Rotary carrying table and machining equipment

By designing an independent hoisting mechanism and rotation θ axis, the precise docking of workpieces in the rotary stage is achieved, which solves the problem of insufficient docking accuracy of the rotary stage in the prior art, and improves the overall accuracy and rigidity of the stage.

CN222966109UActive Publication Date: 2025-06-10SHENZHEN HANS SEMICONDUCTOR EQUIPMENT TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202421755813.7
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-07-23
Publication Date
2025-06-10
Estimated Expiration
2034-07-23

AI Technical Summary

Technical Problem

The rotation θ axis of the existing moving stage has a linkage relationship with the hoisting mechanism, causing the workpiece to rise along the θ axis when it rotates, affecting the accuracy of the probe connection.

Method used

A rotary stage is designed so that the hoisting mechanism and the rotation θ axis are independent of each other. Through the precise control of the rotary driving mechanism and the hoisting mechanism, the area to be tested during rotation corresponds one by one to the probe, and is connected to the probe in the vertical direction.

Benefits of technology

The accuracy of probe connection is improved, the error contact caused by rotating components is avoided, and the rigidity and accuracy of the load stage is enhanced.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a rotary carrying table and machining equipment. The rotary carrying table comprises a mounting base, a rotary assembly, a rotary driving mechanism, a jacking mechanism and a bearing assembly. Wherein the rotating assembly is arranged on the mounting base and provided with a rotating part, and the rotating driving mechanism is arranged on the mounting base, located on the peripheral side of the rotating assembly and used for driving the rotating part to rotate; the jacking mechanism comprises a jacking driving piece and a jacking piece in driving connection with the jacking driving piece, the jacking driving piece is arranged on the mounting base, the bearing assembly is arranged on the rotating part, and a hole allowing the jacking piece to penetrate through is further formed in the bearing assembly. The jacking mechanism and the rotating assembly are independent from each other, after the workpiece rotates by a certain angle along with the rotating assembly and the to-be-detected areas of the workpiece in the vertical direction are in one-to-one correspondence with the probes above, the jacking mechanism ascends in the vertical direction and is in butt joint with the probes, and higher butt joint precision is achieved. The jacking mechanism is located in the hollow area of the rotating assembly, the thickness of the carrying table can be reduced, the rigidity of the carrying table is improved, and the precision of the carrying table is further improved.
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Description

Technical Field

[0001] This application relates to the field of moving platforms, and particularly to a rotating platform and a processing device. Background Art

[0002] As a testing device on the semiconductor manufacturing process line, a probe test station mainly provides electrical parameter and function tests for bare chips to ensure that the chips are qualified products before packaging, which plays an important role in improving the yield of chip production. The moving platform is the working platform for probe testing. The system controls the up-and-down movement and rotational movement of the moving platform, and pairs with the needle card above the platform to complete the probe testing task. As one of the main components of the probe test station, its stability and reliability directly affect the normal progress of probe testing.

[0003] In the related art, there is a linkage relationship between the rotating θ-axis of the moving platform and the lifting mechanism, that is, the lifting mechanism and the θ-axis operate synchronously. When the workpiece rotates, it also rises along the θ-axis, and there is a rotational component when docking with the probe above, which affects the docking accuracy. Utility Model Content

[0004] This application provides a rotating platform and a processing device, which can make the lifting mechanism and the rotating θ-axis independent of each other and improve the docking accuracy.

[0005] This application provides a rotating platform, including:

[0006] A mounting base;

[0007] A rotating assembly, arranged on the mounting base and having a rotating part. The rotating assembly is hollow inside to form a hollow area;

[0008] A rotating drive mechanism, arranged on the mounting base and located on the periphery of the rotating assembly, for driving the rotation of the rotating part;

[0009] A lifting mechanism, including a lifting drive member and a lifting member driven by the lifting drive member. The lifting drive member is arranged on the mounting base and located in the hollow area;

[0010] A bearing assembly, arranged on the rotating part. A hole for the lifting member to pass through is also provided on the bearing assembly.

[0011] In some embodiments, the rotating drive mechanism includes:

[0012] A first drive module, including a drive end moving along a first direction;

[0013] A first sliding assembly, arranged on the drive end, including a sliding end capable of sliding along a second direction. The sliding end is rotatably connected to the rotating part. The first direction and the second direction intersect and are respectively perpendicular to the rotation center of the rotating assembly.

[0014] In some embodiments, the first driving module includes:

[0015] A first lead screw, arranged along the first direction and rotatably connected to the mounting base;

[0016] A first nut, adapted to the first lead screw and slidably connected to the mounting base;

[0017] A first motor, arranged on the mounting base and used to drive the first lead screw to rotate.

[0018] In some embodiments, the first sliding component includes:

[0019] A first slide rail, connected to the first nut and arranged along the second direction;

[0020] A first slider, adapted to the first slide rail;

[0021] The rotary driving mechanism further includes a mounting member arranged between the rotating part and the bearing component, and the first slider is also rotatably connected to the mounting member.

[0022] In some embodiments, the rotary stage further includes an elastic member arranged on the periphery of the rotating component, one end of the elastic member is connected to the mounting base, the other end is connected to the rotating part, and the direction of the elastic force intersects with the rotation center of the rotating component.

[0023] In some embodiments, the rotary stage further includes a lifting mechanism drivingly connected to the mounting base, the lifting mechanism is arranged on a side of the mounting base away from the rotating component, and the driving direction of the lifting mechanism is along the rotation center of the rotating component.

[0024] In some embodiments, the lifting mechanism includes:

[0025] A base, arranged on a side of the mounting base away from the rotating component;

[0026] A second sliding component, used to connect the base and the mounting base to make them slidably connected;

[0027] A second driving module, including a second motor arranged on a side of the base away from the mounting base, and a transmission component drivingly connected to the second motor, the transmission component is drivingly connected to the mounting base.

[0028] In some embodiments, the mounting base and the base are nested, multiple groups of second sliding components are arranged on the periphery of the base, and the transmission component is arranged inside the base.

[0029] In some embodiments, the rotating platform further includes a position sensor disposed on the base, and the position sensor is used to detect the position of the mounting seat.

[0030] The present application also proposes a processing device, including the above-mentioned rotating platform and a machine platform for installing the rotating platform.

[0031] The rotating platform in the present application includes a mounting seat, a rotating assembly, a rotating drive mechanism, a lifting mechanism and a bearing assembly; wherein the rotating assembly is arranged on the mounting seat and has a rotating part, and the rotating assembly is hollowly arranged to form a hollow area; the rotating drive mechanism is arranged on the mounting seat and is located on the peripheral side of the rotating assembly, and is used to drive the rotating part to rotate; the lifting mechanism includes a lifting drive member and a lifting member connected to the lifting drive member, and the lifting drive member is arranged on the mounting seat and is located in the hollow area of ​​the rotating assembly; the bearing assembly is arranged on the rotating part, and the bearing assembly is also provided with a hole for the lifting member to pass through. The lifting mechanism and the rotating assembly are independent of each other. After the workpiece rotates a certain angle with the rotating assembly to ensure that the area to be measured of the workpiece in the vertical direction corresponds one by one with the upper probe, the lifting mechanism is then lifted along the vertical direction and docked with the probe, which has higher docking accuracy. At the same time, the lifting mechanism is located in the hollow area of ​​the rotating assembly, which can reduce the thickness of the platform, improve the rigidity of the platform, and further improve the accuracy of the platform. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 This is a schematic diagram of the structure of a rotating stage in one embodiment of the present application;

[0033] Figure 2 for Figure 1 A cross-sectional view of a rotating stage in an embodiment;

[0034] Figure 3 This is a schematic diagram of the structure of a rotating stage in one embodiment of the present application;

[0035] Figure 4 This is a schematic diagram of the structure of a rotating stage in one embodiment of the present application;

[0036] Figure 5 Schematic diagram of the structure of the lifting mechanism in one embodiment of the present application.

[0037] Description of labels:

[0038] 10. Mounting base; 11. Rotating assembly; 13. Mounting member; 14. Elastic member; 20. Rotating drive mechanism; 21. First bracket; 22. First lead screw; 23. First nut; 24. First motor; 25. First slide rail; 26. First slider; 27. First bearing; 30. Lifting mechanism; 31. Lifting member; 32. Lifting drive member; 40. Carrying assembly; 50. Lifting mechanism; 51. Base; 52. Mounting plate; 53. Second sliding assembly; 54. Second motor; 55. Second bracket; 56. Third bracket; 57. Second lead screw; 61. Position sensor; 62. Detection member.

[0039] The realization of the purpose, functional features and advantages of this application will be further described with reference to the embodiments and the accompanying drawings. Detailed implementation manners

[0040] Next, the solutions in the embodiments of this application will be clearly and completely described with reference to the accompanying drawings in the embodiments of this application. Obviously, the described embodiments are only a part of the embodiments of this application, rather than all the embodiments. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of this application.

[0041] It should be noted that all directional indications such as up, down, left, right, front, back... in the embodiments of this application are only used to explain the relative position relationship and movement conditions between components in a specific posture as shown in the accompanying drawings. If the specific posture changes, the directional indications will also change accordingly.

[0042] It should also be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or there may be a middle element at the same time. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or there may be a middle element at the same time.

[0043] In addition, the descriptions involving "first", "second", etc. in this application are only for descriptive purposes, and cannot be understood as indicating or implying their relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In addition, the technical solutions between various embodiments can be combined with each other, but it must be based on the fact that those of ordinary skill in the art can implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the protection scope required by this application.

[0044] This application proposes a rotating stage, referring to Figures 1 to 5, the rotating stage includes: a mounting base 10; a rotating assembly 11 disposed on the mounting base 10 and having a rotating part, the rotating assembly 11 is hollowly arranged to form a hollow area; a rotation driving mechanism 20 disposed on the mounting base 10 and located on the periphery of the rotating assembly 11 for driving the rotating part to rotate; a lifting mechanism 30 including a lifting driving member 32 and a lifting member 31 drivingly connected to the lifting driving member 32, the lifting driving member 32 is disposed on the mounting base 10 and located in the hollow area of the rotating assembly 11; a carrying assembly 40 disposed on the rotating part, and the carrying assembly 40 is further provided with a hole through which the lifting member 31 passes.

[0045] In this embodiment, the rotating assembly 11 may be a bearing, specifically a crossed roller bearing, and the space inside the inner ring of the bearing forms the above-mentioned hollow area. The rotation center of the rotating assembly 11 is the above-mentioned rotation θ axis. The carrying assembly 40 is used to carry the workpiece, and the lifting mechanism 30 is used to lift the workpiece from the carrying assembly 40 and dock with the probe above the rotating stage. The lifting member 31 may be a rod with a suction cup at the top, and the lifting driving member 32 may be a cylinder or an electric cylinder. During the actual operation process, the workpiece is placed on the carrying assembly 40 and driven by the rotation driving mechanism 20. After rotating a certain angle with the rotating assembly 11, the area to be measured of the workpiece corresponds to the probe above in the vertical direction one by one. The lifting mechanism 30 lifts the workpiece along the vertical direction and docks with the probe. There is no rotational component of the workpiece during the docking process, and no mis-touching will occur. The workpiece is directly docked with the top pin, so the rotating stage has higher docking accuracy. At the same time, the lifting mechanism 30 is located in the hollow area of the rotating assembly 11, which can reduce the thickness of the stage and improve the rigidity of the stage, further improving the accuracy of the stage.

[0046] In some embodiments, referring to Figures 1 to 5 , the rotation driving mechanism 20 includes: a first driving module including a driving end moving along a first direction; a first sliding assembly disposed on the driving end, including a sliding end capable of sliding along a second direction, the sliding end is rotatably connected to the rotating part, the first direction and the second direction intersect and are respectively perpendicular to the rotation center of the rotating assembly 11. In this embodiment, the rotation of the rotating assembly 11 can be decomposed into a movement along the radial direction and a movement along the tangential direction. The moving direction of the driving end of the first driving module is the first direction, the first direction is parallel to the tangential direction, and the second direction is parallel to the radial direction. The rotation driving mechanism 20 is disposed on the periphery of the rotating assembly 11 to avoid their superposition along the vertical direction (rotation θ axis), which can reduce the thickness of the rotating stage and improve its rigidity, and provide an installation space for the lifting mechanism 30.

[0047] Further, the first driving module includes: a first lead screw 22 disposed along a first direction and rotatably connected to the mounting base 10; a first nut 23 adapted to the first lead screw 22 and slidably connected to the mounting base 10; a first motor 24 disposed on the mounting base 10 for driving the first lead screw 22 to rotate. A first bracket 21 is provided on the side of the mounting base 10. The first lead screw 22 is rotatably connected to the first bracket 21. The first motor 24 is disposed on the mounting base 10 and drivingly connected to the first lead screw 22. The first nut 23 is slidably connected to the first bracket 21. The first sliding assembly includes a first slide rail 25 and a first slider 26. Among them, the first slide rail 25 is disposed on the first nut 23 and arranged along a second direction; the first slider 26 is adapted to the first slide rail 25; the rotary drive mechanism 20 further includes a mounting member 13 disposed between the rotating part and the carrying assembly 40, and a first bearing 27 connecting the first slider 26 and the mounting member 13. The mounting member 13 is plate-shaped, and an avoidance hole for avoiding the lifting mechanism 30 is provided in the middle thereof. An installation hole for installing the first bearing 27 is also provided in a region away from the center. A protrusion or pin shaft for docking with the first bearing 27 is provided on the first slider 26. The rotation angle of the rotating assembly 11 can be accurately controlled through screw drive.

[0048] Of course, the above-mentioned rotary drive mechanism 20 is not limited to the screw drive method, and a worm and worm gear can also be used for transmission. Specifically, a worm wheel can be provided on the mounting member 13, and the worm wheel is coaxial with the rotating assembly 11. The worm is rotatably disposed on the mounting base 10 and adapted to the worm wheel. The worm is driven by a motor to rotate, driving the worm wheel and the rotating assembly 11 to rotate. The worm and worm gear mechanism has a large transmission ratio and can also be used for accurately controlling the rotation angle of the rotating assembly 11.

[0049] In some embodiments, referring to Figures 1 to 5 , the rotary stage further includes an elastic member 14 disposed on the periphery of the rotating assembly 11. One end of the elastic member 14 is connected to the mounting base 10, and the other end is connected to the rotating part, and the direction of the elastic force intersects with the rotation center of the rotating assembly 11. The elastic member 14 can be a tension spring. Pin shafts are provided on the side surfaces of the mounting member 13 and the mounting base 10 where they are close to each other, and the two ends of the spring are respectively connected to the pin shafts. By providing the elastic member 14, it is ensured that each transmission component in the first driving module remains in contact, reducing the transmission error caused by the assembly gap.

[0050] In some embodiments, referring to Figures 1 to 5 , the rotary stage further includes a lifting mechanism 50 drivingly connected to the mounting base 10. The lifting mechanism 50 is disposed on the side of the mounting base 10 away from the rotating assembly 11, and the driving direction of the lifting mechanism 50 is along the rotation center of the rotating assembly 11. By providing the lifting mechanism 50, the overall lifting of the rotary stage can be performed, which is suitable for loading and unloading workpieces.

[0051] Specifically, the lifting mechanism 50 includes: a base 51 provided on the side of the mounting seat 10 away from the rotating assembly 11; a second sliding assembly 53 for connecting the base 51 and the mounting seat 10 to enable sliding connection therebetween; and a second driving module including a second motor 54 provided on the side of the base 51 away from the mounting seat 10, and a transmission assembly drivingly connected to the second motor 54, the transmission assembly being drivingly connected to the mounting seat 10.

[0052] The base 51 can be provided below the mounting seat 10 and specifically includes a base plate and a vertical plate provided on the base plate. The vertical plates are connected end to end to enclose an installation cavity. The second sliding assembly 53 includes a second slide rail provided on the outer side of the vertical plate and a slider adapted to the second slide rail. A square frame is provided below the base 51, and the frame can be regarded as a part of the base 51. The frame is provided outside the vertical plate, and its inner wall is connected to the second slider, thereby realizing the nested installation of the mounting seat 10 and the base 51. It can ensure the tight connection between the mounting seat 10 and the base 51, reduce the assembly gap, and further improve the accuracy of the rotating stage.

[0053] The second driving module includes a second motor 54 provided on the side of the base 51 away from the mounting seat 10. The transmission assembly includes a first connection seat and a second connection seat provided in the above-mentioned installation cavity. The first connection seat is provided on the base plate, and the transmission assembly further includes a second lead screw 57 rotatably connected to the first connection seat, and a second nut adapted to the second lead screw 57. The second lead screw 57 is vertically arranged and its lower end is drivingly connected to the second motor 54. The second connection seat is provided on the inner top surface of the mounting seat 10 and is connected to the second nut. The second motor 54 drives the second lead screw 57 to rotate, which can drive the second nut, the second connection seat and the mounting seat 10 to lift. The transmission assembly is provided in the installation cavity to prevent external impurities from entering, further improving the transmission accuracy and service life. In addition, a limiting member is provided at one end of the second lead screw 57 away from the second motor 54 to limit the movement range of the second nut.

[0054] In some embodiments, referring to Figures 1 to 5 , the rotating stage further includes a position sensor 61 provided on the base 51, and the position sensor 61 is used to detect the position of the mounting seat 10. A third bracket 56 can be provided on the base plate, and the position sensor 61 can be arranged on the third bracket 56 along the vertical direction, and the detection piece is provided on the outer wall of the frame. When the frame and the mounting seat 10 are lifted or lowered, the detection piece moves correspondingly. When the detection piece moves to the position sensor 61, a signal change occurs, and according to this signal change, it can be known that the base 51 moves to the set height.

[0055] In some embodiments, air holes may also be provided on the upper surface of the carrier assembly 40, and an air passage communicating with the air holes is provided inside. The workpiece is fixed by creating a negative pressure in the air passage. The lifting member 31 may also be provided with an air path communicating with the suction cup inside, so as to fix the workpiece by negative pressure adsorption and prevent the workpiece from moving laterally or falling during the lifting process. In addition, in addition to using bearings, the rotating assembly 11 may also adopt the form of an annular slide rail and an arc-shaped slider. The annular slide rail is adapted to the arc-shaped slider, and the arc-shaped slider constitutes the rotating part described above.

[0056] This application also provides a processing device. Referring to Figures 1 to 5 , the processing device includes the above-mentioned rotating stage and a machine table for installing the rotating stage. In addition, the processing device may further include a vision positioning device disposed above the rotating stage and a translation device drivingly connected to the rotating stage. The vision positioning device is used to position the workpiece. By rotating the rotating stage and driving the rotating stage to translate by the translation device, it is ensured that the measurement points to be measured on the workpiece can correspond one by one to the probe in the vertical direction.

[0057] In the embodiments of this application, the principle of the rotating stage is as follows:

[0058] The rotating stage includes: a mounting base 10; a rotating assembly 11 disposed on the mounting base 10 and having a rotating part. The rotating assembly 11 is hollowly arranged to form a hollow area; a rotating drive mechanism 20 disposed on the mounting base 10 and located on the periphery of the rotating assembly 11 for driving the rotating part to rotate; a lifting mechanism 30 including a lifting drive member 32 and a lifting member 31 drivingly connected to the lifting drive member 32. The lifting drive member 32 is disposed on the mounting base 10 and located in the hollow area of the rotating assembly 11; a carrier assembly 40 disposed on the rotating part, and the carrier assembly 40 is further provided with a hole for the lifting member 31 to pass through. The carrier assembly 40 is used to carry the workpiece, and the lifting mechanism 30 is used to lift the workpiece and dock it with the probe above. After the workpiece rotates a certain angle with the rotating assembly 11 to ensure that the measurement area to be measured on the workpiece corresponds one by one to the probe above in the vertical direction, the lifting mechanism 30 is then lifted along the vertical direction and docked with the probe. There is no rotational component during the docking process, and there is a higher docking accuracy between the workpiece and the thimble. At the same time, the lifting mechanism 30 is located in the hollow area of the rotating assembly 11, which can reduce the thickness of the stage and improve the rigidity of the stage, further improving the accuracy of the stage.

[0059] The above are only partial or preferred embodiments of this application. Whether in terms of text or drawings, the scope of protection of this application cannot be limited thereby. Any equivalent structural transformation made by using the content of the specification and drawings of this application under the overall concept of this application, or any direct / indirect application in other related technical fields is included in the scope of protection of this application.

Claims

1. A rotating stage, characterized in that: include: Mounting seat; A rotating assembly is disposed on the mounting seat and has a rotating portion, wherein the rotating assembly is hollow to form a hollow area; A rotation driving mechanism, provided on the mounting seat and located around the rotating assembly, for driving the rotating part to rotate; A lifting mechanism, comprising a lifting drive and a lifting member drivingly connected to the lifting drive, wherein the lifting drive is arranged on the mounting seat and located in the hollow area; The bearing assembly is arranged on the rotating part, and the bearing assembly is also provided with a hole for the lifting member to pass through.

2. The rotating stage according to claim 1, characterized in that: The rotary drive mechanism comprises: A first driving module, comprising a driving end moving along a first direction; The first sliding component is arranged at the driving end, and includes a sliding end that can slide along the second direction. The sliding end is rotatably connected to the rotating part. The first direction and the second direction intersect and are respectively perpendicular to the rotation center of the rotating component.

3. The rotating stage according to claim 2, characterized in that: The first driving module comprises: A first screw rod, arranged along the first direction and rotatably connected to the mounting seat; A first nut, adapted to the first screw rod and slidably connected to the mounting seat; The first motor is arranged on the mounting seat and is used for driving the first screw rod to rotate.

4. The rotating stage according to claim 3, characterized in that: The first sliding assembly comprises: A first slide rail connected to the first nut and arranged along the second direction; A first sliding block adapted to the first sliding rail; The rotary drive mechanism further includes a mounting member disposed between the rotating portion and the bearing assembly, and the first sliding block is also rotatably connected to the mounting member.

5. The rotating stage according to claim 1, characterized in that: The rotating platform also includes an elastic member arranged on the peripheral side of the rotating component, one end of the elastic member is connected to the mounting seat, and the other end is connected to the rotating part, and the direction of the elastic force intersects with the rotation center of the rotating component.

6. The rotating stage according to claim 1, characterized in that: The rotating platform further comprises a lifting mechanism drivingly connected to the mounting seat, the lifting mechanism being arranged on a side of the mounting seat away from the rotating assembly, and the driving direction of the lifting mechanism being along the rotation center of the rotating assembly.

7. The rotating stage according to claim 6, characterized in that: The lifting mechanism comprises: A base, disposed on a side of the mounting base away from the rotating assembly; A second sliding assembly is used to connect the base and the mounting base so that the two are slidably connected; The second driving module comprises a second motor arranged on a side of the base away from the mounting seat, and a transmission component drivingly connected to the second motor, wherein the transmission component is drivingly connected to the mounting seat.

8. The rotating stage according to claim 7, characterized in that: The mounting seat is nested with the base, a plurality of groups of the second sliding components are arranged on the peripheral side of the base, and the transmission component is arranged inside the base.

9. The rotating stage according to claim 7, characterized in that: The rotating platform further includes a position sensor disposed on the base, and the position sensor is used to detect the position of the mounting seat.

10. A processing equipment, characterized in that: The invention comprises the rotating stage according to any one of claims 1 to 9 and a machine platform for installing the rotating stage.