Quartz crucible disc of single crystal furnace

Abstract

The utility model relates to a quartz crucible disc of a single crystal furnace. The technical problem to be solved by the utility model is to provide the quartz crucible disc of the single crystal furnace. According to the technical scheme, the crucible disc comprises a crucible disc body, a filtering device, an exhaust device and a gradienter, the exhaust device comprises an exhaust base, a pressing rod, a locking spring and a main sealing ring, the exhaust base comprises a base air passing part and a base end part, an air passing sealing groove is formed in the bottom of the base air passing part, and the air passing sealing groove is communicated with the air passing sealing groove. An air passing action hole which is through front and back and is used for the action of the pressing rod is formed in the air passing sealing groove; and an anti-retreating clamping block is arranged at the bottom of the air passing part of the base. The utility model has the advantages that the locking spring is arranged outside the crucible disc, and the external structure effectively prevents the spring from being damaged due to gas erosion, so that the exhaust is kept stable and reliable; the double-sealing structure of the outer sealing ring and the inner sealing ring enables the exhaust device to be tightly connected with the crucible disc, effectively prevents air leakage, and enables the air pressure in the crucible disc to be stable and controllable.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, and particularly relates to a quartz crucible plate for a single crystal furnace. Background Art

[0002] In actual production, a single crystal furnace needs to be exhaust-treated. The existing exhaust device of the quartz crucible plate of the single crystal furnace mostly uses an internal spring to control the opening and closing of the exhaust. The internal spring is easily eroded by gas, and the spring is damaged, resulting in problems of unstable exhaust control and poor exhaust sealing. Eventually, it is easy to cause the liquid level in the single crystal furnace to shake and the liquid level temperature to be difficult to control, which will affect the stability and reliability of the subsequent single crystal pulling process. Therefore, the existing quartz crucible plate of the single crystal furnace is improved and optimized. Content of the Utility Model

[0003] To solve the above problems, the technical problem to be solved by the utility model is to provide a quartz crucible plate for a single crystal furnace.

[0004] The technical solution adopted by the quartz crucible plate of the utility model for a single crystal furnace is characterized in that it includes a crucible plate main body, a filtering device, an exhaust device and a level gauge arranged on the crucible plate main body. The exhaust device includes an exhaust base, a pressure rod, a locking spring and a main sealing ring. The exhaust base includes a base air passage part and a base end part. A air passage sealing groove for the main sealing ring to be placed is arranged inside the bottom of the base air passage part. A air passage action hole that runs through from front to back and is used for the action of the pressure rod is arranged in the air passage sealing groove. An anti-retreat clamping block is arranged at the bottom of the base air passage part. The pressure rod includes a pressure rod pressing part, a pressure rod body that moves in the air passage action hole and a pressure rod sealing part arranged in sequence. The locking spring is sleeved on the pressure rod body, one end of which abuts against the pressure rod pressing part, and the other end abuts against the base end part. A main sealing ring limiting groove for the installation of the main sealing ring is arranged on the pressure rod sealing part. An exhaust port for gas to be discharged is arranged on the pressure rod body;

[0005] A level gauge installation flange for installing the level gauge and an exhaust connection seat for docking with the exhaust base are arranged on the crucible plate main body. The exhaust connection seat is provided with a connection seat docking end face for docking with the base end part and an exhaust seat installation hole for the base air passage part to be placed. The anti-retreat clamping block is clamped inside the exhaust connection seat.

[0006] The exhaust device further includes an outer sealing ring and an inner sealing ring. The outer sealing ring is sleeved on the pressure rod body and is placed between the connection seat docking end face and the base end part. An inner sealing ring positioning groove for positioning the inner sealing ring is arranged on the base air passage part.

[0007] A air passage part notch is arranged at the end of the base air passage part, and the anti-retreat clamping block is arranged on the air passage part notch.

[0008] The pressure rod body has a cross-shaped structure, and the exhaust ports are arranged thereon at intervals around an arc.

[0009] A conical guiding surface facilitating the installation of the main sealing ring is provided at the end of the pressure rod sealing part.

[0010] The advantages of the quartz crucible plate of the single crystal furnace of the present utility model are as follows: The locking spring is installed outside the crucible plate. This external structure effectively avoids damage to the spring due to gas erosion, making the exhaust stable and reliable; The double-sealing structure of the outer sealing ring and the inner sealing ring makes the connection between the exhaust device and the crucible plate tight, with better sealing performance, effectively preventing air leakage and making the air pressure inside the crucible plate stable and controllable. Description of the Drawings

[0011] The present utility model will be further described in detail below in conjunction with the drawings and specific embodiments.

[0012] Figure 1 is a schematic structural view of the quartz crucible plate of the single crystal furnace of the present utility model;

[0013] Figure 2 is an exploded view of the exhaust device of the present utility model;

[0014] Figure 3 is a schematic structural view of the exhaust base of the present utility model;

[0015] Figure 4 is a schematic structural view of the pressure rod of the present utility model;

[0016] Figure 5 is a schematic structural view of the crucible plate main body of the present utility model;

[0017] Figure 6 is Figure 5 an enlarged view of. Specific Embodiments

[0018] Such as Figures 1-6As shown, the utility model relates to a single crystal furnace quartz crucible plate, comprising a crucible plate body 1, a filtering device 2, an exhaust device 3 and a level 4 arranged on the crucible plate body 1, the exhaust device 3 comprising an exhaust base 6, a pressure rod 7, a locking spring 8 and a main sealing ring 9, the exhaust base 6 comprising a base air outlet 13 and a base end 14, the bottom of the base air outlet 13 is provided with an air outlet sealing groove 15 for inserting the main sealing ring 9, the air outlet sealing groove 15 is provided with an air outlet action hole 16 which runs through the front and back and is used for the action of the pressure rod 7, the bottom of the base air outlet 13 is provided with an anti-retraction block 17, the pressure rod 7 comprises a pressure rod pressing portion 18 which is arranged in sequence, a pressure rod rod body 19 which moves in the air outlet action hole 16 and a pressure rod sealing portion 20, the locking spring 8 is sleeved on the pressure rod rod body 19 One end of the pressure rod is against the pressure rod pressing part 18, and the other end is against the base end 14. The pressure rod sealing part 20 is provided with a main sealing ring limiting groove 21 for installing the main sealing ring 9, and the pressure rod body 19 is provided with an exhaust port 22 for gas discharge; the crucible plate main body 1 is provided with a level mounting flange 24 for installing the level 4 and an exhaust receiving seat 25 docked with the exhaust base 6, the exhaust receiving seat 25 is provided with a receiving seat docking end face 27 docked with the base end 14 and an exhaust seat mounting hole 26 for inserting the base air outlet part 13, the anti-retreat block 17 is clamped at the inner end of the exhaust receiving seat 25, and the locking spring 8 is installed on the outside of the crucible plate main body 1. This external structure effectively prevents the spring from being damaged by gas erosion, so that the exhaust remains stable and reliable.

[0019] The exhaust device 3 also includes an outer sealing ring 11 and an inner sealing ring 10. The outer sealing ring 11 is sleeved on the pressure rod body 19 and is placed between the docking end face 27 of the receiving seat and the base end 14. The base air outlet 13 is provided with an inner sealing ring positioning groove 27 for positioning the inner sealing ring 10. The double sealing structure of the outer sealing ring and the inner sealing ring enables the exhaust device 3 to be tightly connected to the crucible plate body 1, with better sealing performance, effectively preventing air leakage, and making the air pressure in the crucible plate stable and controllable.

[0020] An air outlet cutout 28 is provided at the end of the air outlet portion 13 of the base, and the anti-retraction block 17 is provided on the air outlet cutout 28. The anti-retraction block 17 is connected by a snap connection, which makes installation and disassembly more convenient and quick, and is also easier to insert the anti-retraction block 17.

[0021] The pressure rod body 19 is a cross-shaped structure, on which the exhaust ports 22 are arranged at intervals around arcs. This structure can exhaust air evenly and smoothly, and the structure is more stable and reliable.

[0022] The end of the compression rod sealing portion 20 is provided with a conical introduction surface 30 for facilitating the installation of the main sealing ring 9, making the installation more convenient and quick.

[0023] The above are only the preferred embodiments of the present utility model, and are not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present utility model are all included in the protection scope of the present utility model.

Claims

1. A single crystal furnace quartz crucible plate, characterized in that: The invention comprises a crucible plate body (1), a filtering device (2) arranged on the crucible plate body (1), an exhaust device (3) and a level (4); the exhaust device (3) comprises an exhaust base (6), a pressure rod (7), a locking spring (8) and a main sealing ring (9); the exhaust base (6) comprises a base air outlet portion (13) and a base end portion (14); an air outlet sealing groove (15) for inserting the main sealing ring (9) is provided in the bottom of the base air outlet portion (13); an air outlet action hole (16) penetrating from front to back and used for the action of the pressure rod (7) is provided in the air outlet sealing groove (15); An anti-retraction block (17) is provided at the bottom of the gas portion (13); the pressure rod (7) comprises a pressure rod pressing portion (18), a pressure rod body (19) moving in the gas-passing action hole (16), and a pressure rod sealing portion (20) which are arranged in sequence; the locking spring (8) is sleeved on the pressure rod body (19) and one end of the locking spring abuts against the pressure rod pressing portion (18), and the other end of the locking spring abuts against the base end (14); a main sealing ring limiting groove (21) for installing the main sealing ring (9) is provided on the pressure rod sealing portion (20); and an exhaust port (22) for exhausting gas is provided on the pressure rod body (19); The crucible plate body (1) is provided with a level mounting flange (24) for mounting the level (4) and an exhaust receiving seat (25) docked with the exhaust base (6); the exhaust receiving seat (25) is provided with a receiving seat docking end face (27) docked with the base end (14) and an exhaust seat mounting hole (26) for inserting the base air outlet portion (13); the anti-retraction block (17) is clamped on the inner end of the exhaust receiving seat (25).

2. The single crystal furnace quartz crucible plate according to claim 1, characterized in that: The exhaust device (3) further comprises an outer sealing ring (11) and an inner sealing ring (10); the outer sealing ring (11) is sleeved on the pressure rod body (19) and is disposed between the butt joint end surface (27) of the receiving seat and the end portion (14) of the base; and the base air outlet portion (13) is provided with an inner sealing ring positioning groove (27) for positioning the inner sealing ring (10).

3. The single crystal furnace quartz crucible plate according to claim 1, characterized in that: An air outlet cutout (28) is provided at the end of the air outlet portion (13) of the base, and the anti-retraction block (17) is provided on the air outlet cutout (28).

4. The single crystal furnace quartz crucible plate according to claim 1, characterized in that: The pressure rod body (19) is a cross-shaped structure, on which the exhaust ports (22) are arranged at intervals around a circular arc.

5. The single crystal furnace quartz crucible plate according to claim 1, characterized in that: The end of the compression rod sealing portion (20) is provided with a conical introduction surface (30) for facilitating the installation of the main sealing ring (9).

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