Adjustable self-adaptive gas pressure adjusting controller matched with gas detector for use

Abstract

An adjustable self-adaptive gas pressure adjusting controller used in cooperation with a gas detector comprises a shell, a VCR connector, a clamping sleeve connector, a pressure reduction adjusting valve, a primary air filter, a secondary gas supplementing filter, a gas inlet pipe, an exhaust pipe, a gas supplementing valve, a pressure release valve, a connecting cavity and a float type flowmeter. The VCR connector, the clamping sleeve connector, the pressure reduction adjusting valve, the primary air filter, the secondary air supply filter, the air inlet pipe, the exhaust pipe, the air supply valve, the pressure release valve, the connecting cavity and the float type flowmeter are installed in the shell. The primary air filter and the secondary air supply filter can perform two-stage filtration on air needing to be supplied to the sample injection pipe of the detector, the problem that too many particles and the like in sample gas bring adverse effects on detection data of the detector is solved, the air supply valve and the pressure release valve can supply external air or discharge part of the sample gas, and the detection data of the detector can be accurately detected by the air supply valve and the pressure release valve. The pressure and the flow of sample gas entering the gas inlet of the detector are relatively accurately controlled, and the stable and reliable work of the sampling pump of the detector is met.

Description

Technical Field

[0001] The utility model relates to the technical field of detection auxiliary equipment, in particular to an adjustable self-adaptive gas pressure regulating controller used in conjunction with a gas detector. Background Art

[0002] A gas detector is a device that measures the number of particles in a sample gas (sample gas such as semiconductor bulk gas: refers to high-purity and ultra-high-purity gases used in the semiconductor manufacturing process, mainly including nitrogen, oxygen, hydrogen, argon, etc., whether the number of particles exceeds the standard) or various gas analyses (such as the distribution ratio of particles of different sizes). When a gas detector detects a sample gas, the internal sampling pump will draw the sample gas into the internal detection station, and then the gas detector will display the detected data on the display screen or print the data on the printer to obtain the specific corresponding data of the detected sample gas. Existing gas detectors are generally equipped with a gas regulating device (the exhaust pipe and the gas detector's intake pipe are connected by a pipe) to reduce the air pressure and airflow entering the detector to prevent damage to the detector due to excessive air pressure and airflow.

[0003] Although the gas regulating device of the existing gas detector meets the detection needs to a certain extent, it is limited by the structure and still has the following technical problems: First, if the inner diameter of the air inlet pipe is relatively small, or if the inner part of the air inlet pipe is blocked after a certain period of use, it cannot guarantee that the sampling pump can effectively draw the gas to be detected through the air inlet pipe. Since the gas flow rate is too small, it will have an adverse effect on the operation of the motor of the gas detector sampling pump (the sampling pump cannot draw an appropriate amount of gas, the negative pressure in its volute will increase, and the load of the motor driving the blades in the volute to rotate will increase, so the sampling pump motor will consume more power, and the corresponding load is relatively too large, which increases the probability of motor damage). Second: In order to prevent the gas flow provided to the detector from failing to meet the requirement, some gas regulating devices will supplement the air intake pipe of the detector as needed (that is, when the sample gas flow entering the intake pipe is too small, some air will be supplemented to ensure that the gas flow reaches the sampling flow required by the sampling pump). However, the gas regulating device generally only filters the air through a simple first-stage filter before mixing the sample gas into the air for detection. In this way, particulate matter in the air cannot be effectively removed, and after being mixed into the sample gas, it will have an adverse effect on the final detection data. In addition, the amount of air supplemented by the matching gas regulating device does not have the ability to adjust, that is, if the amount of supplemented air is too small, it still cannot meet the flow requirement of the sampling pump. In summary, it is very necessary to provide a gas regulating controller that can be used in conjunction with a gas detector, can ensure the sample gas flow required by the detector, and can reduce the adverse effects of particulate matter in the supplementary air on the detection as soon as possible. Utility Model Content

[0004] In order to overcome the drawbacks described in the background technology of the gas regulating device supporting the existing gas detector due to structural and functional limitations, the utility model provides an adjustable adaptive gas pressure regulating controller for use with the gas detector with the function of air replenishment / pressure relief under the joint action of relevant mechanisms. The air inlet pipe of the gas detector can obtain a larger air replenishment volume under the same pressure, and can perform two-stage filtration on the air that needs to be supplemented in the sampling tube of the detector, thereby reducing the problem of excessive particulate matter in the sample gas and the adverse effect on the detection data of the gas detector, extending the service life of the gas detector's own filter, and relatively accurately controlling the sample gas pressure and flow entering the air inlet of the detector, thereby ensuring the stable and reliable operation of the sampling pump of the detector.

[0005] The technical solution adopted by the utility model to solve its technical problems is:

[0006] The adjustable self-adaptive gas pressure regulating controller used in conjunction with the gas detector comprises a shell, a VCR joint, a ferrule joint, a pressure reducing regulating valve, a primary air filter, a secondary air supply filter, an air inlet pipe, an exhaust pipe, an air supply valve, a pressure relief valve, a connecting cavity, and a float flowmeter; characterized in that the float flowmeter is installed outside the front end of the shell, and its air inlet end and exhaust end are located inside the front end of the shell; the exhaust end of the primary air filter is connected to the air inlet end of the float flowmeter; the VCR joint and the ferrule joint are respectively installed at the rear end of the shell, and the inlet of the VCR joint and the outlet of the ferrule joint are respectively connected to the air outlet of the sample gas tank and the air inlet pipe of the gas detector; the The rear ends of the intake pipe and the exhaust pipe are respectively installed together with the front ends of the VCR joint and the ferrule joint, and the front ends of the intake pipe and the exhaust pipe are respectively connected to the air inlet and exhaust ports of the pressure reducing regulating valve, and the regulating handle of the pressure reducing regulating valve is located outside the front side of the shell; the connecting cavity is a sealed structure, and the upper and lower ends and the front and rear ends of the connecting cavity are respectively provided with fixed surfaces, the lower end of the air supply valve and the upper end of the pressure relief valve are respectively connected to the upper and lower fixed surfaces of the connecting cavity, and the front side fixed surface of the connecting cavity is connected to the exhaust end of the float flowmeter; a branch pipe is installed at the upper rear end of the exhaust pipe, and the upper end of the branch pipe is connected to the air inlet of the secondary air supply filter, and the air outlet of the secondary air supply filter is connected to the fixed surface on the rear side of the connecting cavity.

[0007] Furthermore, a one-way air valve is installed in series between the exhaust end of the float flowmeter and the mounting surface of the front end of the connecting cavity.

[0008] Furthermore, a handle is installed on the outer upper end of the shell, and a plurality of ventilation holes are provided on the rear side end of the shell.

[0009] Furthermore, the air supply valve and the pressure relief valve have the same structure, and both include a tube body, a spring, an adjustment ring, and a guide tube. The outer end of the tube body has an external thread, and the inner end has an internal thread. A guide seat with a guide hole in the middle is installed on the inner side of the tube body. The guide tube is movably sleeved in the guide hole of the guide seat. A limit plate is installed on the upper end of the guide tube. The lower end of the guide tube is an open structure and the upper end is located below the limit plate and has a vent hole. The adjustment ring is a hollow structure and has an external thread. A spring positioning ring is provided on the lower outer side of the adjustment ring. The lower end of the spring is installed on the upper end of the limit plate, and the upper end of the spring is located on the inner side of the positioning ring.

[0010] Furthermore, the outer diameter of the limit plate is larger than the inner diameter of the guide hole, the outer diameter of the guide tube is smaller than the inner diameter of the guide hole, and a sealing ring is installed at the position of the guide tube above the vent hole.

[0011] Furthermore, the upper portion of the outer end of the tube body of the air supply valve faces downward, and the lower portion of the tube body of the pressure relief valve faces upward, and are respectively connected to the upper and lower end fixing surfaces of the connecting cavity.

[0012] Compared with the prior art, the utility model has the following beneficial effects: the utility model is mainly used in conjunction with a variety of gas detectors, and under the joint action of relevant mechanisms, it has the function of air supply / pressure relief. The air inlet pipe of the gas detector can obtain a larger air supply volume under the same pressure. The primary small air filter and the secondary air supply filter can perform two-stage filtration on the air that needs to be supplemented in the detector sampling tube, reducing the problem of excessive particulate matter in the sample gas and the adverse effect on the detection data of the gas detector, and extending the service life of the gas detector's own filter. The air supply valve and the pressure relief valve can also relatively accurately control the sample gas pressure and flow entering the detector's air inlet by supplementing external air or discharging part of the air, thereby ensuring the stable and reliable operation of the detector sampling pump. Based on the above, the utility model has good application prospects. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0014] Figure 1 , 2 It is a schematic diagram of the overall structure of the utility model in rear view and front view states.

[0015] Figure 3 It is a schematic diagram of the overall planar structure and the partially enlarged structure of the utility model when the shell is not installed. DETAILED DESCRIPTION

[0016] Figure 1 , 2As shown in 3, the adjustable adaptive gas pressure regulating controller used in conjunction with the gas detector includes a housing 1, a VCR connector 2 (mature technology, the structure and use of which are not described in detail in this application), a ferrule connector 3 (mature technology, the structure and use of which are not described in detail in this application), a pressure reducing regulating valve 4 (model AR4000, mature technology, the structure and use of which are not described in detail in this application), a primary small air filter 5 (mature technology, the structure and use of which are not described in detail in this application), a secondary air supply filter 6 (mature technology, the structure and use of which are not described in detail in this application), an air intake pipe 7, an exhaust pipe 8, an air supply valve 11, a pressure relief valve 12, a connecting cavity 9, A float flowmeter 10 (the air flow entering through the air filter 5 can be observed. It is a mature technology and the present application does not elaborate on its structure and method of use); filter elements are installed in the small air filter 5 and the secondary air supply filter 6 respectively. There are openings in the upper and lower left parts, the middle right part, and the upper and lower left parts of the rear end of the housing 1. The air inlet and exhaust ends of the float flowmeter 10 are respectively inserted into the upper and lower left openings of the front lower end of the housing 1 and fixed by nuts. The body of the float flowmeter 10 is located at the front outer side of the housing 1, and its air inlet and exhaust ends are located at the front side of the housing; the exhaust end (external thread) of the air filter 5 and the rear side (internal thread) of the air inlet end of the float flowmeter 10 Connected by internal threads; the middle parts of the VCR joint 2 and the ferrule joint 3 are respectively sleeved in the upper and lower openings on the left side of the rear end of the shell, and the front and rear end outer sides of the middle parts of the VCR joint 2 and the ferrule joint 3 are fixed to the shell 1 through nuts, and the inlet of the VCR joint 2 and the rear end outlet of the ferrule joint 3 are respectively connected to a metal hose (not shown in the figure), and the other ends of the two metal hoses are respectively connected to the gas outlet of the sample gas tank (not shown in the figure) (or directly located in the sampling area) and the air inlet pipe of the gas detector (not shown in the figure); the rear ends of the inlet pipe 7 and the exhaust pipe 8 are respectively installed with the front ends of the VCR joint 2 and the ferrule joint 3 through threads, and the front ends of the inlet pipe 7 and the exhaust pipe 8 are respectively connected to the inlet of the pressure reducing regulating valve 4 The inlet and outlet are connected by threads, and the adjusting handle 41 of the pressure reducing regulating valve 4 is located outside the opening on the right side of the front middle part of the shell 1; the connecting cavity 9 is a sealed structure, and the upper and lower ends and the front and rear ends of the connecting cavity 9 are respectively provided with a screw hole, the lower end of the air supply valve 11 and the upper end of the pressure relief valve 12 are respectively connected to the upper and lower end screw holes of the connecting cavity 10 by threads, and the front side end screw hole of the connecting cavity 10 and the rear side of the exhaust end of the float flowmeter 10 are connected by internal threads through a pipeline; a branch pipe 81 which is interconnected with the interior thereof is welded to the upper rear end of the exhaust pipe 8, the upper end of the branch pipe 81 is connected to the air outlet of the secondary air supply filter 6 by threads, and the air inlet of the secondary air supply filter 6 and the screw hole on the rear side of the connecting cavity 9 are connected by threads.

[0017] Figure 1 , 2As shown in , 3, a one-way air valve 14 is installed in series between the exhaust end of the float flowmeter 10 and the screw hole at the front end of the connecting cavity (to prevent the sample gas or air from flowing into the air filter 5 in reverse, and the air filtered by the air filter 5 can enter the connecting cavity through the one-way air valve). A handle 101 is welded on the outer upper end of the shell 1 (to facilitate the staff to carry and transfer positions), and a plurality of vents 102 are provided in the middle of the rear end of the shell 1 (to facilitate the external air to enter the shell and the air inside the shell to be discharged to the outside). The air supply valve and the pressure relief valve have the same structure, and both include a tube body 131, a spring 132, an adjustment ring 133, and a guide tube 135. The outer end of the tube body 131 has an external thread, and the inner end has an internal thread. A guide seat 136 with a through guide hole in the middle is welded to the middle of the inner side of the tube body 131. The guide tube 135 is movably sleeved in the guide hole of the guide seat 136 from top to bottom. An annular limit plate 1351 is welded to the upper end of the guide tube. The lower end of the guide tube 135 is an open structure and the upper end is located at the limit plate 135. 1, the left and right parts of the lower part have a vent hole 137 that is interconnected with the inside thereof, the adjusting ring 133 (5 mm in height) is an annular hollow structure and has an external thread, the lower outer side of the annular hollow adjusting ring 133 is welded with a ring spring positioning ring 134 (playing a positioning role for the spring) with an open structure at the lower end, the adjusting ring 133 is screwed into the upper end of the tube body through the external thread, the lower end of the spring 132 is welded to the upper end of the limit plate 1351, and the upper end of the spring 132 is located inside the positioning ring 134. The outer diameter of the limit plate 1351 is larger than the inner diameter of the guide hole, the outer diameter of the guide tube 135 is slightly smaller than the inner diameter of the guide hole, and the guide tube 135 is located above the vent hole and is tightly sealed with a rubber sealing ring 138 (playing a sealing role). The upper part of the outer end of the tube body 131 of the air supply valve faces the lower end, and the lower part of the outer end of the tube body 131 of the pressure relief valve faces the upper end, respectively, and is connected to the upper and lower end screw holes of the connecting cavity 9 through threaded sealing.

[0018] Figure 1 , 2As shown in Figures 3 and 4, the present invention is mainly used in conjunction with a variety of gas detectors. Before use, the inlet of the VCR connector 2 and the outlet of the ferrule connector 3 are respectively connected to a metal hose, and the other ends of the two metal hoses are connected to the gas outlet of the sample gas tank (or directly located in the sampling area) and the air inlet pipe of the gas detector. Before using the present invention, the production or testing technicians can set the amount of air that the air supply valve supplies to the exhaust pipe and enters the detector, and set the amount of gas that the pressure relief valve discharges from the exhaust pipe and enters the detector. Specifically, when the adjustment ring 133 of the air supply valve is adjusted upward or downward along the thread, the adjustment ring 133 will compress the spring 132 relatively tightly or relatively loosely, so that when the sample gas volume entering the exhaust pipe 8 is relatively small in flow rate and the air pressure is low (the negative pressure generated by the sampling pump is relatively large), or when the sample gas volume entering the exhaust pipe 8 is relatively large in flow rate and the air pressure is high (the negative pressure generated by the sampling pump is relatively low), the external air will enter the exhaust pipe (the air inlet pipe of the gas detector) after being filtered by the air supply valve through the secondary air supply filter 6. When the regulating ring 133 of the air release valve is adjusted upward or downward along the thread, the regulating ring 133 will compress the spring 132 relatively tightly or relatively loosely, so that when the sample gas volume entering the exhaust pipe 8 is relatively large and the air pressure is high, or when the sample gas volume entering the exhaust pipe 8 is relatively small and the air pressure is low, the excess air entering the exhaust pipe will be released to the outside through the air release valve. The above-mentioned novel method can set the gas flow rate of the sample gas and air entering the detector.

[0019] Figure 1 , 2As shown in Figure 3, specifically, when the gas detector detects the sample gas, the internal sampling pump will generate negative pressure to draw the sample gas into the internal detection station through the air inlet pipe 7, the pressure reducing regulating valve 4 (the gas flow entering the detector can be adjusted by adjusting its handle 41 clockwise or counterclockwise), and the exhaust pipe 8. The external air will enter the connecting cavity 9 after filtering out particulate matter through the air filter 5, and then enter the exhaust pipe 8 and the interior of the detector after further filtering out particulate matter through the secondary air supply filter 6. Under the action of the negative pressure generated by the sampling pump, the air enters the internal detection station. In extreme cases, when there is a problem with the air filter 5 (such as blockage, etc.), the air entering the exhaust pipe and the sample gas cannot meet the sampling gas flow of the sampling pump after mixing. Through the action of the air supply valve, the external air will push the guide tube 135 under the action of negative pressure to overcome the elastic force of the spring 132 and move downward, and then enter the front end of the secondary air supply filter 6 through the air vent 137 of the guide tube. The air filtered by the secondary air supply filter 6 enters the exhaust pipe from the rear end; when the air and the sample gas in the exhaust pipe can meet the sampling gas flow of the sampling pump after mixing, due to the reduction of the negative pressure force, the spring will push the guide tube 135 to move upward along the guide hole of the guide seat, and then through the limit ring of the guide tube and the seal at the lower end of the guide seat, the external air will no longer enter the exhaust pipe. When the external sample gas enters the exhaust pipe in a relatively large amount, the sample gas in the exhaust pipe will reversely enter from the rear end and flow out from the front end of the secondary air supply filter 6 through the action of the air release valve. Under the action of pressure, the sample gas pushes the guide tube 135 to compress the spring 132 to move downward, and then discharges part of the sample gas to the outside through the air vent 137 of the guide tube (in this state, the amount of air entering the exhaust pipe is extremely small), reducing the sample gas flow and pressure in the exhaust pipe; when the sample gas enters the exhaust pipe appropriately or in small amounts, the sample gas in the exhaust pipe will no longer reversely enter from the rear end and flow out from the front end of the secondary air supply filter 6 through the action of the air release valve, and the sample gas will no longer push the guide tube 135 to drive the spring 132 to move downward. The spring pushes the guide tube 135 to move upward along the guide hole of the guide seat, and then the sample gas is no longer discharged to the outside through the limit ring of the guide tube and the seal at the lower end of the guide seat.

[0020] Figure 1 , 2 As shown in Figures 3 and 4, through the above, the new type has the function of air supply / pressure relief under the joint action of relevant mechanisms. The air inlet pipe of the gas detector can obtain a larger air supply volume under the same pressure. The primary small air filter and the secondary air supply filter can perform two-stage filtration on the air that needs to be supplemented in the detector sampling tube, reducing the problem of excessive particulate matter in the sample gas and other adverse effects on the detection data of the gas detector, and extending the service life of the gas detector's own filter. The air supply valve and the pressure relief valve can also relatively accurately control the sample gas pressure and flow entering the detector's air inlet by supplementing external air or exhausting part of the air, thereby ensuring the stable and reliable operation of the detector sampling pump.

[0021] The above shows and describes the basic principles and main features of the utility model and the advantages of the utility model. For those skilled in the art, it is obvious that the utility model is limited to the details of the above exemplary embodiments, and the utility model can be implemented in other specific forms without departing from the spirit or basic features of the utility model. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the utility model is defined by the attached claims rather than the above description, and it is intended that all changes that fall within the meaning and scope of the equivalent elements of the claims are included in the utility model.

[0022] In addition, it should be understood that although the present specification is described according to the implementation mode, the implementation mode does not only include an independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in the embodiments can also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. An adjustable self-adaptive gas pressure regulating controller used in conjunction with a gas detector includes a housing, a VCR connector, a ferrule connector, a pressure reducing regulating valve, a primary air filter, a secondary air supply filter, an air inlet pipe, an exhaust pipe, an air supply valve, a pressure relief valve, a connecting cavity, and a float flowmeter; characterized in that: The float flowmeter is installed outside the front end of the housing, and its air inlet and exhaust ends are located inside the front end of the housing; the exhaust end of the primary air filter is connected to the air inlet end of the float flowmeter; the VCR joint and the ferrule joint are respectively installed at the rear end of the housing, and the inlet of the VCR joint and the outlet of the ferrule joint are respectively connected to the outlet of the sample gas tank and the air inlet pipe of the gas detector; the rear ends of the air inlet pipe and the exhaust pipe are respectively installed together with the front ends of the VCR joint and the ferrule joint, and the front ends of the air inlet pipe and the exhaust pipe are respectively connected to the The air inlet and the air outlet are connected, and the adjusting handle of the pressure reducing regulating valve is located outside the front side of the shell; the connecting cavity is a sealed structure, and the upper and lower ends and the front and rear ends of the connecting cavity are respectively provided with fixed surfaces, the lower end of the air supply valve and the upper end of the pressure relief valve are respectively connected to the upper and lower fixed surfaces of the connecting cavity, and the front side fixed surface of the connecting cavity is connected to the exhaust end of the float flowmeter; a branch pipe is installed at the upper rear end of the exhaust pipe, and the upper end of the branch pipe is connected to the air inlet of the secondary air supply filter, and the air outlet of the secondary air supply filter is connected to the fixed surface on the rear side of the connecting cavity.

2. The adjustable adaptive gas pressure regulating controller used in conjunction with the gas detector according to claim 1 is characterized in that: A one-way air valve is installed in series between the exhaust end of the float flowmeter and the installation surface of the front end of the connection cavity.

3. The adjustable adaptive gas pressure regulating controller used in conjunction with the gas detector according to claim 1 is characterized in that: A handle is installed on the outer upper end of the shell, and a plurality of ventilation holes are arranged on the rear side end of the shell.

4. The adjustable adaptive gas pressure regulating controller used in conjunction with the gas detector according to claim 1 is characterized in that: The air supply valve and the pressure relief valve have the same structure, both including a tube body, a spring, an adjusting ring, and a guide tube. The outer end of the tube body has an external thread and the inner end has an internal thread. A guide seat with a guide hole in the middle is installed on the inner side of the tube body. The guide tube is movably sleeved in the guide hole of the guide seat. A limit plate is installed on the upper end of the guide tube. The lower end of the guide tube is an open structure and the upper end is located below the limit plate and has a vent hole. The adjusting ring is a hollow structure and has an external thread. A spring positioning ring is provided on the lower outer side of the adjusting ring. The lower end of the spring is installed on the upper end of the limit plate, and the upper end of the spring is located on the inner side of the positioning ring.

5. The adjustable and adaptive gas pressure regulating controller used in conjunction with the gas detector according to claim 4 is characterized in that: The outer diameter of the limiting plate is larger than the inner diameter of the guide hole, the outer diameter of the guide tube is smaller than the inner diameter of the guide hole, and a sealing ring is installed at the position of the guide tube above the vent hole.

6. The adjustable adaptive gas pressure regulating controller used in conjunction with the gas detector according to claim 4 is characterized in that: The upper part of the outer end of the tube body of the air supply valve faces downward, and the lower part of the tube body of the pressure relief valve faces upward, and is connected to the upper and lower end fixing surfaces of the connection cavity respectively.

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