Dynamic sealing structure for supporting shaft of CVD (Chemical Vapor Deposition) equipment

Abstract

The utility model discloses a CVD (chemical vapor deposition) equipment support shaft dynamic sealing structure, which relates to the technical field of medical catheter surface coatings and comprises an outer sleeve, an inner sleeve and a support shaft, the inner sleeve is slidably mounted in the outer sleeve, a shaft-driven rotating component is mounted in the inner sleeve, and the shaft-driven rotating component is mounted in the support shaft. The shaft driving rotating assembly comprises a thrust ball bearing, an angular contact ball bearing and an outer check ring, a supporting shaft is installed on the inner side of the thrust ball bearing and the inner side of the angular contact ball bearing, a lifting guide assembly is installed on the outer side of the inner sleeve, and outer sealing assemblies are arranged at the upper end and the lower end of the outer sleeve. According to the dynamic sealing structure for the supporting shaft of the CVD equipment, the supporting shaft is rotationally connected with the inner sleeve through the thrust ball bearing and the angular contact ball bearing, and the guide plates can guide an outer end cover of the outer sleeve, so that two sliding through grooves in the left and right sides of the outer end cover and the left and right guide plates slide up and down to assist in lifting of the supporting shaft and the inner sleeve; and a rotating and lifting structure required by the support shaft of the CVD equipment is realized.

Description

Technical Field

[0001] The utility model relates to the technical field of surface coating of medical catheters, in particular to a dynamic sealing structure of a CVD equipment support shaft. Background Art

[0002] Medical catheter surface coating is a surface treatment commonly used in medical accessories. CVD equipment is required during the treatment process. CVD stands for chemical vapor deposition. This technology was originally developed as a coating method. Currently, with the advancement of science and technology, higher performance requirements are placed on the functional materials and functional components of CVD equipment.

[0003] As the requirements for material structure and synthesis conditions of existing CVD equipment become more stringent, the supporting shaft of the ampoule equipped with the CVD equipment is required to be able to both rise and fall and rotate around its own axis, so a corresponding sealing structure is needed.

[0004] Therefore, in view of this, the existing structure and defects are studied and improved, and a CVD equipment support shaft dynamic sealing structure is proposed. Utility Model Content

[0005] The utility model aims to provide a CVD equipment support shaft dynamic sealing structure to solve the problems raised in the above background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a CVD equipment supporting shaft dynamic sealing structure, comprising an outer sleeve, an inner sleeve and a supporting shaft, the inner part of the outer sleeve is slidably installed with an inner sleeve, and the inner part of the inner sleeve is installed with a shaft dynamic rotating component, the shaft dynamic rotating component comprises a thrust ball bearing, an angular contact ball bearing and an outer retaining ring, and the inner sides of the thrust ball bearing and the angular contact ball bearing are installed with a supporting shaft, the thrust ball bearing is arranged in the middle of the inner side of the inner sleeve, and angular contact ball bearings are installed on the upper and lower sides of the inner side of the inner sleeve, the outer side of the angular contact ball bearing is fixed with an outer retaining ring, and the outer retaining ring is half-embedded in the inner sleeve, the outer side of the inner sleeve is installed with a lifting guide component, and the upper and lower ends of the outer sleeve are provided with outer sealing components.

[0007] Furthermore, a rotary sealing part is installed at both upper and lower ends of the inner sleeve, and a lip sealing ring is provided on one side of the rotary sealing part close to the inner part of the inner sleeve.

[0008] Furthermore, the lifting guide assembly includes an outer end cover and a sliding groove. Two outer end covers are provided. The two outer end covers are respectively fixed to the outer parts of the upper and lower ends of the inner sleeve, and four sliding grooves are evenly opened in the outer end cover.

[0009] Furthermore, the lifting guide assembly also includes a guide plate, and guide plates are fixed on both sides of the inner working area of ​​the outer sleeve, and the top view of the guide plate is an arc structure. The left and right guide plates are located inside the left and right sliding grooves and are slidably connected to the sliding grooves.

[0010] Furthermore, the outer sealing assembly includes an inner shaft seal, an outer shaft seal and a rubber ring. The inner and outer sides of the outer sleeve port are respectively fixed with the inner shaft seal and the outer shaft seal, and a rubber ring is installed between the inner shaft seal and the outer shaft seal.

[0011] Furthermore, the outer sealing assembly also includes sealing ribs, and ring-shaped sealing ribs are fixed to the upper and lower sides of the rubber ring, and both the inner shaft seal and the outer shaft seal are provided with grooves corresponding to the sealing ribs.

[0012] The utility model provides a CVD equipment support shaft dynamic sealing structure, which has the following beneficial effects:

[0013] The utility model is provided with an axial rotation component and a lifting guide component. A thrust ball bearing and an angular contact ball bearing enable the support shaft to be rotatably connected to the inner sleeve. The guide plate can guide the outer end cover of the outer sleeve, so that two sliding grooves on the left and right sides of the outer end cover and the left and right guide plates slide up and down to assist the support shaft and the lifting of the inner sleeve, thereby realizing the rotation and lifting structure required by the support shaft movement of the CVD equipment.

[0014] The utility model is provided with a rotating sealing part and an outer sealing component. A lip-shaped sealing ring is provided on one side of the rotating sealing part close to the inner sleeve to enhance the sealing performance between the supporting shaft and the inner sleeve. The inner shaft seal and the outer shaft seal cooperate with the rubber ring to enhance the sealing performance between the supporting shaft and the outer sleeve, thereby realizing multiple sealing. In addition, the sealing rib structure provided by the rubber ring can enhance the contact stress on the sealing coupling surface and improve the sealing effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a schematic diagram of the overall half-section structure of a CVD equipment support shaft dynamic seal structure of the utility model;

[0016] Figure 2 This is a schematic diagram of a half-section structure of an inner sleeve of a CVD equipment support shaft dynamic seal structure of the utility model;

[0017] Figure 3 This is a schematic diagram of the external structure of an inner sleeve of a CVD equipment support shaft dynamic seal structure of the utility model;

[0018] Figure 4 This is a schematic diagram of the top view of the lifting guide assembly of the supporting shaft dynamic seal structure of a CVD equipment of the utility model;

[0019] Figure 5The utility model is a schematic diagram of the overall external structure of a CVD equipment support shaft dynamic seal structure.

[0020] In the figure: 1. outer sleeve; 2. inner sleeve; 3. shaft-moving rotating assembly; 301. thrust ball bearing; 302. angular contact ball bearing; 303. outer retaining ring; 4. supporting shaft; 5. rotating sealing part; 6. lifting guide assembly; 601. outer end cover; 602. sliding groove; 603. guide plate; 7. outer sealing assembly; 701. inner shaft seal; 702. outer shaft seal; 703. rubber ring; 704. sealing rib. DETAILED DESCRIPTION

[0021] The following is a further detailed description of the implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0022] like Figure 1-Figure 2 As shown, a CVD equipment supporting shaft dynamic sealing structure includes an outer sleeve 1, an inner sleeve 2 and a support shaft 4, the inner sleeve 2 is slidably installed inside the outer sleeve 1, and the inner sleeve 2 is installed with a shaft dynamic rotating component 3, the shaft dynamic rotating component 3 includes a thrust ball bearing 301, an angular contact ball bearing 302 and an outer retaining ring 303, and the inner sides of the thrust ball bearing 301 and the angular contact ball bearing 302 are installed with the support shaft 4, the thrust ball bearing 301 is arranged in the middle of the inner side of the inner sleeve 2, and the angular contact ball bearings 302 are installed on the upper and lower sides of the inner side of the inner sleeve 2, and the outer side of the angular contact ball bearing 302 An outer retaining ring 303 is fixed, and the outer retaining ring 303 is half-embedded in the interior of the inner sleeve 2; the thrust ball bearing 301 and the angular contact ball bearing 302 enable the support shaft 4 to be rotatably connected to the inner sleeve 2, so that the support shaft 4 can meet the rotation requirements. The thrust ball bearing 301 in the middle adopts a bidirectional thrust ball bearing, which can withstand axial loads in two directions. The two angular contact ball bearings 302 on the upper and lower sides can withstand radial loads and axial loads at the same time. The outer retaining ring 303 is half-embedded in the interior of the inner sleeve 2 so that the outer retaining ring 303 can position the angular contact ball bearing 302 to improve stability during rotation.

[0023] like Figure 1-Figure 4As shown, a lifting guide assembly 6 is installed on the outer side of the inner sleeve 2, and the lifting guide assembly 6 includes an outer end cover 601 and a sliding groove 602. Two outer end covers 601 are provided, and the two outer end covers 601 are respectively fixed to the outer sides of the upper and lower ends of the inner sleeve 2, and four sliding grooves 602 are evenly opened in the outer end covers 601. The lifting guide assembly 6 also includes a guide plate 603. The guide plates 603 are fixed on both sides of the inner working area of ​​the outer sleeve 1, and the top view of the guide plate 603 is an arc-shaped structure. The left and right guide plates 603 are located inside the left and right sliding grooves 602. The inner sleeve 2 outside the outer sleeve 1 can be lifted and lowered synchronously with the inner sleeve 1 during the lifting and lowering process of the support shaft 4, and the guide plate 603 can guide the outer end cover 601 of the outer sleeve 1, so that the two sliding grooves 602 on the left and right sides of the outer end cover 601 and the two left and right guide plates 603 slide up and down to improve the lifting stability. At the same time, the two sliding grooves 602 on the front and rear sides of the outer end cover 601 make the upper and lower chambers inside the outer sleeve 1 connected to each other, so that the pressure inside the upper and lower parts of the outer sleeve 1 is the same during the lifting and lowering process of the support shaft 4.

[0024] like Figure 1 , Figure 2 and Figure 5 As shown, the upper and lower ends of the inner sleeve 2 are both equipped with a rotary sealing part 5, and the side of the rotary sealing part 5 close to the inner sleeve 2 is set as a lip seal ring, the upper and lower ends of the outer sleeve 1 are provided with an outer sealing assembly 7, the outer sealing assembly 7 includes an inner shaft seal 701, an outer shaft seal 702 and a rubber ring 703, the inner and outer sides of the port of the outer sleeve 1 are respectively fixed with the inner shaft seal 701 and the outer shaft seal 702, and a rubber ring 703 is installed between the inner shaft seal 701 and the outer shaft seal 702, the outer sealing assembly 7 also includes a sealing rib 704, and the upper and lower sides of the rubber ring 703 are fixed A ring-shaped sealing rib 704 is provided, and both the inner shaft seal 701 and the outer shaft seal 702 are provided with grooves corresponding to the sealing rib 704; a lip-shaped sealing ring is provided on the side of the rotating sealing part 5 close to the inner sleeve 2 to enhance the sealing between the support shaft 4 and the inner sleeve 2; the inner shaft seal 701 and the outer shaft seal 702 cooperate with the rubber ring 703 to enhance the sealing between the support shaft 4 and the outer sleeve 1, thereby realizing multiple sealing; and the sealing rib 704 structure provided by the rubber ring 703 can enhance the contact stress on the sealing coupling surface and improve the sealing effect.

[0025] In summary, if Figure 1-Figure 5As shown, the CVD equipment support shaft dynamic sealing structure, when in use, firstly, the support shaft 4 of the CVD equipment support shaft dynamic sealing structure used for the surface coating of the medical catheter can be arranged inside the inner sleeve 2, at this time, the side of the rotating sealing part 5 close to the inner side of the inner sleeve 2 is arranged as a lip-shaped sealing ring to enhance the sealing between the support shaft 4 and the inner sleeve 2, the inner shaft seal 701, the outer shaft seal 702 cooperate with the rubber ring 703 to enhance the sealing between the support shaft 4 and the outer sleeve 1, thereby realizing multiple sealing, and the sealing rib 704 structure arranged by the rubber ring 703 can enhance the contact stress on the sealing coupling surface to improve the sealing effect, thereby providing a relatively reliable dynamic sealing effect;

[0026] Then, corresponding rotating motors and hydraulic cylinder drive structures are set up. During use, the thrust ball bearing 301 and the angular contact ball bearing 302 enable the support shaft 4 to be rotatably connected to the inner sleeve 2, so that the support shaft 4 can meet the rotation requirements. During the lifting and lowering process of the support shaft 4, the inner sleeve 2 outside it can be lifted and lowered synchronously with the inside of the outer sleeve 1. At this time, the guide plate 603 can guide the outer end cover 601 of the outer sleeve 1, so that the two sliding grooves 602 on the left and right sides of the outer end cover 601 and the two left and right guide plates 603 slide up and down to improve the lifting stability. During this process, the two sliding grooves 602 on the front and rear sides of the outer end cover 601 enable the upper and lower chambers inside the outer sleeve 1 to be connected to each other, so that the upper and lower pressures inside the outer sleeve 1 are the same during the movable lifting and lowering process of the support shaft 4, thus completing the use process of the dynamic sealing structure of the support shaft of the CVD equipment.

[0027] The embodiments of the present invention are provided for the purpose of illustration and description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiments are selected and described to better illustrate the principles and practical applications of the present invention, and to enable those of ordinary skill in the art to understand the present invention and thereby design various embodiments with various modifications suitable for specific uses.

Claims

1. A CVD equipment support shaft dynamic sealing structure, comprising an outer sleeve (1), an inner sleeve (2) and a support shaft (4), characterized in that: The inner sleeve (2) is slidably mounted inside the outer sleeve (1), and the inner sleeve (2) is equipped with an axial rotation assembly (3), the axial rotation assembly (3) comprises a thrust ball bearing (301), an angular contact ball bearing (302) and an outer retaining ring (303), and a support shaft (4) is mounted on the inner sides of the thrust ball bearing (301) and the angular contact ball bearing (302), the thrust ball bearing (301) is arranged at the middle of the inner side of the inner sleeve (2), and the angular contact ball bearing (302) is mounted on both the upper and lower sides of the inner side of the inner sleeve (2), the outer side of the angular contact ball bearing (302) is fixed with an outer retaining ring (303), and the outer retaining ring (303) is half-embedded in the inner sleeve (2), the outer side of the inner sleeve (2) is equipped with a lifting guide assembly (6), and the upper and lower ends of the outer sleeve (1) are equipped with an outer sealing assembly (7).

2. A CVD equipment support shaft dynamic sealing structure according to claim 1, characterized in that: Rotating sealing parts (5) are installed at both upper and lower ends of the inner sleeve (2), and a lip-shaped sealing ring is arranged on one side of the rotating sealing part (5) close to the interior of the inner sleeve (2).

3. The CVD equipment support shaft dynamic sealing structure according to claim 1, characterized in that: The lifting guide assembly (6) comprises an outer end cover (601) and a sliding groove (602). Two outer end covers (601) are provided. The two outer end covers (601) are respectively fixed to the upper and lower ends of the inner sleeve (2), and four sliding grooves (602) are evenly arranged inside the outer end cover (601).

4. A CVD equipment support shaft dynamic sealing structure according to claim 3, characterized in that: The lifting guide assembly (6) also includes a guide plate (603), and the guide plates (603) are fixed on both sides of the inner working area of ​​the outer sleeve (1), and the top view of the guide plates (603) is an arc-shaped structure. The left and right guide plates (603) are located inside the left and right sliding grooves (602) and are slidably connected to the sliding grooves (602).

5. The CVD equipment support shaft dynamic sealing structure according to claim 1, characterized in that: The outer sealing assembly (7) comprises an inner shaft seal (701), an outer shaft seal (702) and a rubber ring (703); the inner shaft seal (701) and the outer shaft seal (702) are fixed to the inner and outer sides of the port of the outer sleeve (1), respectively, and the rubber ring (703) is installed between the inner shaft seal (701) and the outer shaft seal (702).

6. A CVD equipment support shaft dynamic sealing structure according to claim 5, characterized in that: The outer sealing assembly (7) further comprises a sealing rib (704). Ring-shaped sealing ribs (704) are fixed to the upper and lower sides of the rubber ring (703). Meanwhile, the inner shaft seal (701) and the outer shaft seal (702) are both provided with grooves corresponding to the sealing ribs (704).

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