Seed crystal bonding positioning tool

Abstract

The embodiment of the utility model provides a seed crystal bonding positioning tool, and relates to the technical field of silicon carbide seed crystal bonding. The seed crystal bonding positioning tool comprises a jig, the jig comprises a surrounding plate and an end plate, the end plate is in a circular ring shape, a plurality of positioning protrusions are arranged on the inner ring of the end plate in a protruding mode, the ends, away from the end plate, of the positioning protrusions are abutting ends used for abutting against the peripheral wall of a seed crystal, the abutting ends are all located on a preset circle, and the axis of the preset circle, the axis of the end plate and the axis of the surrounding plate are coaxial. The end plates or the coamings are in positioning connection with seed crystals. When the seed crystal is adhered to the seed crystal cover, the abutting ends of the plurality of positioning bulges can abut against the peripheral wall of the seed crystal, and the coaxiality of the seed crystal and the seed crystal cover can be improved under the action of the abutting ends of the plurality of positioning bulges, so that the quality of a silicon carbide crystal growing on the seed crystal is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon carbide seed crystal bonding, and more specifically, to a seed crystal bonding positioning tooling. Background Art

[0002] As an emerging core material of the third-generation semiconductor, silicon carbide (SiC) has excellent properties such as a wide bandgap, a high critical breakdown electric field strength, a high electron mobility, and good radiation resistance and chemical stability. This makes it an important substrate wafer material with wide applications and shows good application prospects in fields such as aviation devices, new energy vehicles, rail transit, and household appliances.

[0003] After research by the inventor, it is found that when bonding the seed crystal, the seed crystal is mainly manually placed on the seed crystal cover for bonding, which is likely to cause a deviation in the concentric position between the seed crystal and the seed crystal cover, affecting crystal growth. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a seed crystal bonding positioning tooling, which can improve the coaxiality between the seed crystal and the seed crystal cover to improve the growth quality of the crystal.

[0005] The embodiments of the utility model are implemented as follows:

[0006] In a first aspect, the utility model provides a seed crystal bonding positioning tooling, including:

[0007] A jig, the jig includes a surrounding plate and an end plate. The end plate is in a circular ring shape, and a plurality of positioning protrusions are convexly provided on the inner circle of the end plate. One end of the positioning protrusion away from the end plate is an abutting end for abutting against the outer peripheral wall of the seed crystal. A plurality of abutting ends are all located on a preset circle. The axis of the preset circle, the axis of the end plate, and the axis of the surrounding plate are coaxial. The end plate or the surrounding plate is used for positioning and connecting with the seed crystal cover;

[0008] When the end plate or the surrounding plate is connected to the seed crystal cover, the surrounding plate, the end plate, and the seed crystal cover are coaxial.

[0009] In an optional embodiment, an internal thread for threadedly connecting with the seed crystal cover is provided on the inner side of the surrounding plate.

[0010] In an optional embodiment, when the end plate or the surrounding plate is connected to the seed crystal cover, the seed crystal is arranged on the seed crystal cover, and when the abutting end abuts against the outer peripheral wall of the seed crystal, the contact dimension of the abutting end and the seed crystal in the axial direction is smaller than the axial dimension of the seed crystal.

[0011] In an optional embodiment, the plurality of positioning protrusions are evenly spaced apart circumferentially around the inner circle.

[0012] In an optional embodiment, four positioning protrusions are convexly provided on the inner circle of the end plate, and the four positioning protrusions are evenly spaced apart circumferentially around the inner circle.

[0013] In an alternative embodiment, three positioning protrusions are convexly provided on the inner ring of the end plate, and the three positioning protrusions are evenly spaced circumferentially around the inner ring.

[0014] In an alternative embodiment, two positioning protrusions are convexly provided on the inner ring of the end plate, and the two positioning protrusions are evenly spaced circumferentially around the inner ring.

[0015] In an alternative embodiment, the abutting end is made of wear-resistant material.

[0016] In an alternative embodiment, both sides of the positioning protrusion are respectively connected to the inner ring arc of the end plate in a smooth transition manner.

[0017] In an alternative embodiment, the shroud is sleeved on the seed crystal cover, and the inner side wall of the shroud is used to abut against the outer peripheral wall of the seed crystal cover.

[0018] The beneficial effects of the embodiments of the present utility model are as follows: A seed crystal bonding and positioning tooling provided by the embodiments of the present utility model includes a jig, the jig includes a shroud and an end plate, the end plate is in a circular ring shape, a plurality of positioning protrusions are convexly provided on the inner ring of the end plate, one end of the positioning protrusion away from the end plate is an abutting end for abutting against the outer peripheral wall of the seed crystal, and a plurality of abutting ends are all located on a preset circle, the axis of the preset circle, the axis of the end plate and the axis of the shroud are coaxial, and the end plate or the shroud is used for positioning and connecting with the seed crystal. When the seed crystal is bonded to the seed crystal cover, the abutting ends of the plurality of positioning protrusions can abut against the outer peripheral wall of the seed crystal, and under the action of the abutting ends of the plurality of positioning protrusions, the coaxiality of the seed crystal and the seed crystal cover can be improved, so as to improve the quality of the silicon carbide crystal grown on the seed crystal. Description of the Drawings

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings required to be used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present utility model, and thus should not be regarded as limiting the scope. For those of ordinary skill in the art, other related drawings can also be obtained based on these drawings without creative efforts.

[0020] Figure 1 It is a schematic diagram of the cooperation between the jig provided by the embodiment of the present utility model and the seed crystal cover;

[0021] Figure 2 For Figure 1 The cross-sectional view of.

[0022] Reference Signs: 1 - jig; 110 - shroud; 120 - end plate; 121 - positioning protrusion; 1211 - abutting end; 2 - seed crystal cover; 3 - seed crystal. Detailed Embodiments

[0023] To make the objectives, technical solutions, and advantages of the embodiments of the present utility model clearer, the following will clearly and completely describe the technical solutions in the embodiments of the present utility model with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are some, but not all, of the embodiments of the present utility model. The components of the embodiments of the present utility model usually described and illustrated in the accompanying drawings here can be arranged and designed in various different configurations.

[0024] Therefore, the following detailed description of the embodiments of the present utility model provided in the accompanying drawings is not intended to limit the scope of the claimed present utility model, but merely represents selected embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts belong to the scope of protection of the present utility model.

[0025] It should be noted that: Similar reference numerals and letters denote similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0026] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the utility model product is usually placed during use. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present utility model. In addition, the terms "first", "second", "third", etc. are only used for descriptive distinction and cannot be understood as indicating or implying relative importance.

[0027] In addition, terms such as "horizontal" and "vertical" do not mean that the components are required to be absolutely horizontal or hanging, but can be slightly inclined. For example, "horizontal" only means that its direction is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0028] In the description of the present utility model, it should also be noted that unless otherwise clearly specified and limited, the terms "set", "installed", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0029] The following will introduce in detail the specific structure of a seed crystal bonding and positioning tooling provided by an embodiment of the present utility model and the corresponding technical effects brought thereby with reference to the patent drawings.

[0030] It should be noted that in this embodiment, coaxiality should not be limited to the strict sense of coaxial, but can also be understood as approximately coaxial.

[0031] Please refer to Figures 1-2 , a seed crystal bonding and positioning tooling provided by an embodiment of the present utility model includes a fixture 1. The fixture 1 includes a surrounding plate 110 and an end plate 120. The end plate 120 is in a circular ring shape. A plurality of positioning protrusions 121 are convexly provided on the inner circle of the end plate 120. One end of the positioning protrusion 121 away from the end plate 120 is an abutting end 1211 for abutting against the outer peripheral wall of the seed crystal 3. A plurality of abutting ends 1211 are all located on a preset circle. The axis of the preset circle, the axis of the end plate 120, and the axis of the surrounding plate 110 are coaxial. The end plate 120 or the surrounding plate 110 is used for positioning connection with the seed crystal 3. It should be noted that the positioning connection in this embodiment can be understood as a detachable positioning connection and can ensure that the axis of the seed crystal cover 2, the axis of the end plate 120, and the axis of the surrounding plate 110 are coaxial.

[0032] When the end plate 120 or the surrounding plate 110 is connected to the seed crystal cover 2, the surrounding plate 110, the end plate 120, and the seed crystal cover 2 are coaxial.

[0033] That is to say, when the fixture 1 in this embodiment is positioned and connected to the seed crystal cover 2 through the surrounding plate 110 or the end plate 120, the end plate 120, the surrounding plate 110, and the preset circle are all coaxial with the seed crystal cover 2. When the seed crystal 3 is bonded to the seed crystal cover 2, the abutting ends 1211 of the plurality of positioning protrusions 121 can abut against the outer peripheral wall of the seed crystal 3, and the coaxiality of the seed crystal 3 and the seed crystal cover 2 can be improved under the action of the abutting ends 1211 of the plurality of positioning protrusions 121, so as to improve the quality of the silicon carbide crystal grown on the seed crystal 3.

[0034] Specifically, in this embodiment, an internal thread for threaded connection with the seed crystal cover 2 is provided on the inner side of the surrounding plate 110. It can be understood that an external thread is provided on the outer peripheral wall of the seed crystal cover 2. The surrounding plate 110 and the seed crystal cover 2 can achieve threaded connection through the internal thread and the external thread. It can be understood that the threaded connection between the surrounding plate 110 and the seed crystal cover 2 can effectively ensure the coaxiality of the surrounding plate 110 and the seed crystal cover 2, so as to ensure the coaxiality of the seed crystal 3 provided on the seed crystal cover 2 and the seed crystal cover 2 under the action of the abutting end 1211.

[0035] Of course, in some other embodiments, the shroud 110 can also be positioned and connected to the seed crystal cover 2 in other ways. For example, the shroud 110 is sleeved on the seed crystal cover 2, that is, the inner side wall of the shroud 110 is used to abut against the outer peripheral wall of the seed crystal cover 2. It can be understood that when the shroud 110 is sleeved on the outside of the seed crystal cover 2, the coaxiality of the shroud 110 and the seed crystal cover 2 can also be ensured.

[0036] Of course, in some other embodiments, the end plate 120 can also be positioned and connected to the end face of the seed crystal 3 rod. For example, positioning posts are provided on the end plate 120. Similarly, the seed crystal cover 2 is provided with positioning holes that are positioned and connected to the positioning posts. The number of positioning posts is multiple. Similarly, the number of positioning holes on the seed crystal cover 2 is also multiple, and the multiple positioning posts are arranged at intervals around a preset path. The axis of the preset path is coaxial with the axis of the end plate 120.

[0037] Alternatively, in some other optional embodiments, a plurality of positioning holes arranged at intervals around a preset path are provided on the end plate 120, and positioning posts connected to the plurality of positioning holes in one-to-one correspondence are provided on the seed crystal cover 2. The axis of the preset path is coaxial with the axis of the end plate 120.

[0038] In some optional embodiments, when the end plate 120 or the shroud 110 is connected to the seed crystal cover 2, the seed crystal 3 is arranged on the seed crystal cover 2, and the abutting end 1211 abuts against the outer peripheral wall of the seed crystal 3. In this embodiment, the shroud 110 is threadedly connected to the seed crystal cover 2. At this time, the contact dimension of the abutting end 1211 and the seed crystal 3 in the axial direction is smaller than the circumferential dimension of the seed crystal 3. That is to say, when the jig 1 is connected to the seed crystal cover 2 and the seed crystal 3 is arranged on the seed crystal 3, the maximum height of the abutting end 1211 is lower than the maximum height of the seed crystal 3, reducing the contact area between the abutting end 1211 and the outer peripheral wall of the seed crystal 3. Therefore, when separating the jig 1 from the seed crystal cover 2, it can be ensured that there is a small frictional force between the abutting end 1211 and the seed crystal 3, facilitating the separation of the jig 1 from the seed crystal cover 2.

[0039] In this embodiment, a plurality of positioning protrusions 121 are evenly arranged at intervals around the circumference of the inner circle. It should be noted that in this embodiment, the plurality can be understood as two or more. And in this embodiment, the plurality of positioning protrusions 121 are evenly arranged at intervals around the circumference of the inner circle. Therefore, under the action of the abutting ends 1211 of the plurality of positioning protrusions 121, the force applied to the seed crystal 3 all points to the axis of the seed crystal cover 2, thereby improving the coaxiality of the seed crystal 3 and the seed crystal cover 2.

[0040] Specifically, in this embodiment, four positioning protrusions 121 are convexly provided on the inner ring of the end plate 120, and the four positioning protrusions 121 are evenly spaced along the circumferential direction of the inner ring. It can be understood that through the four positioning protrusions 121, the positioning around the four sides of the seed crystal 3 can be better realized, thereby ensuring the coaxiality between the seed crystal 3 and the seed crystal cover 2. Of course, in some other embodiments, other numbers of positioning protrusions 121 are convexly provided on the inner ring of the end plate 120. For example, in some alternative embodiments, three positioning protrusions 121 are convexly provided on the inner ring of the end plate 120, and the three positioning protrusions 121 are evenly spaced along the circumferential direction of the inner ring. Or, in some other alternative embodiments, two positioning protrusions 121 are convexly provided on the inner ring of the end plate 120, and the two positioning protrusions 121 are evenly spaced along the circumferential direction of the inner ring. It can be understood that when the number of the positioning protrusions 121 is two or three, the material of the jig 1 can also be saved.

[0041] It should be noted that in this embodiment, the evenly spaced arrangement is not limited to the strictly defined evenly spaced arrangement, as long as it is approximately evenly spaced.

[0042] Or, in some other embodiments, the number of the positioning protrusions 121 can also be 5, 6, 7 or 8. The number of the positioning protrusions 121 is not specifically limited herein. It should be noted that when determining the number of the positioning protrusions 121, while ensuring the coaxiality between the seed crystal 3 and the seed crystal cover 2, the frictional force between the positioning protrusions 121 and the peripheral wall of the seed crystal 3 when the jig 1 and the seed crystal cover 2 are removed should also be considered to facilitate the separation of the jig 1 and the seed crystal cover 2.

[0043] In order to avoid the abutting end 1211 from causing wear to the seed crystal 3, in some alternative embodiments, the abutting end 1211 is made of wear-resistant material. For example, the abutting end 1211 can be made of rubber, silica gel, Teflon material, etc., to reduce the scratches caused by hard contact with the seed crystal 3. Specifically, in some embodiments, the jig 1 is made of an integral material, that is, the jig 1 itself can be made of rubber, silica gel, Teflon material, etc.

[0044] Or, the abutting end 1211 can also be made of low-hardness material. For example, brass or aluminum material, the hardness of these materials is lower than that of silicon carbide, which can reduce the damage to the surface of the seed crystal 3 caused by relative movement with the seed crystal 3.

[0045] Or, a coating that is wear-resistant and not easy to scratch the seed crystal 3 is coated on the surface of the abutting end 1211, such as nickel plating, titanium plating, etc.

[0046] In this embodiment, in order to ensure the service life of the jig 1, in this embodiment, the two sides of the positioning protrusion 121 are respectively connected to the inner circular arc of the end plate 120 in a transitional manner. It can be understood that since the positioning protrusion 121 is connected to the end plate 120 in a circular arc transitional manner, the stress concentration phenomenon at the connection between the positioning protrusion 121 and the end plate 120 can be effectively avoided.

[0047] In summary, a seed crystal bonding and positioning tooling provided by an embodiment of the present invention includes a jig 1. The jig 1 includes a surrounding plate 110 and an end plate 120. The end plate 120 is in a circular ring shape, and a plurality of positioning protrusions 121 are convexly provided on the inner circle of the end plate 120. One end of the positioning protrusion 121 away from the end plate 120 is an abutting end 1211 for abutting against the outer peripheral wall of the seed crystal 3. A plurality of abutting ends 1211 are all located on a preset circle. The axis of the preset circle, the axis of the end plate 120, and the axis of the surrounding plate 110 are coaxial. The end plate 120 or the surrounding plate 110 is used for positioning connection with the seed crystal 3. When the seed crystal 3 is bonded to the seed crystal cover 2, the abutting ends 1211 of the plurality of positioning protrusions 121 can abut against the outer peripheral wall of the seed crystal 3, and the coaxiality of the seed crystal 3 and the seed crystal cover 2 can be improved under the action of the abutting ends 1211 of the plurality of positioning protrusions 121, so as to improve the quality of the silicon carbide crystal grown on the seed crystal 3.

[0048] The above are only the preferred embodiments of the present invention and are not used to limit the present invention. For those skilled in the art, the present invention can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A seed crystal bonding and positioning tool, characterized in that: include: A fixture (1), the fixture (1) comprising a surrounding plate (110) and an end plate (120), the end plate (120) being in an annular shape, the inner ring of the end plate (120) being convexly provided with a plurality of positioning protrusions (121), the end of the positioning protrusion (121) away from the end plate (120) being abutting ends (1211) for abutting against the outer peripheral wall of a seed crystal (3), the plurality of abutting ends (1211) being all located on a preset circle, the axis of the preset circle, the axis of the end plate (120) and the axis of the surrounding plate (110) being coaxial, the end plate (120) or the surrounding plate (110) being used for positioning and connecting with a seed crystal cover (2); When the end plate (120) or the enclosure plate (110) is connected to the seed crystal cover (2), the enclosure plate (110), the end plate (120) and the seed crystal cover (2) are coaxial.

2. The seed crystal bonding and positioning tool according to claim 1, characterized in that: An internal thread for threaded connection with the seed crystal cover (2) is provided on the inner side of the enclosure plate (110).

3. The seed crystal bonding and positioning tool according to claim 1, characterized in that: When the end plate (120) or the surrounding plate (110) is connected to the seed crystal cover (2), the seed crystal (3) is arranged on the seed crystal cover (2), and the abutting end (1211) abuts against the outer peripheral wall of the seed crystal (3), the axial contact dimension between the abutting end (1211) and the seed crystal (3) is smaller than the axial dimension of the seed crystal (3).

4. The seed crystal bonding and positioning tool according to claim 1, characterized in that: The plurality of positioning protrusions (121) are evenly spaced around the circumference of the inner ring.

5. The seed crystal bonding and positioning tool according to claim 1, characterized in that: The inner ring of the end plate (120) is provided with four positioning protrusions (121), and the four positioning protrusions (121) are evenly spaced around the circumference of the inner ring.

6. The seed crystal bonding and positioning tool according to claim 1, characterized in that: The inner ring of the end plate (120) is provided with three positioning protrusions (121), and the three positioning protrusions (121) are evenly spaced around the circumference of the inner ring.

7. The seed crystal bonding and positioning tool according to claim 1, characterized in that: The inner ring of the end plate (120) is provided with two positioning protrusions (121), and the two positioning protrusions (121) are evenly spaced and arranged around the circumference of the inner ring.

8. The seed crystal bonding and positioning tool according to claim 1, characterized in that: The abutting end (1211) is made of wear-resistant material.

9. The seed crystal bonding and positioning tool according to claim 1, characterized in that: Both sides of the positioning protrusion (121) are respectively transitionally connected to the inner arc of the end plate (120).

10. The seed crystal bonding and positioning tool according to claim 1, characterized in that: The enclosure plate (110) is sleeved on the seed crystal cover (2), and the inner side wall of the enclosure plate (110) is used to abut against the outer peripheral wall of the seed crystal cover (2).

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