Wafer bar code label detection jig
By designing a detection fixture for detecting the position of wafer barcode labels, the problem of failure of package reading caused by barcode label offset is solved, and higher process reliability and accuracy are achieved.
Patent Information
- Application Number
- CN202422026328.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-20
- Publication Date
- 2025-06-06
- Estimated Expiration
- 2034-08-20
AI Technical Summary
During the wafer back process, the barcode label is often offset, resulting in machine reading failure in the packaging process, resulting in wafer identification errors.
Design a wafer barcode label detection fixture, including base, tray, bracket mechanism and laser light. The bracket mechanism consists of a first bracket and a second bracket. The laser lamp is fixed to the head end of the second bracket. By comparing the relationship between the light projected by the laser lamp and the actual barcode label position, the position of the barcode label is accurately detected.
By accurately detecting the position of the wafer barcode label, the package reading failure caused by abnormal barcode label position is avoided, and the reliability and accuracy of the process are improved.
Smart Images
Figure CN222951691U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of semiconductors, and in particular to a wafer barcode label detection jig. Background Art
[0002] The back-side process of the wafer mainly includes: (1) Film pasting: applying a protective film to the front-side device of the wafer before grinding; (2) Taiko thinning: grinding the back side of the wafer with a diamond grinding wheel (retaining a ring of about 3 mm original thickness at the edge to support the wafer); (3) Film peeling: after grinding, using ultraviolet light to cure the front protective film and hot melt adhesive to remove the front protective film; (4) Back-side silicon etching: removing the rough grinding lines on the back side of the wafer by silicon etching, effectively reducing the contact resistance; (5) Back-side implantation: implanting specific ions into the target area on the back side of the wafer to change the material properties; (6) Laser annealing: performing laser rapid annealing on the back side of the wafer after ion implantation (such as silicon-based IGBT wafer) to achieve activation depth and effectively repair the lattice structure damaged by ion implantation; (7) Back-side metal sputtering: using physical vapor deposition (PVD) to deposit metal on the back side of the wafer. (8) Vacuum mounting: The dicing tape, iron ring, and Taiko-thinned wafer are bonded together by vacuum pumping and labeled with a barcode (Lot ID) for easy identification by the packaging factory; (9) Wafer ring removal: A diamond blade is used to cut and remove the wafer ring around the edge of the Taiko-thinned wafer; (10) Wafer dicing: A diamond blade is used to divide the wafer into individual chips.
[0003] Among them, during the vacuum film lamination step, the barcode label often shifts, resulting in failure to read the barcode label during the subsequent packaging process, causing errors in wafer identification.
[0004] Therefore, a wafer barcode label detection jig is provided to detect the position of the barcode label and prevent the packaging code reading failure caused by the abnormal position of the barcode label, which has great process value. Utility Model Content
[0005] The technical problem to be solved by the utility model is to provide a wafer barcode label detection jig, which can more accurately detect the position of the wafer barcode label and prevent the packaging code reading failure caused by the abnormal position of the barcode label.
[0006] In order to solve the above problems, the utility model provides a wafer barcode label detection fixture, comprising: a base, on which a tray is arranged, and the tray is used to place wafers; a bracket mechanism, the bracket mechanism comprising a first bracket and a second bracket, the first bracket comprising a supporting portion and an extending portion, the supporting portion is connected to the base and extends along a first direction, the extending portion is connected to the supporting portion and is suspended above the tray, the second bracket has a head end and a tail end arranged oppositely, the tail end of the second bracket is detachably connected to the extending portion of the first bracket, and the head end of the second bracket is suspended above the tray, wherein the first direction forms an angle with the plane where the tray is located; at least one laser lamp, the laser lamp is fixed to the head end of the second bracket, the projection surface of the laser lamp faces the tray, and the light projected by the laser lamp is projected to the fixed position of the tray.
[0007] In some embodiments, the supporting portion of the first bracket includes two supporting rods arranged on two sides of the base opposite to each other, and in the first direction, the height of the supporting rods is greater than the height of the base.
[0008] In some embodiments, the first direction is perpendicular to a plane where the tray is located.
[0009] In some embodiments, the extension portion of the first bracket includes a connecting rod, and both ends of the connecting rod are respectively connected to one of the supporting rods.
[0010] In some embodiments, the tail end of the second bracket is detachably connected to the extension portion of the first bracket by a screw.
[0011] In some embodiments, there are multiple screw holes at the rear end of the second bracket, and the position of the laser lamp can be moved by fixing screws in the screw holes at different positions.
[0012] In some embodiments, the second bracket is a straight rod, and the straight rod is perpendicular to the extension portion of the first bracket.
[0013] In some embodiments, the first end of the second bracket is a rectangular plate.
[0014] In some embodiments, there are multiple laser lamps.
[0015] In some embodiments, the laser light is a red laser light.
[0016] In some embodiments, the laser light projection shape is a cross.
[0017] The above technical solution is to set a bracket mechanism on a base provided with a tray for placing wafers, the bracket mechanism includes a first bracket and a second bracket, the first bracket includes a supporting portion and an extending portion, the supporting portion is connected to the base and extends along a first direction, the extending portion is connected to the supporting portion and is suspended above the tray, the second bracket has a head end and a tail end relatively arranged, the tail end of the second bracket is detachably connected to the extending portion of the first bracket, and the head end of the second bracket is suspended above the tray, at least one laser lamp is fixed to the head end of the second bracket, and by comparing the relationship between the fixed position and the actual position of the light projected by the laser lamp onto the tray, the position of the wafer barcode label can be detected more accurately, thereby avoiding package reading failure caused by abnormal barcode label position.
[0018] It should be understood that the above general description and the detailed description below are only exemplary and explanatory and cannot limit the present invention. The techniques, methods and devices known to ordinary technicians in the relevant field may not be discussed in detail, but in appropriate cases, the techniques, methods and devices should be considered as part of the authorization specification. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] In order to more clearly illustrate the technical solution of the embodiments of the utility model, the drawings required for use in the embodiments of the utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0020] Figure 1 It is a schematic diagram of the device structure of the wafer barcode label detection fixture provided by the first embodiment of the utility model;
[0021] Figure 2 It is a schematic diagram of the front view of the second bracket provided by the first embodiment of the utility model;
[0022] Figure 3 It is a schematic diagram of the device structure of a wafer barcode label detection fixture provided by the second embodiment of the utility model;
[0023] Figure 4 It is a front view schematic diagram of a second bracket provided in the third embodiment of the utility model. DETAILED DESCRIPTION
[0024] The technical solutions in the embodiments of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of them. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0025] Please refer to Figure 1-2 , Figure 1 1 is a schematic diagram of the device structure of the wafer barcode label detection fixture provided by the first embodiment of the utility model. Figure 2 It is a schematic front view of the second bracket provided in the first embodiment of the utility model.
[0026] like Figure 1 As shown, the wafer barcode label detection fixture includes: a base 11, a support mechanism, and at least one laser lamp 15. A tray 12 is arranged on the base 11, and the tray 12 is used to place wafers; the support mechanism includes a first support 13 and a second support 14, the first support 13 includes a support portion 131 and an extension portion 132, the support portion 131 is connected to the base 11 and extends along a first direction Y, the extension portion 132 is connected to the support portion 131 and is suspended above the tray 12, the second support 14 has a head end and a tail end that are arranged oppositely, the tail end of the second support 14 is detachably connected to the extension portion 132 of the first support 13, and the head end of the second support 14 is suspended above the tray 12, wherein the first direction Y is at an angle to the plane where the tray 12 is located; the laser lamp 15 is fixed to the head end of the second support 14, the projection surface of the laser lamp 15 faces the tray 12, and the light projected by the laser lamp 15 is projected to the fixed position 19 of the tray 12.
[0027] The support portion 131 is used to support the first bracket 13 on the base 11 and connect the extension portion 132; the extension portion 132 is used to connect with the second bracket 14; the second bracket 14 is used to set the laser lamp 15 and suspend the laser lamp 15 above the tray 12, so that the light projected by the laser lamp 15 is projected to a fixed position on the tray 12; the fixed position 19 is a position on the tray 12, Figure 1 The fixed position 19 corresponds to a position of the wafer placed on the tray 12. In this embodiment, the wafer to be inspected is placed on the tray 12 in a specific direction, and the fixed position 19 corresponds to the barcode label placed on the wafer to be inspected. The second bracket 14 is a cubic columnar rod. The main view of the second bracket 14 is as shown in FIG. Figure 2 shown.
[0028] In this embodiment, the support portion 131 of the first bracket 13 includes two support rods disposed opposite to each other on both sides of the base 11. In the first direction Y, the height of the support rods is greater than the height of the base 11. Figure 1 As shown, the support rods are symmetrically arranged on both sides of the base 11. The support rods can be fixed to the base 11 by screws and screw holes on the base 11. The height of the support rods is greater than the height of the base 11, so that the second bracket 14 can be located above the tray 12, and accordingly, the second bracket 14 can be located above the wafer to be inspected on the tray 12.
[0029] In this embodiment, the first direction Y is perpendicular to the plane where the tray 12 is located. The angle between the first direction Y and the plane where the tray 12 is located is a right angle, which can make the bracket mechanism more stable.
[0030] like Figure 1 As shown, the extension portion 132 of the first bracket 13 includes a connecting rod, and the two ends of the connecting rod are respectively connected to one of the supporting rods, and the connecting rod is a straight rod. In some embodiments, the connecting rod is a broken line shape spliced by multiple sections.
[0031] like Figure 1 As shown, the two ends of the connecting rod are fixedly connected to one of the supporting rods respectively. In some embodiments, the extension portion 132 is detachably connected to the supporting portion 131, for example, by a slot connection or a screw connection.
[0032] like Figure 1 As shown, the tail end of the second bracket 14 is detachably connected to the extension portion 132 of the first bracket 13 by a screw 16. The second bracket 14 is provided with a screw hole 17, and the extension portion 132 is also provided with a screw hole (not shown). The screw 16 cooperates with the screw hole 17 to fix the tail end of the second bracket 14 to the extension portion 132.
[0033] Continue reading Figure 1 and Figure 2 There are multiple screw holes 17 at the tail end of the second bracket 14, and the position of the laser lamp 15 can be moved by fixing the screws 16 in the screw holes 17 at different positions.
[0034] In this embodiment, the second bracket 14 is a straight rod, and the straight rod is perpendicular to the extension portion 132 of the first bracket 13, that is, the straight rod is perpendicular to the connecting rod. In another embodiment, the angle between the straight rod and the extension portion 132 is less than 90°. The position of the laser light 15 on the second bracket 14 can be adjusted by adjusting the angle between the straight rod and the extension portion 132.
[0035] In this embodiment, the laser lamp 15 is a red laser lamp. The laser lamp 15 projects red light for human eyes to observe. In addition, the projection shape of the laser lamp 15 is a cross shape, through which the position of light projection can be more clearly identified, which is particularly suitable for scenes where the projection position has a right-angle outline.
[0036] When the wafer barcode label detection jig is used to detect the position of the barcode label, the angle of the first bracket 13 and the plane where the tray 12 is located is adjusted, and the positions of the first bracket 13 and the second bracket 14 are adjusted so that the projection of the light projected by the laser lamp 15 is located near the boundary of the normal position of the barcode label of the wafer being detected and away from the center of the wafer (for example, 2 mm from the boundary). The position difference between the boundary of the barcode label of the wafer being detected and away from the center of the wafer and the projection of the light projected by the laser lamp 15 is observed. If the boundary of the barcode label of the wafer being detected and away from the center of the wafer exceeds the projection of the light projected by the laser lamp 15, it is determined that the position of the barcode label of the wafer being detected is abnormal.
[0037] Figure 3 Schematic diagram of the device structure of the wafer barcode label detection fixture provided by the second embodiment of the utility model. Figure 3 As shown, the wafer barcode label detection fixture includes: a base 21, a support mechanism, and at least one laser lamp 25. Specifically, a tray 22 is provided on the base 21, and the tray 22 is used to place wafers; the support mechanism includes a first support 23 and a second support 24, the first support 23 includes a support portion 231 and an extension portion 232, the support portion 231 is connected to the base 21 and extends along a first direction Y, the extension portion 232 is connected to the support portion 231 and is suspended above the tray 22, the second support 24 has a head end and a tail end that are arranged oppositely, the tail end of the second support 24 is detachably connected to the extension portion 232 of the first support 23, and the head end of the second support 24 is suspended above the tray 22, wherein the first direction Y is at an angle to the plane where the tray 22 is located; the laser lamp 25 is fixed to the head end of the second support 24, the projection surface of the laser lamp 25 faces the tray 22, and the light projected by the laser lamp 25 is projected to the fixed position 29 of the tray 12.
[0038] In this embodiment, the support portion 231 includes only one support rod, and the support rod is fixed to one side of the base 21. In addition, the extension portion 232 is integrally formed with the support rod, further ensuring that the support portion 231 and the extension portion 232 are fixed in position.
[0039] Figure 4Schematic diagram of the front view of the second bracket provided by the third embodiment of the utility model. Figure 4 As shown, the main body of the second bracket 34 is a cubic columnar rod. Figure 2 Similar to Figure 2 The difference is that the head end of the second bracket 34 is a rectangular plate, and the rectangular plate is provided with four laser lamps 35. In this embodiment, the projections of the light projected by the laser lamps 35 correspond to the vertex angles of the barcode label of the wafer. By judging the vertex position, it is judged whether the position of the barcode label of the wafer is correct.
[0040] In another embodiment, the number of the laser lamps 35 is 10, and the projection points of the light projected by the laser lamps 35 correspond to the four boundaries of the barcode label of the wafer. Whether the position of the barcode label of the wafer is correct is determined by determining the position of the boundary lines.
[0041] The shape of the head end of the second bracket 34 and the number and distribution of the laser lights thereon can be adjusted according to the shape of the detected area. In some embodiments, the head end of the second bracket 34 is a circular plate.
[0042] The above technical solution is to set a bracket mechanism on a base provided with a tray for placing wafers, the bracket mechanism includes a first bracket and a second bracket, the first bracket includes a supporting portion and an extending portion, the supporting portion is connected to the base and extends along a first direction, the extending portion is connected to the supporting portion and is suspended above the tray, the tail end of the second bracket is detachably connected to the extending portion of the first bracket, and the head end of the second bracket is suspended above the tray, at least one laser lamp is fixed to the head end of the second bracket, and by comparing the relationship between the fixed position and the actual position of the light projected by the laser lamp onto the tray, the position of the wafer barcode label can be detected more accurately, thereby avoiding package reading failure caused by abnormal barcode label position.
[0043] It should be noted that, in this document, relational terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion. The various embodiments in this specification are described in a related manner, and the same and similar parts between the various embodiments can be referenced to each other, and each embodiment focuses on the differences from other embodiments.
[0044] The above is only a preferred embodiment of the utility model, and is not intended to limit the protection scope of the utility model. It should be pointed out that ordinary technicians in this technical field can make several improvements and modifications without departing from the principle of the utility model, and these improvements and modifications should also be regarded as the protection scope of the utility model.
Claims
1. A wafer barcode label detection fixture, characterized in that: include: A base, wherein a tray is provided on the base, and the tray is used to place the wafer; A bracket mechanism, the bracket mechanism comprising a first bracket and a second bracket, the first bracket comprising a supporting portion and an extending portion, the supporting portion being connected to the base and extending along a first direction, the extending portion being connected to the supporting portion and suspended above the tray, the second bracket having a head end and a tail end arranged opposite to each other, the tail end of the second bracket being detachably connected to the extending portion of the first bracket, and the head end of the second bracket being suspended above the tray, wherein the first direction forms an angle with the plane where the tray is located; At least one laser lamp is fixed to the head end of the second bracket, the projection surface of the laser lamp faces the tray, and the light projected by the laser lamp is projected to a fixed position of the tray.
2. The wafer barcode label detection jig according to claim 1, characterized in that: The first direction is perpendicular to the plane where the tray is located.
3. The wafer barcode label detection jig according to claim 1, characterized in that: The supporting portion of the first bracket includes two supporting rods arranged opposite to each other on both sides of the base. In the first direction, the height of the supporting rods is greater than the height of the base.
4. The wafer barcode label detection jig according to claim 3, characterized in that: The extension portion of the first bracket includes a connecting rod, and both ends of the connecting rod are respectively connected to one of the supporting rods.
5. The wafer barcode label detection jig according to claim 1, characterized in that: The tail end of the second bracket is detachably connected to the extension portion of the first bracket by means of screws.
6. The wafer barcode label detection jig according to claim 5, characterized in that: The tail end of the second bracket has a plurality of screw holes, and the position of the laser lamp can be moved by fixing screws in the screw holes at different positions.
7. The wafer barcode label detection jig according to claim 1, characterized in that: The second bracket is a straight rod, and the straight rod is perpendicular to the extension portion of the first bracket.
8. The wafer barcode label detection jig according to claim 1, characterized in that: The first end of the second bracket is a rectangular plate.
9. The wafer barcode label detection jig according to claim 1, characterized in that: There are multiple laser lamps.
10. The wafer barcode label detection jig according to claim 1, characterized in that: The laser lamp is a red laser lamp.
11. The wafer barcode label detection jig according to claim 1, characterized in that: The projection shape of the laser light is a cross.