Cleaning machine feeding piece box moving mechanism moving through air cylinder

Abstract

The utility model discloses a cleaning machine feeding piece box moving mechanism utilizing air cylinder movement, and relates to the technical field of wafer cleaning machines, the cleaning machine feeding piece box moving mechanism comprises a buffer water tank, a piece box moving plate is arranged in the buffer water tank in a front-back movement mode, and an eight-inch piece box limiting block and a six-inch piece box limiting block are arranged on one side of the piece box moving plate. According to the cleaning machine feeding piece box moving mechanism utilizing air cylinder movement, on one hand, the translation air cylinder drives the sliding rails, located at the two ends of the fixed plate, of the movable plate to do horizontal movement through the floating connector, and movement positioning is conducted through the limiting pins at the ends of the sliding rails; the lifting air cylinder drives the Z-shaped plate and the wafer box moving plate at the tail end of the Z-shaped plate to move up and down, and two limiting nuts fixed to the guide rods in a threaded mode are used for moving and positioning the Z-shaped plate and the wafer box moving plate at the tail end of the Z-shaped plate, and automatic lifting and carrying of wafer boxes are achieved through cooperation of the wafer box transverse moving mechanism installed on the side wall of the temporary storage water tank and the wafer box lifting mechanism; the automation degree of the cleaning machine is improved, and the applicability is higher.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer cleaning machines, in particular to a material sheet box moving mechanism for a cleaning machine utilizing the movement of a cylinder. Background Art

[0002] A wafer refers to a silicon chip used to make silicon semiconductor integrated circuits. Its raw material is silicon. After polishing during production, the surface of the wafer needs to be cleaned to ensure the cleanliness of the wafer surface.

[0003] Since the film box moves forward and backward in the buffer tank, if the film box is not limited in front and back, the water resistance will cause the film box to be displaced when moving in the buffer tank, thereby preventing the film box from moving to the specified position.

[0004] Therefore, in view of this, the existing structural deficiencies are studied and improved, and a cleaning machine upper sheet box moving mechanism using cylinder movement is proposed. Utility Model Content

[0005] The utility model aims to provide a cleaning machine upper material box moving mechanism using cylinder movement to solve the problems raised in the above background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a cleaning machine loading film box moving mechanism utilizing cylinder movement, comprising a cache water tank, a film box moving plate moving back and forth inside the cache water tank, and an eight-inch film box limit block is provided on one side of the film box moving plate, and the eight-inch film box limit block cooperates with the limit groove at the bottom of the eight-inch film box, and a six-inch film box limit block is provided on the other side of the film box moving plate, and the six-inch film box limit block cooperates with the limit groove at the bottom of the six-inch film box.

[0007] Furthermore, a film box transverse movement mechanism is fixed to the side of the cache water tank, and the film box transverse movement mechanism includes a fixed plate, a slide rail and a limit pin. The slide rails are symmetrically fixed at the upper and lower ends of the fixed plate, and the limit pins are fixed at the ends of the slide rails.

[0008] Furthermore, the film box transverse movement mechanism also includes a translation cylinder and a floating joint. The translation cylinder is arranged between the slide rails at the upper and lower ends, and the floating joint is connected to the output end of the translation cylinder.

[0009] Furthermore, the film box transverse movement mechanism also includes a movable plate, the floating joint is hinged with the movable plate, and the movable plate is slidably matched with the slide rails at the upper and lower ends.

[0010] Furthermore, a film box lifting mechanism is fixed on the top of the movable plate, and the film box lifting mechanism includes a frame and a guide sleeve. The frame is bolted to the top of the movable plate, and guide sleeves are fixed on both sides of the middle of the frame.

[0011] Furthermore, the film box lifting mechanism also includes a lifting cylinder and a Z-shaped plate. The lifting cylinder is bolted to the middle of the frame, and the output end of the lifting cylinder is connected to the Z-shaped plate, and the Z-shaped plate is fixed to the film box moving plate by welding through reinforcing ribs.

[0012] Furthermore, the film box lifting mechanism also includes a guide rod and a limit nut. The guide rods are fixed on both sides of the back of the Z-shaped plate, and the guide rods are slidably matched with the corresponding guide sleeves, and the limit nut is threadedly fastened in the middle of the guide rod.

[0013] Compared with the prior art, the utility model has the following beneficial effects:

[0014] 1. When the utility model is in use, on the one hand, the translation cylinder drives the slide rails at both ends of the movable plate to make horizontal movement through the floating joint, and the movement is positioned by the limit pins at the ends of the slide rails; on the other hand, the lifting cylinder drives the Z-shaped plate and the film box moving plate at its end to make up and down movements, and the movement is positioned by two limit nuts threadedly fixed on the guide rods. The present application realizes automatic lifting and transportation of the film box by cooperating with the film box lifting mechanism installed on the side wall of the cache water tank, thereby improving the degree of automation of the cleaning machine.

[0015] 2. When the utility model is in use, an eight-inch film box limit block and a six-inch film box limit block corresponding to the grooves at the bottom of the film boxes of different sizes are respectively arranged on both sides of the film box moving plate, so that when the film box moves back and forth in the buffer water tank, the film box will not be displaced due to the resistance of the water, thereby ensuring that the film box can be accurately moved to the specified position. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the overall structure of the utility model device;

[0017] Figure 2 It is a structural schematic diagram of the film box transverse movement mechanism and the film box lifting mechanism of the utility model;

[0018] Figure 3 This is a structural schematic diagram of the film box moving plate of the utility model.

[0019] In the figure: 1. Buffer tank; 2. Film box transverse movement mechanism; 201. Fixed plate; 202. Slide rail; 203. Limit pin; 204. Translation cylinder; 205. Floating joint; 206. Movable plate; 3. Film box lifting mechanism; 301. Frame; 302. Guide sleeve; 303. Lifting cylinder; 304. Z-shaped plate; 305. Guide rod; 306. Limit nut; 4. Film box moving plate; 5. Eight-inch film box limit block; 6. Six-inch film box limit block. DETAILED DESCRIPTION

[0020] The following is a further detailed description of the implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0021] like Figures 1 to 3 As shown, a cleaning machine loading film box moving mechanism using cylinder movement includes a buffer tank 1, a film box moving plate 4 is moved back and forth inside the buffer tank 1, and an eight-inch film box limit block 5 is arranged on one side of the film box moving plate 4, and the eight-inch film box limit block 5 is limited and matched with the groove at the bottom of the eight-inch film box, and a six-inch film box limit block 6 is arranged on the other side of the film box moving plate 4, and the six-inch film box limit block 6 is limited and matched with the groove at the bottom of the six-inch film box. In this application, by respectively arranging eight-inch film box limit blocks 5 and six-inch film box limit blocks 6 corresponding to the grooves at the bottom of the six-inch film box of different sizes on both sides of the film box moving plate 4, when the film box moves back and forth in the buffer tank 1, the film box will not be displaced due to the resistance of water, so that the film box can be accurately moved to the specified position;

[0022] like Figure 1 to Figure 2 As shown, a film box transverse movement mechanism 2 is fixed to the side of the cache water tank 1, and the film box transverse movement mechanism 2 includes a fixed plate 201, a slide rail 202 and a limit pin 203. The slide rails 202 are symmetrically fixed at the upper and lower ends of the fixed plate 201, and the limit pins 203 are fixed at the ends of the slide rails 202. The film box transverse movement mechanism 2 also includes a translation cylinder 204 and a floating joint 205. A translation cylinder 204 is arranged between the slide rails 202 at the upper and lower ends, and the output end of the translation cylinder 204 is connected with the floating joint 205. The film box transverse movement mechanism 2 also includes a movable plate 206, and the floating joint 205 is hinged with the movable plate 206, and the movable plate 206 is slidably matched with the slide rails 202 at the upper and lower ends. On the one hand, the translation cylinder 204 drives the movable plate 206 to move horizontally on the slide rails 202 at the two ends of the fixed plate 201 through the floating joint 205, and moves and positions through the limit pins 203 at the ends of the slide rails 202. A film box lifting device is fixed on the top of the movable plate 206. The film box lifting mechanism 3 includes a frame 301 and a guide sleeve 302. The frame 301 is bolted to the top of the movable plate 206, and the guide sleeves 302 are fixed on both sides of the middle of the frame 301. The film box lifting mechanism 3 also includes a lifting cylinder 303 and a Z-shaped plate 304. The lifting cylinder 303 is bolted to the middle of the frame 301, and the output end of the lifting cylinder 303 is connected to the Z-shaped plate 304, and the Z-shaped plate 304 is fixed to the film box moving plate 4 by reinforcing ribs. The film box lifting mechanism 3 also includes guide rods 305 and limit nuts 306. Guide rods 305 are fixed on both sides of the back side of the Z-shaped plate 304, and the guide rods 305 are slidably matched with the corresponding guide sleeves 302, and the middle part of the guide rods 305 is threadedly fastened with limit nuts 306. On the other hand, the lifting cylinder 303 drives the Z-shaped plate 304 and the end film box moving plate 4 to move up and down, and uses two limit nuts 306 threadedly fixed on the guide rods 305 to perform movement positioning.

[0023] Working principle: When using the cleaning machine loading film box moving mechanism that utilizes cylinder movement, on the one hand, the translation cylinder 204 drives the movable plate 206 through the floating joint 205 to move the slide rails 202 at both ends of the fixed plate 201 horizontally, and moves and positions through the limit pins 203 at the ends of the slide rails 202. On the other hand, the lifting cylinder 303 drives the Z-shaped plate 304 and its end film box moving plate 4 to move up and down, and uses two limit nuts 306 threadedly fixed on the guide rod 305 for movement and positioning. The present application realizes automatic lifting and transportation of the film box by cooperating with the film box lifting mechanism 3 installed on the side wall of the cache water tank 1, thereby improving the degree of automation of the cleaning machine. The present application respectively arranges an eight-inch film box limit block 5 and a six-inch film box limit block 6 corresponding to the bottom grooves of film boxes of different sizes on both sides of the film box moving plate 4, so that when the film box moves back and forth in the cache water tank 1, the film box will not be displaced due to the resistance of water, thereby ensuring that the film box can be accurately moved to the specified position.

[0024] The embodiments of the present invention are provided for the purpose of illustration and description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiments are selected and described to better illustrate the principles and practical applications of the present invention, and to enable those of ordinary skill in the art to understand the present invention and thereby design various embodiments with various modifications suitable for specific uses.

Claims

1. A cleaning machine upper sheet box moving mechanism using cylinder motion, comprising a buffer tank (1), characterized in that: A film box moving plate (4) is provided inside the cache water tank (1) for moving back and forth, and an eight-inch film box limiting block (5) is provided on one side of the film box moving plate (4), and the eight-inch film box limiting block (5) is matched with the groove at the bottom of the eight-inch film box, and a six-inch film box limiting block (6) is provided on the other side of the film box moving plate (4), and the six-inch film box limiting block (6) is matched with the groove at the bottom of the six-inch film box.

2. A cleaning machine loading sheet box moving mechanism using cylinder motion according to claim 1, characterized in that: A film box transverse movement mechanism (2) is fixed on the side of the buffer water tank (1), and the film box transverse movement mechanism (2) comprises a fixed plate (201), a slide rail (202) and a limit pin (203). The slide rails (202) are symmetrically fixed at the upper and lower ends of the fixed plate (201), and the limit pins (203) are fixed at the ends of the slide rails (202).

3. A cleaning machine loading sheet box moving mechanism using cylinder motion according to claim 2, characterized in that: The film box transverse movement mechanism (2) also includes a translation cylinder (204) and a floating joint (205). The translation cylinder (204) is arranged between the upper and lower ends of the slide rails (202), and the floating joint (205) is connected to the output end of the translation cylinder (204).

4. A cleaning machine loading sheet box moving mechanism using cylinder motion according to claim 3, characterized in that: The film box transverse movement mechanism (2) further comprises a movable plate (206), the floating joint (205) is hingedly connected with the movable plate (206), and the movable plate (206) is slidably matched with the slide rails (202) at the upper and lower ends.

5. A cleaning machine loading sheet box moving mechanism using cylinder motion according to claim 4, characterized in that: A film box lifting mechanism (3) is fixed on the top of the movable plate (206), and the film box lifting mechanism (3) comprises a frame (301) and a guide sleeve (302). The frame (301) is bolted to the top of the movable plate (206), and the guide sleeves (302) are fixed on both sides of the middle of the frame (301).

6. A cleaning machine loading sheet box moving mechanism using cylinder motion according to claim 5, characterized in that: The film box lifting mechanism (3) also includes a lifting cylinder (303) and a Z-shaped plate (304); the lifting cylinder (303) is bolted to the middle of the frame (301); the output end of the lifting cylinder (303) is connected to the Z-shaped plate (304); and the Z-shaped plate (304) is fixed to the film box moving plate (4) by welding via reinforcing ribs.

7. A cleaning machine loading sheet box moving mechanism using cylinder motion according to claim 6, characterized in that: The film box lifting mechanism (3) also includes a guide rod (305) and a limit nut (306). The guide rods (305) are fixed on both sides of the back of the Z-shaped plate (304), and the guide rods (305) are slidably matched with the corresponding guide sleeves (302), and the limit nut (306) is threadedly fastened in the middle of the guide rod (305).

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