Substrate fixing device

Abstract

The utility model discloses a substrate fixing device, and belongs to the technical field of semiconductor board level packaging equipment. The adsorption platform is fixedly connected to the top of the supporting platform; the substrate edge pressing mechanism comprises four pressing strips, the four pressing strips are arranged on the periphery of the adsorption platform, a first lifting assembly is arranged on the supporting platform, and the output end of the first lifting assembly is connected with the four pressing strips and used for driving the four pressing strips to ascend and descend. According to the utility model, the substrate is kept at a fixed position through the four pressing strips and the adsorption platform, so that the substrate can be fully attached to the adsorption platform, the subsequent process flow is facilitated, and the completeness of the substrate process is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor board-level packaging equipment, in particular to a substrate fixing device. Background Art

[0002] PLP (panel level Package) is also called board-level packaging. In board-level packaging manufacturing, due to the large size of the substrate (510mm * 515mm or 600mm * 600mm) and the edge warpage of about 7mm, the traditional wafer uses a vacuum adsorption method to keep it on the workbench, but this method cannot cope with the adsorption and retention of the current large warped substrate, making the edge of the substrate unable to fully fit the workbench, thus bringing inconvenience to the subsequent process flow.

[0003] Therefore, a substrate fixing device is proposed. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a substrate fixing device, aiming to solve or improve at least one of the above technical problems.

[0005] To achieve the above purpose, the utility model provides the following solutions: The utility model provides a substrate fixing device, including:

[0006] A support platform;

[0007] An adsorption platform, which is fixedly connected to the top of the support platform;

[0008] A substrate edge pressing mechanism, which includes four pressing strips. The four pressing strips are respectively arranged around the adsorption platform. A first lifting component is arranged on the support platform, and the output end of the first lifting component is connected to the four pressing strips and is used to drive the four pressing strips to lift.

[0009] Preferably, the first lifting component includes four brackets fixedly connected to the support platform. A first motor and a sliding guide rail are fixedly connected to the brackets. A lead screw rotatably connected to the brackets is fixedly connected to the output shaft of the first motor. A first slider is slidably connected to the sliding guide rail. The lead screw penetrates through the first slider and is threadedly connected to the first slider. A horizontal moving component is arranged on the first slider, and the four horizontal moving components are respectively connected to the four pressing strips.

[0010] Preferably, the horizontal moving component includes a cylinder fixedly connected to the first slider, and the output end of the cylinder is fixedly connected to the pressing strip.

[0011] Preferably, a support mechanism is further provided on the support platform. The support mechanism includes a bottom plate fixedly connected to the top of the support platform. The bottom plate is located below the adsorption platform. A second lifting assembly is provided on the bottom plate. A connecting plate is provided at the output end of the second lifting assembly. A plurality of support rods are fixedly connected to the connecting plate. A plurality of through holes are formed in the adsorption platform. The plurality of support rods are arranged in one-to-one correspondence with the plurality of through holes and are slidably connected.

[0012] Preferably, the second lifting assembly includes two horizontal limiting guide rails fixedly connected to the bottom plate. The two horizontal limiting guide rails are respectively located on both sides of the connecting plate. A horizontal limiting slider is slidably connected to the horizontal limiting guide rail. A driving assembly is provided on the bottom plate and is in transmission connection with the horizontal limiting slider. An inclined limiting guide rail is fixedly connected to the horizontal limiting slider. An inclined limiting slider is slidably connected to the inclined limiting guide rail. A vertical limiting slider is fixedly connected to the inclined limiting slider. A vertical limiting guide rail slidably connected to the vertical limiting slider is fixedly connected to the bottom plate. The two vertical limiting sliders are respectively fixedly connected to both sides of the connecting plate.

[0013] Preferably, the driving assembly includes a connecting rod rotatably connected to the bottom plate. First belt pulleys are respectively fixedly connected to both ends of the connecting rod. Two second belt pulleys are rotatably connected to the bottom plate. The first belt pulley and the second belt pulley are connected by a belt in transmission. The two horizontal limiting sliders are respectively fixedly connected to the two belts. A power assembly is provided on the bottom plate. The power assembly is connected to the connecting rod.

[0014] Preferably, the power assembly includes a second motor fixedly connected to the bottom plate. A gearbox is fixedly connected to the output shaft of the second motor. The output shaft of the gearbox is fixedly connected to one of the first belt pulleys.

[0015] Preferably, a plurality of columnar pressing blocks are fixedly connected below the pressing strip.

[0016] The present utility model discloses the following technical effects: The substrate is placed on the adsorption platform. The four pressing strips respectively press on the edge warping parts of the substrate, so that the adsorption platform effectively adsorbs the whole substrate, thereby keeping the substrate on the adsorption platform, ensuring that the substrate can fully fit the adsorption platform, and further facilitating the subsequent process flow and ensuring the integrity of the substrate process. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The drawings constituting a part of this application are used to provide a further understanding of this application. The schematic embodiments of this application and their descriptions are used to explain this application and do not constitute an improper limitation to this application. In the drawings:

[0018] Figure 1 is a schematic diagram of the overall structure when the present utility model fixes the substrate;

[0019] Figure 2 is a schematic structural view of the present utility model;

[0020] Figure 3 is a schematic structural view of the substrate edge pressing mechanism in the present utility model;

[0021] Figure 4 is a schematic structural view of the support mechanism in the present utility model;

[0022] Figure 5 is a schematic structural view of the second lifting assembly in the present utility model.

[0023] In the figure: 100, substrate edge pressing mechanism; 110, bracket; 120, first motor; 130, sliding guide rail; 140, cylinder; 150, connecting member between the guide rail and the cylinder; 160, pressing strip; 170, columnar pressing block; 180, ; 200, support platform; 300, substrate; 400, support mechanism; 410, second motor; 420, gearbox; 430, connecting rod; 440, belt; 450, horizontal limit slider; 460, connecting plate; 470, support rod; 480, oblique limit slider; 490, vertical limit slider; 500, manipulator. Specific embodiments

[0024] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments in the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0025] To make the above objects, features, and advantages of the present utility model more obvious and understandable, the present utility model will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0026] Referring to Figures 1 - 5 , the present utility model provides a substrate fixing device, including:

[0027] Support platform 200;

[0028] Adsorption platform, the adsorption platform is fixedly connected to the top of the support platform 200;

[0029] Substrate edge pressing mechanism 100, the substrate edge pressing mechanism 100 includes four pressing strips 160, the four pressing strips 160 are respectively arranged around the adsorption platform, and a first lifting assembly is arranged on the support platform 200, and the output end of the first lifting assembly is connected to the four pressing strips 160 and is used to drive the four pressing strips 160 to lift;

[0030] In this embodiment, a manipulator 500 is further provided on the top of the support platform 200, which is used to transfer the substrate 300 above the adsorption platform. When fixing the substrate 300, the substrate 300 is placed on the adsorption platform. A plurality of adsorption holes are formed in the adsorption platform, and a negative pressure environment is provided by a vacuum pump, so as to generate an adsorption force on the substrate through the adsorption holes;

[0031] After the substrate 300 is placed on the adsorption platform, four pressing strips 160 are respectively pressed on the edge warping parts of the substrate 300, so that the adsorption platform effectively adsorbs the whole substrate 300, thereby keeping the substrate 300 on the adsorption platform, ensuring that the substrate 300 can fully fit the adsorption platform, and further facilitating the subsequent process flow and ensuring the integrity of the substrate process; moreover, the device has a compact structure and low cost, and can meet the use requirements of existing and future substrates with larger warping amounts.

[0032] In a further optimized solution, the first lifting assembly includes four brackets 110 fixedly connected to the support platform 200. A first motor 120 and a sliding guide rail 130 are fixedly connected to the brackets 110. A lead screw rotatably connected to the brackets 110 is fixedly connected to the output shaft of the first motor 120. A first slider is slidably connected to the sliding guide rail 130. The lead screw passes through the first slider and is threadedly connected to the first slider. A horizontal movement assembly is arranged on the first slider, and the four horizontal movement assemblies are respectively connected to the four pressing strips 160;

[0033] The horizontal movement assembly includes a cylinder 140 fixedly connected to the first slider. The output end of the cylinder 140 is fixedly connected to the pressing strip 160; the cylinder 140 is fixedly connected to the first slider through a guide rail and a cylinder connecting piece 150;

[0034] Since a manipulator 500 is arranged on one side of the adsorption platform, two sets of lifting structures composed of brackets 110, a first motor 120, a sliding guide rail 130, a cylinder 140, a lead screw, a first slider, etc. are arranged on the pressing strip 160 near the manipulator 500, and the two sets of lifting structures are respectively located on both sides of the manipulator 500, so as to avoid interference with the manipulator 500;

[0035] At the beginning, the pressing strips 160 are at a high position and are scattered outward. After the substrate 300 is placed on the adsorption platform, the four pressing strips 160 are driven by the cylinder 140 to approach each other, and the pressing strips 160 are driven by the first motor 120 to descend and press above the edge of the substrate 300.

[0036] For a further optimized solution, a support mechanism 400 is also provided on the support platform 200. The support mechanism 400 includes a bottom plate fixedly connected to the top of the support platform 200. The bottom plate is located below the adsorption platform. A second lifting assembly is provided on the bottom plate. A connecting plate 460 is provided at the output end of the second lifting assembly. A plurality of support rods 470 are fixedly connected to the connecting plate 460. A plurality of through holes are formed in the adsorption platform. The plurality of support rods 470 are arranged in one-to-one correspondence with the plurality of through holes and are slidably connected;

[0037] The plurality of through holes formed in the adsorption platform do not affect the sealing performance inside the adsorption platform. In this embodiment, there are 9 support rods 470, which are divided into 3 rows;

[0038] During operation, the manipulator 500 transports the substrate 300 to the handover position of the adsorption platform. The second lifting assembly drives the plurality of support rods 470 to rise, contacts the bottom of the substrate 300 and jacks it up to the handover high position, so that the substrate 300 is separated from the manipulator 500. The manipulator 500 withdraws from the working area (safe position) of the adsorption platform. Then the second lifting assembly drives the plurality of support rods 470 to descend. The support rods 470 descend into the through holes, so that the substrate 300 is placed on the adsorption platform.

[0039] For a further optimized solution, the second lifting assembly includes two horizontal limiting guide rails fixedly connected to the bottom plate. The two horizontal limiting guide rails are respectively located on both sides of the connecting plate 460. A horizontal limiting slider 450 is slidably connected to the horizontal limiting guide rail. A driving assembly is provided on the bottom plate and is in transmission connection with the horizontal limiting slider 450. An inclined limiting guide rail is fixedly connected to the horizontal limiting slider 450. An inclined limiting slider 480 is slidably connected to the inclined limiting guide rail. A vertical limiting slider 490 is fixedly connected to the inclined limiting slider 480. A vertical limiting guide rail slidably connected to the vertical limiting slider 490 is fixedly connected to the bottom plate. The two vertical limiting sliders 490 are respectively fixedly connected to both sides of the connecting plate 460;

[0040] The driving assembly includes a connecting rod 430 rotatably connected to the bottom plate. First belt wheels are respectively fixedly connected to both ends of the connecting rod 430. Two second belt wheels are rotatably connected to the bottom plate. The first belt wheel and the second belt wheel are in transmission connection through a belt 440. The two horizontal limiting sliders 450 are respectively fixedly connected to the two belts 440. A power assembly is provided on the bottom plate and is connected to the connecting rod 430;

[0041] The power assembly includes a second motor 410 fixedly connected to the bottom plate. A gearbox 420 is fixedly connected to the output shaft of the second motor 410. The output shaft of the gearbox 420 is fixedly connected to one of the first belt wheels;

[0042] The second motor 410 is a stepper motor. When the support rod 470 moves up and down, the second motor 410 drives the first pulley to rotate. The connecting rod 430 drives the two first pulleys to rotate simultaneously, thereby driving the belt 440 to transmit. During the transmission of the belt 440, the horizontal limit slider 450 is driven to move horizontally, thereby driving the oblique limit slider 480 to move obliquely, and further driving the vertical limit slider 490 to move up and down. Therefore, the lifting of multiple support rods 470 is realized.

[0043] In a further optimized solution, a plurality of columnar pressing blocks 170 are fixedly connected below the pressing strip 160; the substrate 300 is pressed by the columnar pressing blocks 170.

[0044] When the present utility model is in use, in the initial state (there is no substrate 300 on the adsorption platform), the pressing strip 160 is at a high position and spreads out away from the center position of the adsorption platform. The support rod 470 is at a low position. The manipulator 500 transports the glass substrate 300 to the handover position of the adsorption platform, and the second motor 410 is started to drive a plurality of support rods 470 to rise to lift the glass substrate 300 to the handover high position (the substrate 300 is separated from the manipulator 500). The manipulator 500 exits the working area (safe position) of the adsorption platform. The air cylinder 140 drives the pressing strip 160 to move towards the center position of the adsorption platform and move in place. The first motor 120 drives the columnar pressing block 170 at the bottom of the pressing strip 160 to descend to press the substrate 300. The adsorption platform vacuum-sucks the substrate 300, and the specified process of the adsorption platform is further executed.

[0045] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "longitudinal", "transverse", "up", "down", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present utility model.

[0046] The embodiments described above are only descriptions of the preferred embodiments of the present utility model, and do not limit the scope of the present utility model. Without departing from the design spirit of the present utility model, various deformations and improvements made by those of ordinary skill in the art to the technical solutions of the present utility model shall fall within the protection scope determined by the claims of the present utility model.

Claims

1. A substrate fixing device, characterized in that: include: Support platform (200); An adsorption platform, the adsorption platform being fixedly connected to the top of the supporting platform (200); A substrate edge clamping mechanism (100), the substrate edge clamping mechanism (100) comprising four clamping strips (160), the four clamping strips (160) being respectively arranged around the adsorption platform, a first lifting component being arranged on the support platform (200), an output end of the first lifting component being connected to the four clamping strips (160) and being used for driving the four clamping strips (160) to rise and fall.

2. The substrate fixing device according to claim 1, characterized in that: The first lifting assembly comprises four brackets (110) fixedly connected to the support platform (200), a first motor (120) and a sliding guide rail (130) fixedly connected to the bracket (110), a lead screw rotatably connected to the bracket (110) fixedly connected to the output shaft of the first motor (120), a first slider slidably connected to the sliding guide rail (130), the lead screw passes through the first slider and is threadedly connected to the first slider, a horizontal moving assembly is arranged on the first slider, and the four horizontal moving assemblies are respectively connected to the four pressure strips (160).

3. The substrate fixing device according to claim 2, characterized in that: The horizontal moving assembly comprises a cylinder (140) fixedly connected to the first sliding block, and an output end of the cylinder (140) is fixedly connected to the pressure bar (160).

4. The substrate fixing device according to claim 1, characterized in that: A support mechanism (400) is also provided on the support platform (200), and the support mechanism (400) includes a base plate fixedly connected to the top of the support platform (200), and the base plate is located below the adsorption platform. A second lifting assembly is provided on the base plate, and a connecting plate (460) is provided at the output end of the second lifting assembly. A plurality of support rods (470) are fixedly connected to the connecting plate (460), and a plurality of through holes are opened on the adsorption platform. The plurality of support rods (470) are arranged one-to-one with the plurality of through holes and are slidably connected.

5. The substrate fixing device according to claim 4, characterized in that: The second lifting assembly comprises two horizontal limit guide rails fixedly connected to the base plate, the two horizontal limit guide rails are respectively located on both sides of the connecting plate (460), a horizontal limit slider (450) is slidably connected to the horizontal limit guide rail, a driving assembly is provided on the base plate and is transmission-connected to the horizontal limit slider (450), an oblique limit guide rail is fixedly connected to the horizontal limit slider (450), an oblique limit slider (480) is slidably connected to the oblique limit guide rail, a vertical limit slider (490) is fixedly connected to the oblique limit slider (480), a vertical limit guide rail slidably connected to the vertical limit slider (490) is fixedly connected to the base plate, and the two vertical limit sliders (490) are respectively fixedly connected to both sides of the connecting plate (460).

6. The substrate fixing device according to claim 5, characterized in that: The driving assembly comprises a connecting rod (430) rotatably connected to the base plate, first pulleys are fixedly connected to both ends of the connecting rod (430), two second pulleys are rotatably connected to the base plate, the first pulley and the second pulley are connected by a belt (440), the two horizontal limit sliders (450) are fixedly connected to the two belts (440), a power assembly is arranged on the base plate, and the power assembly is connected to the connecting rod (430).

7. The substrate fixing device according to claim 6, characterized in that: The power assembly comprises a second motor (410) fixedly connected to the base plate, a gear box (420) fixedly connected to an output shaft of the second motor (410), and an output shaft of the gear box (420) fixedly connected to one of the first pulleys.

8. The substrate fixing device according to claim 1, characterized in that: A plurality of columnar pressing blocks (170) are fixedly connected below the pressing strip (160).

Images