Double-sided temperature control winding evaporation equipment with vacuum chamber filled with adsorbent

Abstract

The utility model discloses double-sided temperature control winding evaporation equipment with a vacuum chamber filled with adsorbents, which comprises a vacuum bin, a cooling drum is arranged in the middle of one end in the vacuum bin, a winding roller and an unwinding roller are respectively arranged at the top and the bottom of one side of one end in the vacuum bin, an electron beam gun is arranged at the top of one side of the vacuum bin, and an electron beam is arranged at the bottom of one side of the electron beam gun. A mounting plate is arranged at the bottom, close to the cooling drum, of one end in the vacuum bin, a crucible is arranged in the middle of the top of the mounting plate, and the two sides of the top of the crucible are sleeved with rotating rods; according to the utility model, the radiation cold plate is additionally arranged on the crucible, so that single-side cooling of the conventional winding evaporation equipment is changed into double-side temperature control, stress strain is effectively reduced, temperature control is more accurate, entrainment blocking of an evaporation material is reduced, a thicker and more uniform evaporation layer is easy to form, and the attachment efficiency of the evaporation material is improved; in addition, after the radiation cold plate is additionally arranged, the vacuum chamber can be rapidly cooled, and therefore the door opening time after vacuum withdrawal is shortened.

Description

Technical Field

[0001] The utility model relates to the technical field of evaporation coating equipment, in particular to a double-sided temperature-controlled winding evaporation coating equipment with an adsorbent filled in a vacuum chamber. Background Technique

[0002] The vacuum evaporation coating method is a method in which, under vacuum conditions, the material to be evaporated in the evaporation container is heated to evaporate, so that its atoms or molecules escape from the surface by gasification to form a vapor stream, which impinges on the surface of the substrate or base and condenses into a solid thin film.

[0003] The existing patent with the authorization announcement number "CN113265623A" discloses a double-sided winding coating machine using high-power electron beam evaporation coating, which includes a vacuum chamber. Along the running path of the substrate, a unwind roller, a first coating mechanism, a second coating mechanism, and a winding roller are sequentially arranged in the vacuum chamber; the first coating mechanism is used for coating one side of the substrate, and the first coating mechanism includes a first coating roller and a first coating area, and a first evaporation source is arranged in the first coating area; the second coating mechanism is used for coating the other side of the substrate; the present invention can continuously perform double-sided evaporation coating, and the high-power electron beam evaporation coating has high energy and high film layer deposition efficiency, and can realize large-batch uniform film formation on large-width substrates.

[0004] Due to the use of high-power electron beams to heat and evaporate the coating material in the existing winding evaporation coating equipment, the efficiency is high. However, during the evaporation coating process, a large amount of heat is carried out by the evaporation of the coating material, which will affect the stress of the material to be coated, resulting in changes in strain and tension. In order to cool the coil and the coating material, a cooling system is built into the main roller to cool the winding material and the coating material. However, in order to reach the target temperature, this single-sided cooling method necessarily requires a larger temperature difference or a larger flow rate of the cooling medium. At the same time, the coating material will also form mists near the coating layer due to high-temperature evaporation, and the mists will generate resistance to the adhesion of the coating material on the winding material, reduce the adhesion amount, and increase the consumption of the coating material. Content of the Utility Model

[0005] The purpose of the utility model is to provide a double-sided temperature-controlled winding evaporation coating equipment with an adsorbent filled in a vacuum chamber to solve the problems presented in the above background technique.

[0006] To achieve the above object, the present utility model provides the following technical solutions: a double-sided temperature-controlled winding evaporation coating device for filling an adsorbent in a vacuum chamber, including a vacuum chamber. In the middle of one end inside the vacuum chamber, a cooling drum is provided. At the top and bottom of one side of one end inside the vacuum chamber, a winding roller and an unwinding roller are respectively provided. At the top of one side of the vacuum chamber, an electron beam gun is provided. At the bottom near the cooling drum at one end inside the vacuum chamber, a mounting plate is provided. In the middle of the top of the mounting plate, a crucible is provided. On both sides of the top of the crucible, rotating rods are sleeved. On the outer sides of the two groups of rotating rods, radiation cold plates are provided. Inside the two groups of radiation cold plates, cooling pipes are provided. At both ends of the top of the two groups of radiation cold plates, away from each other, adsorption filler grooves are provided. In the middle of the bottom of the mounting plate, an adjusting component is provided.

[0007] Preferably, the adjusting component includes a rack, a gear, an electric push rod, a push plate, a connecting rod and a movable plate. In the middle of the bottom of the mounting plate, an electric push rod is provided. At the four corners of the top of the mounting plate, connecting rods are slidably sleeved. At the bottom of the four groups of connecting rods, a push plate is jointly provided. The output end of the electric push rod is connected to the push plate. At the top of the same-side two groups of connecting rods, a movable plate is jointly provided. At both ends of the two groups of rotating rods, gears are provided. On both sides of the top of the two groups of movable plates, racks meshing with the gears are provided, which can control the unfolding and closing of the radiation cold plates.

[0008] Preferably, the shape of the cooling pipe is serpentine. At both sides of one end of the radiation cold plate, a cooling inlet pipe and a cooling outlet pipe are respectively provided, and both the cooling inlet pipe and the cooling outlet pipe are communicated with the cooling pipe. The serpentine structure is evenly distributed, and the cooling effect is better. The cooling inlet pipe and the cooling outlet pipe are used for the inlet and outlet of the cooling medium.

[0009] Preferably, the cooling surface of the radiation cold plate is made of a hydrophobic material, which can strengthen the rolling of the condensed water to the bottom and into the adsorption filler groove.

[0010] Preferably, the adsorption filler groove is filled with an adsorption filler, which can adsorb the condensed water on the radiation cold plate and various impurities in the vacuum chamber.

[0011] Preferably, a plurality of guide rollers are provided at one end inside the vacuum chamber, which are used for guiding and conveying the substrate.

[0012] Compared with the prior art, the beneficial effects of the present utility model are: this double-sided temperature-controlled winding evaporation coating device for filling an adsorbent in a vacuum chamber;

[0013] 1. By adding radiation cold plates on the crucible, changing the single-sided cooling of the current winding evaporation coating device to double-sided temperature control, effectively reducing stress and strain, achieving more precise temperature control, while reducing the blockage of the evaporation coating material mist, being easy to form a thicker and more uniform evaporation coating layer, improving the adhesion efficiency of the evaporation coating material. In addition, after adding the radiation cold plates, the vacuum chamber can be quickly cooled, thus shortening the door opening time after the vacuum evacuation.

[0014] 2. Through the adsorption filler tank on the radiation cold plate, on the one hand, it adsorbs the condensed water on the radiation cold plate, and on the other hand, it also absorbs various impurities in the vacuum chamber, which can not only improve the cleanliness of the vacuum chamber, but also effectively reduce the configuration of the vacuum system, enabling the evaporation material to adhere more effectively to the winding material and form a more uniform and thicker coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 is a perspective view of the present utility model;

[0016] Figure 2 is a front view sectional view of the present utility model;

[0017] Figure 3 is a front view sectional view of the radiation cold plate of the present utility model in the closed state;

[0018] Figure 4 is a front view sectional view of the radiation cold plate of the present utility model in the unfolded state;

[0019] Figure 5 is a top view of the crucible of the present utility model;

[0020] Figure 6 is a top view sectional view of the radiation cold plate of the present utility model.

[0021] In the figure: 1, vacuum chamber; 2, unwinding roller; 3, winding roller; 4, cooling drum; 5, electron beam gun; 6, mounting plate; 7, crucible; 8, radiation cold plate; 9, rack; 10, gear; 11, electric push rod; 12, push plate; 13, connecting rod; 14, movable plate; 15, adsorption filler tank; 16, cooling pipe; 17, rotating rod. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0022] The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0023] Please refer to Figure 1-4, an embodiment provided by the present utility model: a double-sided temperature-controlled winding evaporation coating device for filling adsorbents in a vacuum chamber, comprising a vacuum chamber 1. At one end inside the vacuum chamber 1, a plurality of guide rollers are arranged for guiding and conveying a substrate. In the middle of one end inside the vacuum chamber 1, a cooling drum 4 is provided. At the top and bottom of one side of one end inside the vacuum chamber 1, a winding roller 3 and an unwinding roller 2 are respectively provided. At the top of one side of the vacuum chamber 1, an electron beam gun 5 is provided. At the bottom near the cooling drum 4 at one end inside the vacuum chamber 1, a mounting plate 6 is provided. In the middle of the top of the mounting plate 6, a crucible 7 is provided;

[0024] On both sides of the top of the crucible 7, rotating rods 17 are sleeved. On the outer sides of the two rotating rods 17, radiation cold plates 8 are provided. Inside the two radiation cold plates 8, cooling pipes 16 are provided. At both ends of the top of the two radiation cold plates 8 on the side far from each other, adsorption packing grooves 15 are provided. Adsorption packing is filled inside the adsorption packing grooves 15, which can adsorb the condensed water on the radiation cold plates 8 and various impurities in the vacuum chamber 1. The cooling surface of the radiation cold plates 8 is made of a hydrophobic material, which can strengthen the rolling of the condensed water to the bottom and into the adsorption packing grooves 15. In the middle of the bottom of the mounting plate 6, an adjusting assembly is provided.

[0025] Furthermore, the adjusting assembly includes a rack 9, a gear 10, an electric push rod 11, a push plate 12, a connecting rod 13 and a movable plate 14. In the middle of the bottom of the mounting plate 6, an electric push rod 11 is provided. At the four corners of the top of the mounting plate 6, connecting rods 13 are slidably sleeved. At the bottom of the four connecting rods 13, a push plate 12 is jointly provided. The output end of the electric push rod 11 is connected to the push plate 12. At the top of the same-side two connecting rods 13, a movable plate 14 is jointly provided. At both ends of the two rotating rods 17, gears 10 are provided. At both sides of the top of the two movable plates 14, racks 9 meshing with the gears 10 are provided, which can control the unfolding and closing of the radiation cold plates 8.

[0026] Furthermore, the shape of the cooling pipe 16 is serpentine. At both sides of one end of the radiation cold plate 8, a cooling inlet pipe and a cooling outlet pipe are respectively provided, and both the cooling inlet pipe and the cooling outlet pipe are communicated with the cooling pipe 16. The serpentine structure is evenly distributed, and the cooling effect is better. The cooling inlet pipe and the cooling outlet pipe are used for the inlet and outlet of the cooling medium.

[0027] Embodiment

[0028] The adsorption packing grooves 15 can adopt other structures and can be not attached to the radiation cold plates 8. Its function can only improve the vacuum quality of the vacuum chamber, which can be arranged on the vacuum pumping pipeline or in a certain idle space of the vacuum chamber, and the shape is designed according to the space structure;

[0029] One or two radiation cold plates 8 are set according to the evaporation coating distance. If the distance is large, one is set; if the distance is short, two are set;

[0030] Working principle: When the device is used for coating, the substrate can be fixed on the unwinding roller 2, then pass through the cooling drum 4 and be connected to the winding roller 3. When coating, start the electron beam gun 5 to heat the coating material, so that the coating material quickly evaporates and adheres to the substrate;

[0031] At the same time, start the electric push rod 11 to run. The electric push rod 11 can push the push plate 12 to move downward. At this time, the push plate 12 can drive the movable plate 14 to move downward under the connection of the four groups of connecting rods 13. Then the movable plate 14 drives the rack 9, so that the rack 9 can drive the gear 10 meshing with it to rotate, and then drive the rotating rod 17 through the gear 10, so as to drive the two radiation cold plates 8 to flip and open, so that the two radiation cold plates 8 can face the evaporation plating material. At this time, cool the medium into the cooling pipe 16 through the cooling inlet pipe. After passing through the cooling pipe 16, the cooling medium can be discharged from the cooling drain pipe to continuously exchange heat with the radiation cold plate 8, so that the radiation cold plate 8 can radiatively cool the evaporation plating area, changing the single-sided cooling of the cooling drum 4 to double-sided temperature control, which is more conducive to the stress coupling and adhesion enhancement of the winding material and the coating material;

[0032] After the evaporation plating is completed, the two radiation cold plates 8 can be controlled to flip and reset, covering the top of the crucible 7 as a cover plate, which can accelerate the cooling of the crucible 7 and the vacuum chamber 1, and can more efficiently achieve temperature balance, so that the vacuum chamber can be opened faster to realize work such as material replacement and cleaning;

[0033] During the evaporation plating process, after the radiation cold plate 8 flips and opens, the adsorption filler tank 15 can move to the lower part of the radiation cold plate 8. When the radiation cold plate 8 radiates and cools to produce condensation, it can be absorbed by the adsorption filler in the adsorption filler tank 15, and the adsorption filler can also absorb various impurities in the vacuum chamber, which can not only improve the cleanliness of the vacuum chamber, but also effectively reduce the configuration of the vacuum system.

[0034] For those skilled in the art, it is obvious that the present invention is not limited to the details of the above exemplary embodiments, and can be implemented in other specific forms without departing from the spirit or basic characteristics of the present invention. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting. The scope of the present invention is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present invention. Any reference signs in the claims should not be regarded as limiting the claimed rights.

[0035] In the description of the present utility model, unless otherwise specified, the meaning of "a plurality of" is two or more; the orientation or positional relationship indicated by terms such as "upper", "lower", "left", "right", "inner", "outer", "front end", "rear end", "head", "tail", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be construed as a limitation to the present utility model. In addition, terms such as "first", "second", "third", etc. are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0036] In the description of the present utility model, it should be noted that unless otherwise clearly specified and defined, the terms "connected" and "connection" should be understood in a broad sense. For example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

Claims

1. A double-sided temperature-controlled winding evaporation device with a vacuum chamber filled with an adsorbent, comprising a vacuum chamber (1), characterized in that: A cooling drum (4) is arranged in the middle of one end of the vacuum chamber (1), a winding roller (3) and an unwinding roller (2) are arranged at the top and bottom of one side of the one end of the vacuum chamber (1), respectively, an electron beam gun (5) is arranged at the top of one side of the vacuum chamber (1), a mounting plate (6) is arranged at the bottom of one end of the vacuum chamber (1) close to the cooling drum (4), a crucible (7) is arranged in the middle of the top of the mounting plate (6), rotating rods (17) are sleeved on both sides of the top of the crucible (7), radiation cold plates (8) are arranged on the outside of two groups of the rotating rods (17), cooling pipes (16) are arranged inside the two groups of the radiation cold plates (8), adsorption filler grooves (15) are arranged at both ends of the two groups of the radiation cold plates (8) on the side away from each other, and an adjustment component is arranged in the middle of the bottom of the mounting plate (6).

2. The double-sided temperature-controlled winding evaporation equipment with a vacuum chamber filled with an adsorbent according to claim 1, characterized in that: The adjustment component comprises a rack (9), a gear (10), an electric push rod (11), a push plate (12), a connecting rod (13) and a movable plate (14); the electric push rod (11) is arranged in the middle of the bottom of the mounting plate (6); the connecting rods (13) are slidably sleeved at the four corners of the top of the mounting plate (6); the bottoms of the four groups of connecting rods (13) are commonly provided with a push plate (12); the output end of the electric push rod (11) is connected to the push plate (12); the tops of the two groups of connecting rods (13) at the same end are commonly provided with a movable plate (14); the two ends of the two groups of rotating rods (17) are provided with gears (10); and the two sides of the tops of the two groups of movable plates (14) are provided with racks (9) meshing with the gears (10).

3. The double-sided temperature-controlled winding evaporation equipment with a vacuum chamber filled with an adsorbent according to claim 1, characterized in that: The cooling pipe (16) is serpentine in shape, and a cooling inlet pipe and a cooling exhaust pipe are respectively arranged on both sides of one end of the radiation cold plate (8), and both the cooling inlet pipe and the cooling exhaust pipe are connected to the cooling pipe (16).

4. The double-sided temperature-controlled winding evaporation equipment with a vacuum chamber filled with an adsorbent according to claim 1, characterized in that: The cooling surface of the radiation cold plate (8) is made of hydrophobic material.

5. The double-sided temperature-controlled winding evaporation equipment with a vacuum chamber filled with an adsorbent according to claim 1, characterized in that: The inner side of the adsorption filler groove (15) is filled with adsorption filler.

6. The double-sided temperature-controlled winding evaporation equipment with a vacuum chamber filled with an adsorbent according to claim 1, characterized in that: A plurality of guide rollers are arranged at one end inside the vacuum bin (1).

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