Photomask clamp

Abstract

The embodiment of the utility model provides a photomask clamp, which comprises a base, a clamping device, a clamping device and a clamping device, the bearing part is positioned on the base and is in running fit with the base by taking a first axis as an axis; the clamping assembly is positioned on the bearing part, is in running fit with the bearing part by taking a second axis as an axis, and is used for clamping a photomask; wherein the extension directions of the first axis and the second axis are different. By adopting the technical scheme, the clamping assembly rotates relative to the base by taking the first axis as the axis and rotates relative to the bearing part by taking the second axis as the axis, and the clamping assembly has two-axis rotation freedom degrees, so that the total exposed area of the surface of the photomask clamped by the clamping assembly in any direction in the whole rotation period can be increased; and thus, the monitoring space required by monitoring can be reduced.

Description

Technical Field

[0001] The embodiments of the present utility model relate to the technical field of semiconductors, and particularly to a photomask fixture. Background Art

[0002] During the semiconductor manufacturing process, the surface of the photomask is prone to being contaminated by pollutants such as airborne particles and gas molecules. Using a contaminated photomask for exposure imaging will cause problems of pattern failure. It is necessary to monitor and purge the pollutants on the surface of the photomask.

[0003] Currently, the pollutants on the surface of the photomask are mainly monitored by the human eye, which requires a large monitoring space. Therefore, how to provide a technical solution to reduce the monitoring space has become an urgent technical problem to be solved. Summary of the Utility Model

[0004] In view of this, the embodiments of the present utility model provide a photomask fixture that can reduce the monitoring space required for monitoring.

[0005] The embodiments of the present utility model provide a photomask fixture, including:

[0006] A base;

[0007] A bearing part located on the base and rotatably engaged with the base about a first axis;

[0008] A clamping assembly located on the bearing part and rotatably engaged with the bearing part about a second axis, the clamping assembly being used for clamping a photomask;

[0009] Wherein, the extending directions of the first axis and the second axis are different.

[0010] Optionally, the photomask fixture further includes:

[0011] A first rotating assembly for making the bearing part rotatably engaged with the base about a first axis;

[0012] The bearing part includes:

[0013] A main body part connected to the first rotating assembly; and

[0014] A side wall connected to the main body part, wherein the side wall is connected to one end of the clamping assembly and is rotatably engaged about a second axis.

[0015] Optionally, a bottom rotating hole is formed on the base; the first rotating assembly includes:

[0016] A first driving motor fixed on the base, the first driving motor having a first driving shaft about a first axis;

[0017] A bottom rotating shaft, one end of the bottom rotating shaft is fixed to the bearing part, and the other end is connected to the first driving shaft through the bottom rotating hole;

[0018] A control device, the control device is electrically connected to the first driving motor of the first rotating assembly.

[0019] Optionally, the side wall includes:

[0020] A first side wall and a second side wall arranged oppositely;

[0021] One end of the clamping assembly is connected to the first side wall and is rotationally matched with the second axis; the other end is connected to the second side wall and is rotationally matched with the second axis.

[0022] Optionally, the clamping assembly includes:

[0023] A carrier;

[0024] A first clamping member located on the carrier and rotationally matched with the first side wall with the second axis as the axis;

[0025] A second clamping member located on the carrier and rotationally matched with the second side wall with the second axis as the axis, and oppositely arranged with the first clamping member along the second axis direction;

[0026] The distance between the first clamping member and the second clamping member is adjustable.

[0027] Optionally, a first side wall rotating hole is formed on the first side wall, and a second side wall rotating hole is formed on the second side wall;

[0028] The photomask fixture further includes: a second rotating assembly for making the clamping assembly rotationally matched with the bearing part with the second axis as the axis;

[0029] The second rotating assembly includes:

[0030] A second driving motor fixed to the first side wall, the second driving motor has a second driving shaft with the second axis as the axis;

[0031] A first side wall rotating shaft, one end of the first side wall rotating shaft is fixed to the clamping assembly, and the other end is connected to the second driving shaft through the first side wall rotating hole;

[0032] A second side wall rotating shaft, one end of the second side wall rotating shaft is fixed to the clamping assembly, and the other end passes through the second side wall rotating hole.

[0033] Optionally, both the first clamping member and the second clamping member are hydraulic rods. Both the first clamping member and the second clamping member include a piston rod and a cylinder block. The piston rod moves relative to the cylinder block along the second axis, where:

[0034] The distance between the piston rods of the first clamping member and the second clamping member is adjustable, and the reticle is clamped by the piston rods of the first clamping member and the second clamping member;

[0035] The cylinder blocks of the first clamping member are respectively fixedly connected to the stage and the first side wall rotating shaft, and the cylinder blocks of the second clamping member are respectively fixedly connected to the stage and the second side wall rotating shaft.

[0036] Optionally, the clamping assembly further includes:

[0037] A pressure sensor located on the opposite end faces of the first clamping member and the second clamping member;

[0038] The reticle fixture further includes:

[0039] A control device electrically connected to the pressure sensor and electrically connected to at least one of the first clamping member and the second clamping member.

[0040] Optionally, the stage has a monitoring hole for monitoring the surface of the reticle in contact with the stage.

[0041] Optionally, the first axis is perpendicular to the second axis.

[0042] Compared with the prior art, the technical solution of the embodiment of the present utility model has the following advantages:

[0043] In the reticle fixture provided by the embodiment of the present utility model, the bearing portion is rotationally matched with the base with the first axis as the axis, and the clamping assembly is located on the bearing portion, enabling the clamping assembly to rotate relative to the base with the first axis as the axis; the clamping assembly is rotationally matched with the bearing portion with the second axis as the axis, enabling the clamping assembly to rotate relative to the bearing portion with the second axis as the axis; the extending directions of the first axis and the second axis are different, and the clamping assembly has two-axis rotational freedom. The above technical solution can increase the total area of the surface of the reticle clamped by the clamping assembly exposed during the entire rotation cycle in any direction, thereby reducing the monitoring space required for monitoring. Description of the Drawings

[0044] To more clearly illustrate the technical solutions of the embodiments of the present invention, the following will briefly introduce the drawings required for use in the embodiments of the present invention or the description of the prior art. Obviously, the following described drawings are only some embodiments of this specification. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0045] Figure 1 A schematic diagram of a working scenario for monitoring contaminants on the surface of a photomask is shown.

[0046] Figure 2 A schematic structural diagram of an embodiment of a photomask fixture in the present invention is shown.

[0047] Figure 3 Shows Figure 2 The top view schematic diagram of Specific embodiments

[0048] As described in the background art, during the semiconductor manufacturing process, the surface of the photomask is easily contaminated by contaminants such as airborne particles and gas molecules. Using a contaminated photomask for exposure imaging will cause problems such as pattern failure. It is necessary to monitor and purge the contaminants on the surface of the photomask. Currently, the contaminants on the surface of the photomask are mainly monitored by the human eye.

[0049] Referring to Figure 1 , a schematic diagram of a working scenario for monitoring contaminants on the surface of a photomask is shown. The photomask M is placed on the observation table N, and the monitor O moves around the observation table N to visually inspect different orientations of the first surface of the photomask M. Then, the monitor O flips the photomask M to visually inspect different orientations of the second surface of the photomask M.

[0050] The above solution requires a large monitoring space.

[0051] Therefore, how to provide a technical solution to reduce the monitoring space required for monitoring has become an urgent technical problem to be solved.

[0052] To solve the above technical problems, an embodiment of the present invention provides a photomask fixture, which includes: a base; a bearing part located on the base, the bearing part is rotationally matched with the base around a first axis; a clamping assembly located on the bearing part and rotationally matched with the bearing part around a second axis, the clamping assembly is used for clamping the photomask; wherein, the extending directions of the first axis and the second axis are different.

[0053] In the photomask fixture provided by the embodiment of the present utility model, the bearing part is rotationally matched with the base around the first axis, the clamping assembly is located on the bearing part, and the clamping assembly can rotate relative to the base around the first axis; the clamping assembly is rotationally matched with the bearing part around the second axis, and the clamping assembly can rotate relative to the bearing part around the second axis; the extending directions of the first axis and the second axis are different, and the clamping assembly has two-axis rotational freedom. The above technical solution can increase the total area of the surface of the photomask clamped by the clamping assembly in any direction exposed during the entire rotation period, thereby reducing the monitoring space required for monitoring.

[0054] In order to make the above objects, features and advantages of the embodiments of the present utility model more obvious and understandable, the following will describe the specific embodiments of the present utility model in detail with reference to the drawings.

[0055] With reference to Figure 2 and Figure 3 , where Figure 2 shows a schematic structural diagram of an embodiment of the photomask fixture in the present utility model, Figure 3 shows Figure 2 a top view schematic diagram of

[0056] Base 1;

[0057] A bearing part 2 located on the base 1 and rotationally matched with the base 1 around the first axis L1;

[0058] A clamping assembly 3 located on the bearing part 2 and rotationally matched with the bearing part 2 around the second axis L2, and the clamping assembly 3 is used for clamping the photomask M;

[0059] wherein, the extending directions of the first axis L1 and the second axis L2 are different.

[0060] In the photomask fixture provided by the present utility model, the bearing part 2 is rotationally matched with the base 1 around the first axis L1, the clamping assembly 3 is located on the bearing part 2, and the clamping assembly 3 can rotate relative to the base 1 around the first axis L1; the clamping assembly 3 is rotationally matched with the bearing part 2 around the second axis L2, and the clamping assembly 3 can rotate relative to the bearing part 2 around the second axis L2; the extending directions of the first axis L1 and the second axis L2 are different, and the clamping assembly 3 has two-axis rotational freedom. The above technical solution can increase the total area of the surface of the photomask M clamped by the clamping assembly 3 in any direction exposed during the entire rotation period, thereby reducing the monitoring space required for monitoring.

[0061] In this embodiment, the photomask M has a first surface m1 and a second surface m2 to be monitored, and the first surface m1 and the second surface m2 are oppositely arranged.

[0062] In this embodiment, the bearing part 2 is located on the base 1. The bearing part 2 is rotationally engaged with the base 1 about the first axis L1, which can increase the total exposed area of the surface of the photomask M in other directions except the direction along the first axis L1 during the entire rotation period, thereby reducing the monitoring space required for monitoring.

[0063] In this embodiment, the clamping assembly 3 is rotationally engaged with the bearing part 2 about the second axis L2, which can increase the total exposed area of the surface of the photomask M in other directions except the direction along the second axis L2 during the entire rotation period, thereby reducing the monitoring space required for monitoring.

[0064] In this embodiment, the extending directions of the first axis L1 and the second axis L2 are different, which can increase the total exposed area of the surface of the photomask M in any direction during the entire rotation period, thereby further reducing the monitoring space required for monitoring. In other embodiments, the extending directions of the first axis and the second axis may be the same, which will not be elaborated here.

[0065] As an example, the first axis L1 and the second axis L2 may be perpendicular to maximize the total exposed area of the surface of the photomask M clamped by the clamping assembly 3 in a single monitoring direction during the entire rotation period, and further reduce the monitoring space required for monitoring. In other embodiments, the first axis and the second axis may not be perpendicular. For example, the included angle between the first axis and the second axis is 45 degrees.

[0066] In this embodiment, the photomask fixture may further include: a first rotation assembly 4, and the first rotation assembly 4 is used to make the bearing part 2 rotationally engaged with the base 1 about the first axis L1.

[0067] As an example, a bottom rotation hole h1 coaxial with the first axis L1 is formed on the base 1. The first rotation assembly 4 includes: a first driving motor 41 fixed to the base 1, and the first driving motor 41 has a first driving shaft 42 about the first axis L1; and a bottom rotation shaft 43. One end of the bottom rotation shaft 43 is fixed to the bearing part 2, and the other end is connected to the first driving shaft 42 through the bottom rotation hole h1. Driven by the first driving shaft 42, the bottom rotation shaft 43 can drive the bearing part 2 to be rotationally engaged with the base 1 about the first axis L1.

[0068] It can be understood that the above implementation manners are only for illustrative purposes, used to exemplify the possible cooperation manners of the bearing part rotatingly cooperating with the base with the first axis as the axis, and should not be construed as a limitation on the implementation manner of the bearing part rotatingly cooperating with the base with the first axis as the axis in the present invention. Any possible mechanism that enables the bearing part to rotate with the base with the first axis as the axis recognized by those skilled in the art can be applied to the first rotating assembly in the present invention.

[0069] As an example, the first driving motor 41 can be located inside the base 1, which is beneficial to reducing the exposure risk of the first driving motor 41.

[0070] As an example, a bearing (not shown in the figure) is provided between the bottom rotating hole h1 and the bottom rotating shaft 43, which is used to reduce the sliding friction between the bottom rotating hole h1 and the bottom rotating shaft 43, thereby reducing the wear of the base 1 and the bottom rotating shaft 43.

[0071] As an example, the end of the bottom rotating shaft 43 is connected to the end face of the bearing part 2 corresponding to the center of gravity of the bearing part 2, which is beneficial to reducing the offset amount between the center of gravity of the bearing part 2 and the first axis L1 and improving the stability of the photomask M during the rotation process.

[0072] In this embodiment, the photomask fixture may further include: a control device (not shown in the figure) electrically connected to the first driving motor 41, and the control device is used to control the switch and rotation speed of the first driving motor 41, so as to control the rotation speed and rotation angle of the clamping assembly 3 and the photomask M rotating with the first axis L1 as the axis.

[0073] In actual use, the control device can control the rotation speed of the first driving motor 41 according to the observation rate of the monitor, so as to control the rotation speed of the clamping assembly 3 and the photomask M rotating with the first axis L1 as the axis; the control device can also switch the first driving motor 41 at intervals according to the needs of the monitor, so as to control the clamping assembly 3 and the photomask M to stop after rotating a target angle with the first axis L1 as the axis. After the monitor finishes observing, continue to control the clamping assembly 3 and the photomask M to rotate with the first axis L1 as the axis.

[0074] In this embodiment, the bearing part 2 may include: a main body part 21 connected to the first rotating assembly 4; and a side wall connected to the main body part 21, wherein the side wall is connected to one end of the clamping assembly 3 and is rotatably mated with the second axis L2, and the side wall is used to provide support for the clamping assembly 3.

[0075] As an example, the side walls may include a first side wall 22 and a second side wall 23 which are oppositely arranged. Wherein, the first side wall 22 is connected to one end of the clamping assembly 3 and is rotationally fitted with the second axis L2 as the axis, and the second side wall 23 is connected to the other end of the clamping assembly 3 and is rotationally fitted with the second axis L2 as the axis.

[0076] Specifically, the first side wall 22 and the second side wall 23 can respectively provide support for both ends of the clamping assembly 3, which can improve the support strength and stability of the bearing part 2 for the clamping assembly 3.

[0077] In this embodiment, the photomask fixture may further include a second rotation assembly 5 for enabling the clamping assembly 3 to be rotationally fitted with the bearing part 2 with the second axis L2 as the axis.

[0078] As an example, a first side wall rotation hole h2 coaxial with the second axis L2 is formed on the first side wall 22, and a second side wall rotation hole (not shown in the figure) coaxial with the second axis L2 is formed on the second side wall 23. The second rotation assembly 5 includes: a second driving motor 51 fixedly arranged on the first side wall 22, the second driving motor 51 having a second driving shaft 52 with the second axis L2 as the axis; a first side wall rotation shaft 53, one end of the first side wall rotation shaft 53 is fixed to the clamping assembly 3, and the other end passes through the first side wall rotation hole h2 and is connected to the second driving shaft 52; a second side wall rotation shaft, one end of the second side wall rotation shaft is fixed to the clamping assembly 3, and the other end passes through the second side wall rotation hole.

[0079] It can be understood that the above implementation manners are only for illustrative examples, used to illustrate the possible cooperation manners of the clamping assembly rotatingly fitted with the bearing part with the second axis as the axis, and cannot be understood as a limitation on the implementation manner of the clamping assembly rotatingly fitted with the bearing part with the second axis as the axis in the present invention. Any possible mechanism that enables the clamping assembly to be rotationally fitted with the bearing part with the second axis as the axis recognized by those skilled in the art can be applied to the second rotation assembly in the present invention.

[0080] As an example, the second driving motor 51 may be located inside the first side wall 22, which is beneficial to reducing the exposure risk of the second driving motor 51.

[0081] In this embodiment, a bearing is arranged between the first side wall rotation hole h2 and the first side wall rotation shaft 53, which is used to reduce the sliding friction between the first side wall rotation hole h2 and the first side wall rotation shaft 53, thereby reducing the loss between the first side wall 22 and the first side wall rotation shaft 53.

[0082] In this embodiment, a bearing (not shown in the figure) is provided between the second side wall rotation hole and the second side wall rotation shaft to reduce the sliding friction between the second side wall rotation hole and the second side wall rotation shaft, thereby reducing the loss between the second side wall 23 and the second side wall rotation shaft.

[0083] In this embodiment, the control device can be electrically connected to the second driving motor 51. The control device is used to control the switch and rotation speed of the second driving motor 51, so as to control the rotation speed and rotation angle when the clamping assembly 3 and the photomask M rotate about the second axis L2.

[0084] In actual use, the control device can control the rotation speed of the second driving motor 51 according to the observation speed of the monitor, so as to control the rotation speed when the clamping assembly 3 and the photomask M rotate about the second axis L2; the control device can also switch the second driving motor at intervals according to the needs of the monitor, so as to control the clamping assembly 3 and the photomask M to stop after rotating a target angle about the second axis L2. After the monitor finishes observing, continue to control the clamping assembly 3 and the photomask M to rotate about the second axis L2.

[0085] As an example, the first axis L1 can extend in the horizontal direction, and the second axis L2 can extend in the vertical direction.

[0086] In actual use, the control device can control the clamping assembly 3 and the photomask M to rotate about the second axis L2 until the photomask M is horizontal and the first surface m1 of the photomask M faces upward and then stop; after the monitor finishes observing the current position, the control device controls the clamping assembly 3 and the photomask M to rotate a target angle about the first axis L1 and then stop, and repeat this process until the first surface m1 of the photomask M is completely monitored; the control device controls the clamping assembly 3 and the photomask M to rotate about the second axis L2 until the photomask M is horizontal and the second surface m2 of the photomask M faces upward and then stop; after the monitor finishes observing the current position, the control device controls the clamping assembly 3 and the photomask M to rotate a target angle about the first axis L1 and then stop, and repeat this process until the second surface m2 of the photomask M is completely monitored. During the entire monitoring process, the monitor does not need to move around the photomask M to visually inspect different orientations of the first surface m1 and the second surface m2 of the photomask M, which can reduce the monitoring space required for monitoring.

[0087] In this embodiment, the clamping assembly 3 may include: a stage 31; a first clamping member 32 located on the stage 31, the first clamping member 32 being rotationally engaged with the first side wall 22 about the second axis L2; a second clamping member 33 located on the stage 31, the second clamping member 33 being rotationally engaged with the second side wall 23 about the second axis L2, the second clamping member 33 and the first clamping member 32 being oppositely arranged along the second axis L2; and the distance between the first clamping member 32 and the second clamping member 33 being adjustable.

[0088] In actual use, the photomask M is located between the first clamping member 32 and the second clamping member 33 and can be clamped and fixed by the first clamping member 32 and the second clamping member 33; the distance between the first clamping member 32 and the second clamping member 33 is adjustable, so that the acting force between the photomask M and the first clamping member 32 and the second clamping member 33 can be adjusted, thereby reducing the probability of damage to the photomask M.

[0089] In this embodiment, the stage 31 is used to carry the photomask M, and the first surface m1 or the second surface m2 of the photomask M abuts against the stage 31; the stage 31 has a monitoring hole 31a for monitoring the surface of the photomask M that abuts against the stage 31.

[0090] In this embodiment, at least one of the first clamping member 32 and the second clamping member 33 is a hydraulic rod.

[0091] As an example, both the first clamping member 32 and the second clamping member 33 are hydraulic rods. The first clamping member 32 and the second clamping member 33 each include a piston rod a and a cylinder body b, and the piston rod a can move relative to the cylinder body b along the second axis L2. Among them: the distance between the piston rod a of the first clamping member 32 and the piston rod a of the second clamping member 33 is adjustable, and the photomask M is clamped by the piston rod a of the first clamping member 32 and the piston rod a of the second clamping member 33; the cylinder body b of the first clamping member 32 is fixedly connected to the stage 31 and the rotating shaft 53 of the first side wall respectively, and the cylinder body b of the second clamping member 33 is fixedly connected to the stage 31 and the rotating shaft 52 of the second side wall respectively, and can rotate about the second axis L2 with the stage 31 and the photomask M and be rotationally engaged with the carrying portion 2.

[0092] In other embodiments, the first clamping member 32 may be a hydraulic rod, and the second clamping member 33 may also be a limiting block. The distance between the first clamping member 32 and the second clamping member 33 can be adjusted by the first clamping member 32.

[0093] It can be understood that the above implementation manners are only for illustrative purposes, used to illustrate possible implementation manners of the first clamping member or the second clamping member, and should not be construed as a limitation on the implementation manners of the first clamping member or the second clamping member in the present utility model. Any possible mechanism that can be recognized by those skilled in the art to adjust the distance between the first clamping member and the second clamping member can be applied to the first clamping member and the second clamping member in the present utility model.

[0094] In this embodiment, the control device can also be electrically connected to the first clamping member 32 and the second clamping member 33, and is used to control the distance between the first clamping member 32 and the second clamping member 33.

[0095] In this embodiment, the clamping assembly 3 can further include: a pressure sensor located on the opposite end faces of the first clamping member 32 and the second clamping member 33. The control device can also be electrically connected to the pressure sensor, so as to be able to control the distance between the first clamping member 32 and the second clamping member 33 according to the pressure sensor.

[0096] As an example, the number of the pressure sensors is two, which are respectively located on the two opposite end faces of the first clamping member 32 and the second clamping member 33.

[0097] In actual use, the photomask M is placed on the stage 31. The control device controls the distance between the first clamping member 32 and the second clamping member 33 to decrease. When the pressure transmitted by the pressure sensor is equal to the preset pressure, the control device controls the first clamping member 32 and the second clamping member 33 to stop moving. During the entire clamping process, the acting force between the photomask M and the first clamping member 32 and the second clamping member 33 is not greater than the preset pressure, so as to be able to reduce the probability of damage to the photomask M.

[0098] It can be understood that the above implementation manners are only for illustrative purposes, used to illustrate the possible number and installation positions of the pressure sensors, and should not be construed as a limitation on the number and installation positions of the pressure sensors in the present utility model. For example, in other examples, the number of the pressure sensors can also be one, which is located on the end face of the first clamping member opposite to the second clamping member.

[0099] It can be understood that the above embodiments provide multiple implementation schemes. The implementation schemes can be combined and cross-referenced with each other without conflict, so as to extend multiple possible implementation schemes, and all of these can be considered as the implementation schemes disclosed and made public in the embodiments of the present application.

[0100] It should be noted that the "examples" or "embodiments" referred to in this specification refer to specific features, structures or characteristics that can be included in at least one implementation mode of the embodiments of the present utility model. And in the description of this specification, terms such as "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Thus, features defined with terms such as "first" and "second" may explicitly or implicitly include one or more of such features. Moreover, terms such as "first" and "second" are used to distinguish similar objects and do not necessarily have to be used to describe a specific order or indicate importance. It can be understood that such terms can be interchanged under appropriate circumstances so that the embodiments of the present utility model described herein can be implemented in an order other than those illustrated or described herein.

[0101] Although the embodiments of the present utility model are disclosed as above, the present utility model is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present utility model. Therefore, the protection scope of this specification should be subject to the scope defined by the claims.

Claims

1. A mask fixture, characterized in that: include: Base; A bearing portion located on the base and rotatably matched with the base with the first axis as an axis; A clamping assembly located on the bearing portion and rotatably matched with the bearing portion with the second axis as an axis, wherein the clamping assembly is used to clamp the photomask; Wherein, the first axis and the second axis extend in different directions.

2. The photomask fixture according to claim 1, characterized in that: Also includes: A first rotating assembly that enables the bearing portion to rotate with the base about a first axis; The bearing portion comprises: A main body connected to the first rotating assembly; and A side wall connected to the main body, wherein the side wall is connected to one end of the clamping assembly and is rotatably matched with the second axis.

3. The photomask fixture according to claim 2, characterized in that: The base is provided with a bottom rotation hole; the first rotation assembly comprises: A first driving motor fixedly mounted on the base, wherein the first driving motor has a first driving shaft with a first axis as its axis; A bottom rotating shaft, one end of which is fixed to the bearing portion, and the other end of which is connected to the first driving shaft by penetrating the bottom rotating hole; A control device is electrically connected to the first driving motor of the first rotating assembly.

4. The photomask fixture according to claim 2, characterized in that: The side wall comprises: A first side wall and a second side wall arranged opposite to each other; One end of the clamping assembly is connected to the first side wall and is rotatably matched with the second axis; the other end is connected to the second side wall and is rotatably matched with the second axis.

5. The photomask fixture according to claim 4, characterized in that: The clamping assembly comprises: Carrier; A first clamping member located on the carrier and rotatably matched with the first side wall about the second axis; A second clamping member located on the carrier, rotatably matched with the second side wall with the second axis as an axis, and arranged opposite to the first clamping member along the second axis direction; The distance between the first clamping member and the second clamping member is adjustable.

6. The photomask fixture according to claim 5, characterized in that: A first side wall rotation hole is formed on the first side wall, and a second side wall rotation hole is formed on the second side wall; The mask clamp further comprises: a second rotating assembly for making the clamping assembly rotate and cooperate with the bearing portion around the second axis; The second rotating assembly comprises: A second driving motor fixedly mounted on the first side wall, the second driving motor having a second driving shaft with a second axis as its shaft; A first side wall rotation shaft, one end of which is fixed to the clamping assembly, and the other end of which is connected to the second driving shaft by penetrating the first side wall rotation hole; A second side wall rotation shaft, one end of which is fixed to the clamping assembly, and the other end of which is penetrated by the second side wall rotation hole.

7. The photomask fixture according to claim 6, characterized in that: The first clamping member and the second clamping member are both hydraulic rods, and the first clamping member and the second clamping member both include a piston rod and a cylinder body, and the piston rod moves relative to the cylinder body along the second axis direction, wherein: The distance between the piston rod of the first clamping member and the piston rod of the second clamping member is adjustable, and the light shield is clamped by the piston rod of the first clamping member and the piston rod of the second clamping member; The cylinder body of the first clamping member is fixedly connected to the carrier and the first side wall rotation axis respectively, and the cylinder body of the second clamping member is fixedly connected to the carrier and the second side wall rotation axis respectively.

8. The photomask fixture according to claim 5, characterized in that: The clamping assembly also includes: a pressure sensor located on an end surface of the first clamping member opposite to the second clamping member; The photomask fixture further comprises: A control device is electrically connected to the pressure sensor and to at least one of the first clamping member and the second clamping member.

9. The photomask fixture according to claim 5, characterized in that: The carrier has a monitoring hole, and the monitoring hole is used to monitor the surface of the mask that contacts the carrier.

10. The photomask fixture according to claim 1, characterized in that: The first axis is perpendicular to the second axis.

Images