Cryopump support
By designing a cryopump bracket with a sliding adjustment structure, the problems of single function and poor adaptability of the existing bracket are solved, and the effect of adapting to the cryopump body of different sizes is achieved, which improves the frequency of use and reduces the manufacturing cost.
Patent Information
- Application Number
- CN202421843756.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-31
- Publication Date
- 2025-06-06
- Estimated Expiration
- 2034-07-31
AI Technical Summary
The existing cryopump bracket has a single function and cannot be adapted to cryopump bodies of different sizes, resulting in the need to manufacture multiple sizes of brackets, which increases manufacturing cost and maintenance complexity.
A cryopump bracket is designed, adopting a support frame, an adjustment frame, a support column and a sliding adjustment structure. Through the vertical crossing of the first adjustment guide rail and the second adjustment guide rail, the sliding adjustment of at least four support columns is realized, forming a square arrangement to adapt to the cryopump body of different sizes.
The bracket can be adapted to cryopump bodies of different sizes, which improves the frequency of use of the bracket, reduces manufacturing costs, and eliminates the need to manufacture multiple sizes of brackets, simplifying the maintenance and installation process.
Smart Images
Figure CN222950718U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field related to cryogenic pumps, and in particular to a cryogenic pump bracket. Background Art
[0002] A cryopump, also known as a condensation pump or a cold pump, is a device that obtains and maintains ultra-high vacuum through condensation, adsorption and capture. It is widely used in vacuum coating, flat panel displays, semiconductor integrated circuits, space environment simulation and high-energy physics. The cryopump consists of a compressor and a cryogenic pump body. The cryogenic pump body includes main components such as a GM refrigerator, a pump body shell, a primary baffle, a radiation shield and a cold umbrella. The cryogenic pump body has a series of universal calibers of different sizes. Compared with ordinary water pumps, the structure of cryogenic pumps is more complicated and requires intensive maintenance. In order to make installation, maintenance and transportation more convenient, a cryogenic pump bracket is generally provided to support the pump body for easy transportation and maintenance. In the prior art, the bracket can generally only match a single-caliber cryogenic pump body. Pump bodies of different sizes need to be configured with brackets separately, and multiple brackets need to be processed. The function of each bracket is single and the frequency of use of each bracket is low. Utility Model Content
[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model proposes a cryopump bracket, which can solve the problem of the bracket having a single function.
[0004] According to a first aspect of the utility model, a cryogenic pump bracket includes: a support frame, an adjustment frame, a support column and a sliding adjustment structure, wherein the adjustment frame is arranged at the top of the support frame, and the adjustment frame includes a first adjustment rail and a second adjustment rail arranged perpendicularly and crosswise to each other, and the sliding adjustment structure is arranged on the first adjustment rail, the second adjustment rail and the support column, wherein the first adjustment rail is provided with at least two support columns, and the support column can be slidably adjusted in position along the extension direction of the first adjustment rail by the sliding adjustment structure, and the second adjustment rail is provided with at least two support columns, and the support column can be slidably adjusted in position along the extension direction of the second adjustment rail by the sliding adjustment structure.
[0005] A cryogenic pump bracket according to an embodiment of the utility model has at least the following beneficial effects: the first adjustment rail and the second adjustment rail are cross-arranged perpendicularly to each other, so that at least four support columns can be slidably adjusted by a sliding adjustment structure to form a square arrangement position to adapt to the connection position of the cryogenic pump, and the connection positions of cryogenic pumps of different sizes are different. The position of the support can be adjusted by the sliding adjustment structure to adapt to different cryogenic pump bodies. Therefore, only one bracket needs to be configured to meet the connection requirements of cryogenic pumps of different sizes, which can increase the frequency of use of the bracket, and there is no need to manufacture brackets of multiple sizes, and the manufacturing cost is low.
[0006] According to some embodiments of the utility model, the sliding adjustment structure includes a first sliding groove, a second sliding groove, a sliding column and a locking piece, the first sliding groove is arranged on the first adjustment guide rail and extends along the length direction of the first adjustment guide rail, the second sliding groove is arranged on the second adjustment guide rail and extends along the length direction of the second adjustment guide rail, the sliding column is arranged at the bottom of the support column, the sliding column can slide and cooperate with the corresponding first sliding groove and second sliding groove, the locking piece is arranged on the sliding column, and the locking piece can lock the sliding column to the adjustment frame.
[0007] According to some embodiments of the present utility model, the sliding column includes a stud, and the locking member includes a nut, the nut is threadedly connected to the sliding column, and the nut can press the adjustment frame against the support column.
[0008] According to some embodiments of the utility model, a support member is provided at the bottom of the support column, and the support member is extended along the radial direction of the support column, and the support member abuts against the top of the adjustment frame.
[0009] According to some embodiments of the present invention, the support member includes a circular gasket.
[0010] According to some embodiments of the present invention, the side wall of the support column is provided with a first matching groove and a second matching groove, and the bottom wall of the first matching groove is arranged parallel to the bottom wall of the second matching groove.
[0011] According to some embodiments of the present invention, a connecting portion is provided on the top of the support column, and the connecting portion is used to connect to a cryogenic pump.
[0012] According to some embodiments of the present invention, the support frame includes a first cross bar and a second cross bar that are arranged parallel to each other, and the adjustment frame is arranged on the top of the first cross bar and the second cross bar.
[0013] According to some embodiments of the utility model, the support frame also includes a third cross bar, one end of the third cross bar is connected to the first cross bar, and the other end is connected to the second cross bar. The third cross bar is provided with a support seat, and the support seat is connected to the bottom of the adjustment frame.
[0014] According to some embodiments of the present invention, at least two rollers are provided at the bottom of the support frame.
[0015] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] The above or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:
[0017] Figure 1 It is a general schematic diagram of an embodiment of the utility model;
[0018] Figure 2 for Figure 1 A schematic diagram of another direction;
[0019] Figure 3 for Figure 1 Exploded diagram of
[0020] Figure 4 A schematic diagram of the structure of the support column.
[0021] Reference numerals:
[0022] Support frame 100, first cross bar 110, second cross bar 120, third cross bar 130, support seat 131, roller 140;
[0023] An adjustment frame 200, a first adjustment rail 210, and a second adjustment rail 220;
[0024] Support column 300, support member 310, circular gasket 311, first matching groove 320, second matching groove 330, connecting portion 340;
[0025] The sliding adjustment structure 400 , the first sliding groove 410 , the second sliding groove 420 , the sliding column 430 , the stud 431 , the locking member 440 , and the nut 441 . DETAILED DESCRIPTION
[0026] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.
[0027] In the description of the present utility model, it is necessary to understand that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "axial", "radial", "circumferential" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, unless otherwise specified, "multiple" means two or more.
[0028] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0029] Reference Figure 1 to Figure 2 According to the first aspect of the present invention, a cryogenic pump bracket includes a support frame 100, an adjustment frame 200, a support column 300 and a sliding adjustment structure 400. The adjustment frame 200 is arranged on the top of the support frame 100. The adjustment frame 200 includes a first adjustment rail 210 and a second adjustment rail 220 that are perpendicularly arranged to cross each other. The sliding adjustment structure 400 is arranged on the first adjustment rail 210, the second adjustment rail 220 and the support column 300, wherein the first adjustment rail 210 is provided with at least two support columns 300, and the support column 300 can slide and adjust its position along the extension direction of the first adjustment rail 210 through the sliding adjustment structure 400, and the second adjustment rail 220 is provided with at least two support columns 300, and the support column 300 can slide and adjust its position along the extension direction of the second adjustment rail 220 through the sliding adjustment structure 400. The first adjustment rail 210 and the second adjustment rail 220 are cross-arranged perpendicularly to each other, so that at least four support columns 300 can be slidably adjusted by the sliding adjustment structure 400 to form a square arrangement position to adapt to the connection position of the cryopump. The connection positions of cryopumps of different sizes are different, and the support position can be adjusted by the sliding adjustment structure 400 to adapt to different cryopump bodies. Therefore, only one bracket is needed to meet the connection requirements of cryopumps of different sizes, which can increase the frequency of use of the bracket and there is no need to manufacture brackets of multiple sizes, so the manufacturing cost is low.
[0030] Specifically, the adjustment frame 200 can be welded to the top of the support frame 100, and the adjustment frame 200 can be set to a first adjustment rail 210 and a second adjustment rail 220 that are perpendicularly arranged to each other. The first adjustment rail 210 and the second adjustment rail 220 can be an integrated structure, and the support column 300 is vertically arranged, and the support column 300 has a certain height to provide sufficient accommodation space for the pump body. The specific structure of the sliding adjustment structure 400 is not limited here. The sliding adjustment structure 400 can enable the support column 300 to slide along the extension direction of the first adjustment rail 210 or the second adjustment rail 220, and the first adjustment rail 210 can Two support columns 300, the second adjustment rail 220 can also be provided with two support columns 300, the pump body is supported by four support columns 300, and the four support columns 300 can slide to a square arrangement shape to facilitate connection with the connecting flange of the pump body. The common calibers of the cryogenic pump body are 4 inches, 6 inches, 8 inches, 10 inches, 12 inches, 16 inches, 20 inches, 22 inches, 30 inches, etc., and the four support columns 300 can slide to expand or reduce the size of the square to match the above-mentioned pump body connecting flanges of different calibers, so that only one cryogenic pump bracket is needed to meet the support requirements of various cryogenic pumps.
[0031] Reference Figures 1 to 3 In some embodiments of the utility model, the sliding adjustment structure 400 includes a first slide groove 410, a second slide groove 420, a sliding column 430 and a locking piece 440. The first slide groove 410 is arranged on the first adjustment guide rail 210 and extends along the length direction of the first adjustment guide rail 210. The second slide groove 420 is arranged on the second adjustment guide rail 220 and extends along the length direction of the second adjustment guide rail 220. The sliding column 430 is arranged at the bottom of the support column 300. The sliding column 430 can slide and cooperate with the corresponding first slide groove 410 and second slide groove 420. The locking piece 440 is arranged on the sliding column 430, and the locking piece 440 can lock the sliding column 430 to the adjustment frame 200.
[0032] Specifically, the first adjustment guide rail 210 can be provided with a first slide groove 410 running through it from top to bottom, and the second adjustment guide rail 220 can be provided with a second slide groove 420 running through it from top to bottom, so that the sliding column 430 at the bottom of the support column 300 can pass through the first slide groove 410 or the second slide groove 420, so that the sliding column 430 can slide along the first slide groove 410 and the second slide groove 420 in cooperation, and the locking member 440 can be provided on the sliding column 430, and the specific structure of the locking member 440 is not limited. The locking member 440 can lock the sliding column 430 and the adjustment frame 200 to limit the position of the support column 300. It can be understood that after the locking member 440 is unlocked, the sliding column 430 can slide and adjust the position along the first slide groove 410 or the second slide groove 420, which can facilitate the adjustment of the position of the support column 300.
[0033] Reference Figure 1 It can be understood that the first slide groove 410 and the second slide groove 420 can be arranged in sections to improve the structural strength of the first adjustment guide rail 210 and the second adjustment guide rail 220.
[0034] Reference Figure 3 In some embodiments of the present invention, the sliding column 430 includes a stud 431, and the locking member 440 includes a nut 441. The nut 441 is threadedly connected to the sliding column 430, and the nut 441 can press the adjustment frame 200 against the support column 300. Specifically, the bottom end of the stud 431 passes through the first slide groove 410 or the second slide groove 420, and the nut 441 is tightened from the bottom end, which can press the adjustment frame 200 against the support column 300, thereby achieving locking. The structure is relatively simple, and the stud 431 can be slidably matched with the first slide groove 410 or the second slide groove 420, and can be threadedly connected with the nut 441 to lock the position of the support column 300.
[0035] It is understandable that the locking member 440 may also be a rotatable buckle, and the buckle may be rotated to press the adjustment frame 200 .
[0036] Reference Figure 1 and Figure 3 In some embodiments of the present invention, a support member 310 is provided at the bottom of the support column 300, and the support member 310 is extended radially along the support column 300, and the support member 310 abuts against the top of the adjustment frame 200. Specifically, the support member 310 can expand the contact area with the adjustment frame 200 to improve the stability of the connection.
[0037] Reference Figure 1 and Figure 3 In some embodiments of the present invention, the support member 310 includes a circular gasket 311. The circular gasket 311 is a universal part, which can reduce manufacturing costs.
[0038] Reference Figure 4In some embodiments of the present invention, the side wall of the support column 300 is provided with a first matching groove 320 and a second matching groove 330, and the bottom wall of the first matching groove 320 is arranged parallel to the bottom wall of the second matching groove 330. The first matching groove 320 and the second matching groove 330 can be clamped with a wrench, so that the support column 300 can be twisted to rotate, which is convenient for installation.
[0039] Specifically, the support column 300 can be set in a cylindrical shape to facilitate processing, and a first matching groove 320 and a second matching groove 330 can be cut out on the side wall. The first matching groove 320 and the second matching groove 330 can be clamped with a wrench, so that the support column 300 can be twisted and rotated, which is convenient for installation.
[0040] It is understandable that the support column 300 can also be configured as a square column.
[0041] Reference Figures 1 to 4 In some embodiments of the present invention, a connection portion 340 is provided on the top of the support column 300, and the connection portion 340 is used to connect with the cryopump. Specifically, the connection portion 340 can be a threaded column, which can be connected with the flange of the cryopump.
[0042] Reference Figures 1 to 3 In some embodiments of the present invention, the support frame 100 includes a first crossbar 110 and a second crossbar 120 arranged in parallel with each other, and the adjustment frame 200 is arranged on the top of the first crossbar 110 and the second crossbar 120. It can reduce manufacturing materials and save costs.
[0043] Specifically, the first cross bar 110 and the second cross bar 120 can both be set as channel steels, and the first cross bar 110 and the second cross bar 120 can be set parallel to each other. The adjustment frame 200 can be welded to the first cross bar 110 and the second cross bar 120 to connect the first cross bar 110 and the second cross bar 120, which can reduce manufacturing materials and save costs.
[0044] Reference Figures 1 to 3 In some embodiments of the present invention, the support frame 100 also includes a third cross bar 130, one end of the third cross bar 130 is connected to the first cross bar 110, and the other end is connected to the second cross bar 120. The third cross bar 130 is provided with a support seat 131, and the support seat 131 is connected to the bottom of the adjustment frame 200, which can improve the bearing capacity of the adjustment frame 200.
[0045] Specifically, the third cross bar 130 can be vertically arranged with the first cross bar 110 and the second cross bar 120 to strengthen the overall strength of the support frame 100. The support seat 131 can be arranged in the middle of the third cross bar 130. The support seat 131 can be connected to the middle of the adjustment frame 200 to support the adjustment frame 200 in the middle, thereby improving the bearing capacity of the adjustment frame 200.
[0046] Reference Figures 1 to 3 In some embodiments of the present invention, at least two rollers 140 are provided at the bottom of the support frame 100 to facilitate the transport of the support frame. Specifically, four rollers 140 can be provided at the four corners of the support frame 100, so that the support frame can be transported stably.
[0047] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.
[0048] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.
Claims
1. A cryopump support, characterized in that: include: Support frame (100); An adjustment frame (200) is arranged on the top of the support frame (100), and the adjustment frame (200) comprises a first adjustment guide rail (210) and a second adjustment guide rail (220) which are arranged perpendicularly and crosswise to each other; Support column (300); A sliding adjustment structure (400) is provided on the first adjustment guide rail (210), the second adjustment guide rail (220) and the support column (300); The first adjustment rail (210) is provided with at least two support columns (300), and the support columns (300) can be slidably adjusted along the extension direction of the first adjustment rail (210) through a sliding adjustment structure (400); the second adjustment rail (220) is provided with at least two support columns (300), and the support columns (300) can be slidably adjusted along the extension direction of the second adjustment rail (220) through a sliding adjustment structure (400).
2. A cryopump support according to claim 1, characterized in that: The sliding adjustment structure (400) includes a first sliding groove (410), a second sliding groove (420), a sliding column (430) and a locking member (440), wherein the first sliding groove (410) is arranged on the first adjustment guide rail (210) and extends along the length direction of the first adjustment guide rail (210), the second sliding groove (420) is arranged on the second adjustment guide rail (220) and extends along the length direction of the second adjustment guide rail (220), the sliding column (430) is arranged at the bottom of the support column (300), the sliding column (430) can slide and cooperate with the corresponding first sliding groove (410) and the second sliding groove (420), the locking member (440) is arranged on the sliding column (430), and the locking member (440) can lock the sliding column (430) to the adjustment frame (200).
3. A cryopump support according to claim 2, characterized in that: The sliding column (430) includes a stud (431), and the locking member (440) includes a nut (441). The nut (441) is threadedly connected to the sliding column (430), and the nut (441) can press the adjustment frame (200) against the support column (300).
4. A cryopump support according to claim 1, characterized in that: A support member (310) is provided at the bottom of the support column (300), and the support member (310) is extended along the radial direction of the support column (300), and the support member (310) abuts against the top of the adjustment frame (200).
5. A cryopump support according to claim 4, characterized in that: The support member (310) includes a circular gasket (311).
6. A cryopump support according to claim 1, characterized in that: The side wall of the support column (300) is provided with a first matching groove (320) and a second matching groove (330), and the bottom wall of the first matching groove (320) is arranged parallel to the bottom wall of the second matching groove (330).
7. A cryopump support according to claim 1, characterized in that: A connecting portion (340) is provided at the top of the support column (300), and the connecting portion (340) is used to be connected to a cryogenic pump.
8. The cryopump support according to claim 1, characterized in that: The support frame (100) comprises a first crossbar (110) and a second crossbar (120) which are arranged parallel to each other, and the adjustment frame (200) is arranged on the top of the first crossbar (110) and the second crossbar (120).
9. A cryopump support according to claim 8, characterized in that: The support frame (100) further comprises a third cross bar (130), one end of the third cross bar (130) being connected to the first cross bar (110), and the other end being connected to the second cross bar (120), the third cross bar (130) being provided with a support seat (131), and the support seat (131) being connected to the bottom of the adjustment frame (200).
10. The cryopump support according to claim 1, characterized in that: At least two rollers (140) are provided at the bottom of the support frame (100).