Phosphorus diffusion anti-blocking system and diffusion furnace

Abstract

The utility model discloses a phosphorus diffusion anti-blocking system which comprises a furnace body, a controller, a liquid accumulation device, a liquid discharge pipeline and a gas source pipeline, a drain valve and a filter are arranged on the drain pipeline, one end of the drain pipeline is connected to the furnace body, and the other end of the drain pipeline is connected to a first port of the liquid accumulation device; a gas source valve is arranged on the gas source pipeline, a gas source is introduced into one end of the gas source pipeline, and the other end of the gas source pipeline is connected to the furnace body and a second port of the liquid accumulation device; the controller is electrically connected with the liquid discharge valve and the air source valve; the gas source is inert gas. According to the anti-blocking system, the air source valve and the liquid discharge valve are regulated and controlled through the controller, impurities in the liquid discharge pipeline, the air source pipeline and the exhaust pipe can be subjected to ventilation purging treatment, crystallization blockage is prevented, the pipeline cleaning frequency is reduced, the service life of the pipeline is prolonged, and the working efficiency of the pipeline is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of tail gas treatment equipment for diffusion furnaces, and more specifically, to a phosphorus diffusion anti-blocking system and a diffusion furnace. Background Art

[0002] Low-pressure diffusion is a diffusion method achieved by improving the airtightness of the furnace tube and enhancing the vacuum system. The vacuum system provides a low-pressure environment, thereby increasing the mean free path of phosphorus oxychloride molecules, improving the uniformity, stability, and film density of diffusion. Using the low-pressure diffusion process, a uniform p-n structure can be obtained, and it is easier to achieve a shallow junction and high sheet resistance diffusion process, thereby improving the battery conversion efficiency, increasing the single-tube production capacity, and reducing the manufacturing cost.

[0003] However, in the existing air extraction method, since liquid or solid metaphosphoric acid will be formed after the exhaust gas is cooled, these metaphosphoric acids are extremely likely to block the gas outlet interface of the furnace tube, the vacuum pump, and the filter, and need to be cleaned frequently. In addition, metaphosphoric acid has strong corrosiveness, which affects accessories such as vacuum pumps and shortens the service life of the tail gas discharge system. Summary of the Utility Model

[0004] To solve the technical defects existing in the prior art, the utility model provides the following technical solutions:

[0005] The first aspect of the utility model provides a phosphorus diffusion anti-blocking system, which includes a furnace body, and also includes a controller, a liquid accumulation device, a liquid discharge pipeline, and a gas source pipeline;

[0006] A liquid discharge valve and a filter are arranged on the liquid discharge pipeline. One end of the liquid discharge pipeline is connected to the furnace body, and the other end is connected to the first port of the liquid accumulation device;

[0007] A gas source valve is arranged on the gas source pipeline. One end of the gas source pipeline leads to a gas source, and the other end is connected to the furnace body and the second port of the liquid accumulation device.

[0008] The controller is electrically connected to the liquid discharge valve and the gas source valve;

[0009] Among them, the gas source is an inert gas.

[0010] Further, the gas source pipeline includes a first gas source pipeline, a second gas source pipeline, and a third gas source pipeline, where:

[0011] The other end of the first gas source pipeline is connected to the furnace mouth of the furnace body;

[0012] The other end of the second gas source pipeline is connected to the furnace tail of the furnace body;

[0013] The other end of the third gas source pipeline is connected to the second port of the liquid accumulation device.

[0014] Further, the liquid discharge valve sequentially includes a first liquid discharge valve and a second liquid discharge valve according to the liquid discharge direction, and the filter is arranged at the input end of the first liquid discharge valve.

[0015] Further, there are two gas source valves on the third gas source pipeline, and a flow meter is arranged on the third gas source pipeline between the two gas source valves;

[0016] The controller is electrically connected to the flow meter.

[0017] Further, a bypass pipeline is further included, a bypass valve is arranged on the bypass pipeline, one end of the bypass pipeline is communicated with the third gas source pipeline between the two gas source valves, and the other end is communicated with the liquid discharge pipeline between the first liquid discharge valve and the second liquid discharge valve;

[0018] The controller is electrically connected to the bypass valve.

[0019] Further, a second branch of the second gas source pipeline is further included, which is in parallel with the gas source valve on the second gas source pipeline, and a flow regulating valve and a gas source valve are arranged on the second branch of the second gas source pipeline;

[0020] The controller is electrically connected to the flow regulating valve.

[0021] Further, a vacuum pumping device communicated with the furnace body is further included, and the vacuum pumping device includes an air extraction pipe, a vacuum valve and a vacuum pump which are sequentially arranged on the air extraction pipe according to the air extraction direction;

[0022] The controller is electrically connected to the vacuum valve and the vacuum pump.

[0023] Further, the liquid discharge pipeline is a corrugated pipe.

[0024] Further, the liquid accumulation device includes a liquid level reminder module arranged inside.

[0025] In a second aspect of the present utility model, a diffusion furnace is provided, which includes a furnace body, a reaction chamber arranged inside the furnace body, and the phosphorus diffusion anti-blocking system as described above, and the phosphorus diffusion anti-blocking system is communicated with the reaction chamber.

[0026] The beneficial effects of the present utility model compared with the prior art are as follows:

[0027] Through the regulation and control of the gas source valve and the liquid discharge valve by the controller, the anti-blocking system of the present utility model can perform ventilation and purging treatment on the impurities in the liquid discharge pipeline, the gas source pipeline and the air extraction pipe, prevent crystallization and blockage, reduce the pipeline cleaning frequency, and improve the service life and working efficiency of the pipeline. Description of the Drawings

[0028] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the embodiments. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0029] Figure 1 It is a schematic structural diagram of a phosphorus diffusion furnace anti-blocking system and a diffusion furnace provided by an embodiment of the present application;

[0030] Among them: 1 - furnace body, 2 - liquid accumulation device, 201 - liquid level reminder module, 3 - drain pipeline, 301 - filter, 302 - first drain valve, 303 - second drain valve, 4 - gas source pipeline, 401 - gas source valve, 402 - flow meter, 403 - flow regulating valve, 5 - bypass valve, 6 - vacuum pumping device, 601 - suction pipe, 602 - vacuum valve, 603 - vacuum pump. Specific embodiments

[0031] To make the purpose, technical solutions, and advantages of the embodiments of the present invention clearer, the following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the claimed present invention, but merely represents the selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present invention.

[0032] As Figure 1 shown, an embodiment of the present application provides a phosphorus diffusion anti-blocking system, including a furnace body 1, and further including a controller, a liquid accumulation device 2, a drain pipeline 3, and a gas source pipeline 4;

[0033] A drain valve and a filter 301 are provided on the drain pipeline 3. One end of the drain pipeline 3 is connected to the furnace body 1, and the other end is connected to the first port of the liquid accumulation device 2;

[0034] A gas source valve 401 is provided on the gas source pipeline 4. One end of the gas source pipeline 4 introduces a gas source, and the other end is connected to the furnace body 1 and the second port of the liquid accumulation device 2.

[0035] The controller is electrically connected to the drain valve and the gas source valve 401;

[0036] Among them, the gas source is an inert gas.

[0037] The anti-blocking system of the present utility model can perform ventilation purging on the impurities in the liquid discharge pipeline 3 and the gas source pipeline 4 by the controller's regulation of the gas source valve 401 and the liquid discharge valve, preventing crystallization blockage, reducing the pipeline cleaning frequency, and improving the service life and working efficiency of the pipeline.

[0038] The embodiments of the present application do not specifically limit the inert gas, which can be nitrogen or other gases that do not react with the products in the diffusion furnace.

[0039] As Figure 1 shown, the gas source pipeline in the embodiments of the present application includes a first gas source pipeline 41, a second gas source pipeline 42, and a third gas source pipeline 43, where:

[0040] The other end of the first gas source pipeline 41 is connected to the furnace mouth of the furnace body 1;

[0041] The other end of the second gas source pipeline 42 is connected to the furnace tail of the furnace body 1;

[0042] The other end of the third gas source pipeline 43 is connected to the second port of the liquid accumulation device 2.

[0043] The first gas source pipeline 41 is connected to the furnace mouth of the furnace body 1, and the second gas source pipeline 42 is connected to the furnace tail of the furnace body 1. The furnace mouth and the furnace tail are key areas of the gas flow in the furnace body. Such a diversion setting can effectively manage the gas flow in the furnace body 1, ensure the uniform distribution of the gas flow in the furnace body, and achieve a better purging air effect; a dedicated gas source connection to the liquid accumulation device 2 can also better purge the liquid accumulation device 2.

[0044] Specifically, the liquid discharge valve in the embodiments of the present application sequentially includes a first liquid discharge valve 302 and a second liquid discharge valve 303 according to the liquid discharge direction, and a filter 301 is arranged at the input end of the first liquid discharge valve 302.

[0045] The embodiments of the present application do not specifically limit the filter 301, which can be a condensate filter or a high-temperature filter.

[0046] Specifically, there are two gas source valves 401 on the third gas source pipeline 43 in the embodiments of the present application. A flow meter 402 is arranged on the third gas source pipeline 43 between the two gas source valves 401; the controller is electrically connected to the flow meter 402.

[0047] The flow meter 402 can monitor the actual flow rate of the gas source in real time, enabling precise adjustment and control of the gas source flow rate, thereby ensuring the stability and reliability of the system.

[0048] Specifically, the embodiment of the present application further includes a bypass pipeline. A bypass valve 5 is provided on the bypass pipeline. One end of the bypass pipeline is connected to the third gas source pipeline 43 between two gas source valves 401, and the other end is connected to the drainage pipeline 3 between the first drainage valve 302 and the second drainage valve 303; the controller is electrically connected to the bypass valve 5.

[0049] The bypass pipeline allows a standby path to be established between the third gas source pipeline 43 between the gas source valves 401 and the drainage pipeline 3, thereby achieving flexible control of the air flow. When it is necessary to bypass a specific part or adjust the air flow path, the bypass pipeline can provide additional operation options; in addition, the bypass pipeline is connected to the drainage pipeline 3, allowing the air flow to be guided to the drainage pipeline through the bypass pipeline during the drainage operation, which helps to provide additional operation options when it is necessary to clean the accumulated liquid or adjust the drainage flow rate.

[0050] Specifically, the embodiment of the present application further includes a second branch of the second gas source pipeline 44 that is connected in parallel with the gas source valve 401 on the second gas source pipeline 42. A flow regulating valve 403 and a gas source valve 401 are provided on the second branch of the second gas source pipeline 44; the controller is electrically connected to the flow regulating valve 403.

[0051] The setting of the branch improves the redundancy of the system. Even if there is a problem with the main gas source pipeline, the branch can continue to supply gas, reducing the risk of system downtime; the flow regulating valve 403 is electrically connected to the controller, enabling automatic adjustment. The controller can automatically adjust the flow regulating valve 403 according to the real-time data and set parameters of the system, thereby optimizing the gas source use and process control.

[0052] By precisely controlling the gas flow rate, waste or efficiency reduction caused by excessive or too small air flow can be avoided, thereby improving the overall operation efficiency of the system.

[0053] Specifically, the embodiment of the present application further includes a vacuum pumping device 6 connected to the furnace body 1. The vacuum pumping device 6 includes an air extraction pipe 601 and a vacuum valve 602 and a vacuum pump 603 sequentially arranged on the air extraction pipe 601 according to the air extraction direction; the controller is electrically connected to the vacuum valve 602 and the vacuum pump 603.

[0054] The vacuum pumping device 6 can effectively remove gases, vapors or other substances that may interfere with the process in the furnace body, helping to clean the environment in the furnace body, improving the purity of the process, and maintaining an appropriate vacuum degree can improve the efficiency and product quality of the process. For example, in the process of thin film deposition or chemical vapor deposition, the vacuum environment helps to improve the uniformity and accuracy of material deposition.

[0055] The embodiments of the present application do not specifically limit the first drain valve 302, the second drain valve 303, the gas source valve 401, the flow regulating valve 403, the bypass valve 5, and the vacuum valve 602, which can be ball valves, gate valves, globe valves, or butterfly valves, etc., and the type selection can be made according to specific circumstances.

[0056] The embodiments of the present application do not specifically limit the structure of the drain pipeline 3. Exemplarily, the drain pipeline 3 is a corrugated pipe.

[0057] The corrugated pipe can compensate for the change in the length of the pipeline caused by thermal expansion or contraction, allowing the pipeline to expand and contract accordingly when the temperature changes. And due to the flexibility of the corrugated pipe, the installation process is usually simpler than that of rigid pipes, which can reduce the number of pipeline connection points and fitting requirements.

[0058] The embodiments of the present application do not specifically limit the composition of the liquid accumulation device 2. Exemplarily, the liquid accumulation device 2 includes a liquid level reminder module 201 arranged inside.

[0059] When the liquid level approaches the set high or low warning line, the liquid level reminder module 201 can issue an alarm or notification to avoid the overflow of the accumulated liquid, thereby reducing the adverse losses caused by the backflow of the accumulated liquid.

[0060] The embodiments of the present application further provide a diffusion furnace, which includes a furnace body 1, a reaction chamber arranged inside the furnace body, and a phosphorus diffusion anti-blocking system, and the phosphorus diffusion anti-blocking system is communicated with the reaction chamber.

[0061] It can be seen that through the regulation and control of the gas source valve 401 and the drain valve by the controller 2, the anti-blocking system of the present utility model can perform ventilation and purging treatment on the impurities in the drain pipeline 3 and the gas source pipeline 4, prevent crystallization blockage, reduce the pipeline cleaning frequency, and improve the service life and working efficiency of the pipeline.

[0062] It should be noted that for those skilled in the art, it is obvious that the present utility model is not limited to the details of the above exemplary embodiments, and without departing from the spirit or basic characteristics of the present utility model, the present utility model can be implemented in other specific forms. Therefore, in any aspect, the embodiments should be regarded as exemplary and non-limiting. The scope of the present utility model is defined by the appended claims rather than the above description. Therefore, it is intended to include all changes falling within the meaning and scope of the equivalent elements of the claims in the present utility model, and any reference signs in the claims should not be regarded as limiting the claimed rights.

[0063] Specific examples are used in this utility model to illustrate the principle and implementation manner of this utility model. The above description is only the preferred implementation manner of this utility model and is not used to limit this utility model. For those skilled in the art, various changes and modifications can be made to this utility model. Any modification, equivalent replacement, improvement, etc. made without departing from the principle and spirit of this utility model shall be included within the protection scope of this utility model.

Claims

1. A phosphorus diffusion anti-blocking system, comprising a furnace body (1), characterized in that: It also includes a controller, a liquid accumulation device (2), a liquid discharge pipeline (3) and an air source pipeline (4); The liquid discharge pipeline (3) is provided with a liquid discharge valve and a filter (301); one end of the liquid discharge pipeline (3) is connected to the furnace body (1), and the other end is connected to the first port of the liquid accumulation device (2); The gas source pipeline (4) is provided with a gas source valve (401); one end of the gas source pipeline (4) is connected to the gas source, and the other end is connected to the furnace body (1) and the second port of the liquid accumulation device (2); The controller is electrically connected to the drain valve and the gas source valve (401); Wherein, the gas source is an inert gas.

2. The phosphorus diffusion anti-clogging system according to claim 1, characterized in that: The gas source pipeline comprises a first gas source pipeline (41), a second gas source pipeline (42) and a third gas source pipeline (43), wherein: The other end of the first gas source pipeline (41) is connected to the furnace opening of the furnace body (1); The other end of the second gas source pipeline (42) is connected to the furnace tail of the furnace body (1); The other end of the third gas source pipeline (43) is connected to the second port of the liquid accumulation device (2).

3. The phosphorus diffusion anti-clogging system according to claim 2, characterized in that: The liquid discharge valve comprises a first liquid discharge valve (302) and a second liquid discharge valve (303) in sequence according to the liquid discharge direction, and the filter (301) is arranged at the input end of the first liquid discharge valve (302).

4. The phosphorus diffusion anti-clogging system according to claim 3, characterized in that: There are two gas source valves (401) on the third gas source pipeline (43), and a flow meter (402) is provided on the third gas source pipeline (43) between the two gas source valves (401); The controller is electrically connected to the flow meter (402).

5. The phosphorus diffusion anti-clogging system according to claim 4, characterized in that: It also includes a bypass pipeline, on which a bypass valve (5) is provided, one end of the bypass pipeline is connected to the third gas source pipeline (43) between the two gas source valves (401), and the other end of the bypass pipeline is connected to the drainage pipeline (3) between the first drainage valve (302) and the second drainage valve (303); The controller is electrically connected to the bypass valve (5).

6. The phosphorus diffusion anti-clogging system according to claim 2, characterized in that: It also comprises a second gas source pipeline branch (44) connected in parallel with the gas source valve (401) on the second gas source pipeline (42), wherein the second gas source pipeline branch (44) is provided with a flow regulating valve (403) and the gas source valve (401); The controller is electrically connected to the flow regulating valve (403).

7. The phosphorus diffusion anti-clogging system according to claim 1, characterized in that: It also comprises a vacuum exhaust device (6) connected to the furnace body (1), the vacuum exhaust device (6) comprising an exhaust pipe (601) and a vacuum valve (602) and a vacuum pump (603) arranged on the exhaust pipe (601) in sequence according to the exhaust direction; The controller is electrically connected to the vacuum valve (602) and the vacuum pump (603).

8. The phosphorus diffusion anti-clogging system according to claim 1, characterized in that: The liquid discharge pipeline (3) is a corrugated pipe.

9. The phosphorus diffusion anti-clogging system according to claim 1, characterized in that: The liquid accumulation device (2) comprises a liquid level reminder module (201) arranged inside.

10. A diffusion furnace, comprising a furnace body (1), a reaction chamber arranged in the furnace body, and the phosphorus diffusion anti-clogging system according to any one of claims 1 to 9, wherein the phosphorus diffusion anti-clogging system is connected to the reaction chamber.

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