Machine table capable of calibrating rotation center of circular part and circular part calibration system

Abstract

The utility model provides a machine table capable of calibrating the rotation center of a circular piece. The machine table comprises a main body, a distance measuring sensor and a distance adjusting device. Wherein the main body comprises a machine body and a rotating platform, the machine body is of a hollow structure internally provided with a cylindrical cavity, the rotating platform is arranged in the center of the bottom of the cavity, and the upper surface of the rotating platform is used for bearing the circular part. The central axis of the cavity coincides with the rotating shaft of the rotating platform. The distance measuring sensor is arranged on the inner wall of the cavity and used for measuring the distance between the outer side wall of the circular piece and the inner wall of the cavity. The distance adjusting device comprises a distance adjusting arm and a distance adjusting head, one end of the distance adjusting arm is movably connected with the machine body, and the other end of the distance adjusting arm is connected with the distance adjusting head. According to the technical scheme, the eccentric condition of the circular part rotating in the machine table can be measured, and the position of the circular part is calibrated according to the measurement result, so that the eccentric state of the circular part is improved or eliminated, the operation of the machine table is more stable, the rapid thermal annealing effect of a wafer is improved, and the production efficiency is improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor processing, and in particular to a machine platform capable of calibrating the rotation center of a circular part and a circular part calibration system. Background Art

[0002] Rapid thermal annealing is a key technology in semiconductor processing. This technology is mainly used to activate doping elements and repair damage caused by ion implantation, as well as to change the contact surface between films or between films and substrates. Compared with traditional furnace annealing, rapid thermal annealing has the advantages of lower thermal budget, less impurities, less pollution and shorter processing time. During the rapid thermal annealing process, the wafer is usually placed on the support platform of the rapid thermal annealing machine, and the wafer rotates synchronously with the support platform to improve temperature uniformity and heat conduction efficiency, reduce thermal stress and defects, thereby improving production efficiency and improving process results. In actual production, circular parts are often used to limit and protect the wafer. The inner diameter of the circular part is usually slightly larger than the wafer diameter, which can prevent the wafer from being thrown away from the working position during rotation and avoid bumping the edge of the wafer. Among them, the circular part can be a disc-shaped part, and a circular depression can be opened in the center of the disc-shaped part. The wafer is placed in the circular depression to form a circumferential limit and protection for the wafer. Alternatively, the circular member may be a ring-shaped member, and an annular sunken step may be provided on the inner side of the ring-shaped member to support the wafer and perform circumferential positioning and protection on the wafer.

[0003] However, in the prior art, each time the circular part is installed, the operator can only visually check whether the center of the circular part is basically aligned with the rotation axis of the support platform (that is, check whether the circular part has an eccentric rotation problem). If the circular part is found to have eccentric rotation, the worker generally performs manual adjustment with rough adjustment accuracy. Therefore, the center position of the cross section of the circular part may have a large deviation from the position of the rotation axis, that is, the circular part may have severe eccentricity when rotating, resulting in swinging, which may lead to various problems such as uneven heating, uneven stress distribution of the wafer, and influence on doping uniformity, further reducing production efficiency and possibly affecting device quality. Utility Model Content

[0004] The purpose of the embodiments of the present application is to provide a machine that can calibrate the rotation center of a circular part, which can measure the eccentricity of the circular part when it rotates inside the machine, and calibrate the position of the circular part according to the measurement results, thereby improving or eliminating the eccentricity of the circular part, making the operation of the machine more stable, improving the rapid thermal annealing effect of the wafer, and improving production efficiency.

[0005] In the first aspect, the present application provides a machine that can calibrate the rotation center of a circular part, including a main body, a distance measuring sensor and a distance adjusting device. The main body includes a fuselage and a rotating platform, the fuselage is a hollow structure with a cylindrical chamber arranged inside, the rotating platform is arranged at the bottom center of the chamber, and the upper surface of the rotating platform is used to support the circular part. The central axis of the chamber coincides with the rotation axis of the rotating platform. The distance measuring sensor is arranged on the inner wall of the chamber, and is used to measure the distance between the outer wall of the circular part and the inner wall of the chamber. The distance adjusting device includes a distance adjusting arm and a distance adjusting head, one end of the distance adjusting arm is movably connected to the fuselage, and the other end of the distance adjusting arm is connected to the distance adjusting head. When in use, the distance adjusting head is moved closer to or away from the outer wall of the circular part by adjusting the distance adjusting arm to move closer to or away from the circular part.

[0006] In an implementable solution, there are multiple distance measuring sensors, and the multiple distance measuring sensors are evenly distributed along the circumference of the chamber.

[0007] In one feasible solution, the distance adjusting head is detachably connected to the distance adjusting arm.

[0008] In an implementable solution, a side of the pitch adjusting head away from the pitch adjusting arm is configured as a plane or as an arc surface with a convex side facing the circular member.

[0009] In an practicable solution, a buffer layer for reducing friction is provided on a side of the pitch adjusting head away from the pitch adjusting arm.

[0010] In an implementable solution, the side wall of the fuselage is provided with a hole structure penetrating inside and outside the side wall, and the pitch-adjusting arm is penetrated in the hole structure in a manner that it can move along the extension direction of the hole structure.

[0011] In an implementable solution, the side wall of the fuselage is provided with a hole structure penetrating the inner and outer side walls, the hole structure is provided with an internal thread, the pitch adjusting arm is a threaded rod, and the pitch adjusting arm is threadedly matched with the hole structure. A gripping portion for twisting the pitch adjusting arm is fixedly provided at one end of the pitch adjusting arm located outside the fuselage.

[0012] In an implementable solution, a scale for indicating the length of the pitch-adjustable arm extending into the interior of the fuselage is provided on the surface of the pitch-adjustable arm.

[0013] In a second aspect, the present application also provides a circular part calibration system, which includes a machine platform that can calibrate the rotation center of the circular part, and also includes a controller and a driver. The controller is connected to the distance sensor and the driver signal, the driver is installed on the machine body, and the distance adjustment device is installed on the driver. The controller is connected to the distance sensor signal. When working, the controller obtains the distance measurement result between the outer wall of the circular part and the inner wall of the chamber in real time through the distance sensor, and controls the driver to drive the distance adjustment arm of the distance adjustment device to move in the direction of approaching or moving away from the circular part.

[0014] Compared with the prior art, the beneficial effects of this application include at least:

[0015] The present application provides a machine that can calibrate the position of a circular part. By using the machine provided by the present application, the distance between the outer wall of the circular part and the inner wall of the chamber can be obtained through a distance measuring sensor, and the degree of eccentricity of the circular part can be accurately determined. Its efficiency and accuracy are much higher than the efficiency and accuracy of human eye observation, and the amount of movement of the distance adjusting head of the distance adjusting device towards or away from the circular part can be determined according to the measurement result of the distance measuring sensor, and the position of the circular part can be adjusted at any time, and finally the center of the circular part is basically coincident with the rotation axis of the rotating platform. The operation of the entire calibration process is more convenient and efficient, and the eccentricity problem of the circular part can be well reduced or even eliminated, and the swing amplitude of the circular part can be reduced, so that the heating effect of the wafer, the stress distribution of the wafer, etc. are more uniform, and the rapid thermal annealing effect is improved. At the same time, the operation of the machine is more stable, and the possibility of mechanical damage, noise and other problems is reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0017] Figure 1 A top perspective view of a machine platform capable of calibrating the rotation center of a circular member according to an embodiment of the present application;

[0018] Figure 2 for Figure 1 Side perspective view of the middle machine;

[0019] Figure 3 is a side perspective view of a second machine according to an embodiment of the present application;

[0020] Figure 4 is a side perspective view of a third machine according to an embodiment of the present application;

[0021] Figure 5 is a schematic diagram of a circular component calibration system according to an embodiment of the present application;

[0022] Figure 6 A line graph that records distance measurements.

[0023] In the figure: 1. body; 2. rotating platform; 3. circular part; 4. distance measuring sensor; 5. distance adjusting device; 6. controller; 7. driver; 101. chamber; 501. distance adjusting arm; 502. distance adjusting head; 503. gripping part. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0025] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0026] like Figure 1-Figure 4 As shown, the present application provides a machine capable of calibrating the position of a circular part, comprising a main body, a distance sensor 4 and a distance adjusting device 5. The main body comprises a body 1 and a rotating platform 2, wherein the body 1 is a hollow structure having a cylindrical chamber 101 disposed therein, the rotating platform 2 is disposed at the bottom center of the chamber 101, and the upper surface of the rotating platform 2 is used to carry the circular part 3. The central axis of the chamber 101 coincides with the rotation axis of the rotating platform 2. The distance sensor 4 is disposed on the inner wall of the chamber 101, and is used to measure the distance between the outer wall of the circular part 3 and the inner wall of the chamber 101. The distance adjusting device 5 comprises a distance adjusting arm 501 and a distance adjusting head 502, wherein one end of the distance adjusting arm 501 is movably connected to the body 1, and the other end of the distance adjusting arm 501 is connected to the distance adjusting head 502. The upper surface of the circular part 3 is provided with a groove capable of accommodating a wafer. The circular part 3 may be disc-shaped or ring-shaped.

[0027] When in use, the machine is first started to make the rotating platform 2 drive the circular member 3 to start rotating. During the rotation process, the distance between the outer wall of the circular member 3 and the inner wall of the chamber 101 can be obtained in real time through the distance sensor 4, and the fluctuation of the measurement result of the distance sensor 4 can be displayed through a display device (such as Figure 6 If the center of the circular member 3 coincides with the rotation axis of the rotating platform 2, that is, the circular member 3 does not have eccentricity, the distance measurement result should remain unchanged during the rotation of the circular member 3.

[0028] Therefore, if the distance measurement result fluctuates, and the fluctuation amplitude exceeds the preset threshold, it indicates that the swing amplitude of the circular part 3 exceeds expectations, and the distance needs to be adjusted to reduce or eliminate the eccentricity. When adjusting the distance, the distance adjusting arm 501 of the distance adjusting device 5 is controlled to move toward the direction close to the circular part 3, driving the distance adjusting head 502 to approach the outer wall of the circular part 3. Since the circular part 3 is in a high-speed rotating state, under the limiting effect of the distance adjusting head 502, the swing amplitude of the circular part 3 will be reduced, and its rotation center will be close to the rotation axis of the rotating platform 2. During the distance adjustment process, the fluctuation amplitude of the measurement result of the distance measuring sensor 4 is observed in real time. When the fluctuation amplitude is less than the preset threshold, it indicates that the swing amplitude of the circular part 3 is within an acceptable range. At this time, the distance adjusting arm 501 can be controlled to move away from the circular part 3, thereby ending the distance adjustment operation.

[0029] By using the machine provided by the present application, the distance between the outer wall of the circular part 3 and the inner wall of the chamber 101 can be obtained by the distance sensor 4, and the degree of eccentricity of the circular part 3 can be accurately determined, and its efficiency and accuracy are much higher than the efficiency and accuracy of human eye observation, and the movement amount of the distance adjusting head 502 of the distance adjusting device 5 towards or away from the circular part 3 can be determined according to the measurement result of the distance sensor 4, and the position of the circular part 3 can be adjusted at any time, and finally the center of the circular part 3 is basically coincident with the rotation axis of the rotating platform 2. The operation of the entire calibration process is more convenient and efficient, which can better reduce or even eliminate the eccentricity problem of the circular part 3, reduce the swing amplitude of the circular part 3, so that the heating effect of the wafer, the stress distribution of the wafer, etc. are more uniform, and the rapid thermal annealing effect is improved, while making the operation of the machine more stable, reducing the possibility of mechanical damage, noise and other problems.

[0030] In one embodiment, if Figure 1As shown, there are multiple distance measuring sensors 4, and the multiple distance measuring sensors 4 are evenly distributed along the circumference of the chamber 101. The distance measuring sensor 4 can be one or more of an infrared distance measuring sensor, a laser distance measuring sensor or an ultrasonic distance measuring sensor, which is not limited here. When a single distance measuring sensor is used, if the sensor fails, is damaged or aged, the measurement result may be wrong, or even directly lead to calibration failure. The provision of multiple distance measuring sensors provides a certain degree of redundancy, which helps to avoid this problem. If there is a significant difference between the measurement results of each distance measuring sensor, it means that some or all of the distance measuring sensors have failed, and the corresponding distance measuring sensors and their mounting bases should be removed and replaced after shutdown. Each distance measuring sensor 4 can be a distance measuring sensor of the same type or a distance measuring sensor of a different type. After the distance measuring sensors 4 are installed in place, the angles formed by the lines connecting each distance measuring sensor 4 and the center of the cross section of the chamber 101 and the corresponding distance measuring direction should be consistent. In this way, if the center of the circular member 3 coincides with the rotation axis of the rotating platform 2, the measurement results of each distance measuring sensor 4 should be basically consistent, which is convenient for comparing the measurement results and fluctuations of each distance measuring sensor 4.

[0031] In one embodiment, the pitch head 502 is detachably connected to the pitch arm 501. The pitch head 502 and the pitch arm 501 may be connected by threaded connection, snap connection, magnetic connection, etc., as long as the connection is stable and reliable, and no excessive restrictions are made here. After adopting the detachable design, the operator can replace the pitch head 502 according to the actual situation to adapt to different circular sizes, or replace it when the pitch head 502 is severely worn or damaged. Therefore, the design has higher flexibility and adaptability, and can better meet the needs of different users or different application scenarios.

[0032] In one embodiment, if Figure 2-Figure 3 As shown, the side of the pitch adjusting head 502 away from the pitch adjusting arm 501 is set as a plane or a curved surface with the convex side facing the circular member 3. When adjusting the pitch, the circular member 3 is in a rotating state, and the pitch adjusting head 503 contacts the outer wall of the circular member 3, so that the center of the circular member 3 moves. The contact area between the plane or the convex curved surface and the circular member 3 is relatively small, and the degree of friction between them is low, which helps to reduce wear and prevent the pitch adjusting head 503 from being affected by the circular member 3 and deviating.

[0033] In one embodiment, a buffer layer for reducing friction is provided on the side of the pitch adjusting head 502 away from the pitch adjusting arm 501. When adjusting the pitch, since the circular member 3 is in a high-speed rotating state, there is strong friction between the pitch adjusting head 502 and the outer wall of the circular member 3, which is prone to wear, so a buffer layer can be introduced to reduce friction. The surface of the buffer layer should be smooth, wear-resistant, and not easy to deform, and it should be able to minimize the wear on the circular member 3 to prevent the pitch adjusting head 503 from being affected by the circular member 3 and deviating. The buffer layer can be made of ceramic, stainless steel, or high molecular polymer materials such as nylon and polyurethane, and no excessive restrictions are made here.

[0034] In one embodiment, if Figure 1-Figure 3 As shown, the side wall of the fuselage 1 is provided with a hole structure penetrating the inside and outside of the side wall, and the pitch-adjusting arm 501 is inserted into the hole structure in a manner that it can move along the extension direction of the hole structure. The hole structure matches the cross-sectional shape of the pitch-adjusting arm 501, and its height is within the height range of the upper and lower edges of the outer wall of the circular part 3, thereby ensuring that when the pitch-adjusting arm 501 moves toward the direction close to the circular part 3, the pitch-adjusting head 502 can smoothly contact the circular part 3. When the pitch needs to be adjusted, the pitch-adjusting arm 501 can be pushed outside the machine to make the pitch-adjusting head 502 approach and contact the circular part 3; after the pitch adjustment is completed, the pitch-adjusting arm 501 can be pulled outside the machine to make the pitch-adjusting head 502 away from the circular part 3.

[0035] In one embodiment, if Figure 4 As shown, the side wall of the fuselage 1 is provided with a hole structure penetrating the inner and outer walls, the hole structure is provided with an internal thread, the pitch-adjusting arm 501 is a threaded rod, and the pitch-adjusting arm 501 is threadedly matched with the hole structure. A gripping portion 503 for twisting the pitch-adjusting arm 501 is fixedly provided at one end of the pitch-adjusting arm 501 located on the outer side of the fuselage 1. When in use, the gripping portion 503 can be rotated outside the machine to drive the pitch-adjusting arm 501 to move in a direction close to the circular part 3, so that the pitch-adjusting head 502 fits with the outer wall of the circular part 3, thereby adjusting the distance between the outer wall of the circular part 3 and the inner wall of the chamber 101. After the pitch adjustment is completed, the gripping portion 503 is rotated in the opposite direction to drive the pitch-adjusting arm 501 to move in a direction away from the circular part 3, so that the pitch-adjusting head 502 is out of contact with the outer wall of the circular part 3. The gripping portion 503 can be in a disc shape, a cross shape, etc., and its edge can also be provided with a structure such as a pattern for increasing friction, which is not too restrictive here.

[0036] In one embodiment, the surface of the pitch-adjusting arm 501 is provided with a scale (not shown in the figure) for indicating the length of the pitch-adjusting arm 501 extending into the interior of the fuselage 1. The scale can help the operator understand and accurately control the travel distance of the pitch-adjusting arm 501, and help the operator avoid affecting the efficiency and effect of the pitch adjustment due to excessive movement amplitude.

[0037] In one embodiment, if Figure 5As shown, the present application also provides a circular component calibration system, which includes the aforementioned machine capable of calibrating the rotation center of the circular component, and also includes a controller 6 and a driver 7. The controller 6 is signal-connected to the distance sensor 4 and the driver 7, the driver 7 is mounted on the body 1, and the distance adjustment device 5 is mounted on the driver 7. The controller 6 is signal-connected to the distance sensor 4. During operation, the controller 6 obtains the distance measurement result between the outer wall of the circular component 3 and the inner wall of the chamber 101 in real time through the distance sensor 4. When the fluctuation amplitude of the distance measurement result exceeds the preset threshold, the controller 6 will control the driver 7 to drive the distance adjustment arm 501 of the distance adjustment device 5 to move in the direction close to the circular component 3 for distance adjustment; when the fluctuation amplitude of the distance measurement result is less than the preset threshold, the controller 6 will control the driver 7 to drive the distance adjustment arm 501 of the distance adjustment device 5 to move in the direction away from the circular component 3.

[0038] In one embodiment, when using the machine or circular component calibration system that can calibrate the rotation center of a circular component provided by the present application, the calibration can be performed according to the following steps: (1) Install the circular component 3 and obtain the initial distance measurement result through the distance sensor 4; (2) Set the initial distance measurement result as the reference value in the controller 6, and then record the subsequent distance measurement results. If the subsequent distance measurement result is greater than the reference value of 0, it is recorded as a positive number, otherwise it is recorded as a negative number; (3) Summarize and analyze all distance measurement results to form a line graph; (4) Based on the summary of the measurement results, calibrate the position of the circular component 3 with the help of the distance adjustment device 5. Figure 6 As shown, the line graph can be used to intuitively understand the fluctuation level of the distance measurement results, providing data support for subsequent manual distance adjustment or automatic distance adjustment.

[0039] The above description is only the preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A machine capable of calibrating the rotation center of a circular part, characterized in that: include: The main body comprises a body (1) and a rotating platform (2), wherein the body (1) is a hollow structure having a cylindrical chamber (101) disposed therein, the rotating platform (2) being disposed at the bottom center of the chamber (101), and the upper surface of the rotating platform (2) being used to carry a circular member (3); wherein the central axis of the chamber (101) coincides with the rotation axis of the rotating platform (2); a distance measuring sensor (4), arranged on the inner wall of the chamber (101), and used for measuring the distance between the outer wall of the circular member (3) and the inner wall of the chamber (101); The pitch adjusting device (5) comprises a pitch adjusting arm (501) and a pitch adjusting head (502); one end of the pitch adjusting arm (501) is movably connected to the body (1), and the other end of the pitch adjusting arm (501) is connected to the pitch adjusting head (502); when in use, the pitch adjusting arm (501) is adjusted to move in a direction close to or away from the circular member (3), so that the pitch adjusting head (502) moves close to or away from the outer wall of the circular member (3).

2. The machine according to claim 1, characterized in that: There are a plurality of distance measuring sensors (4), and the plurality of distance measuring sensors (4) are evenly distributed along the circumference of the chamber (101).

3. The machine according to claim 1, characterized in that: The distance adjusting head (502) is detachably connected to the distance adjusting arm (501).

4. The machine according to claim 1, characterized in that: The side of the pitch adjusting head (502) away from the pitch adjusting arm (501) is configured as a plane or as an arc surface with the convex side facing the circular member (3).

5. The machine according to claim 1, characterized in that: A buffer layer for reducing friction is provided on a side of the pitch adjusting head (502) away from the pitch adjusting arm (501).

6. The machine according to claim 1, characterized in that: The side wall of the fuselage (1) is provided with a hole structure penetrating the inside and outside of the side wall, and the pitch adjustment arm (501) is inserted into the hole structure in a manner that it can move along the extension direction of the hole structure.

7. The machine according to claim 1, characterized in that: The side wall of the fuselage (1) is provided with a hole structure penetrating the inner and outer side walls, the hole structure is provided with an internal thread, the pitch-adjusting arm (501) is a threaded rod, and the pitch-adjusting arm (501) is threadedly matched with the hole structure; A gripping portion (503) for twisting the pitch adjusting arm (501) is fixedly provided at one end of the pitch adjusting arm (501) located outside the fuselage (1).

8. The machine according to claim 1, characterized in that: The surface of the pitch-adjusting arm (501) is provided with a scale for indicating the length of the pitch-adjusting arm (501) extending into the interior of the fuselage (1).

9. A circular part calibration system, comprising the machine according to any one of claims 1 to 8, and further comprising a controller (6) and a driver (7), wherein the controller (6) is connected to the distance sensor (4) and the driver (7) by signals, the driver (7) is mounted on the machine body (1), and the distance adjustment device (5) is mounted on the driver (7); the controller (6) is connected to the distance sensor (4) by signals; When in operation, the controller (6) obtains the distance measurement result between the outer wall of the circular member (3) and the inner wall of the chamber (101) in real time through the distance measuring sensor (4), and controls the driver (7) to drive the distance adjusting arm (501) of the distance adjusting device (5) to move in a direction approaching or moving away from the circular member (3).

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