Quartz tube and vacuum coating equipment
By setting cooling components in the quartz tube, the middle and end positions of the pipe body are isolated, and the end positions are reduced, which facilitates the replacement of the seal ring, which solves the problem of damage to the quartz tube due to thermal expansion and contraction, extends the service life and saves the time of replacing the seal ring.
Patent Information
- Application Number
- CN202421795410.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-26
- Publication Date
- 2025-06-10
- Estimated Expiration
- 2034-07-26
AI Technical Summary
The vacuum leakage rate of quartz tubes is high due to the aging of the sealing ring at high temperatures, and the sealing ring needs to be replaced frequently, resulting in thermal expansion, cooling and shrinkage damage.
A quartz tube is designed, and the cooling components are provided with cooling components including cooling cooling plates and seals. The cooling components areolate the middle and end positions of the pipe body, thereby achieving cooling of the end positions, making it easier to replace the sealing ring.
It reduces the thermal expansion and contraction caused by heating and cooling of quartz tubes, extends the service life of quartz tubes, and saves the cooling and heating time when replacing the seal ring.
Smart Images
Figure CN222961532U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of photovoltaic, in particular to a quartz tube and a vacuum coating device. Background Art
[0002] In the photovoltaic field, in the coating process of preparing solar cells such as PERC cells, the sealing fittings of the PECVD equipment used in the coating process usually consist of a fixed flange (functioning to fix the quartz tube), a sealing ring, a vacuum flange, etc. The internal vacuum state of the quartz tube is achieved through the following design: the fixed flange is designed with a groove, and the sealing ring is squeezed by the vacuum flange and the fixed flange, and the sealing ring fits tightly with the quartz tube, so as to achieve the integration of the quartz tube and the flange. Then, the whole system is sealed through the furnace door, so as to achieve the internal vacuum state of the quartz tube. As the main quartz component, the damage rate of the quartz tube is relatively high. The damage of the quartz tube is mainly due to the leakage rate problem. Specifically, the coating process requires silane and ammonia as reactants, and the reactants have an explosion risk in a non-vacuum state. Therefore, the requirement for vacuum degree is extremely high. However, at a high temperature of 500°C, the sealing ring on the quartz tube is prone to aging, resulting in a large vacuum leakage rate, and it is necessary to often cool down to room temperature to replace the sealing ring. The quartz tube is cooled from 500°C to room temperature and then heated up to 500°C, which has to undergo several processes of thermal expansion and contraction, and is extremely prone to cause the quartz tube to burst and be damaged.
[0003] In view of the above problems of quartz tube damage, the traditional technology mainly optimizes from two aspects: (1) By improving the material of the sealing ring, the service life of the sealing ring is extended, and the replacement frequency is reduced, so as to achieve the purpose of extending the life of the quartz tube. However, this method will lead to an increase in material costs; (2) Changing the cooling method of the sealing ring, adding a flange, and introducing circulating cooling water into the flange. However, this solution also requires a high cost. Summary of the Utility Model
[0004] Based on this, it is necessary to provide a quartz tube. The quartz tube of the utility model can reduce the thermal expansion and contraction of the quartz tube and extend the service life of the quartz tube.
[0005] One embodiment of the present application provides a quartz tube.
[0006] A quartz tube includes a tube body, a sealing flange, a sealing ring, and a cooling component. The tube body is used to be arranged in a furnace body, and both ends of the tube body respectively protrude from the furnace body. The two ends of the tube body are respectively sealed and connected with the sealing flange. The cooling component is arranged inside the tube body, and the cooling component is respectively arranged at both ends of the tube body. The cooling component is used to isolate the middle position and the two end positions of the tube body to cool the two end positions.
[0007] In some of these embodiments, the temperature reduction component includes a temperature reduction cold plate and a temperature reduction seal. The periphery of the temperature reduction cold plate is sealingly connected to the inner wall of the pipe body through the temperature reduction seal.
[0008] In some of these embodiments, the temperature reduction seal is a Teflon seal ring.
[0009] In some of these embodiments, the temperature reduction cold plate has a temperature reduction cooling channel. On the surface of the temperature reduction cold plate closer to the port of the pipe body, a liquid inlet and a liquid outlet are provided. The liquid inlet and the liquid outlet are respectively communicated with the temperature reduction cooling channel, and the liquid inlet and the liquid outlet are respectively used to communicate with a water source.
[0010] In some of these embodiments, the temperature reduction component further includes a liquid inlet nozzle and a liquid outlet nozzle. The liquid inlet nozzle and the liquid outlet nozzle are respectively installed on the surface of the temperature reduction cold plate closer to the port of the pipe body. The liquid inlet nozzle communicates with the liquid inlet, the liquid outlet nozzle communicates with the liquid outlet, and the liquid inlet nozzle and the liquid outlet nozzle are respectively used to communicate with a water source.
[0011] In some of these embodiments, the temperature reduction cooling channel is curved.
[0012] In some of these embodiments, the number of the temperature reduction cooling channels is multiple.
[0013] In some of these embodiments, the thickness of the temperature reduction cold plate is 5 mm to 20 mm.
[0014] In some of these embodiments, the maximum outer diameter of the temperature reduction seal is 6 mm to 10 mm.
[0015] Another embodiment of the present application further lies in providing a vacuum coating device.
[0016] A vacuum coating device includes the quartz tube. The quartz tube is installed in the furnace body of the vacuum coating device, and both ends of the pipe body respectively protrude from the furnace body.
[0017] The above quartz tube is used to isolate the middle position and the two end positions of the pipe body through the temperature reduction component to achieve temperature reduction of the two end positions. When it is necessary to replace the sealing ring, at a temperature of 500 °C of the pipe body, it is not necessary to directly cool the pipe body. The temperature reduction component is used to isolate the end positions of the pipe body to achieve temperature reduction. After the end positions of the pipe body are cooled to room temperature, it is convenient for the operator to replace the aging sealing ring on the sealing flange. When replacing the aging sealing ring, the sealing of the pipe body is achieved through the temperature reduction component, which can reduce or avoid vacuum leakage of the pipe body, reduce the thermal expansion and contraction of the quartz tube caused by frequent heating and cooling, and extend the service life of the quartz tube.
[0018] Compared with the traditional technology, the quartz tube of the present application has at least the following technical effects:
[0019] (1) By setting the cooling component, the present application can cool the two ends of the tube body of the quartz tube without cooling the quartz tube, so as to facilitate the replacement of the aging sealing ring on the sealing flange and avoid damage to the quartz tube caused by repeated heating and cooling steps.
[0020] (2) The present application does not need to improve the original sealing flange. Only by setting the cooling component, the quartz tube equipment is hardly modified, the processing cost of the cooling cold plate of the cooling component is relatively low, and for the same quartz tubes of coating equipment of the same model, only one set of cooling components of the same size needs to be manufactured, so the popularity is relatively high.
[0021] (3) While reducing the damage of the quartz tube, the present application saves the cooling and heating time when replacing the sealing ring, usually saving 10 - 12 hours, that is, saving the production capacity loss of 10 - 12 hours, and at the same time saving the power consumption loss caused by reheating after cooling. Description of the Drawings
[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the following drawings are only some embodiments of the present application. For those skilled in the art, without creative efforts, other drawings can be obtained according to these drawings.
[0023] In order to more completely understand the present application and its beneficial effects, the following will be described in conjunction with the drawings. Among them, the same reference numerals represent the same parts in the following description.
[0024] Figure 1 Schematic diagram of the quartz tube according to an embodiment of the present invention;
[0025] Figure 2 Schematic diagram of the cooperation between the quartz tube and the furnace body according to an embodiment of the present invention;
[0026] Figure 3 Schematic diagram of the cooling component of the quartz tube according to an embodiment of the present invention.
[0027] Description of the Reference Numerals in the Drawings
[0028] 10. Quartz tube; 100. Tube body; 200. Sealing flange; 300. Sealing ring; 400. Cooling component; 401. Cooling cold plate; 4011. Cooling and cooling channel; 402. Cooling seal; 403. Liquid inlet nozzle; 404. Liquid outlet nozzle; 20. Furnace body. Detailed Embodiments
[0029] In order to make the above objects, features and advantages of the present utility model more obvious and understandable, the following detailed description of the specific embodiments of the present utility model will be given with reference to the accompanying drawings. A lot of specific details are set forth in the following description in order to fully understand the present utility model. However, the present utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the connotation of the present utility model. Therefore, the present utility model is not limited by the specific embodiments disclosed below.
[0030] In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be understood as a limitation to the present utility model.
[0031] In the present utility model, unless otherwise clearly defined and limited, the terms "installation", "connection", "connection", "fixation", etc. should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. It can be the communication inside two elements or the interaction relationship between two elements, unless otherwise clearly defined. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.
[0032] In the present utility model, unless otherwise clearly defined and limited, the first feature being "on" or "under" the second feature can be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on" the second feature can be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature is at a higher horizontal height than the second feature. The first feature being "under", "beneath" and "under" the second feature can be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature is at a lower horizontal height than the second feature.
[0033] In the description of the present utility model, the meaning of several is more than one, the meaning of multiple is more than two, understand greater than, less than, exceeding, etc. as not including the present number, understand above, below, within, etc. as including the present number. If there is a description of first and second, it is only for the purpose of distinguishing technical features and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features or implicitly indicating the sequence relationship of the indicated technical features.
[0034] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those of ordinary skill in the technical field to which the present utility model belongs. The terms used herein in the specification of the present utility model are only for the purpose of describing specific embodiments and are not intended to limit the present utility model. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.
[0035] The embodiment of the present application provides a quartz tube 10 to solve at least one of the problems in the prior art that when the service life of the sealing ring 300 is extended by improving the material of the sealing ring 300, the material cost increases; and the problem that a relatively high cost is required to add a flange and introduce circulating cooling water into the flange. The quartz tube 10 will be described below with reference to the drawings.
[0036] The quartz tube 10 provided by the embodiment of the present application, for example, please refer to Figure 1 as shown Figure 1 is a schematic structural diagram of the quartz tube 10 provided by the embodiment of the present application. The quartz tube 10 of the present application can be used for the production and preparation of solar cells. For example, it can be used in the coating process of the PERC cell preparation process to reduce the thermal expansion and contraction of the quartz tube 10 and extend the service life of the quartz tube 10.
[0037] In order to more clearly illustrate the structure of the quartz tube 10, the quartz tube 10 will be introduced below with reference to the drawings. For example, please refer to Figure 1 as shown, a quartz tube 10 includes a tube body 100, a sealing flange 200, a sealing ring 300, and a cooling component 400. Refer to Figure 2 as shown Figure 2 is a schematic diagram of the cooperation between the quartz tube and the furnace body according to an embodiment of the present utility model. The tube body 100 is used to be arranged in the furnace body 20 and both ends of the tube body 100 respectively protrude from the furnace body 20. Both ends of the tube body 100 are hermetically connected with the sealing flange 200. The sealing flange 200 and the tube body 100 are hermetically connected through the sealing ring 300. The cooling component 400 is arranged in the tube body 100. Cooling components 400 are respectively arranged at both ends of the tube body 100. The cooling component 400 is used to isolate the middle position and the two end positions of the tube body 100 to cool the two end positions.
[0038] The above quartz tube 10 is provided with a temperature reduction component 400 to isolate the middle position of the tube body 100 from the two end positions, so as to cool the two end positions. When the sealing ring 300 needs to be replaced, at a temperature of 500 °C of the tube body 100, there is no need to directly cool the tube body 100, and the internal vacuum state of the quartz tube 10 is maintained. The temperature reduction component 400 is used to isolate the end positions of the tube body 100 to achieve temperature reduction. After the end positions of the tube body 100 are cooled to room temperature, the operator replaces the aging sealing ring 300 on the sealing flange 200. Since the temperature reduction component 400 seals the tube body 100, the leakage of vacuum of the tube body 100 is avoided when replacing the sealing ring 300, the thermal expansion and contraction of the quartz tube 10 caused by heating and cooling are reduced, and the service life of the quartz tube 10 is prolonged.
[0039] In some embodiments, refer to Figure 3 as shown Figure 3 It is a schematic diagram of the temperature reduction component of the quartz tube according to an embodiment of the present invention. The temperature reduction component 400 includes a temperature reduction cold plate 401 and a temperature reduction seal 402. The periphery of the temperature reduction cold plate 401 is hermetically connected to the inner wall of the tube body 100 through the temperature reduction seal 402.
[0040] In some embodiments, the temperature reduction seal 402 is a Teflon seal ring.
[0041] In some embodiments, the temperature reduction cold plate 401 is provided with a temperature reduction cooling channel 4011 inside. The surface of the temperature reduction cold plate 401 closer to the port of the tube body 100 is provided with a liquid inlet and a liquid outlet, and the liquid inlet and the liquid outlet are respectively communicated with the temperature reduction cooling channel 4011, and the liquid inlet and the liquid outlet are respectively used for communicating with a water source.
[0042] In some embodiments, the temperature reduction component 400 further includes a liquid inlet nozzle 403 and a liquid outlet nozzle 404. The liquid inlet nozzle 403 and the liquid outlet nozzle 404 are respectively installed on the surface of the temperature reduction cold plate 401 closer to the port of the tube body 100. The liquid inlet nozzle 403 is communicated with the liquid inlet, and the liquid outlet nozzle 404 is communicated with the liquid outlet. The liquid inlet nozzle 403 and the liquid outlet nozzle 404 are respectively used for communicating with a water source.
[0043] In some embodiments, the temperature reduction cooling channel 4011 is curved. The curved temperature reduction cooling channel 4011 can increase the temperature reduction speed of the temperature reduction cold plate 401, and the two end positions of the tube body 100 can be cooled to room temperature in about 10 minutes.
[0044] In some embodiments, the number of the temperature reduction cooling channels 4011 is multiple. The multiple temperature reduction cooling channels 4011 can increase the temperature reduction speed of the temperature reduction cold plate 401, and the two end positions of the tube body 100 can be cooled to room temperature within several minutes.
[0045] In some of these embodiments, the thickness of the cooling cold plate 401 is 5 mm to 20 mm.
[0046] In some of these embodiments, the maximum outer diameter of the cooling seal 402 is 6 mm to 10 mm. The maximum outer diameter of the cooling seal 402 is adaptively selected according to actual needs, and the maximum outer diameter of the cooling seal 402 only needs to be adapted to the gap between the cooling cold plate 401 and the tube body 100.
[0047] An embodiment of the present application further lies in providing a vacuum coating device.
[0048] A vacuum coating device includes a quartz tube 10. The quartz tube 10 is installed in the furnace body 20 of the vacuum coating device, and both ends of the tube body 100 protrude from the furnace body 20 respectively. See Figure 2 as shown.
[0049] In some of these embodiments, the above-mentioned vacuum coating device may be a PECVD device. For example, the length of the quartz tube 10 is 2546 mm, and the length of the furnace body 20 of the PECVD is 2300 mm. Therefore, there is a space of 123 mm at each of the front and rear ends of the quartz tube 10 extending out of the furnace body 20. The positions of the front and rear ends of the quartz tube 10 are parts without heating wires, that is, non-process areas. In the case of no heating by the heating wires, the temperature of the areas at the front and rear ends of the quartz tube 10 can be thermally conducted by the part with heating wires.
[0050] In the above-mentioned vacuum coating device, by adding a cooling component 400 in the non-process area of the quartz tube 10 to block the heat conduction between the process area heated by the heating wires and the non-process area, and adding a cooling channel 4011, the temperature of the non-process area is reduced by circulating cooling water. The process area in the middle position of the tube body 100 can be heat-insulated and heated, so as not to affect the overall temperature of the quartz tube 10, and only the non-process area where the sealing ring 300 needs to be replaced is cooled, so as to complete the replacement of the sealing ring 300, ensure that the quartz tube 10 will not be frequently heated and cooled, and thus reduce the damage phenomenon of the quartz tube 10.
[0051] In some of these embodiments, the inner diameter of the quartz tube 10 is 450 mm, the diameter of the cooling disk 401 is 440 mm, and the maximum outer diameter of the cooling seal 402 is 10 mm. The liquid inlet nozzle 403 is externally connected to cooling water. Before on-site operation of the cooling water, it is first connected to the factory inlet and outlet water through a hose, and then the cooling disk 401 is placed in the furnace body 20. After the cooling disk 401 cools the non-heating areas at both ends of the tube body 100 for at least 10 minutes, the operator can then perform the operation of replacing the sealing ring 300. That is to say, when the cooling component 400 in this application is in use, it is placed inside the tube body 100 only when the aging sealing ring 300 on the quartz tube 10 needs to be replaced. When the quartz tube 10 is in processing and production, the cooling component 400 does not need to be placed inside the tube body 100.
[0052] Compared with the traditional technology, the quartz tube 10 of this application has at least the following technical effects:
[0053] (1) By setting the cooling component 400, this application can cool the sealing rings 300 at both ends of the tube body 100 without cooling the quartz tube 10, which is convenient for replacing the sealing rings 300 and avoids damage to the quartz tube 10 due to repeated heating and cooling steps.
[0054] (2) This application does not need to improve the original sealing flange 200. Only by setting the cooling component 400, there are almost no modifications to the quartz tube 10 equipment. The processing cost of the cooling disk 401 of the cooling component 400 is also relatively low. For the same quartz tube 10 of the coating equipment of the same model, only one set of cooling components 400 of the same size needs to be manufactured, and the popularity is relatively high.
[0055] (3) While reducing the damage of the quartz tube 10, this application saves the cooling and heating time when replacing the sealing ring 300 in the traditional technology. Usually, 10 - 12 hours can be saved, that is, 10 - 12 hours of production capacity loss can be saved, and at the same time, the power consumption loss caused by reheating after cooling is saved.
[0056] In the above embodiments, the descriptions of each embodiment have their own focuses. For the parts not detailed in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.
[0057] The technical features of the above-described embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope described in this specification.
[0058] The above-described embodiments merely represent several implementation manners of the present utility model. The description is relatively specific and detailed, but it should not be construed as a limitation to the scope of the patent of the present utility model. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present utility model, several modifications and improvements can still be made, and these all fall within the protection scope of the present utility model. Therefore, the protection scope of the patent of the present utility model shall be subject to the appended claims.
Claims
1. A quartz tube (10), characterized in that: The invention comprises a pipe body (100), a sealing flange (200), a sealing ring (300) and a cooling component (400), wherein the pipe body (100) is used to be arranged in a furnace body (20) and the two ends of the pipe body (100) respectively protrude from the furnace body (20), the two ends of the pipe body (100) are respectively sealedly connected with the sealing flanges (200), the cooling component (400) is arranged in the pipe body (100), the two ends of the pipe body (100) are respectively provided with the cooling component (400), and the cooling component (400) is used to isolate the middle position of the pipe body (100) from the two end positions so as to realize cooling of the two end positions.
2. The quartz tube (10) according to claim 1, characterized in that: The cooling component (400) comprises a cooling plate (401) and a cooling seal (402), and the periphery of the cooling plate (401) is sealedly connected to the inner wall of the pipe body (100) via the cooling seal (402).
3. The quartz tube (10) according to claim 2, characterized in that: The temperature-reducing sealing component (402) is a Teflon sealing ring.
4. The quartz tube (10) according to claim 2, characterized in that: The cooling plate (401) has a cooling channel (4011) therein, and a surface of the cooling plate (401) closer to the port of the tube body (100) is provided with a liquid inlet and a liquid outlet, the liquid inlet and the liquid outlet are respectively connected to the cooling channel (4011), and the liquid inlet and the liquid outlet are respectively used to connect to a water source.
5. The quartz tube (10) according to claim 4, characterized in that: The cooling component (400) further comprises a liquid inlet nozzle (403) and a liquid outlet nozzle (404), wherein the liquid inlet nozzle (403) and the liquid outlet nozzle (404) are respectively mounted on a surface of the cooling cold plate (401) closer to the port of the tube body (100), the liquid inlet nozzle (403) is communicated with the liquid inlet, and the liquid outlet nozzle (404) is communicated with the liquid outlet, and the liquid inlet nozzle (403) and the liquid outlet nozzle (404) are respectively used to connect to a water source.
6. The quartz tube (10) according to claim 4, characterized in that: The temperature reduction cooling channel (4011) is curved.
7. The quartz tube (10) according to claim 4, characterized in that: The number of the cooling channels (4011) is multiple.
8. The quartz tube (10) according to any one of claims 2 to 7, characterized in that: The cooling plate (401) has a thickness of 5 mm to 20 mm.
9. The quartz tube (10) according to any one of claims 2 to 7, characterized in that: The maximum outer diameter of the temperature-reducing seal (402) is 6 mm to 10 mm.
10. A vacuum coating device, characterized in that: It comprises the quartz tube (10) as claimed in any one of claims 1 to 9, wherein the quartz tube (10) is installed in a furnace body (20) of the vacuum coating equipment, and the two ends of the tube body (100) respectively protrude from the furnace body (20).