Normalizing device and silicon wafer processing equipment
By designing a silicon wafer regularization device including multiple regular components and driving mechanisms, the problem of difficulty in ensuring consistency in the silicon wafer during handling is solved, and the four sides of the silicon wafer are regularized to ensure consistency and production accuracy.
Patent Information
- Application Number
- CN202422105420.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-28
- Publication Date
- 2025-06-10
- Estimated Expiration
- 2034-08-28
AI Technical Summary
In the prior art, it is difficult to ensure the precise placement and neat stacking of hundreds of silicon wafers during the process of transporting from the conveying line to the material box, which makes it difficult to ensure consistency and may have an adverse impact on subsequent processes.
A regular device is designed, including a frame body, a regular work station, an installation station, a first regular component, a second regular component, a third regular component, a fourth regular component, a driving mechanism and a transmission link, etc. The first regular component is driven close to or away from the regular work station through the drive mechanism, and driven to other regular components, so that it is close to or away from the regular work station at the same time, so as to achieve four sides of the silicon wafer.
Through this device, the consistency of silicon wafers can be effectively guaranteed, production accuracy can be improved, adversely affected to subsequent processes, and production costs and equipment complexity can be reduced.
Smart Images
Figure CN222966090U_ABST
Abstract
Description
Technical Field
[0001] The present disclosure relates to the field of photovoltaic technologies, and more particularly to a rectifying device and a silicon wafer processing apparatus. Background Art
[0002] During the process of transferring silicon wafers from a conveyor line to a cassette, ensuring the precise placement and neat stacking of hundreds of silicon wafers is a major technical challenge. Currently, SCARA (Selective Compliance Assembly Robot Arm) combined with vision photography technology is used to achieve the automated handling and placement of silicon wafers. However, due to the influence of various factors, the consistency of silicon wafers is still difficult to guarantee, which may have an adverse impact on subsequent processes. Summary of the Utility Model
[0003] In view of this, embodiments of the present disclosure provide a rectifying device and a silicon wafer processing apparatus to solve the problem that the consistency of silicon wafers is difficult to guarantee in the prior art.
[0004] The present disclosure provides a rectifying device, including: a frame body, the frame body having a rectifying station and an installation station located outside the rectifying station, the installation station having a first side, a second side, a third side, and a fourth side; a first rectifying component, located on the first side and slidably connected to the frame body; a driving mechanism, connected to the first rectifying component and configured to drive the first rectifying component to approach or move away from the rectifying station; a second rectifying component, located on the second side and slidably connected to the frame body, the sliding direction of the second rectifying component being parallel to the sliding direction of the first rectifying component; a transmission connecting rod, one end of the transmission connecting rod being rotatably connected to the first rectifying component, the other end of the transmission connecting rod being rotatably connected to the second rectifying component, and a portion of the transmission connecting rod between the two ends being rotatably connected to the frame body; a third rectifying component, located on the third side and slidably connected to the frame body, the sliding direction of the third rectifying component being perpendicular to the sliding direction of the first rectifying component; a first linkage component, the first linkage component being respectively connected to the first rectifying component and the third rectifying component and configured to drive the third rectifying component to approach or move away from the rectifying station synchronously when the first rectifying component approaches or moves away from the rectifying station; a fourth rectifying component, located on the fourth side and slidably connected to the frame body, the sliding direction of the fourth rectifying component being parallel to the sliding direction of the third rectifying component; a second linkage component, the second linkage component being respectively connected to the first rectifying component and the fourth rectifying component and configured to drive the fourth rectifying component to approach or move away from the rectifying station synchronously when the first rectifying component approaches or moves away from the rectifying station.
[0005] According to an embodiment of the present disclosure, the first linkage assembly includes: a wedge member located on a side of the first alignment assembly close to the alignment station and fixedly connected to the first alignment assembly. The wedge member has a first inclined surface which intersects the sliding direction of the first alignment assembly. The first inclined surface slopes gradually away from the alignment station from one end close to the first alignment assembly to the other end away from the first alignment assembly. The first inclined surface is in sliding contact with a side of the third alignment assembly facing away from the alignment station; a first elastic member connected to the third alignment assembly and configured to provide an elastic force to the third alignment assembly in a direction away from the alignment station.
[0006] According to an embodiment of the present disclosure, the driving mechanism includes: a rotary driving member installed on the frame body. The rotary driving member includes an output shaft; a cam installed on the output shaft; a first follower installed on the first alignment assembly and abutting against a side wall of the cam. The first follower is located on a side of the cam close to the alignment station; a second elastic member connecting the frame body and the first alignment assembly and configured to provide an elastic force to the first alignment assembly in a direction away from the alignment station.
[0007] According to an embodiment of the present disclosure, the first alignment assembly includes: an alignment member located above the frame body together with the second alignment assembly, the third alignment assembly, and the fourth alignment assembly, and disposed opposite to the second alignment assembly; a connecting member having one end fixedly connected to the alignment member and the other end extending below the frame body and connected to the first follower.
[0008] According to an embodiment of the present disclosure, a second inclined surface is provided on a side of the fourth alignment assembly facing away from the alignment station. The second inclined surface intersects the sliding direction of the fourth alignment assembly. The second inclined surface slopes gradually away from the alignment station from one end close to the first alignment assembly to the other end away from the first alignment assembly. The second inclined surface is in sliding contact with the second linkage assembly. The second linkage assembly is configured to push the fourth alignment assembly close to the alignment station through the second inclined surface when the first alignment assembly approaches the alignment station.
[0009] According to an embodiment of the present disclosure, the second linkage assembly includes: a linkage rod fixedly connected to the first alignment assembly; a second follower installed on the linkage rod and in sliding contact with the second inclined surface; a third elastic member connecting the frame body and the fourth alignment assembly and configured to provide an elastic force to the fourth alignment assembly in a direction away from the alignment station.
[0010] According to an embodiment of the present disclosure, it further includes: a fixing frame, located below the frame body and fixedly connected to the frame body. The fixing frame includes a bottom plate, and the bottom plate is provided with a through hole; the rotary driving member is fixedly connected to the bottom plate, and the output shaft of the rotary driving member passes through the through hole.
[0011] According to an embodiment of the present disclosure, at least one of the first rectifying assembly, the second rectifying assembly, the third rectifying assembly, and the fourth rectifying assembly is provided with a contact member, and the contact member is configured to contact the product when the first rectifying assembly, the second rectifying assembly, the third rectifying assembly, or the fourth rectifying assembly slides towards the rectifying station; the contact member is detachably connected to the first rectifying assembly, the second rectifying assembly, the third rectifying assembly, or the fourth rectifying assembly.
[0012] According to an embodiment of the present disclosure, the number of the rectifying stations is two, and both of the two rectifying stations are located between the first rectifying assembly and the second rectifying assembly; the number of the third rectifying assemblies is two, and the two third rectifying assemblies are located between two adjacent rectifying stations; two first inclined surfaces are respectively arranged on two sides of the wedge-shaped member, and one of the first inclined surfaces is in sliding contact with one of the third rectifying assemblies, and the other first inclined surface is in sliding contact with the other third rectifying assembly; the number of the second linkage assemblies is two, and both of the two second linkage assemblies are connected to the first rectifying assembly; the number of the fourth rectifying assemblies is two, and the two fourth rectifying assemblies are connected to the two second linkage assemblies in one-to-one correspondence.
[0013] According to an embodiment of the present disclosure, the first elastic member includes: a first tension spring, one end of the first tension spring is fixedly connected to one of the third rectifying assemblies, and the other end of the first tension spring is fixedly connected to the other third rectifying assembly.
[0014] The present disclosure also provides a wafer processing device, including: the rectifying device as described above; a cassette, having a storage cavity, and the cassette is fixedly connected to the frame body in the rectifying device; wherein, the frame body is provided with an access hole, the access hole is located at the rectifying station, and the access hole is communicated with the storage cavity.
[0015] According to the aligning device and the wafer processing equipment provided by the embodiments of the present disclosure, when the first aligning component is driven by a driving mechanism to slide towards the aligning station, the first aligning component can drive the second aligning component, the third aligning member, and the fourth aligning member, so that the first aligning component, the second aligning component, the third aligning member, and the fourth aligning member slide towards the aligning station simultaneously, realizing the four-sided alignment of the wafer, ensuring the consistency of the wafer, improving the production accuracy, and preventing adverse effects on subsequent processes. Description of the Drawings
[0016] By describing the embodiments of the present disclosure in more detail in conjunction with the drawings, the above and other objects, features, and advantages of the present disclosure will become more obvious. The drawings are used to provide a further understanding of the embodiments of the present disclosure, and constitute a part of the specification. Together with the embodiments of the present disclosure, they are used to explain the present disclosure, and do not constitute a limitation to the present disclosure. In the drawings, the same reference numerals generally represent the same components or steps.
[0017] Figure 1 It is a top view of an aligning device provided by an embodiment of the present disclosure.
[0018] Figure 2 It is a perspective view of an aligning device provided by an embodiment of the present disclosure from one perspective.
[0019] Figure 3 It is a perspective view of an aligning device provided by an embodiment of the present disclosure from another perspective.
[0020] Figure 4 It is a perspective view of an aligning device provided by an embodiment of the present disclosure from yet another perspective.
[0021] Figure 5 It is a schematic structural diagram of an aligning device provided by an embodiment of the present disclosure when no aligning action is performed.
[0022] Figure 6 It is a schematic structural diagram of an aligning device provided by an embodiment of the present disclosure when an aligning action is performed.
[0023] Reference Signs:
[0024] 100, frame; 110, aligning station; 120, installation station; 130, fixing frame;
[0025] 200, first aligning component; 210, aligning member; 220, driving part; 230, connecting part; 241, linkage rod; 242, second follower; 250, contact part; 260, mounting bracket; 270, extension rod;
[0026] 300, second aligning component;
[0027] 400. Third regularizing component;
[0028] 500. Fourth regularizing component; 510. Second inclined surface;
[0029] 600. Driving mechanism; 610. Rotary driving member; 620. Cam; 630. First follower; 640. Second elastic member;
[0030] 700. Transmission connecting rod;
[0031] 800. Wedge member; 810. First inclined surface;
[0032] 910. First elastic member;
[0033] 920. Material box. Specific implementation manner
[0034] Next, the technical solutions in the embodiments of the present disclosure will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present disclosure. Obviously, the described embodiments are only a part of the embodiments of the present disclosure, rather than all the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present disclosure.
[0035] Next, in conjunction with Figures 1 to 6 An exemplary description will be given to the regularizing device of the embodiments of the present disclosure.
[0036] The regularizing device of this embodiment includes a frame body 100. The frame body 100 has a regularizing station 110 and an installation station 120 located outside the regularizing station 110. The installation station 120 has a first side, a second side, a third side, and a fourth side. Specifically, the frame body 100 is a horizontally arranged rectangular plate structure. The regularizing station 110 is a rectangular area on the upper side of the frame body 100. The installation station 120 is a square annular or approximately square annular area of the frame body 100 located outside the regularizing station 110. The first side, the second side, the third side, and the fourth side are the four side positions of the installation station 120. Among them, the first side is opposite to the second side, and the third side is opposite to the fourth side.
[0037] The alignment device further includes a first alignment component 200, a second alignment component 300, a third alignment component 400, and a fourth alignment component 500. The installation station 120 is the installation position of the first alignment component 200, the second alignment component 300, the third alignment component 400, and the fourth alignment component 500. Among them, the first alignment component 200 is located on the first side and is slidably connected to the frame 100. The second alignment component 300 is located on the second side and is slidably connected to the frame 100. The sliding direction of the second alignment component 300 is parallel to the sliding direction of the first alignment component 200. The third alignment component 400 is located on the third side and is slidably connected to the frame 100. The sliding direction of the third alignment component 400 is perpendicular to the sliding direction of the first alignment component 200. The fourth alignment component 500 is located on the fourth side and is slidably connected to the frame 100. The sliding direction of the fourth alignment component 500 is parallel to the sliding direction of the third alignment component 400. The sliding directions of the first alignment component 200, the second alignment component 300, the third alignment component 400, and the fourth alignment component 500 are all directions of approaching or departing from the alignment station 110. Optionally, to make the sliding of the first alignment component 200, the second alignment component 300, the third alignment component 400, and the fourth alignment component 500 more stable, the frame 100 is provided with slide rails that are slidably connected to the first alignment component 200, the second alignment component 300, the third alignment component 400, and the fourth alignment component 500 respectively.
[0038] The alignment device further includes a driving mechanism 600, a transmission connecting rod 700, a first linkage component, and a second linkage component.
[0039] Among them, the driving mechanism 600 is connected to the first alignment component 200, and the driving mechanism 600 is configured to drive the first alignment component 200 to approach or depart from the alignment station 110.
[0040] One end of the transmission connecting rod 700 is rotatably connected to the first alignment component 200. Specifically, the first alignment component 200 includes mounting brackets 260 located at both ends. The mounting brackets 260 are provided with extension rods 270, and one end of the transmission connecting rod 700 is rotatably connected to the extension rod 270. The other end of the transmission connecting rod 700 is rotatably connected to the second alignment component 300. The portion of the transmission connecting rod 700 between the two ends is rotatably connected to the frame 100. When the driving mechanism 600 drives the first alignment component 200 to approach the alignment station 110, the transmission connecting rod 700 rotates under the drive of the first alignment component 200, thereby driving the second alignment component 300 to approach the alignment station 110; when the first alignment component 200 departs from the alignment station 110, the transmission connecting rod 700 rotates under the drive of the first alignment component 200, thereby driving the second alignment component 300 to depart from the alignment station 110.
[0041] Optionally, long strip-shaped through holes are respectively arranged at both ends of the transmission link 700, and rotating shafts are slidably inserted into the long strip-shaped through holes. One of the rotating shafts is connected to the first alignment component 200, and the other rotating shaft is connected to the second alignment component 300.
[0042] The first linkage component is respectively connected to the first alignment component 200 and the third alignment component 400, and is configured to drive the third alignment component 400 to approach or move away from the alignment station 110 synchronously when the first alignment component 200 approaches or moves away from the alignment station 110. Exemplarily, when the driving mechanism 600 drives the first alignment component 200 to approach the alignment station 110, the first linkage component transmits to the third alignment component 400, thereby driving the third alignment component 400 to approach the alignment station 110; when the first alignment component 200 moves away from the alignment station 110, the first linkage component transmits to the third alignment component 400, thereby driving the third alignment component 400 to move away from the alignment station 110.
[0043] The second linkage component is respectively connected to the first alignment component 200 and the fourth alignment component 500, and is configured to drive the fourth alignment component 500 to approach or move away from the alignment station 110 synchronously when the first alignment component 200 approaches or moves away from the alignment station 110. Exemplarily, when the driving mechanism 600 drives the first alignment component 200 to approach the alignment station 110, the second linkage component transmits to the fourth alignment component 500, thereby driving the fourth alignment component 500 to approach the alignment station 110; when the first alignment component 200 moves away from the alignment station 110, the second linkage component transmits to the fourth alignment component 500, thereby driving the fourth alignment component 500 to move away from the alignment station 110.
[0044] In this embodiment, by the drive of the driving mechanism 600, the first alignment component 200, the second alignment component 300, the third alignment component 400, and the fourth alignment component 500 are simultaneously slid in the direction approaching the alignment station 110, so as to align the four sides of the silicon wafer, ensure the consistency of the silicon wafer, improve the production accuracy, and prevent adverse effects on subsequent processes. Since only one driving mechanism 600 is provided, the alignment device of this embodiment has the advantages of low production and use cost and small occupied space.
[0045] In some embodiments of the present disclosure, the first linkage component includes a wedge-shaped member 800 and a first elastic member 910.
[0046] The wedge-shaped member 800 is fixedly connected to the first sizing assembly 200. The wedge-shaped member 800 has a first inclined surface 810. The first inclined surface 810 is vertically arranged and intersects with the sliding direction of the first sizing assembly 200. The first inclined surface 810 is inclined gradually in a direction away from the sizing station 110 from one end close to the first sizing assembly 200 to the other end far from the first sizing assembly 200. The first inclined surface 810 is in sliding contact with the side of the third sizing assembly 400 facing away from the sizing station 110. When the driving mechanism 600 drives the first sizing assembly 200 to approach the sizing station 110, the wedge-shaped member 800 moves synchronously with the first sizing assembly 200, and pushes the third sizing assembly 400 to slide towards the sizing station 110 through the sliding contact between the first inclined surface 810 and the third sizing assembly 400.
[0047] The first elastic member 910 is connected to the third sizing assembly 400. The first elastic member 910 is, for example, a tension spring, a compression spring or an elastic sheet, etc. The first elastic member 910 is configured to provide an elastic force to the third sizing assembly 400 in a direction pointing away from the sizing station 110. Thus, when the first sizing assembly 200 moves away from the sizing station 110, the elastic force of the first elastic member 910 is used to drive the third sizing assembly 400 to slide in a direction away from the sizing station 110.
[0048] In some embodiments of the present disclosure, a second inclined surface 510 is provided on the side of the fourth sizing assembly 500 facing away from the sizing station 110. The second inclined surface 510 is vertically arranged and intersects with the sliding direction of the fourth sizing assembly 500. The second inclined surface 510 is inclined gradually in a direction away from the sizing station 110 from one end close to the first sizing assembly 200 to the other end far from the first sizing assembly 200. The second inclined surface 510 is in sliding contact with the first sizing assembly 200. When the driving mechanism 600 drives the first sizing assembly 200 to approach the sizing station 110, the first sizing assembly 200 pushes the fourth sizing assembly 500 to slide towards the sizing station 110 through the sliding contact with the second inclined surface 510.
[0049] Optionally, the second linkage assembly includes a linkage rod 241, a second follower 242 and a third elastic member 243.
[0050] The linkage rod 241 is fixedly connected to the first rectifying assembly 200. Specifically, the extending direction of the linkage rod 241 is parallel to the extending direction of the first rectifying assembly 200. One end of the linkage rod 241 is fixedly connected to the mounting bracket 260 of the first rectifying assembly 200, and the other end of the linkage rod 241 points in the direction close to the fourth rectifying assembly 500. The second follower 242 is installed at the end of the linkage rod 241 facing away from the first rectifying assembly 200 and is in sliding contact with the second inclined surface 510. Specifically, the second follower 242 includes a rotating shaft and a roller. The rotating shaft of the second follower 242 is vertically arranged and fixedly connected to the linkage rod 241. The roller of the second follower 242 is rotatably sleeved outside the rotating shaft of the second follower 242, and the roller of the second follower 242 contacts the second plane. When the driving mechanism 600 drives the first rectifying assembly 200 to approach the rectifying station 110, the linkage rod 241 drives the second follower 242 to move synchronously with the first rectifying assembly 200. The second follower 242 pushes the fourth rectifying assembly 500 through the second inclined surface 510, causing the fourth rectifying assembly 500 to slide towards the rectifying station 110.
[0051] The third elastic member 243 is connected to the fourth rectifying assembly 500. The third elastic member 243 is, for example, a tension spring, a compression spring, or an elastic sheet, etc. The third elastic member 243 is configured to provide an elastic force to the fourth rectifying assembly 500 in the direction away from the rectifying station 110. Thus, when the first rectifying assembly 200 moves away from the rectifying station 110, the elastic force of the third elastic member 243 is used to drive the fourth rectifying assembly 500 to slide in the direction away from the rectifying station 110.
[0052] In an embodiment of the present disclosure, the driving mechanism 600 includes a rotary driving member 610, a cam 620, a first follower 630, and a second elastic member 640. The rotary driving member 610 is mounted on the frame 100 and includes an output shaft. The rotary driving member 610 may be a rotary motor, a pneumatic motor, a hydraulic motor, etc. Taking the rotary driving member 610 as a rotary motor as an example, the motor shaft of the rotary motor is the output shaft. The cam 620 is mounted on the output shaft and can perform an eccentric motion under the drive of the rotary driving member 610. The first follower 630 is mounted on the first alignment assembly 200 and abuts against the side wall of the cam 620. The first follower 630 is located on the side of the cam 620 close to the alignment station 110. The first follower 630 includes a rotating shaft and a roller. The rotating shaft of the first follower 630 is vertically arranged and fixedly connected to the first alignment assembly 200. The roller of the first follower 630 is rotatably sleeved outside the rotating shaft of the first follower 630 and contacts the cam surface of the cam 620. When the rotary driving member 610 drives the cam 620 to rotate, the cam 620 can push the first follower 630 to move, thereby driving the first alignment assembly 200 to slide towards the direction close to the alignment station 110. The first elastic member 910 is a tension spring, a compression spring, an elastic sheet, etc. The second elastic member 640 connects the frame 100 and the first alignment assembly 200. The second elastic member 640 is configured to provide an elastic force to the first alignment assembly 200 in the direction away from the alignment station 110, so that when the rotary driving member 610 drives the cam 620 to rotate to an angle where the convex side gradually moves away from the first follower 630, the second elastic member 640 can drive the first alignment assembly 200 to slide towards the direction away from the alignment station 110.
[0053] In some other embodiments of the present disclosure, the driving mechanism 600 includes any one of linear driving members such as a cylinder, a hydraulic cylinder, a telescopic motor, or a linear motor. The movable end of the linear driving member is connected to the first follower 630, and the first follower 630 can be driven to slide towards the direction close to the alignment station 110 through the linear driving member.
[0054] Combined with Figure 3 , in an embodiment of the present disclosure, the first alignment assembly 200 includes an alignment member 210 and a connecting member.
[0055] The alignment member 210, the second alignment assembly 300, the third alignment assembly 400, and the fourth alignment assembly 500 are located above the frame 100. The alignment member 210 is connected to the second alignment assembly 300, and the alignment member 210 is connected to the wedge member 800.
[0056] One end of the connecting member is fixedly connected to the regularizing member 210, and the other end extends below the frame body 100 and is connected to the first follower 630. Specifically, the connecting member includes a driving portion 220 and a connecting portion 230. Both the driving portion 220 and the connecting portion 230 can be in a plate-like or rod-like structure. The driving portion 220 is located below the frame body 100 and is connected to the first follower 630. The connecting portion 230 is perpendicular to the frame body 100 and connects the regularizing member 210 and the driving portion 220.
[0057] In the above embodiment, the arrangement in which the regularizing member 210, the second regularizing assembly 300, the third regularizing assembly 400, and the fourth regularizing assembly 500 are located above the frame body 100, and the driving portion 220 is located below the frame body 100 and connected to the first follower 630 can effectively improve the space utilization rate in the vertical direction, reduce the components located above the frame body 100, make it easier for the product to be placed from above the frame body 100 to the regularizing station 110, and reduce the risk of product damage.
[0058] In an embodiment of the present disclosure, the regularizing device further includes a fixing frame 130. The fixing frame 130 is located below the frame body 100 and is fixedly connected to the frame body 100. The fixing frame 130 includes a bottom plate and a connecting plate. The connecting plate is arranged vertically, one end of which is fixedly connected to the lower side of the frame body 100, and the other end is fixedly connected to the bottom plate. The bottom plate is arranged horizontally and is provided with a through hole; the rotary driving member 610 is fixedly connected to the bottom plate, and the output shaft of the rotary driving member 610 passes through the through hole. For example, the rotary driving member 610 is a rotary motor. The rotary motor is arranged vertically, the motor housing of the rotary motor is located below the bottom plate and is fixedly connected to the bottom plate by bolts. The motor shaft of the rotary motor is the output shaft and passes through the through hole. The motor shaft of the rotary motor is connected to the cam 620.
[0059] The rotary driving member 610 can be fixed below the frame body 100 through the fixing frame 130, further improving the space utilization rate in the vertical direction.
[0060] Combined with Figure 2 , in an embodiment of the present disclosure, at least one of the first regularizing assembly 200, the second regularizing assembly 300, the third regularizing assembly 400, and the fourth regularizing assembly 500 is provided with a contact member 250. The contact member 250 is configured to contact the product when the first regularizing assembly 200, the second regularizing assembly 300, the third regularizing assembly 400, or the fourth regularizing assembly 500 slides toward the regularizing station 110.
[0061] Optionally, the first organizing component 200, the second organizing component 300, the third organizing component 400 and the fourth organizing component 500 are respectively provided with at least one contact member 250, and the contact member 250 is fixed on the side (i.e., the upper side) of the first organizing component 200, the second organizing component 300, the third organizing component 400 or the fourth organizing component 500 away from the frame 100, and in the direction toward the organizing station 110, the contact member 250 is located at the front side of the connected organizing component, the second organizing component 300, the third organizing component 400 or the fourth organizing component 500. When the first organizing component 200, the second organizing component 300, the third organizing component 400 and the fourth organizing component 500 move toward the organizing station 110, the contact members 250 of the first organizing component 200, the second organizing component 300, the third organizing component 400 and the fourth organizing component 500 respectively contact the side of the product and push the product to correct the position and angle.
[0062] The contact piece 250 is made of PEEK material, has good wear resistance, is not easily damaged during repeated use, and will not damage the product.
[0063] Optionally, the contact member 250 is detachably connected to the first regular assembly 200, the second regular assembly 300, the third regular assembly 400 or the fourth regular assembly 500. For example, the contact member 250 is provided with a vertical through hole, the upper side of the first regular assembly 200, the second regular assembly 300, the third regular assembly 400 or the fourth regular assembly 500 is provided with a threaded hole, and the contact member 250 is fixedly connected by a bolt that is penetrated through the through hole and threadedly matched with the threaded hole.
[0064] In one embodiment of the present disclosure, there are two tidying stations 110, and both of them are located between the first tidying component 200 and the second tidying component 300; there are two third tidying components 400, and both of them are located between two adjacent tidying stations 110; first inclined surfaces 810 are respectively provided on both sides of the wedge 800, and one of the first inclined surfaces 810 is in sliding contact with one of the third tidying components 400, and the other first inclined surface 810 is in sliding contact with the other third tidying component 400; there are two second linkage components, and both of them are connected to the first tidying component 200; there are two fourth tidying components 500, and both of them are connected to the two second linkage components in a one-to-one correspondence.
[0065] Specifically, along the length direction of the frame body 100, there are two regularly arranged regularizing workstations 110 at intervals. Installation workstations 120 are arranged on the outer sides of each regularizing workstation 110. The first regularizing component 200 and the second regularizing component 300 both extend along the length direction of the regularizing workstation 110 to both ends of the frame body 100, so that the two regularizing workstations 110 can share the first regularizing component 200 and the second regularizing component 300. Two corresponding third regularizing components 400 are arranged for the two regularizing workstations 110. The two third regularizing components 400 are arranged between the two regularizing workstations 110 and extend along the width direction of the frame body 100. First inclined surfaces 810 are respectively arranged on both sides of the wedge-shaped member 800, so that the cross-sectional dimension of the wedge-shaped member 800 gradually decreases from the end close to the first regularizing component 200 to the end far from the regularizing component. One end of the wedge-shaped member 800 facing away from the first regularizing component 200 is located between the two third regularizing components 400. Thus, when the wedge-shaped member 800 moves towards the second regularizing component 300, it can simultaneously push the two third regularizing components 400 away from each other, so that the two third regularizing components 400 respectively approach the corresponding regularizing workstations 110. The number of the fourth regularizing components 500 is two. The two fourth regularizing components 500 are respectively arranged at both ends in the length direction of the frame body 100 and extend along the width direction of the frame body 100. One second linkage component is correspondingly arranged for each fourth regularizing component 500. The inclination directions of the second inclined surfaces 510 of the two fourth regularizing components 500 are opposite. Thus, when the first regularizing component 200 slides towards the direction close to the regularizing workstation 110, it can push the two fourth regularizing components 500 closer to each other, that is, the two fourth regularizing components 500 respectively slide towards their corresponding regularizing workstations 110.
[0066] Optionally, in this embodiment, the number of the transmission linkages 700 is two. The two transmission linkages 700 are respectively arranged at both ends of the frame body 100 and are both rotationally connected to the first regularizing component 200 and the second regularizing component 300. The first regularizing component 200 and the second regularizing component 300 have a relatively large length. By arranging the two transmission linkages 700, the transmission between the first regularizing component 200 and the second regularizing component 300 can be more stable.
[0067] Combined with Figure 1 and Figure 2, the alignment device of this embodiment has two alignment stations 110, and can simultaneously perform the alignment operations on two products. Thus, it can meet the simultaneous alignment requirements of the two parts of the product after the silicon wafer is laser cleaved. In addition, since the two third alignment components 400 and the two fourth alignment components 500 in the alignment device of this embodiment are respectively in a symmetric form, it can better adapt to the symmetric structure of the two parts of the product formed after the silicon wafer is laser cleaved, without the need to flip and adjust the two parts of the product, which is beneficial to simplifying the process. In addition, by using the same driving mechanism 600 to meet the driving requirements of the two alignment stations 110, the complexity and production cost of the alignment device can be effectively reduced.
[0068] Combined with Figure 2 , in an embodiment of the present disclosure, the first elastic member 910 includes a first tension spring. The first tension spring is arranged along the length direction of the frame body 100. One end of the first tension spring is fixedly connected to one of the third alignment components 400, and the other end of the first tension spring is fixedly connected to the other third alignment component 400. In this embodiment, the elastic reset of the two third alignment components 400 is simultaneously realized by the first tension spring. On the one hand, it can reduce the complexity of the alignment device and the cost. On the other hand, it can reduce the space occupied by the first elastic member 910. On the other hand, it is convenient to ensure the synchronism of the two third alignment components 400, which is beneficial to reducing the debugging difficulty.
[0069] Combined with Figure 5 and Figure 6 , for the alignment device of this embodiment, when the alignment action is not executed, the distance between the first alignment component 200 and the second alignment component 300 and the distance between the third alignment component 400 and the fourth alignment component 500 are relatively large, avoiding interference between the first alignment component 200, the second alignment component 300, the third alignment component 400 and the fourth alignment component 500 and the product, and it is convenient to place the product on the alignment station 110 for preparing the alignment operation, or to take out the product from the alignment station 110; when the alignment device executes the alignment action, the distance between the first alignment component 200 and the second alignment component 300 and the distance between the third alignment component 400 and the fourth alignment component 500 are respectively reduced. At this time, the first alignment component 200 and the second alignment component 300 are in contact with two opposite sides of the product, and the third alignment component 400 and the fourth alignment component 500 are in contact with the other two opposite sides of the product, which can realize the four-sided alignment and precise positioning of the product, and effectively ensure the position accuracy of the product.
[0070] Combined with Figure 2, The embodiments of the present disclosure further provide a wafer processing device, which includes the above-mentioned regularization device and a cassette 920. The cassette 920 has a storage cavity, and the cassette 920 is fixedly connected to the frame 100 in the regularization device; wherein, the frame 100 is provided with an access hole, the access hole is located at the regularization station 110, and the access hole communicates with the storage cavity.
[0071] In the wafer processing device of this embodiment, before the product enters the cassette 920, it can be regularized by the regularization device. On the one hand, it ensures the position accuracy of the product, and on the other hand, it can also prevent the product from contacting and damaging other components due to position errors.
[0072] Optionally, when the regularization device includes two regularization stations 110, the number of cassettes 920 is two, and the storage cavities of the two cassettes 920 communicate with the access holes corresponding to the two regularization stations 110 respectively.
[0073] Optionally, the cassette 920 is a drawer-type cassette 920. When the number of products in the cassette 920 reaches a preset value, it is convenient to perform operations such as moving the cassette 920.
[0074] Optionally, the wafer processing device further includes a lifting mechanism. The lifting mechanism has a lifting end, and this lifting end can support the product in the cassette 920 and drive the product to move vertically, thereby facilitating the stacking and regularization of the product.
[0075] The expressions "an embodiment" and "embodiment" mentioned in the specification indicate that the described embodiments may include specific features, structures, or characteristics, but not necessarily every embodiment includes such specific features, structures, or characteristics. In addition, such phrases do not necessarily refer to the same embodiment. Moreover, when combining specific features, structures, or characteristics with an embodiment, implementing such features, structures, or characteristics in combination with other embodiments, whether explicitly or implicitly described, is within the knowledge scope of those skilled in the art.
[0076] It should be understood that the terms "on...", "above...", and "over..." in the present disclosure should be interpreted in the broadest manner, so that "on..." not only means "directly on something", but also includes the meaning of "on something" with intermediate features or layers therebetween, and "above..." or "over..." not only includes the meaning of "above or over something", but may also include the meaning of "above or over something" with no intermediate features or layers therebetween (i.e., directly on something).
[0077] In addition, for ease of description, spatial relative terms may be used in this document, such as "below", "beneath", "under", "above", "over", etc., to describe the relationship of one component or feature to other components or features as shown in the figures. Spatial relative terms are intended to encompass different orientations of a component in use or operation other than the orientation shown in the drawings. The device may have other orientations (rotated 90 degrees or at other orientations), and the spatial relative descriptors used in this document may be interpreted accordingly.
[0078] It should be noted that in this document, the term "comprise", "include" or any other variant thereof is intended to cover non-exclusive inclusion, such that a process, method, article or device comprising a series of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article or device. Without further limitation, an element defined by the phrase "comprising a..." does not exclude the presence of additional identical elements in the process, method, article or device comprising the element.
[0079] The above are only the preferred embodiments of the present disclosure and are not intended to limit the present disclosure. Any modifications, equivalent replacements, etc. made within the spirit and principles of the present disclosure shall be included within the protection scope of the present disclosure.
Claims
1. A tidying device, characterized in that: include: A frame, the frame having a tidying station and an installation station located outside the tidying station, the installation station having a first side, a second side, a third side and a fourth side; A first regularization component, located at the first side and slidably connected to the frame; a driving mechanism connected to the first tidying component and configured to drive the first tidying component to move toward or away from the tidying station; A second tidying component is located at the second side and is slidably connected to the frame, and the sliding direction of the second tidying component is parallel to the sliding direction of the first tidying component; A transmission connecting rod, one end of which is rotatably connected to the first regular assembly, the other end of which is rotatably connected to the second regular assembly, and a portion of the transmission connecting rod between the two ends is rotatably connected to the frame; A third tidying component is located at the third side and is slidably connected to the frame, and the sliding direction of the third tidying component is perpendicular to the sliding direction of the first tidying component; A first linkage component, the first linkage component is connected to the first tidying component and the third tidying component respectively, and is configured to drive the third tidying component to synchronously approach or move away from the tidying station when the first tidying component approaches or moves away from the tidying station; A fourth tidying component is located at the fourth side and is slidably connected to the frame, and the sliding direction of the fourth tidying component is parallel to the sliding direction of the third tidying component; A second linkage component is respectively connected to the first tidying component and the fourth tidying component, and is configured to drive the fourth tidying component to synchronously approach or move away from the tidying station when the first tidying component approaches or moves away from the tidying station.
2. The tidying device according to claim 1, characterized in that: The first linkage component comprises: A wedge-shaped member is located on a side of the first tidying component close to the tidying station and is fixedly connected to the first tidying component. The wedge-shaped member has a first inclined surface, the first inclined surface intersects with the sliding direction of the first tidying component, the first inclined surface gradually inclines in a direction away from the tidying station from an end close to the first tidying component to an end away from the first tidying component, and the first inclined surface is in sliding contact with a side of the third tidying component away from the tidying station; The first elastic member is connected to the third tidying component and is configured to provide an elastic force to the third tidying component in a direction away from the tidying station.
3. The tidying device according to claim 1 or 2, characterized in that: The driving mechanism comprises: A rotary drive member is mounted on the frame, and the rotary drive member includes an output shaft; A cam mounted on the output shaft; A first follower, mounted on the first tidying component and abutting against a side wall of the cam, wherein the first follower is located on a side of the cam close to the tidying station; A second elastic member connects the frame and the first tidying component and is configured to provide an elastic force to the first tidying component in a direction away from the tidying station.
4. The tidying device according to claim 3, characterized in that: The first structured component comprises: A tidying piece, which is located above the frame together with the second tidying component, the third tidying component and the fourth tidying component, and is arranged opposite to the second tidying component; A connecting piece, one end of which is fixedly connected to the regulating piece, and the other end of which extends to the bottom of the frame and is connected to the first follower.
5. The tidying device according to claim 1 or 2, characterized in that: A second inclined surface is provided on the side of the fourth tidying component facing away from the tidying station, the second inclined surface intersects with the sliding direction of the fourth tidying component, the second inclined surface gradually tilts toward the direction away from the tidying station from the end close to the first tidying component to the end away from the first tidying component, the second inclined surface is in sliding contact with the second linkage component, and the second linkage component is configured to push the fourth tidying component close to the tidying station through the second inclined surface when the first tidying component is close to the tidying station.
6. The tidying device according to claim 5, characterized in that: The second linkage component comprises: A linkage rod connected to the first regular component; A second follower, mounted on the linkage rod and in sliding contact with the second inclined surface; A third elastic member connects the frame and the fourth tidying component and is configured to provide an elastic force to the fourth tidying component in a direction away from the tidying station.
7. The tidying device according to claim 3, characterized in that: Also includes: A fixing frame, located below the frame body and fixedly connected to the frame body, the fixing frame comprising a bottom plate, and the bottom plate is provided with a through hole; The rotary drive member is fixedly connected to the bottom plate, and the output shaft of the rotary drive member is passed through the through hole.
8. The tidying device according to claim 1 or 2, characterized in that: At least one of the first tidying assembly, the second tidying assembly, the third tidying assembly and the fourth tidying assembly is equipped with a contact member, and the contact member is configured to contact the product when the first tidying assembly, the second tidying assembly, the third tidying assembly or the fourth tidying assembly slides toward the tidying station; The contact piece is detachably connected to the first structured component, the second structured component, the third structured component or the fourth structured component.
9. The tidying device according to claim 2, characterized in that: The number of the tidying stations is two, and the two tidying stations are both located between the first tidying component and the second tidying component; The number of the third tidying components is two, and the two third tidying components are located between two adjacent tidying stations; The first inclined surfaces are respectively arranged on both sides of the wedge-shaped member, one of the first inclined surfaces is in sliding contact with one of the third regular components, and the other first inclined surface is in sliding contact with the other third regular component; The number of the second linkage components is two, and the two second linkage components are both connected to the first regular component; The number of the fourth regular components is two, and the two fourth regular components are connected to the two second linkage components in a one-to-one correspondence.
10. The tidying device according to claim 9, characterized in that: The first elastic member comprises: A first tension spring, one end of which is fixedly connected to one of the third regular components, and the other end of which is fixedly connected to another of the third regular components.
11. A silicon wafer processing device, characterized in that: include: A tidying device as claimed in any one of claims 1 to 10; A material box having a storage cavity, wherein the material box is fixedly connected to a frame in the tidying device; Wherein, the frame is provided with an access hole, the access hole is located at the regular workstation, and the access hole is communicated with the storage cavity.