Edge finder

Abstract

The utility model discloses an edge finder used for wafer edge finding, the edge finder comprises a box body, and a rotating mechanism, a positioning mechanism and an edge identification device which are arranged in the box body, the rotating mechanism is used for bearing a wafer, and the positioning mechanism can be used for automatically adjusting the position of an adsorption platform to ensure that the position of the wafer accurately corresponds to the position of the edge identification device. And circle center correction is realized. According to the edge finder, through cooperative work of the second driving assembly and the third driving assembly, the position of the wafer can be automatically adjusted in the longitudinal direction and the transverse direction, and circle center correction of the wafer is achieved in cooperation with the first driving assembly. The automatic adjustment mode not only improves the edge searching efficiency and accuracy of the edge finder, but also avoids the risk of wafer damage caused by manual touch of the wafer.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing, in particular to an edge finder used for wafer edge finding. Background Art

[0002] Wafer edge finding is a critical step in the semiconductor manufacturing process, which involves determining the precise edge position of the wafer for subsequent processing steps. Traditional edge finders often need to manually adjust the placement of the wafer according to the wafer's own specifications and placement during the edge finding process to ensure the correct alignment of the wafer with the edge recognition device and to achieve center correction, which is not only time-consuming but also easy to damage the wafer. Utility Model Content

[0003] The utility model aims to provide an edge finder which can automatically adjust the position of a wafer according to actual conditions and realize circle center correction, so as to improve edge finding efficiency and reduce the risk of wafer damage.

[0004] In order to solve the above technical problems, the utility model provides an edge finder for wafer edge finding, comprising:

[0005] The box body comprises a top plate and a bottom plate, a cavity is defined between the top plate and the bottom plate, and a channel is opened on the top plate;

[0006] a rotating mechanism, comprising an adsorption platform located above the top plate, a first driving assembly disposed in the cavity, and a rotating rod driven to rotate by the first driving assembly, wherein the rotating rod passes through the channel and the adsorption platform is mounted on the upper end thereof;

[0007] a positioning mechanism, arranged in the cavity, the positioning mechanism comprising a second drive assembly and a third drive assembly, the second drive assembly being in transmission connection with the rotating mechanism and used to drive the rotating drive mechanism to move longitudinally, the third drive assembly being mounted on the bottom plate and in transmission connection with the second drive assembly and used to drive the second drive assembly and the rotating mechanism to move transversely; and,

[0008] An edge recognition device is arranged on the box body, and the edge recognition device is used to recognize the wafer carried by the adsorption platform.

[0009] In one embodiment, the first driving assembly includes a mounting frame, and a first motor, a transmission group and a bearing group installed on the mounting frame, the mounting frame includes a first mounting plate, a second mounting plate and a third mounting plate which are sequentially spaced from bottom to top and supported and connected to each other, the first mounting plate is connected to the second driving assembly, a gap is formed between the first mounting plate and the second mounting plate, the transmission group is arranged in the gap, the first motor and the third mounting plate are arranged side by side on the upper side of the first mounting plate, a bearing sleeve is integrally formed on the lower side of the third mounting plate, the bearing group is arranged in the bearing sleeve, the rotating rod sequentially passes downward through the third mounting plate, the bearing group and the second mounting plate and extends to the gap, the driving shaft of the first motor passes through the second mounting plate to extend to the gap, and the rotating rod and the driving shaft are connected by transmission through the transmission group.

[0010] In one embodiment, the transmission group includes two transmission wheels and a transmission belt mounted on the two transmission wheels, one of the two transmission wheels is coaxially connected to the driving shaft of the first motor, and the other one is coaxially connected to the rotating rod.

[0011] In one embodiment, the rotating rod includes an upper rod and a lower rod arranged in sequence from top to bottom, the upper end of the upper rod is provided with the adsorption platform, the adsorption platform is provided with an air suction port, and a first air duct is formed, the first air duct is connected to the air suction port, the lower end of the lower rod extends to the gap through the first mounting plate, and the upper end is key-connected to the upper rod.

[0012] In one embodiment, the suction port is opened on the top side of the adsorption platform, and an air discharge port is opened on the peripheral side of the adsorption platform, and the air discharge port is connected to the first air channel.

[0013] In one embodiment, the bearing sleeve has a second air channel extending radially, and the second air channel is connected to an air nozzle arranged on the outer periphery of the bearing sleeve and the first air channel. The edge finder also includes a vacuum generating device arranged in the cavity, and the vacuum generating device is connected to the air nozzle and is used to provide negative pressure to the air nozzle.

[0014] In one embodiment, the third driving component includes a third guide rail installed on the upper side of the base plate, a transverse slider slidably assembled on the third guide rail, and a third motor arranged at one end of the third guide rail. The third guide rail extends laterally, the transverse slider is connected to the second driving component, and the third motor is drivingly connected to the transverse slider for driving the transverse slider to slide along the third guide rail.

[0015] In one embodiment, the transverse slider is provided with screw holes in the transverse direction, and the third driving assembly also includes a transverse screw, two transmission wheels spaced apart in the longitudinal direction, and a transmission belt sleeved on the two transmission wheels, the two transmission wheels are coaxially connected to the driving shaft of the third motor, the other of the two transmission wheels is coaxially connected to the transverse screw, and the transverse screw is passed through the screw hole on the transverse slider.

[0016] In one embodiment, the second driving assembly includes a second guide rail installed on the upper side of the transverse slider, a longitudinal slider slidably assembled on the second guide rail, and a second motor arranged at one end of the second guide rail, the second guide rail extends longitudinally, the first mounting plate is connected to the longitudinal slider, and the second motor is drivingly connected to the longitudinal slider for driving the longitudinal slider to slide along the second guide rail.

[0017] In one embodiment, the longitudinal slider is provided with a screw hole along the longitudinal direction, and the second driving assembly also includes a longitudinal screw, two transmission wheels spaced apart in the transverse direction, and a transmission belt sleeved on the two transmission wheels, the two transmission wheels are coaxially connected to the driving shaft of the second motor, the other of the two transmission wheels is coaxially connected to the longitudinal screw, and the longitudinal screw is passed through the screw hole on the longitudinal slider.

[0018] The technical solution provided by the utility model has the following advantages:

[0019] The edge finder provided by the utility model includes a box body and a rotating mechanism, a positioning mechanism and an edge recognition device arranged in the box body, wherein the rotating mechanism is used to carry the wafer, and the positioning mechanism can be used to automatically adjust the position of the adsorption platform to ensure that the position of the wafer and the edge recognition device accurately correspond to each other and realize the center correction. The edge finder can automatically adjust the position of the wafer in the longitudinal and transverse directions through the coordinated work of the second drive component and the third drive component, and realize the center correction of the wafer in cooperation with the first drive component. This automated adjustment method not only improves the edge finding efficiency and accuracy of the edge finder, but also avoids the risk of manually touching the wafer and causing damage to the wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0021] Figure 1 A schematic diagram of the three-dimensional structure of an embodiment of an edge finder provided by the utility model, wherein part of the box is not shown;

[0022] Figure 2 for Figure 1 A cross-sectional view of the middle edge finder;

[0023] Figure 3 for Figure 2 The enlarged schematic diagram of point A in the middle;

[0024] Figure 4 for Figure 1 Schematic diagram of the three-dimensional structure of the edge finder;

[0025] Figure 5 for Figure 4 Schematic diagram of the three-dimensional structure of the rotating mechanism and the positioning mechanism;

[0026] Figure 6 for Figure 5 A schematic diagram of the three-dimensional structure of the rotating mechanism and the positioning mechanism from another perspective, in which the wafer is not shown.

[0027] Description of reference numerals:

[0028] 100-edge finder; 10-box; 11-top plate; 12-bottom plate; 13-cavity; 14-channel; 20-rotating mechanism; 21-adsorption platform; 211-air inlet; 212-air outlet; 22-first drive assembly; 221-mounting frame; 222-first motor; 223-transmission group; 224-bearing group; 23-rotating rod; 230-first air channel; 231-upper rod; 232-lower rod; 30-positioning mechanism; 31-second drive assembly; 311-second Guide rail; 312-longitudinal slider; 313-second motor; 32-third drive assembly; 321-third guide rail; 322-transverse slider; 323-third motor; 40-gap; 41-first mounting plate; 42-second mounting plate; 43-third mounting plate; 44-bearing sleeve; 440-second air duct; 45-air nozzle; 46-drive wheel; 47-drive belt; 50-control device; 60-vacuum generating device; 70-code reading device; 80-edge recognition device; 200-wafer. DETAILED DESCRIPTION

[0029] The technical solution of the utility model will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, rather than all of the embodiments. The utility model will be described in detail below with reference to the accompanying drawings and in conjunction with the embodiments. It should be noted that the embodiments of the utility model and the features in the embodiments can be combined with each other without conflict.

[0030] It should be noted that the terms "first", "second", etc. in the specification and claims of the utility model and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence.

[0031] See also Figures 1 to 6 The utility model provides an edge finder 100, which is used for edge finding of a wafer 200.

[0032] The edge finder 100 includes a box 10, a rotating mechanism 20 and a positioning mechanism 30. The box 10 serves as a protective structure to accommodate and carry the components of the edge finder 100. The box 10 includes a top plate 11 and a bottom plate 12, which are spaced apart in the vertical direction, a cavity 13 is defined between the top plate 11 and the bottom plate 12, and a channel 14 is opened on the top plate 11.

[0033] The rotating mechanism 20 includes an adsorption platform 21 located above the top plate 11, a first driving component 22 disposed in the cavity 13, and a rotating rod 23 driven to rotate by the first driving component 22. The adsorption platform 21 is used to fix the wafer 200 by adsorption using negative pressure. The rotating rod 23 is passed through the channel 14 to extend upward from the top plate 11, and the adsorption platform 21 is installed at the upper end of the rotating rod 23. In this way, the wafer 200 is carried above the top plate 11, and the first driving component 22 drives the rotating rod 23 to rotate, so as to drive the adsorption platform 21 to rotate to achieve the center correction of the wafer 200.

[0034] The positioning mechanism 30 is arranged in the cavity 13, and the positioning mechanism 30 includes a second drive component 31 and a third drive component 32. The second drive component 31 is connected to the rotating mechanism 20 for driving the rotating drive mechanism to move in the longitudinal direction. The third drive component 32 is installed on the bottom plate 12 and is connected to the second drive component 31 for driving the second drive component 31 and the rotating mechanism 20 to move in the lateral direction. The edge recognition device 80 is arranged in the box 10, and the edge recognition device 80 is used to identify the wafer 200 carried by the adsorption platform 21. The edge recognition device 80 may include a light source and an image recognition mechanism. The image of the wafer 200 acquired by the image recognition mechanism is analyzed and processed to realize edge finding of the wafer 200.

[0035] The edge finder 100 should also include a control device 50, which is preferably arranged in the cavity 13 and is used to be electrically connected to the rotating mechanism 20 and the positioning mechanism 30 to control the operation of the first drive component 22, the second drive component 31 and the third drive component 32 as needed, and automatically adjust the specific position of the wafer 200 without manual operation.

[0036] Preferably, the edge finder 100 further includes a code reading device 70 for performing code identification on the wafer 200 .

[0037] It is understandable that when the wafer 200 placed on the adsorption platform 21 has different specifications and placement positions, it needs to be adjusted so that it is correctly aligned with the edge recognition device 80 and the center of the circle is corrected. In this embodiment, the positioning mechanism 30 can be used to automatically adjust the position of the adsorption platform 21 to ensure that the position of the wafer 200 and the edge recognition device 80 accurately correspond and the center of the circle is corrected. The edge finder 100 can automatically adjust the position of the wafer 200 in the longitudinal and transverse directions through the coordinated work of the second drive component 31 and the third drive component 32, and cooperate with the first drive component 22 to correct the center of the wafer 200. This automated adjustment method not only improves the edge finding efficiency and accuracy of the edge finder 100, but also avoids the risk of manually touching the wafer 200 and causing damage to the wafer 200.

[0038] For further information, please refer to Figures 4 to 6 The first driving assembly 22 includes a mounting frame 221, and a first motor 222, a transmission group 223 and a bearing group 224 installed on the mounting frame 221. The mounting frame 221 includes a first mounting plate 41, a second mounting plate 42 and a third mounting plate 43 which are spaced from bottom to top and supported and connected to each other. The first mounting plate 41 is connected to the second driving assembly 31, and a gap 40 is formed between the first mounting plate 41 and the second mounting plate 42. The transmission group 223 is arranged in the gap 40. The first motor 222 and the third mounting plate 43 are arranged side by side on the upper side of the first mounting plate 41. A bearing sleeve 44 is integrally formed on the lower side of the third mounting plate 43. The bearing group 224 is arranged in the bearing sleeve 44. The rotating rod 23 passes through the third mounting plate 43, the bearing group 224 and the second mounting plate 42 in sequence downward and extends to the gap 40. The driving shaft of the first motor 222 passes through the second mounting plate 42 to extend to the gap 40. The rotating rod 23 and the driving shaft are connected by the transmission group 223. In this embodiment, the mounting frame 221 plays the role of carrying the rotating mechanism 20 and connecting it to the positioning mechanism 30. The arrangement relationship of each component is compact and reasonable, which is convenient for assembly and maintenance while occupying a small space.

[0039] Preferably, the transmission group 223 includes two transmission wheels 46 and a transmission belt 47 sleeved on the two transmission wheels 46, one of the two transmission wheels 46 is coaxially connected to the driving shaft of the first motor 222, and the other is coaxially connected to the rotating rod 23. In this way, the transmission group 223 is used to stably and reliably transmit the power of the first motor 222 to the rotating rod 23, so as to drive the adsorption platform 21 to rotate around the rotation axis.

[0040] Preferably, the rotating rod 23 includes an upper rod 231 and a lower rod 232 arranged in sequence from top to bottom, the upper end of the upper rod 231 is provided with the adsorption platform 21, the adsorption platform 21 is provided with an air suction port 211, and a first air channel 230 is formed, and the first air channel 230 is connected to the air suction port 211. The edge finder 100 also includes a vacuum generating device 60 arranged in the cavity 13, so that the first air channel 230 generates negative pressure to adsorb and fix the wafer 200. The lower end of the lower rod 232 extends to the gap 40 through the first mounting plate 41, and is connected to the transmission group 223 arranged therein, and the upper end of the lower rod 232 is key-connected to the upper rod 231. In this way, the first motor 222 drives the lower rod 232 to rotate, and transmits the torque to the upper rod 231, driving the adsorption platform 21 at its upper end to rotate.

[0041] Furthermore, the suction port 211 is provided on the top side of the adsorption platform 21, and the exhaust port 212 is provided on the peripheral side of the adsorption platform 21, and the exhaust port 212 is connected to the first air channel 230. In this embodiment, the exhaust port 212 is externally connected to an exhaust valve (not shown in the figure) to open the second exhaust port 212 when the adsorption needs to be released.

[0042] Preferably, the bearing sleeve 44 has a second air channel 440 extending radially, the second air channel 440 is connected to the air nozzle 45 disposed on the outer periphery of the bearing sleeve 44 and the first air channel 230, and the vacuum generating device 60 is connected to the air nozzle 45 and is used to provide negative pressure to the air nozzle 45. The controller is preferably connected to the air nozzle 45, the air release valve and the vacuum generating device 60 to adsorb or release the adsorption as needed, and can adjust the magnitude of the negative pressure according to the specifications of the wafer 200.

[0043] In order to realize the lateral and longitudinal movement of the rotating mechanism 20, the specific structures of the second driving assembly 31 and the third driving assembly 32 can be various. Figure 5 and Figure 6 The third driving assembly 32 includes a third guide rail 321 installed on the upper side of the bottom plate 12, a transverse slider 322 slidably mounted on the third guide rail 321, and a third motor 323 disposed at one end of the third guide rail 321. The third guide rail 321 extends in the transverse direction, the transverse slider 322 is connected to the second driving assembly 31, and the third motor 323 is drivingly connected to the transverse slider 322 to drive the transverse slider 322 to slide along the third guide rail 321. In this way, the third guide rail 321 plays the role of carrying the entire positioning mechanism 30 and the rotating mechanism 20, and drives the adsorption platform 21 to adjust its transverse positioning according to the position adjustment requirements.

[0044] Furthermore, the transverse slider 322 is provided with screw holes in the transverse direction, and the third driving assembly 32 further includes a transverse screw, two transmission wheels 46 spaced apart in the longitudinal direction, and a transmission belt 47 sleeved on the two transmission wheels 46, the two transmission wheels 46 are coaxially connected to the driving shaft of the third motor 323, and the other of the two transmission wheels 46 is coaxially connected to the transverse screw, and the transverse screw is passed through the screw hole on the transverse slider 322. In this way, the adsorption platform 21 is smoothly moved in the transverse direction by using the screw nut transmission mechanism.

[0045] Based on the above embodiment, preferably, the second driving assembly 31 includes a second guide rail 311 installed on the upper side of the transverse slider 322, a longitudinal slider 312 slidably assembled on the second guide rail 311, and a second motor 313 arranged at one end of the second guide rail 311, the second guide rail 311 extends longitudinally, the longitudinal slider 312 is connected to the first mounting plate 41, and the second motor 313 is drivingly connected to the longitudinal slider 312 for driving the longitudinal slider 312 to slide along the second guide rail 311.

[0046] Preferably, the longitudinal slider 312 is provided with a screw hole in the longitudinal direction, and the second driving assembly 31 further includes a longitudinal screw, two transmission wheels 46 spaced apart in the transverse direction, and a transmission belt 47 sleeved on the two transmission wheels 46, the two transmission wheels 46 are coaxially connected to the driving shaft of the second motor 313, and the other of the two transmission wheels 46 is coaxially connected to the longitudinal screw, and the longitudinal screw is passed through the screw hole on the longitudinal slider 312. In this way, the adsorption platform 21 is smoothly moved in the longitudinal direction by using the screw nut transmission mechanism.

[0047] Obviously, the above described embodiments are only a part of the embodiments of the utility model, not all of them. Based on the embodiments of the utility model, ordinary technicians in this field can make other different forms of changes or modifications without creative work, which should fall within the scope of protection of the utility model.

Claims

1. An edge finder for wafer edge finding, characterized in that: The edge finder comprises: The box body comprises a top plate and a bottom plate, a cavity is defined between the top plate and the bottom plate, and a channel is opened on the top plate; a rotating mechanism, comprising an adsorption platform located above the top plate, a first driving assembly disposed in the cavity, and a rotating rod driven to rotate by the first driving assembly, wherein the rotating rod passes through the channel and the adsorption platform is mounted on the upper end thereof; a positioning mechanism, arranged in the cavity, the positioning mechanism comprising a second drive assembly and a third drive assembly, the second drive assembly being in transmission connection with the rotating mechanism and used to drive the rotating mechanism to move longitudinally, the third drive assembly being mounted on the bottom plate and in transmission connection with the second drive assembly and used to drive the second drive assembly and the rotating mechanism to move transversely; and, An edge recognition device is arranged on the box body, and the edge recognition device is used to recognize the wafer carried by the adsorption platform.

2. The edge finder according to claim 1, characterized in that: The first driving assembly includes a mounting frame, and a first motor, a transmission group and a bearing group installed on the mounting frame, the mounting frame includes a first mounting plate, a second mounting plate and a third mounting plate which are spaced sequentially from bottom to top and supported and connected to each other, the first mounting plate is connected to the second driving assembly, a gap is formed between the first mounting plate and the second mounting plate, the transmission group is arranged in the gap, the first motor and the third mounting plate are arranged side by side on the upper side of the first mounting plate, a bearing sleeve is integrally formed on the lower side of the third mounting plate, the bearing group is arranged in the bearing sleeve, the rotating rod passes downward through the third mounting plate, the bearing group and the second mounting plate in sequence, and extends to the gap, the driving shaft of the first motor passes through the second mounting plate to extend to the gap, and the rotating rod and the driving shaft are connected through the transmission group.

3. The edge finder according to claim 2, characterized in that: The transmission group includes two transmission wheels and a transmission belt sleeved on the two transmission wheels. One of the two transmission wheels is coaxially connected to the driving shaft of the first motor, and the other one is coaxially connected to the rotating rod.

4. The edge finder according to claim 3, characterized in that: The rotating rod includes an upper rod and a lower rod which are arranged in sequence from top to bottom. The upper end of the upper rod is provided with the adsorption platform, the adsorption platform is provided with an air suction port, and a first air duct is formed. The first air duct is connected to the air suction port. The lower end of the lower rod extends to the gap through the first mounting plate, and the upper end is key-connected to the upper rod.

5. The edge finder according to claim 4, characterized in that: The top side of the adsorption platform is provided with the air intake port, the peripheral side of the adsorption platform is provided with an air discharge port, and the air discharge port is connected to the first air channel.

6. The edge finder according to claim 4, characterized in that: The bearing sleeve has a second air channel extending radially, and the second air channel is connected to an air nozzle arranged on the outer periphery of the bearing sleeve and the first air channel. The edge finder also includes a vacuum generating device arranged in the cavity, and the vacuum generating device is connected to the air nozzle and is used to provide negative pressure for the air nozzle.

7. The edge finder according to any one of claims 2 to 6, characterized in that: The third driving assembly includes a third guide rail installed on the upper side of the base plate, a transverse slider slidably assembled on the third guide rail, and a third motor arranged at one end of the third guide rail. The third guide rail extends laterally, the transverse slider is connected to the second driving assembly, and the third motor is drivingly connected to the transverse slider for driving the transverse slider to slide along the third guide rail.

8. The edge finder according to claim 7, characterized in that: The transverse slider is provided with screw holes in the transverse direction, and the third driving assembly also includes a transverse screw, two transmission wheels spaced apart in the longitudinal direction, and a transmission belt sleeved on the two transmission wheels, the two transmission wheels are coaxially connected to the driving shaft of the third motor, the other of the two transmission wheels is coaxially connected to the transverse screw, and the transverse screw is passed through the screw hole on the transverse slider.

9. The edge finder according to claim 7, characterized in that: The second driving assembly includes a second guide rail installed on the upper side of the transverse slider, a longitudinal slider slidably assembled on the second guide rail, and a second motor arranged at one end of the second guide rail. The second guide rail extends longitudinally, the first mounting plate is connected to the longitudinal slider, and the second motor is drivingly connected to the longitudinal slider for driving the longitudinal slider to slide along the second guide rail.

10. The edge finder according to claim 9, characterized in that: The longitudinal slider is provided with screw holes along the longitudinal direction, and the second driving assembly also includes a longitudinal screw, two transmission wheels spaced apart in the transverse direction, and a transmission belt sleeved on the two transmission wheels, the two transmission wheels are coaxially connected to the driving shaft of the second motor, the other of the two transmission wheels is coaxially connected to the longitudinal screw, and the longitudinal screw is passed through the screw hole on the longitudinal slider.

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