Edge searching equipment suitable for wafers of multiple specifications

Abstract

The utility model discloses an edge searching device suitable for wafers of multiple specifications, which belongs to the technical field of semiconductor processing and manufacturing, and specifically comprises a base, an edge searching rotating shaft, an edge fixing assembly, a wafer frame and an adjusting assembly, and the edge searching rotating shaft is horizontally arranged on the base and can rotate on the base; the edge positioning assembly is arranged on the base and is axially provided with the wafer rack along the edge searching rotating shaft, the wafer rack is used for bearing a vertical wafer, the straight edge of the wafer can downwards extend out of the wafer rack, and the wafer rack comprises a side plate for preventing the wafer from toppling and at least one supporting point for supporting the wafer; the adjusting assembly is used for adjusting the distance between the edge fixing assembly and the topmost element line of the cross section of the edge searching rotating shaft. According to the utility model, by arranging the adjusting assembly, the distance between the edge positioning assembly and the topmost tessellation line of the cross section of the edge searching rotating shaft can be adjusted, so that the product can be applied to wafers of positioning straight lines with different lengths in the same specification or different specifications.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor processing and manufacturing, and particularly relates to an edge-finding device suitable for wafers of multiple specifications. Background Art

[0002] Wafer refers to the silicon wafer used to make silicon semiconductor circuits. Its raw material is silicon. High-purity polysilicon is dissolved and doped with silicon crystal seeds, and then slowly pulled out to form cylindrical single crystal silicon. After grinding, polishing and slicing, the silicon crystal rod is formed into a silicon wafer, also known as a wafer.

[0003] The edge finder unifies the wafer's positioning straight edge onto a plane through a hand-cranked shaft. Currently, most edge finders are only suitable for a single type of wafer rack. This type of tool that is only suitable for a single style is not suitable for use with multiple products on a production line. It is inconvenient to use and consumes too many tools and manpower. Utility Model Content

[0004] The purpose of the utility model is to provide an edge-finding device suitable for wafers of various specifications, so as to solve the problems raised in the above-mentioned background technology.

[0005] To achieve the above-mentioned purpose, a technical solution adopted by the utility model is: an edge-finding device suitable for wafers of multiple specifications, comprising a base, an edge-finding shaft, an edge-fixing assembly, a wafer rack and an adjustment assembly, wherein the edge-finding shaft is horizontally arranged on the base and can rotate on the base, the edge-fixing assembly is arranged on the base and axially arranged along the edge-finding shaft, the base is provided with a positioning groove / block, and the wafer rack is provided with a positioning groove / block used in conjunction with the positioning block / groove;

[0006] The wafer rack is used to support the upright wafer, and the straight edge of the wafer can extend downward from the wafer rack, and the wafer rack includes a side plate to prevent the wafer from tipping over and at least one supporting point for supporting the wafer;

[0007] After the wafer rack is assembled on the base, the following three situations are formed during the rotation of the edge-finding shaft:

[0008] (1) The arc edge of the wafer contacts the edge-finding axis and causes the wafer to rise and leave at least one supporting point;

[0009] (2) When the curved edge of the wafer rotates away from the edge-finding axis, the locating straight edge of the wafer is supported by the edge-fixing assembly;

[0010] (3) When the arcuate edge of the wafer rotates away from the edge-finding shaft, the positioning straight edge of the wafer is supported by the edge-finding shaft and the edge-fixing assembly, and the wafer does not move with the edge-finding shaft;

[0011] Wherein, the adjustment component is used to adjust the distance between the edge-fixing component and the topmost element line of the cross section of the edge-finding shaft.

[0012] Preferably, the adjusting assembly includes a base frame and a fastening structure disposed on the base. The fixed-side assembly slides on the base frame, and the fastening structure is used to fix the fixed-side assembly on the base frame.

[0013] Preferably, the fixed-side assembly includes a fixed-side rod to which a connecting frame is fixed. The fixed-side rod is used to support the wafer, and the connecting frame is slidably connected to the base frame.

[0014] Preferably, the wafers in the wafer holder are separated by side plates. A plurality of partition blocks are provided on the connecting frame, and the edge-finding rotating shaft passes through all the partition blocks. The wafers supported by the fixed-side rod are separated by the partition blocks one by one.

[0015] Preferably, the side surface of the partition block is inclined to facilitate the entry of the wafer and its overlapping on the fixed-side rod.

[0016] Preferably, the fastening structure includes a tightening bolt. A long strip-shaped through hole is formed on the base frame along the sliding direction of the connecting frame. A threaded hole with an opening corresponding to the long strip-shaped through hole is formed on the connecting frame. The tightening bolt fixes the base frame and the connecting frame together through cooperation with the threaded hole.

[0017] Preferably, the positioning groove and the positioning block form a limit in the horizontal X-axis direction, and a stop block for performing a one-way limit on the wafer holder in the horizontal Y-axis direction is further provided on the base.

[0018] Preferably, the base frame is rotatably connected to the base, and the axes of the base frame and the edge-finding rotating shaft are on the same straight line. A fixing member for fixing the base frame on the base is provided on the base frame.

[0019] Advantages of the present utility model: By providing the adjusting assembly, the distance between the fixed-side assembly and the topmost generatrix of the cross-section of the edge-finding rotating shaft can be adjusted, so that the product can be applied to wafers with different lengths of positioning straight lines in the same specification or different specifications, expanding the scope of use of the product;

[0020] Among them, by making the base frame and the edge-finding rotating shaft coaxial, the fixed-side rod can be made to move around the edge-finding rotating shaft. In combination with the adjusting assembly, the product can further expand the applicable wafer specifications. Description of the Drawings

[0021] Figure 1 is a structural schematic diagram of the present utility model Figure 1 ;

[0022] Figure 2 is a structural schematic diagram of the present utility model Figure 2 ;

[0023] Figure 3 Schematic diagram of the positional relationship between the adjustment component and the fixed-side component in the present utility model Figure 1 ;

[0024] Figure 4 Schematic diagram of the positional relationship between the adjustment component and the fixed-side component in the present utility model Figure 2 ;

[0025] Figure 5 is Figure 3 an enlarged schematic view of part A of

[0026] In the figure: 1, base; 2, edge-finding rotating shaft; 3, fixed-side component; 5, positioning groove / block; 6, stop block; 7, base frame; 8, fastening structure; 9, long strip-shaped through hole; 10, threaded hole; 11, guiding block; 12, sliding groove;

[0027] 13, connecting frame; 14, fixed-side rod; 15, partition block; 17, connecting plate; 18, adjustment hole; 19, fixing plate. Specific embodiments

[0028] The following elaborates on the preferred embodiments of the present utility model in conjunction with the accompanying drawings, so that the advantages and features of the present utility model can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the protection scope of the present utility model.

[0029] Embodiment:

[0030] Refer to Figure 1 , Figure 2 , Figure 4 , an edge-finding device applicable to wafers of multiple specifications, including a base 1, an edge-finding rotating shaft 2, a fixed-side component 3, a wafer holder (not shown in the figure), and an adjustment component. The edge-finding rotating shaft 2 is horizontally arranged on the base 1 and can rotate on the base 1. The fixed-side component 3 is arranged on the base 1 and is arranged along the axial direction of the edge-finding rotating shaft 2. A positioning groove / block 5 is arranged on the base 1, and a positioning groove / block 5 for cooperating with the positioning block / groove is arranged on the wafer holder;

[0031] The wafer holder is used to support the upright wafer, and the straight edge of the wafer can extend downward from the wafer holder. The wafer holder includes side plates for preventing the wafer from tipping over and at least one support point for supporting the wafer;

[0032] After the wafer holder is assembled to the base 1, the following three situations are formed during the rotation of the edge-finding rotating shaft 2:

[0033] (1) The arc edge of the wafer abuts against the edge-finding rotating shaft 2 and causes the wafer to rise and disengage from at least one support point;

[0034] (2) When the arc edge of the wafer rotates away from the edge-finding rotating shaft 2, the positioning straight edge of the wafer is supported by the fixed-side component 3;

[0035] (3) When the arc edge of the wafer turns away from the edge-finding rotating shaft 2, the positioning straight edge of the wafer is supported by the edge-finding rotating shaft 2 and the fixed-edge assembly 3, and the wafer does not move with the edge-finding rotating shaft 2;

[0036] Wherein, the adjusting assembly is used to adjust the distance between the fixed-edge assembly 3 and the topmost generatrix of the cross-section of the edge-finding rotating shaft 2;

[0037] Wherein, the positioning groove and the positioning block form a limit in the horizontal X-axis direction, and a stop block 6 for unidirectionally limiting the wafer holder in the horizontal Y-axis direction is further provided on the base 1;

[0038] Wherein, the wafer holder can adopt the main body structure of the wafer holder in the Chinese patent with the publication number CN217405377U, as long as there are positioning grooves / blocks 5 on the wafer holder that cooperate with the base;

[0039] Wherein, the rotation of the edge-finding rotating shaft 2 can be realized by means of a motor or manual shaking, etc.

[0040] Wherein, refer to Figure 3 、 Figure 4 、 Figure 5 , the adjusting assembly includes a base frame 7 and a fastening structure 8 arranged on the base 1, the fixed-edge assembly 3 slides on the base frame 7, the fastening structure 8 is used to fix the fixed-edge assembly 3 on the base frame 7, the fixed-edge assembly 3 includes a fixed-edge rod 14 with a connecting frame 13 fixed thereon, the fixed-edge rod 14 is used to support the wafer, the connecting frame 13 is slidably connected to the base frame 7, specifically, the connection structure between the connecting frame 13 and the base frame 7 can be realized by, for example, setting a guiding block 11 on the base frame 7 and opening a sliding groove 12 on the connecting frame 13 for cooperating with the guiding block 11. Among them, the fastening structure 8 can be mainly composed of a tightening bolt. In this case, a long strip-shaped through hole 9 is opened on the base frame 7 along the sliding direction of the connecting frame 13, a threaded hole 10 with an opening corresponding to the long strip-shaped through hole 9 is opened on the connecting frame 13, and the tightening bolt fixes the base frame 7 and the connecting frame 13 together through cooperation with the threaded hole 10. Of course, the movement of the connecting frame 13 and the function of the fastening structure 8 can also be realized by a cylinder, a screw rod structure, etc. In addition, the wafers in the wafer holder are separated by side plates, a plurality of separating blocks 15 are arranged on the connecting frame 13, the edge-finding rotating shaft 2 passes through all the separating blocks 15, and the wafers supported by the fixed-edge rod 14 are separated by the separating blocks 15 one by one. The side surfaces of the separating blocks 15 are inclined to facilitate the wafers to enter and overlap on the fixed-edge rod 14.

[0041] Among them, the base frame 7 is rotatably connected to the base 1, and the axis of the base frame 7 is on the same straight line as the axis of the edge-finding rotating shaft 2. A fixing member for fixing the base frame 7 on the base 1 is provided on the base frame 7. Specifically, two fixing plates 19 are fixed on the base 1. The two fixing plates 19 are arranged around the edge-finding rotating shaft 2. A connecting plate 17 is fixed at each end of the base frame 7. The two ends of the base frame 7 refer to the two ends along the axis direction of the edge-finding rotating shaft 2. The edge-finding rotating shaft 2 penetrates through the two connecting plates 17. At the same time, there is a gap between the edge-finding rotating shaft 2 and the connecting plate 17. Among them, at least two adjusting holes 18 are formed in the connecting plate 17 and are distributed in a circumferential array with the axis of the edge-finding rotating shaft 2 as the center. Insertion holes for cooperating with the adjusting holes 18 are formed in the fixing plate 19. The fixing member can be a pin, a bolt, etc.

[0042] Working principle and process:

[0043] When using this product, adjust the adjusting component according to the model of the product to realize the adjustment of the position of the edge-fixing rod 14. At the same time, the relative position between the connecting plate 17 and the fixing plate 19 can be adjusted as needed and fixed by the fixing member. Subsequently, the wafer holder is assembled onto the base 1. At this time, the arc edge of the wafer will abut against the edge-finding rotating shaft 2 and be lifted by it, and the positioning straight edge of the wafer will be lapped on the edge-fixing rod 14. As the edge-finding rotating shaft 2 rotates, the arc edge of the wafer disengages from the edge-finding rotating shaft 2. Affected by the height difference between the edge-fixing rod 14 and the edge-finding rotating shaft 2, the positioning straight edge of the wafer is lapped on the edge-fixing rod 14. To ensure the finishing effect, this product can be rotated several more times.

[0044] The above are only the embodiments of the present invention, and thus do not limit the patent scope of the present invention. Any equivalent structural transformation made by using the content of the specification and drawings of the present invention, or directly or indirectly applied in other related technical fields, shall be equally included in the patent protection scope of the present invention.

Claims

1. An edge-finding device suitable for wafers of various specifications, characterized by: The invention comprises a base (1), an edge-finding shaft (2), an edge-fixing assembly (3), a wafer rack and an adjustment assembly, wherein the edge-finding shaft (2) is horizontally arranged on the base (1) and can rotate on the base (1), the edge-fixing assembly (3) is arranged on the base (1) and axially arranged along the edge-finding shaft (2), the base (1) is provided with a positioning groove / block (5), and the wafer rack is provided with a positioning groove / block (5) used in conjunction with the positioning block / groove; The wafer rack is used to support the upright wafer, and the straight edge of the wafer can extend downward from the wafer rack, and the wafer rack includes a side plate to prevent the wafer from tipping over and at least one supporting point for supporting the wafer; After the wafer rack is assembled on the base (1), the following three situations are formed during the rotation of the edge-finding shaft (2): (1) The arc-shaped edge of the wafer contacts the edge-finding shaft (2) and causes the wafer to rise and leave at least one supporting point; (2) When the arc-shaped edge of the wafer rotates away from the edge-finding axis (2), the positioning straight edge of the wafer is supported by the edge-fixing assembly (3); (3) when the arc-shaped edge of the wafer rotates away from the edge-finding shaft (2), the positioning straight edge of the wafer is supported by the edge-finding shaft (2) and the edge-fixing assembly (3), and the wafer does not move along with the edge-finding shaft (2); The adjustment component is used to adjust the distance between the topmost element line of the cross section of the edge-fixing component (3) and the edge-finding shaft (2).

2. The edge-finding device applicable to wafers of various specifications according to claim 1, characterized in that: The adjustment assembly comprises a base frame (7) and a fastening structure (8) arranged on a base (1); the edge fixing assembly (3) slides on the base frame (7); and the fastening structure (8) is used to fix the edge fixing assembly (3) on the base frame (7).

3. The edge-finding device applicable to wafers of various specifications according to claim 2 is characterized in that: The edge fixing assembly (3) comprises an edge fixing rod (14) on which a connecting frame (13) is fixed, the edge fixing rod (14) is used to support the wafer, and the connecting frame (13) is slidably connected to the base frame (7).

4. The edge-finding device applicable to wafers of various specifications according to claim 3 is characterized in that: The wafers in the wafer rack are separated by side plates, a plurality of separation blocks (15) are arranged on the connecting frame (13), the edge-finding shaft (2) passes through all the separation blocks (15), and the wafers supported by the edge-fixing rods (14) are separated one by one by the separation blocks (15).

5. The edge-finding device applicable to wafers of various specifications according to claim 4, characterized in that: The side surfaces of the partition block (15) are arranged to be inclined so as to facilitate the wafer to enter and overlap on the edge fixing rod (14).

6. The edge-finding device applicable to wafers of various specifications according to claim 3, characterized in that: The fastening structure (8) comprises a tightening bolt, the base frame (7) is provided with an elongated through hole (9) arranged along the sliding direction of the connecting frame (13), the connecting frame (13) is provided with a threaded hole (10) whose opening corresponds to the elongated through hole (9), and the tightening bolt fixes the base frame (7) and the connecting frame (13) together by cooperating with the threaded hole (10).

7. The edge-finding device applicable to wafers of various specifications according to claim 1, characterized in that: The positioning groove and the positioning block form a horizontal X-axis direction limit, and the base (1) is also provided with a stopper (6) for unidirectionally limiting the wafer rack in the horizontal Y-axis direction.

8. The edge-finding device applicable to wafers of various specifications according to claim 2, characterized in that: The base frame (7) is rotatably connected to the base (1), and the axis of the base frame (7) and the edge-finding shaft (2) are on the same straight line. The base frame (7) is provided with a fixing member for fixing the base frame (7) to the base (1).

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