Jig

Abstract

The utility model discloses a jig, which is used for disassembling and assembling an insulating window in a semiconductor processing device, and comprises a main body ring piece, the inner diameter of the main body ring piece is greater than or equal to the outer diameter of the insulating window, and the main body ring piece can be sleeved in the circumferential direction of the insulating window; the positioning pieces are arranged on the lower surface of the main body ring piece at intervals and correspond to the positioning holes in the top of the lining; the fixed clamping plugs have fixed thicknesses extending in the radial direction of the main body ring piece and are fixed to the inner side of the main body ring piece at intervals; the at least one adjusting clamping plug is mounted on the inner side of the main body ring piece and can move in the radial direction of the main body ring piece; the hoisting piece is fixedly connected with the main body ring piece; the fixing clamping plug and the adjusting clamping plug can abut against the circumferential side wall of the insulation window, the radial position of the adjusting clamping plug on the main body ring piece is adjusted, concentric installation of the insulation window and the lining is achieved, and meanwhile convenience of disassembly and assembly of the insulation window is improved.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor equipment, and particularly relates to a jig for disassembling and assembling an insulating window in a semiconductor processing device. Background Art

[0002] In the field of semiconductor manufacturing, plasma processing technology is one of the key technologies for realizing high-precision substrate processing. Plasma reaction devices are widely used in various processes, such as plasma etching, chemical vapor deposition, etc. Among them, inductively coupled plasma (ICP) reaction devices are widely used in the field of silicon etching due to their high etching rate, high selectivity, and good large-area uniformity.

[0003] The inductively coupled plasma reaction device includes an insulating window disposed on a lining. When installing the insulating window with the existing jig, it is impossible to ensure the concentric installation of the insulating window and the lining, resulting in a certain offset when the insulating window is installed on the lining, which may affect the accuracy of the process and cause plasma leakage. At the same time, the existing jig cannot align and install the insulating window on the lining at one time, and the insulating window needs to be lifted and moved multiple times, which wears the sealing ring below the insulating window, thereby reducing the sealing performance of the ICP reaction device. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a jig for disassembling and assembling an insulating window, so as to realize the concentric installation of the insulating window and the lining, reduce the wear of the sealing ring below the insulating window, enhance the airtightness of the plasma reaction device, and improve the convenience of disassembling and assembling the insulating window at the same time.

[0005] To achieve the above object, the utility model provides a jig for disassembling and assembling an insulating window in a semiconductor processing device. The semiconductor processing device is provided with a lining inside, and the insulating window is disposed on the lining. The jig includes: a main body ring member, the inner diameter of which is greater than or equal to the outer diameter of the insulating window, and can be sleeved on the circumferential outer side of the insulating window; positioning members, which are arranged at intervals on the lower surface of the main body ring member and correspond to the positioning holes at the top of the lining; a plurality of fixed chucks, which have a fixed thickness extending along the radial direction of the main body ring member and are fixed at intervals on the inner side of the main body ring member; at least one adjusting chuck, which is installed on the inner side of the main body ring member and can move along the radial direction of the main body ring member; a lifting member, which is fixedly connected to the main body ring member; the fixed chucks and the adjusting chuck can abut against the circumferential side wall of the insulating window, and the radial position of the adjusting chuck on the main body ring member is adjusted to make the insulating window and the lining installed concentrically.

[0006] Preferably, a slot is further provided on the side wall of the insulating window, and the fixed chucks and the adjusting chuck can be embedded in the slot.

[0007] Preferably, it further includes a plurality of jacking members. Each jacking member passes through a through hole provided in the circumferential direction of the main body ring member. After the adjusting plug and the fixing plug are fixed to the insulating window, the jacking member can move downward along the axial direction of the main body ring member until the bottom of the jacking member abuts against the top of the inner lining, providing an upward acting force to separate the insulating window from the inner lining.

[0008] Preferably, the jacking member is a first screw, and the through hole is a threaded hole matching the first screw.

[0009] Preferably, the adjusting plug includes a plug body and a fastener; the first end of the fastener is connected to the plug body, and the second end penetrates through the radial direction of the main body ring member.

[0010] Preferably, the fastener is a second screw. By rotating the second screw, the plug body is driven to move radially along the main body ring member; by stopping rotating the second screw, the plug body is fixed on the main body ring member.

[0011] Preferably, the sides of the fixing plug and the adjusting plug facing the insulating window match the radian of the card slot on the side wall of the insulating window.

[0012] Preferably, the main body ring member is a closed ring, or an open ring, or composed of a plurality of arc segments.

[0013] Preferably, the plurality of arc segments are evenly distributed along the circumferential direction of the insulating window, and at least one fixing plug and / or adjusting plug is provided on each arc segment.

[0014] Preferably, the hoisting member includes at least one suspension rod, and a plurality of pull rings are provided on the suspension rod. Both ends of each suspension rod are fixedly connected to the main body ring member respectively.

[0015] Preferably, the hoisting member includes a lifting ring concentric with the main body ring member, a plurality of pull rings are provided on the lifting ring, and the lifting ring is connected to the main body ring member through a plurality of reinforcing rods.

[0016] Preferably, the number of the positioning members is greater than or equal to 3.

[0017] Preferably, the semiconductor processing device is an inductively coupled plasma reaction device.

[0018] Compared with the prior art, the technical solution of the present utility model has at least the following advantages:

[0019] By adjusting the fixing plug and the adjusting plug arranged on the main body ring to change their radial positions on the main body ring, the concentric setting of the insulating window and the main body ring can be achieved; meanwhile, by inserting the positioning member on the lower surface of the main body ring into the positioning hole at the top of the inner lining, the concentric installation of the main body ring and the inner lining is completed, thereby realizing the concentric installation of the insulating window and the inner lining at one time, and reducing the wear of the sealing ring below the insulating window. Secondly, by providing a jacking member, the insulating window and the inner lining can be separated, which is convenient for removing the insulating window from the inner lining through a lifting member, improving the convenience of disassembling and installing the insulating window, and also avoiding damage to the insulating window and the inner lining caused by violent disassembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a cross-sectional view of the fixture of the present invention arranged circumferentially around the insulating window;

[0021] Figure 2 It is a schematic diagram of a fixture of the present invention;

[0022] Figure 3 It is a schematic diagram of another fixture of the present invention;

[0023] Figure 4 It is a schematic diagram of yet another fixture of the present invention;

[0024] Figure 5 It is a schematic diagram of still another fixture of the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0025] To make the objectives, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0026] It should be noted that in this article, the terms "include", "comprise", "have" or any other variant thereof are intended to cover non-exclusive inclusion, so that a process, method, article or terminal device including a series of elements not only includes those elements but also includes other elements not expressly listed, or further includes elements inherent to such process, method, article or terminal device. Without further limitation, the elements defined by the statement "include..." or "comprise..." do not exclude the existence of additional elements in the process, method, article or terminal device including the said elements.

[0027] It should be noted that the accompanying drawings are in very simplified forms and use non-precise ratios. In the present utility model, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. They are only used to conveniently and clearly assist in explaining the purpose of an embodiment of the present utility model.

[0028] Figure 1 FIG. 4 is a partial cross-sectional view of a reaction chamber 10 for plasma processing in an inductively coupled plasma (ICP) reaction device. The reaction chamber 10 includes a generally cylindrical inner liner 11 made of a metallic material. Inside the inner liner 11 is a space for performing plasma reactions, including a pedestal for supporting a substrate. Above the inner liner 11 is provided an insulating window 12, and above the insulating window 12 is provided a coil. The radio frequency energy of the coil passes through the insulating window 12 and acts on the gas above the substrate to generate plasma. A sealing ring 13 is also provided between the insulating window 12 and the inner liner 11 to achieve the sealing between the insulating window 12 and the inner liner 11. Since the weight of the insulating window 12 is relatively large, a jig is required for installation and removal. In the prior art, the installation accuracy of the jig for installing the insulating window 12 is not high, and it is impossible to ensure the concentric installation of the insulating window 12 and the inner liner 11. When the insulating window 12 is installed on the top of the inner liner 11, a certain offset will occur. At the same time, when the existing jig installs the insulating window 12, the insulating window 12 needs to be lifted and moved multiple times to align with the inner liner 11. During the process of lifting and moving the insulating window 12 multiple times, the sealing ring 13 below the insulating window 12 will be worn, so the sealing ring 13 needs to be frequently replaced, increasing the manufacturing cost; if the sealing ring 13 is not replaced in time, it may also cause the leakage of plasma.

[0029] In view of the above defects, this embodiment provides a jig 100 for disassembling and assembling the insulating window 12 in an inductively coupled plasma reaction device, as Figure 1 and Figure 2As shown in the figure, the jig 100 includes: a main body ring 101, the inner diameter of which is greater than or equal to the outer diameter of the insulating window 12, so that the main body ring 101 can be sleeved on the circumferential outer side of the insulating window 12 during use; a positioning member 102, which is arranged at intervals on the lower surface of the main body ring 101 and corresponds to the preset positioning holes 14 at the top of the inner liner 11. By inserting the positioning member 102 into the corresponding positioning holes 14, the concentricity of the main body ring 101 and the inner liner 11 can be ensured; a plurality of fixed chucks 103, which have a fixed thickness extending radially along the main body ring 101 and are fixed at intervals on the inner side of the main body ring 101; at least one adjusting chuck 104, which is installed on the inner side of the main body ring 101 and can move radially along the main body ring 101; a lifting member 105, which is fixedly connected to the main body ring 101 and is used to lift the main body ring 101, and the adjusting chuck 104 can be arranged opposite to the fixed chuck 103; when moving the insulating window 12, the fixed chuck 103 and the adjusting chuck 104 respectively abut against the circumferential side walls of the insulating window 12, adjust the radial position of the adjusting chuck 104 on the main body ring 101, and further adjust the position of the insulating window 12 in the main body ring 101 to make the insulating window 12 concentric with the main body ring 101, and the fixed chuck 103 and the adjusting chuck 104 are fixed to the circumferential side walls of the insulating window 12 by friction, so that the insulating window 12 and the main body ring 101 remain relatively stationary.

[0030] As Figure 1 and Figure 2 shown in the figure, when installing the insulating window 12 using the jig 100 provided in this embodiment, the main body ring 101 and the insulating window 12 that remain relatively stationary are lifted simultaneously through the lifting member 105 and moved above the inner liner 11. Since the main body ring 101 can be concentrically arranged with the inner liner 11 through the positioning member 102, the positioning member 102 on the lower surface of the main body ring 101 is inserted into the corresponding positioning holes 14 to complete the concentric installation of the main body ring 101 and the inner liner 11, and thus the concentric installation of the insulating window 12 and the inner liner 11 is achieved at one time, reducing the wear on the sealing ring 13 below the insulating window 12. Among them, since three points can determine a circle, the number of the positioning members 102 is greater than or equal to 3 to ensure the concentric setting of the main body ring 101 and the inner liner 11.

[0031] Further, as Figure 1As shown, a clamping groove 121 is further provided on the circumferential side wall of the insulating window 12. The fixed clamping plug 103 and the adjusting clamping plug 104 can be embedded into the clamping groove 121 to improve the connection stability between the insulating window 12 and the main body ring 101. Among them, the sides of the fixed clamping plug 103 and the adjusting clamping plug 104 facing the insulating window 12 match the radian of the clamping groove 121. Specifically, the clamping groove 121 on the circumferential side wall of the insulating window 12 is a concave groove recessed towards the center of the circle. The sides of the fixed clamping plug 103 and the adjusting clamping plug 104 facing the insulating window 12 are convex arcs, and the radian of the arc is approximately equal to the radian of the groove, so that the fixed clamping plug 103 and the adjusting clamping plug 104 can be closely attached to the clamping groove 121. The clamping groove 121 provides a clamping fixing force and friction force to the fixed clamping plug 103 and the adjusting clamping plug 104, so that the insulating window 12 can be more stably fixed in the main body ring 101, effectively preventing the insulating window 12 from falling off the main body ring 101, and further improving the installation stability of the insulating window 12.

[0032] Specifically, as Figure 2 shown, in this embodiment, the shape of the main body ring 101 is a closed ring. The inner diameter of the main body ring 101 is larger than the outer diameter of the insulating window 12, so that the main body ring 101 can be arranged around the circumferential outer side of the insulating window 12. Two fixed clamping plugs 103 and two adjusting clamping plugs 104 are arranged along the circumference of the main body ring 101. The fixed clamping plug 103 has a fixed thickness extending radially along the main body ring 101, which can make the center of the insulating window 12 approximately located at the center position of the main body ring 101 when the insulating window 12 is arranged in the main body ring 101. Then, move the adjusting clamping plug 104 along the radial direction of the main body ring 101 to change the radial position of the adjusting clamping plug on the main body ring 101, that is, adjust the distance from the adjusting clamping plug 104 to the center of the main body ring 101, so that the center of the insulating window 12 coincides with the center of the main body ring 101, and then realize the concentric setting of the insulating window 12 and the main body ring 101. By setting the main body ring 101 as a closed ring, the fixed clamping plug 103 and the adjusting clamping plug 104 can be arranged at any position in the circumferential direction of the main body ring 101 to realize the radial adjustment of any circumferential position of the insulating window 12, and then ensure the concentric setting of the insulating window 12 and the main body ring 101.

[0033] Among them, as Figure 2As shown, the adjusting plug 104 includes a plug body 141 and a fastener 142; the first end of the fastener 142 is connected to the plug body 141, and the second end passes through the radial arrangement of the main ring 101. The plug body 141 is installed on the inner side of the main ring 101 or flexibly removed from the main ring 101 through the fastener 142 to ensure that the insulating window 12 can be installed in the main ring 101. Specifically, in the present embodiment, the fastener 142 is a second screw, and the plug body 141 is fixed on the main ring 101 by inserting the second screw into the mounting hole on the main ring 101 and rotating the second screw; when the insulating window 12 is installed in the main ring 101 and the position of the insulating window 12 in the main ring 101 needs to be adjusted, the second screw is rotated again to drive the plug body 141 to move back and forth radially along the main ring 101, and the extrusion force provided by the plug body 141 pushes the insulating window 12 to be displaced radially, thereby realizing the concentric adjustment of the insulating window 12 and the main ring 101.

[0034] Furthermore, the hanging member 105 includes at least one hanging rod 151, and a plurality of pull rings 152 are provided on the hanging rod 151. Both ends of each hanging rod 151 are fixedly connected to the main ring member 101, and two adjacent hanging rods 151 can also be arranged crosswise at a certain angle to improve the stability of the main ring member 101. By applying an upward pulling force to the pull ring 152, the main ring member 101 and the insulating window 12 are lifted up at the same time. In this embodiment, Figure 2 As shown, the hanging member 105 includes two hanging rods 151 , and the hanging rods 151 are arranged perpendicular to each other, which reduces the deformation and stress concentration of the main ring member 101 and enhances the structural stability of the main ring member 101 .

[0035] In another embodiment, if Figure 3 As shown, the lifting member 205 includes a lifting ring 251 concentric with the main ring 101, and a plurality of pull rings 253 are arranged on the lifting ring 251, and the pull ring 253 is fixedly connected to the lifting ring 251, and the lifting ring 251 is connected to the main ring 101 through a plurality of reinforcing rods 252, which can effectively enhance the structural stability between the lifting ring 251 and the main ring 101, especially when subjected to external loads or torque, it can help disperse the force, reduce local stress, and improve the rigidity and anti-deformation ability of the overall structure. At the same time, by setting the lifting ring 251 concentric with the main ring 101, the level of the main ring 101 and the insulating window 12 during the movement is also guaranteed, which effectively prevents the main ring 101 and the insulating window 12 from tilting, and improves the assembly safety of the insulating window 12.

[0036] In yet another embodiment, Figure 4As shown, the shape of the main body ring 201 is an open ring, and the opening can be set at any position in the circumferential direction of the main body ring 201. Compared with a closed ring, the inner diameter of the open ring can be finely adjusted by adjusting the tension at the opening, which enables the fixed plug 103 and the adjusting plug 104 provided on the open ring to fit more closely to the circumferential side wall of the insulating window 12, increasing the extrusion force of the fixed plug 103 and the adjusting plug 104 on the open ring, and thus improving the fixing effect between the main body ring 201 and the insulating window 12. At the same time, when the open ring lifts the insulating window 12, the stress is mainly concentrated at the opening, while the stress in other parts of the open ring is relatively small, which can avoid generating uniform high stress on the entire open ring, thereby prolonging the service life of the main body ring 201 and reducing the risk of fracture.

[0037] In yet another embodiment, as Figure 5 shown, the main body ring 301 is composed of a plurality of arc segments 311. The plurality of arc segments 311 are evenly distributed along the circumferential direction of the insulating window 12 to form a ring shape, and at least one fixed plug 103 and / or adjusting plug 104 is provided on each arc segment 311. Specifically, in this embodiment, the main body ring 301 is composed of two arc segments 311. The inner diameter of the main body ring 301 formed by the two arc segments 311 surrounding the insulating window 12 is greater than or equal to the outer diameter of the insulating window 12. One fixed plug 103 and one adjusting plug 104 are provided on each arc segment 311, and the two arc segments 311 are connected by a suspension rod 151. During use, the two arc segments 311 are respectively sleeved on the circumference of the insulating window 12, the position of the adjusting plug 104 in the radial direction of the arc segment 311 is adjusted, the insulating window 12 is clamped inside the main body ring 301 to make the insulating window 12 concentric with the main body ring 301, and then the positioning member 102 on the lower surface of the main body ring 301 is inserted into the corresponding positioning hole 14 to complete the concentric installation of the main body ring 301 and the inner liner 11, thereby realizing the concentric installation of the insulating window 12 and the inner liner 11 at one time. By splitting the main body ring 301 into multiple arc segments 311, each split arc segment 311 can independently bear the force, thereby improving the structural stability and service life of the main body ring 301; at the same time, if a certain part of the main body ring 301 is damaged, only the corresponding arc segment 311 needs to be replaced instead of the entire main body ring 301, reducing the maintenance cost.

[0038] After the inductively coupled plasma (ICP) reaction device operates at high temperature for a long time, the sealing ring 13 between the inner liner 11 and the insulating window 12 tightly adheres the inner liner 11 and the insulating window, resulting in time-consuming and laborious disassembly of the insulating window 12. Based on this, as Figures 1 to 5The jig of any of the embodiments shown further includes a jacking member 106. A plurality of through holes 161 are provided in the circumferential direction of the main body ring members 101, 201, and 301. The jacking member 106 can pass through the through holes 161 and contact the top of the inner liner 11. For Figure 1 and Figure 2 taking the jig 100 shown as an example, when the insulating window 12 is disassembled from the inner liner 11 by using the jig 100, first, the main body ring member 101 is sleeved on the circumference of the insulating window 12, and the radial position of the adjusting plug 104 is adjusted to fix the adjusting plug 104 and the fixed plug 103 to the insulating window 12. In this embodiment, the shape of the jacking member 106 is a cylindrical pin with equal diameter. By applying an impact force to the cylindrical pin, the cylindrical pin can move downward along the axial direction of the main body ring member 101 until the bottom of the cylindrical pin abuts against the top of the inner liner 11. Furthermore, the cylindrical pin provides an upward acting force to separate the insulating window 12 from the inner liner 11. By providing the jacking member 106, the insulating window 12 and the inner liner 11 can be pre-separated, which is convenient for later removing the insulating window 12 from the inner liner 11 through the lifting member 105.

[0039] Optionally, the jacking member 106 is a first screw, and the through hole 161 provided on the main body ring member is a threaded hole matching the first screw. The first screw makes a screwing-in movement in the threaded hole, so that the first screw moves downward along the axial direction of the main body ring member until the first screw abuts against the top of the inner liner 11. The first screw provides an upward acting force to separate the insulating window 12 from the inner liner 11. This screw structure has the advantages of labor saving and strong controllability, and avoids damage to the top of the inner liner 11 caused by excessive impact force applied.

[0040] In summary, the jig for disassembling and assembling the insulating window provided by the present utility model can realize the concentric setting of the insulating window 12 and the main body ring member 101 by adjusting the radial positions of the fixed plug 103 and the adjusting plug 104 provided on the main body ring member 101; at the same time, by inserting the positioning member 102 on the lower surface of the main body ring member 101 into the positioning hole 14 on the top of the inner liner 11, the concentric installation of the main body ring member 101 and the inner liner 11 is completed. Furthermore, the concentric installation of the insulating window 12 and the inner liner 11 is realized at one time, reducing the wear of the sealing ring 13 below the insulating window 12. Secondly, by providing the jacking member 106, the insulating window 12 and the inner liner 11 can be separated, which is convenient for removing the insulating window 12 from the inner liner 11 through the lifting member 105, improving the convenience of disassembling and assembling the insulating window 12, and also avoiding damage to the insulating window 12 and the inner liner 11 caused by violent disassembly.

[0041] Although the content of the present utility model has been described in detail through the above preferred embodiments, it should be recognized that the above description should not be considered as a limitation of the present utility model. After those skilled in the art have read the above content, various modifications and alternatives to the present utility model will be obvious. Therefore, the protection scope of the present utility model should be defined by the appended claims.

Claims

1. A fixture for disassembling and assembling an insulating window in a semiconductor processing device, characterized in that: The semiconductor processing device is provided with a liner, and the insulating window is provided on the liner, comprising: A main body ring, whose inner diameter is greater than or equal to the outer diameter of the insulating window, can be sleeved on the circumferential outer side of the insulating window; Positioning members, which are arranged at intervals on the lower surface of the main ring member and correspond to the positioning holes on the top of the liner; A plurality of fixed plugs, which have a fixed thickness extending radially along the main ring member and are fixed at intervals on the inner side of the main ring member; At least one adjusting plug, which is installed on the inner side of the main body ring and can move along the radial direction of the main body ring; A hanging part, which is fixedly connected to the main ring part; The fixed plug and the adjusting plug can abut against the circumferential side wall of the insulating window, and the radial position of the adjusting plug on the main ring can be adjusted to make the insulating window and the liner installed concentrically.

2. The fixture according to claim 1, characterized in that: A card slot is also provided on the side wall of the insulating window, and the fixed card plug and the adjustable card plug can be embedded in the card slot.

3. The fixture according to claim 1, characterized in that: It also includes a plurality of lifting members, each of which passes through a through hole arranged in the circumference of the main ring member. When the adjusting plug and the fixing plug are fixed to the insulating window, the lifting member can move downward along the axial direction of the main ring member until the bottom of the lifting member abuts against the top of the lining, providing an upward force to separate the insulating window from the lining.

4. The fixture according to claim 3, characterized in that: The lifting member is a first screw, and the through hole is a screw hole matching the first screw.

5. The fixture according to claim 1, characterized in that: The regulating plug comprises a plug body and a fastener; the first end of the fastener is connected to the plug body, and the second end penetrates the radial arrangement of the main ring.

6. The fixture according to claim 5, characterized in that: The fastener is a second screw. By rotating the second screw, the plug body is driven to move radially along the main ring. By stopping the rotation of the second screw, the plug body is fixed on the main ring.

7. The fixture according to claim 2, characterized in that: The side of the fixed plug and the adjustable plug facing the insulating window matches the arc of the slot on the side wall of the insulating window.

8. The fixture according to claim 1, characterized in that: The main body ring is a closed circular ring, or an open circular ring, or is composed of a plurality of arc segments.

9. The fixture according to claim 8, characterized in that: A plurality of arc segments are evenly distributed along the circumference of the insulating window, and at least one fixed plug and / or adjustable plug is arranged on each arc segment.

10. The fixture according to claim 1, characterized in that: The hanging component comprises at least one hanging rod, on which a plurality of pull rings are arranged, and both ends of each hanging rod are respectively fixedly connected to the main body ring component.

11. The fixture according to claim 1, characterized in that: The lifting component comprises a lifting ring which is concentric with the main body ring component, the lifting ring is provided with a plurality of pull rings, and the lifting ring is connected with the main body ring component through a plurality of reinforcing rods.

12. The fixture according to claim 1, characterized in that: The number of the positioning members is greater than or equal to 3.

13. The fixture according to claim 1, characterized in that: The semiconductor processing device is an inductively coupled plasma reaction device.

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