiments" in this application means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described in this application may be combined with other embodiments.

[0031] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", and "attached" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0032] The term "and / or" in this application is only a description of the association relationship of associated objects, indicating that there can be three relationships. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this application generally indicates that the associated objects before and after are in an "or" relationship.

[0033] The term "multiple" as used in this application refers to more than two (including two). Similarly, "multiple groups" refers to more than two groups (including two groups), and "multiple sheets" refers to more than two sheets (including two sheets).

[0034] At present, the commonly used material for the radial sensor mounting seat in the molecular pump is polyetheretherketone (PEEK), which is a kind of plastic. When the molecular pump is working, the motor stator generates the most serious heat due to the iron loss of the motor stator and the eddy current loss of the motor rotor. The heat generated by the iron loss of the motor stator and the eddy current loss of the motor rotor is dissipated to the surroundings. Among them, the first magnetic bearing and the second magnetic bearing located in the upper and lower parts of the motor stator form high temperatures due to the heat transferred from the motor stator and the loss of their own bearings. At this time, the heat dissipation of the first magnetic bearing and the second magnetic bearing can only be achieved through the stator housing that is in contact with a circle in the circumference. The upper and lower directions of the first magnetic bearing and the second magnetic bearing form heat insulation due to the non-thermal conductivity of the radial sensor mounting seat made of PEEK, which ultimately leads to poor heat dissipation of the pump core. The long-term high temperature of the radial sensor mounting seat will cause the size of the radial sensor mounting seat to change, thereby affecting the position of the radial sensor, resulting in inaccurate radial sensor detection data, and ultimately affecting the performance of the magnetic levitation molecular pump. In addition, the raw material cost of PEEK is high, and the processing technology is more difficult than that of metal. Therefore, it is necessary to develop a radial sensor mounting assembly that is low in cost, easy to process and has good thermal conductivity.

[0035] First, refer to Figure 1 The embodiment of the present application provides a radial sensor mounting assembly for a molecular pump, comprising a first mounting seat 1, a second mounting seat 2 and a radial sensor 4, wherein the first mounting seat 1 is fixed to the housing 5 of the molecular pump, and the first mounting seat 1 is constructed in an annular shape; the second mounting seat 2 is arranged on the radial inner side of the first mounting seat 1; the radial sensor 4 is arranged on the second mounting seat 2, and the radial sensor 4 is suitable for detecting the radial offset state of the rotating shaft of the molecular pump; wherein the first mounting seat 1 is a heat conductive member, and the second mounting seat 2 is a non-magnetic conductive member. It should be understood that the first mounting seat 1 is an annular structure, the first mounting seat 1 is sleeved on the rotating shaft of the molecular pump, and the second mounting seat 2 is arranged on the radial inner side of the annular structure of the first mounting seat 1. The radial sensor 4 is arranged on the second mounting seat 2, and the radial sensor 4 faces the rotating shaft of the molecular pump to detect the radial offset state of the rotating shaft of the molecular pump.

[0036] The radial sensor mounting assembly for a molecular pump proposed in the embodiment of the present application includes a first mounting seat 1 and a second mounting seat 2. The first mounting seat 1 is a heat conductive member, and the second mounting seat 2 is a non-magnetic member. The second mounting seat 2 is arranged on the radial inner side of the first mounting seat 1, and the radial sensor 4 is arranged on the second mounting seat 2. The non-magnetic second mounting seat 2 can ensure that the signal of the radial sensor 4 is not interfered with; the first mounting seat 1 is a heat conductive member, which can assist in heat dissipation and export part of the heat from the motor stator and the magnetic bearing to the outside, thereby reducing the probability of deformation of the first mounting seat 1 due to long-term high temperature, thereby reducing the impact on the position of the radial sensor 4, and further improving the performance of the molecular pump.

[0037] Optionally, the first mounting seat 1 is any one of an aluminum alloy part and a magnesium alloy part. The first mounting seat 1 is a heat-conducting part such as an aluminum alloy part or a magnesium alloy part, which improves the thermal conductivity of the radial sensor mounting assembly, thereby improving the heat dissipation performance of the molecular pump and reducing the probability of deformation of the first mounting seat 1 due to long-term high temperature. In an optional embodiment, the first mounting seat 1 is an aluminum alloy part. The raw material cost of aluminum alloy is low, and the processing of aluminum alloy is relatively simple. The first mounting seat 1 of the radial sensor mounting assembly is made of aluminum alloy as a whole, that is, the contact surface between the first mounting seat 1 and the molecular pump core is made of aluminum alloy. The radial sensor mounting assembly made of aluminum alloy has good thermal conductivity and can improve the heat dissipation performance of the molecular pump core.

[0038] Optionally, the second mounting seat 2 is any one of a ceramic part, polyetheretherketone and nylon. The second mounting seat 2 is a non-magnetic part such as a ceramic part, polyetheretherketone or nylon, and the radial sensor 4 is fixed to the second mounting seat 2. The non-magnetic second mounting seat 2 can ensure that the signal of the radial sensor 4 is not interfered with. After the radial sensor 4 is fixed to the second mounting seat 2, the second mounting seat 2 is fixed to the first mounting seat 1, so that the signal of the radial sensor 4 is not interfered with, and the heat dissipation performance of the entire molecular pump can be improved, thereby reducing the probability that the entire first mounting seat will not be deformed due to long-term high temperature, thereby affecting the detection accuracy of the radial sensor 4.

[0039] Optionally, refer to Figure 1 , Figure 2 and Figure 3 The inner diameter of the first mounting seat 1 is provided with a mounting groove 13, and an adhesive layer 3 is provided between the second mounting seat 2 and the inner wall of the mounting groove 13. The second mounting seat 2 is mounted in the mounting groove 13 of the first mounting seat 1, and the second mounting seat 2 is bonded and fixed to the mounting groove 13 to determine the position of the second mounting seat 2, thereby ensuring that the radial sensor 4 is fixed at the required position.

[0040] Optionally, along the radial inner side of the first mounting seat 1, the radial sensor 4 does not extend out of the mounting groove 13. This ensures that the radial sensor 4 is located at the required design position, thereby improving the stability and accuracy of the detection data of the radial sensor 4. At the same time, when the shaft is installed and in a non-working state, the probability of the shaft colliding with the radial sensor is reduced, thereby improving the service life of the radial sensor.

[0041] Specifically, the first mounting seat 1 includes a first portion 11 and a second portion 12, wherein the first portion 11 is arranged close to the rotating shaft, and the second portion 12 is arranged on the outer periphery of the first portion 11 and extends along the axial direction of the rotating shaft on both sides of the first portion 11, respectively. The first portion 11 has a first surface and a second surface, and the second portion 12 protrudes from the first surface and the second surface on both sides of the first portion 11. The first mounting seat has a receiving groove near the inner diameter edge of the first mounting seat 1, and the receiving groove is formed by the first surface of the first mounting seat 1 extending axially toward the second surface. In other words, the first surface of the first mounting seat 1 is recessed toward the second surface to form the receiving groove. The first mounting seat 1 has a notch formed by the inner diameter edge of the first mounting seat 1 extending radially toward the outer diameter edge of the first mounting seat 1, and the setting of the notch can reduce the self-weight of the first mounting seat 1. The notch penetrates the second surface and part of the bottom surface of the receiving groove along the axial direction. The part of the bottom surface of the receiving groove that is not penetrated by the notch forms a support surface 14, and the part of the receiving groove that is not penetrated by the notch on one side of the inner wall of the first mounting seat 1 forms a limiting portion 15. The three side walls of the receiving groove, the limiting portion 15 and the supporting surface 14 constitute the mounting groove 13. When the second mounting seat 2 is installed in the mounting groove 13, the limiting portion 15 is used to limit the radial mounting position of the second mounting seat 2 on the first mounting seat 1, thereby ensuring that the radial sensor 4 is located at the design required position.

[0042] refer to Figures 1 to 3 , on the radial inner side of the first mounting seat 1, the second mounting seat 2 has a mounting column 22 extending radially toward the rotating shaft of the first mounting seat 1, and the radial sensor 4 is mounted on the mounting column 22. The second mounting seat 2 has two grooves 21, and the two grooves 21 respectively form holes with the support surface 14 of the mounting groove 13, so that glue can pass through during glue pouring and form an adhesive layer 3 between the second mounting seat 2 and the mounting groove 13. The limiting portion 15 on the mounting groove 13 limits the installation position of the second mounting seat 2, and the radial sensor 4 is mounted on the mounting column 22 of the second mounting seat 2, so that the radial sensor 4 does not protrude from the radial inner edge of the first mounting seat 1.

[0043] The second mounting base 2 is also provided with a wiring groove 23 for electrically connecting the radial sensor 4 with the circuit board.

[0044] Optionally, there are multiple second mounting seats 2 and radial sensors 4. Along the circumference of the first mounting seat 1, multiple second mounting seats 2 are arranged at intervals on the radial inner side of the first mounting seat 1, and each radial sensor 4 is arranged on the corresponding second mounting seat 2. Along the circumference of the first mounting seat 1, multiple spaced mounting grooves 13 are arranged on the first mounting seat 1, each mounting groove 13 is provided with a second mounting seat 2, and a radial sensor 4 is installed on each second mounting seat 2. Multiple radial sensors 4 are provided to perform multi-angle detection on the radial offset of the rotating shaft, so as to more accurately detect the radial offset of the rotating shaft.

[0045] Optionally, there are four second mounting seats 2 and four radial sensors 4, and the four radial sensors 4 include a first radial sensor, a second radial sensor, a third radial sensor, and a fourth radial sensor arranged in sequence along the circumference of the first mounting seat 1; the connecting line between the first radial sensor and the third radial sensor and the connecting line between the second radial sensor and the fourth radial sensor are orthogonal to each other. The connecting line between the first radial sensor and the third radial sensor and the connecting line between the second radial sensor and the fourth radial sensor both pass through the axis of the rotating shaft, that is, the first radial sensor, the second radial sensor, the third radial sensor, and the fourth radial sensor are symmetrically distributed about the axis of the rotating shaft.

[0046] Second, reference Figure 4 The embodiment of the present application provides a molecular pump, comprising a housing 5, a rotating shaft, a motor stator assembly 6, a first magnetic bearing 7, a second magnetic bearing 8, and a radial sensor mounting assembly as described in any of the above embodiments, wherein the rotating shaft is arranged in the housing 5; along the radial direction of the rotating shaft, the motor stator assembly 6 is arranged between the housing 5 and the rotating shaft; along the axial direction of the rotating shaft, the first magnetic bearing 7 and the second magnetic bearing 8 are respectively located on both sides of the motor stator assembly 6; along the axial direction of the rotating shaft, the radial sensor mounting assembly is arranged on the side of the first magnetic bearing 7 away from the second magnetic bearing 8 or the side of the second magnetic bearing 8 away from the first magnetic bearing 7. The radial sensor mounting assembly is arranged on the side of the first magnetic bearing 7 away from the second magnetic bearing 8 or on the side of the second magnetic bearing 8 away from the first magnetic bearing 7, so that the radial offset of the rotating shaft can be detected, and the position of the rotating shaft can be adjusted according to the radial offset of the rotating shaft to ensure that the rotating shaft is located at the required position, thereby ensuring the stable performance of the molecular pump.

[0047] The molecular pump proposed in the embodiment of the present application includes a radial sensor mounting assembly, which includes a first mounting seat 1 and a second mounting seat 2. The second mounting seat 2 is a non-magnetic component. When the radial sensor 4 detects the radial offset of the rotating shaft, the non-magnetic second mounting seat 2 can ensure that the signal of the radial sensor 4 is not interfered with; the first mounting seat 1 is a heat-conducting component, which can assist in heat dissipation and reduce the probability of deformation of the first mounting seat 1 due to long-term high temperature, thereby reducing the impact on the position of the radial sensor 4, thereby improving the stability of the molecular pump performance.

[0048] Optionally, there are two radial sensor mounting assemblies, including a first radial sensor mounting assembly 100 and a second radial sensor mounting assembly 200. Along the axial direction of the rotating shaft, the first radial sensor mounting assembly 100 is arranged on the side of the first magnetic bearing 7 away from the second magnetic bearing 8, and the second radial sensor mounting assembly 200 is arranged on the side of the second magnetic bearing 8 away from the first magnetic bearing 7. The first radial sensor mounting assembly 100 is arranged at the first magnetic bearing 7, and the first radial sensor mounting assembly 100 has a first radial sensor; the second radial sensor mounting assembly 200 is arranged at the second magnetic bearing 8, and the second radial sensor mounting assembly 200 has a second radial sensor. The first magnetic bearing 7 adjusts the position of the rotating shaft at the first magnetic bearing 7 according to the detection data of the first radial sensor, and the second magnetic bearing 8 adjusts the position of the rotating shaft outside the second magnetic bearing 8 according to the detection data of the second radial sensor, so that the rotating shaft can maintain a balanced state, thereby ensuring the stable performance of the molecular pump.

[0049] Optionally, a plurality of through holes 16 are provided on the first mounting seat 1, and the plurality of through holes 16 are spaced apart along the circumference of the first mounting seat 1, and each through hole 16 passes through the first mounting seat 1 along the axial direction of the rotating shaft. The provision of the plurality of through holes 16 can enhance the fluidity of the glue and reduce the formation of pores during the glue filling process of the molecular pump assembly.

[0050] After the first radial sensor mounting assembly 100, the first magnetic bearing 7, the motor stator assembly 6, the second magnetic bearing 8 and the second radial sensor mounting assembly 200 are installed on the housing 5 as the pump core assembly of the molecular pump, it is necessary to fix the pump core assembly and the housing 5 by glue injection. A plurality of through holes 16 are arranged on the first mounting seat 1 to connect the space between the pump core assembly and the housing 5 with the outside world, thereby improving the fluidity of the glue and reducing the formation of pores during the assembly process of the molecular pump.

[0051] The present application uses a first mounting seat 1 made of aluminum alloy and a second mounting seat 2 made of ceramic. The radial sensor 4 is first glued to the second mounting seat 2 with glue to prevent the radial sensor 4 from directly contacting the magnetic conductive material, thereby preventing the signal of the radial sensor 4 from being interfered with. Finally, the second mounting seat 2 is glued to the first mounting seat 1. Optionally, a mounting groove 13 is provided on the first mounting seat 1, the width of the mounting groove 13 is equal to the width of the second mounting seat 2, the depth of the mounting groove 13 along the radial direction of the first mounting seat 1 is equal to the thickness of the second mounting seat 2 along the radial direction of the first mounting seat 1, and the second mounting seat 2 is prevented from sliding when the second mounting seat 2 is installed. The mounting groove 13 has a limiting portion 15 on the radial inner side of the first mounting seat 1, and the limiting portion 15 limits the installation position of the second mounting seat 2, ensuring that after the second mounting seat 2 is installed in the mounting groove 13, the radial sensor 4 does not extend out of the mounting groove 13, that is, the radial sensor 4 does not extend out of the radial inner side of the first mounting groove 13, thereby ensuring that the radial sensor 4 will not be damaged due to the positional displacement of the rotor assembly, thereby ensuring the stability of the molecular pump performance.

[0052] It should also be noted that the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, commodity or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, commodity or device. In the absence of more restrictions, the elements defined by the sentence "comprises a ..." do not exclude the existence of other identical elements in the process, method, commodity or device including the elements.

[0053] The various embodiments in this specification are described in a progressive manner, and the same or similar parts between the various embodiments can be referenced to each other, and each embodiment focuses on the differences from other embodiments.

[0054] The above is only an embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various changes and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the scope of the claims of the present application.

[0055] Although the embodiments of the present application have been described in conjunction with the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present application, and such modifications and variations are all within the scope defined by the appended claims.

Claims

1. A radial sensor mounting assembly for a molecular pump, characterized in that: include: A first mounting seat, fixed to the housing of the molecular pump, wherein the first mounting seat is in a ring shape; A second mounting seat, arranged radially inward of the first mounting seat; A radial sensor, disposed on the second mounting seat, wherein the radial sensor is suitable for detecting a radial offset state of a rotating shaft of the molecular pump; Wherein, the first mounting seat is a heat conductive member, and the second mounting seat is a non-magnetic conductive member.

2. The radial sensor mounting assembly for a molecular pump according to claim 1, characterized in that: The first mounting seat is any one of an aluminum alloy part and a magnesium alloy part.

3. The radial sensor mounting assembly for a molecular pump according to claim 1, characterized in that: The second mounting seat is any one of a ceramic piece, polyetheretherketone and nylon.

4. The radial sensor mounting assembly for a molecular pump according to claim 1, characterized in that: The inner diameter of the first mounting seat is provided with a mounting groove, and an adhesive layer is provided between the second mounting seat and the inner wall of the mounting groove.

5. The radial sensor mounting assembly for a molecular pump according to claim 4, characterized in that: Along the radial inner side of the first mounting seat, the radial sensor does not extend out of the mounting groove.

6. The radial sensor mounting assembly for a molecular pump according to any one of claims 1 to 5, characterized in that: There are multiple second mounting seats and multiple radial sensors. Along the circumference of the first mounting seat, multiple second mounting seats are arranged at intervals on the radial inner side of the first mounting seat, and each radial sensor is arranged on the corresponding second mounting seat.

7. The radial sensor mounting assembly for a molecular pump according to claim 6, characterized in that: There are four of each of the second mounting seat and the radial sensors, and the four radial sensors include a first radial sensor, a second radial sensor, a third radial sensor and a fourth radial sensor which are sequentially arranged along the circumference of the first mounting seat; A line connecting the first radial sensor and the third radial sensor and a line connecting the second radial sensor and the fourth radial sensor are orthogonal to each other.

8. A molecular pump, characterized in that: include: case; A rotating shaft is disposed in the housing; A motor stator assembly, which is arranged between the housing and the rotating shaft along the radial direction of the rotating shaft; A first magnetic bearing and a second magnetic bearing, wherein the first magnetic bearing and the second magnetic bearing are respectively located on two sides of the motor stator assembly along the axial direction of the rotating shaft; The radial sensor mounting assembly according to any one of claims 1 to 7 is arranged on a side of the first magnetic bearing away from the second magnetic bearing or on a side of the second magnetic bearing away from the first magnetic bearing along the axial direction of the rotating shaft.

9. The molecular pump according to claim 8, characterized in that: The radial sensor mounting assembly is two and includes a first radial sensor mounting assembly and a second radial sensor mounting assembly. Along the axial direction of the rotating shaft, the first radial sensor mounting assembly is arranged on a side of the first magnetic bearing away from the second magnetic bearing, and the second radial sensor mounting assembly is arranged on a side of the second magnetic bearing away from the first magnetic bearing.

10. The molecular pump according to claim 8, characterized in that: The first mounting seat is provided with a plurality of through holes, the plurality of through holes are spaced apart along the circumference of the first mounting seat, and each of the through holes penetrates the first mounting seat along the axial direction of the rotating shaft.

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