Positioner for semiconductor processing

Abstract

The utility model relates to the technical field of semiconductor processing, and discloses a positioner for semiconductor processing, which comprises a mounting box, a motor is fixedly connected to the inner wall of the mounting box, a fixing shaft is fixedly connected to the output end of the motor, a gear is fixedly connected to the outer wall of the fixing shaft, and connecting frames which are in bilateral symmetry are slidably connected to the interior of the mounting box. The lower surface of the connecting frame is fixedly connected with a rack plate, the rack plate is connected with the gear in a meshed mode, the upper surface of the connecting frame is fixedly connected with a clamping plate, the inner wall of the mounting box is fixedly connected with a fixing box, and the interior of the fixing box is rotationally connected with a lead screw. According to the utility model, the motor is started to drive the fixing shaft to drive the gear and the rack plate to rotate in an engaged manner, so that the connecting frame drives the clamping plate to stably clamp the semiconductor, and the fixing shaft rotates the screw rod to drive the piston plate to move and extract air at the bottom of the semiconductor, thereby further stabilizing the semiconductor and improving the practicability of the device.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing, in particular to a positioner for semiconductor processing. Background Technique

[0002] Semiconductor is an electronic material between conductor and insulator, such as silicon, which is widely used in electronic devices such as transistors and integrated circuits. During the semiconductor processing, the positioner plays a key role in ensuring the precise alignment of micron- or even nanometer-level process steps, thus maintaining the production consistency and efficiency. This precise positioning not only reduces the adjustment time and scrap rate during the production process, but also improves the product quality and manufacturing efficiency.

[0003] In most cases, the existing positioners use servo motors arranged on two bottom plates. The servo motors drive the threaded rods to rotate. Depending on the threaded connection between the threaded rods and the positioning pressure plates, the positioning pressure plates can be lifted and lowered, which can facilitate the positioning and fixing of plate-shaped semiconductors and reduce the possibility of fatigue caused by long-term operation of workers. However, only fixing the semiconductor on one side by the pressure plate will also lead to unstable clamping, and further lead to the problem of semiconductor detachment. Therefore, a positioner for semiconductor processing is proposed to solve the above problems. Summary of the Utility Model

[0004] To make up for the above deficiencies, the utility model provides a positioner for semiconductor processing, aiming to improve the problem that the fixing method adopted in the existing technology is relatively single, which further leads to semiconductor detachment and thus reduces the practicability of the equipment.

[0005] To achieve the above object, the utility model provides the following technical solution: A positioner for semiconductor processing, including an installation box, the inner wall of the installation box is fixedly connected with a motor, the output end of the motor is fixedly connected with a fixed shaft, the outer wall of the fixed shaft is fixedly connected with a gear, the installation box internally slidably connects with symmetric left and right connecting frames, the lower surface of the connecting frame is fixedly connected with a rack plate, the rack plate is meshed and connected with the gear, the upper surface of the connecting frame is fixedly connected with a clamping plate, the inner wall of the installation box is fixedly connected with a fixed box, the inside of the fixed box rotatably connects with a lead screw, one end of the lead screw is fixedly connected to one end of the fixed shaft, the outer wall of the lead screw is threadedly connected with a piston plate, the piston plate is slidably connected to the inner wall of the fixed box, a stabilizing component for stabilizing the semiconductor is installed inside the fixed box, and a fixed pipe penetrates through the installation box, and a drainage pipe is fixedly connected to the lower surface of the fixed pipe.

[0006] Further, the stabilizing component includes a first connecting pipe, one end of the first connecting pipe is fixedly connected inside the fixed box, a check valve is fixedly connected to the outer wall of the first connecting pipe, and one end of the check valve is fixedly connected inside the drainage pipe.

[0007] Furthermore, a plurality of mounting plates are fixedly connected to one side of the outer wall of the mounting box, a plug rod is fixedly connected to the lower surface of the mounting plate, and a conical block is fixedly connected to the lower surface of the plug rod.

[0008] Furthermore, a mounting seat is slidably connected to the outer wall of the conical block, and a mounting block is fixedly connected to one side of the outer wall of the mounting seat.

[0009] Furthermore, a bolt is slidably connected inside the mounting block, and a nut is threadedly connected to the outer wall of the bolt.

[0010] Furthermore, a sliding rod is slidably connected inside the mounting seat, and a clamping block is fixedly connected to one end of the sliding rod.

[0011] Furthermore, the clamping block is arranged through the interior of the mounting seat, and the clamping block is slidably connected to the outer wall of the conical block.

[0012] Furthermore, a spring is sleeved on the outer wall of the sliding rod, one end of the spring is fixedly connected to the inner wall of the mounting seat, and the other end of the spring is fixedly connected to one side of the outer wall of the clamping block.

[0013] The utility model has the following beneficial effects:

[0014] 1. In the utility model, the fixed shaft is driven by starting the motor so that the fixed shaft drives the gear and the rack plate to mesh and rotate, thereby causing the connecting frame to drive the clamping plate to clamp the semiconductor to achieve a stable effect. At the same time, the fixed shaft drives the lead screw to rotate, thereby driving the piston plate to move, thereby extracting the air from the bottom of the semiconductor to achieve a further stabilizing effect of the semiconductor, thereby improving the practicality of the equipment.

[0015] 2. In the utility model, the mounting seat is installed in the use position by the cooperation of bolts and nuts, and then the mounting box drives the insertion rod and the conical block on the lower surface of the mounting plate to be inserted into the interior of the mounting seat. At this time, the reaction force of the spring drives the clamping block to engage the conical block, thereby achieving the effect of quick installation of the mounting box. When disassembling, the sliding rod is pulled to make the spring contract and the clamping block separate from the outer wall of the conical block, thereby achieving the effect of quick disassembly, thereby improving the practicality of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the three-dimensional structure of a semiconductor processing positioner proposed by the utility model;

[0017] Figure 2 This is a schematic diagram of the structure of the fixed axis portion of a positioner for semiconductor processing proposed by the utility model;

[0018] Figure 3Schematic diagram of the piston plate part structure of a locator for semiconductor processing proposed by the present utility model;

[0019] Figure 4 Schematic sectional view of the mounting seat of a locator for semiconductor processing proposed by the present utility model.

[0020] Legend:

[0021] 1. Installation box; 2. Motor; 3. Fixed shaft; 4. Gear; 5. Rack plate; 6. Connecting frame; 7. Clamping plate; 8. Fixed box; 9. Lead screw; 10. Piston plate; 11. Stabilizing component; 1101. Connecting pipe 1; 1102. Check valve; 12. Drainage pipe; 13. Fixed pipe; 14. Mounting plate; 15. Plug rod; 16. Tapered block; 17. Mounting seat; 18. Mounting block; 19. Bolt; 20. Nut; 21. Sliding rod; 22. Spring; 23. Block. Specific implementation mode

[0022] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present utility model.

[0023] Referring to Figure 1 , Figure 2 and Figure 3 , an embodiment provided by the present utility model: A locator for semiconductor processing includes an installation box 1. The inner wall of the installation box 1 is fixedly connected with a motor 2. The output end of the motor 2 is fixedly connected with a fixed shaft 3. The outer wall of the fixed shaft 3 is fixedly connected with a gear 4. The inside of the installation box 1 is slidably connected with symmetrically arranged connecting frames 6 on the left and right. The lower surface of the connecting frame 6 is fixedly connected with a rack plate 5. The rack plate 5 is meshed with the gear 4. The upper surface of the connecting frame 6 is fixedly connected with a clamping plate 7. The inner wall of the installation box 1 is fixedly connected with a fixed box 8. The inside of the fixed box 8 is rotatably connected with a lead screw 9. One end of the lead screw 9 is fixedly connected to one end of the fixed shaft 3. The outer wall of the lead screw 9 is threadedly connected with a piston plate 10. The piston plate 10 is slidably connected to the inner wall of the fixed box 8. A stabilizing component 11 for stabilizing the semiconductor is installed inside the fixed box 8. A fixed pipe 13 penetrates through the inside of the installation box 1. The lower surface of the fixed pipe 13 is fixedly connected with a drainage pipe 12; The stabilizing component 11 includes a connecting pipe 1101. One end of the connecting pipe 1101 is fixedly connected to the inside of the fixed box 8. The outer wall of the connecting pipe 1101 is fixedly connected with a check valve 1102. One end of the check valve 1102 is fixedly connected to the inside of the drainage pipe 12;

[0024] Specifically, after placing the semiconductor on the inner wall of the mounting box 1, start the motor 2 to drive the fixed shaft 3 to rotate. Through this rotation action, the gear 4 and the rack plate 5 start to mesh and rotate, ensuring stable and precise motion transmission. As the rack plate 5 moves, the connecting frame 6 is driven, causing the clamping plate 7 to tightly clamp the semiconductor, ensuring its stability. At the same time, the rotation of the fixed shaft 3 also drives the lead screw 9 to rotate, thereby pushing the piston plate 10 to move, effectively exhausting the air at the bottom of the semiconductor, further enhancing the stability and performance of the semiconductor.

[0025] Referring to Figure 1 , Figure 3 and Figure 4 , a plurality of mounting plates 14 are fixedly connected to one side of the outer wall of the mounting box 1. A plug rod 15 is fixedly connected to the lower surface of the mounting plate 14, and a tapered block 16 is fixedly connected to the lower surface of the plug rod 15. The outer wall of the tapered block 16 is slidably connected to a mounting seat 17, and a mounting block 18 is fixedly connected to one side of the outer wall of the mounting seat 17. A bolt 19 is slidably connected inside the mounting block 18, and a nut 20 is threadedly connected to the outer wall of the bolt 19. A sliding rod 21 is slidably connected inside the mounting seat 17, and a clamping block 23 is fixedly connected to one end of the sliding rod 21. The clamping block 23 is disposed through the inside of the mounting seat 17, and the clamping block 23 is slidably connected to the outer wall of the tapered block 16. A spring 22 is sleeved on the outer wall of the sliding rod 21. One end of the spring 22 is fixedly connected to the inner wall of the mounting seat 17, and the other end of the spring 22 is fixedly connected to one side of the outer wall of the clamping block 23.

[0026] Specifically, by passing the bolt 19 through the mounting block 18 and rotating the nut 20, the mounting seat 17 is successfully and firmly installed in the designated position. Subsequently, hold the mounting box 1 by hand and insert the plug rod 15 and the tapered block 16 on the lower surface of the mounting plate 14 into the inside of the mounting seat 17 together. During this process, the reaction force of the spring 22 drives the clamping block 23 to tightly engage with the outer wall of the tapered block 16, quickly and reliably completing the installation of the mounting box 1. When disassembly is required, simply pull the sliding rod 21, and the spring 22 will contract, causing the clamping block 23 to disengage from the outer wall of the tapered block 16, easily achieving quick disassembly and ensuring the convenience and safety of the installation process.

[0027] Working principle: When in use, first pass the bolt 19 through the mounting block 18 and then rotate the nut 20 to install the mounting seat 17 in the use position. At this time, hold the mounting box 1 by hand and insert the plug rod 15 and the tapered block 16 on the lower surface of the mounting plate 14 into the inside of the mounting seat 17 together. At this time, the reaction force of the spring 22 drives the clamping block 23 to engage with the outer wall of the tapered block 16, thereby achieving the effect of quickly installing the mounting box 1. When disassembly is required, by pulling the sliding rod 21, the spring 22 contracts and the clamping block 23 disengages from the outer wall of the tapered block 16, thereby achieving the effect of quick disassembly.

[0028] Secondly, after the installation is completed, place the semiconductor on the inner wall of the installation box 1. Then start the motor 2. The motor 2 drives the fixed shaft 3 to rotate. Through the rotation of the fixed shaft 3, the effect of driving the gear 4 to mesh and rotate with the rack plate 5 is achieved. At this time, through the movement of the rack plate 5, the connecting frame 6 drives the clamping plate 7 to clamp the semiconductor stably. At the same time, when the fixed shaft 3 rotates, it drives the screw rod 9 to rotate, thereby driving the piston plate 10 to move, and then evacuating the air at the bottom of the semiconductor to further stabilize the semiconductor.

[0029] Finally, it should be noted that the above are only the preferred embodiments of the present invention and are not used to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, for those skilled in the art, they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A semiconductor processing positioner, comprising a mounting box (1), characterized in that: The inner wall of the installation box (1) is fixedly connected to a motor (2), the output end of the motor (2) is fixedly connected to a fixed shaft (3), the outer wall of the fixed shaft (3) is fixedly connected to a gear (4), the interior of the installation box (1) is slidably connected to a left-right symmetrical connecting frame (6), the lower surface of the connecting frame (6) is fixedly connected to a rack plate (5), the rack plate (5) is meshingly connected to the gear (4), the upper surface of the connecting frame (6) is fixedly connected to a clamping plate (7), the inner wall of the installation box (1) is fixedly connected to a fixing box (8), a screw rod (9) is rotatably connected inside the fixed box (8), one end of the screw rod (9) is fixedly connected to one end of the fixed shaft (3), the outer wall of the screw rod (9) is threadedly connected to a piston plate (10), and the piston plate (10) is slidably connected to the inner wall of the fixed box (8), a stabilizing component (11) for stabilizing the semiconductor is installed inside the fixed box (8), a fixing tube (13) is arranged through the inside of the installation box (1), and a drainage tube (12) is fixedly connected to the lower surface of the fixing tube (13).

2. A semiconductor processing positioner according to claim 1, characterized in that: The stabilizing component (11) comprises a connecting tube 1 (1101), one end of which is fixedly connected to the interior of the fixing box (8), a one-way valve (1102) is fixedly connected to the outer wall of the connecting tube 1 (1101), and one end of which is fixedly connected to the interior of the drainage tube (12).

3. A semiconductor processing positioner according to claim 2, characterized in that: A plurality of mounting plates (14) are fixedly connected to one side of the outer wall of the mounting box (1), an insertion rod (15) is fixedly connected to the lower surface of the mounting plate (14), and a conical block (16) is fixedly connected to the lower surface of the insertion rod (15).

4. A semiconductor processing positioner according to claim 3, characterized in that: The outer wall of the conical block (16) is slidably connected to a mounting seat (17), and one side of the outer wall of the mounting seat (17) is fixedly connected to a mounting block (18).

5. A semiconductor processing positioner according to claim 4, characterized in that: A bolt (19) is slidably connected inside the mounting block (18), and a nut (20) is threadedly connected to the outer wall of the bolt (19).

6. A semiconductor processing positioner according to claim 5, characterized in that: A sliding rod (21) is slidably connected inside the mounting seat (17), and a clamping block (23) is fixedly connected to one end of the sliding rod (21).

7. A semiconductor processing positioner according to claim 6, characterized in that: The clamping block (23) is arranged to penetrate the interior of the mounting seat (17), and the clamping block (23) is slidably connected to the outer wall of the conical block (16).

8. A semiconductor processing positioner according to claim 7, characterized in that: The outer wall of the sliding rod (21) is sleeved with a spring (22), one end of the spring (22) is fixedly connected to the inner wall of the mounting seat (17), and the other end of the spring (22) is fixedly connected to one side of the outer wall of the clamping block (23).

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