Magnetic suspension motor and molecular pump

Abstract

The utility model relates to the technical field of molecular pumps, and discloses a magnetic suspension motor and a molecular pump, the magnetic suspension motor comprises a shell, a rotating shaft assembly, a first radial magnetic bearing stator, a second radial magnetic bearing stator, a first circuit board and a first radial sensor, the rotating shaft assembly is arranged in the shell, and the rotating shaft assembly is arranged in the shell along the axial direction of the rotating shaft assembly; the shell is provided with a first end and a second end, the first radial sensor is electrically connected with the first circuit board, the first circuit board is arranged on the side, away from the second radial magnetic bearing stator, of the first radial magnetic bearing stator in the axial direction of the rotating shaft assembly, and the first end comprises a first peripheral wall and a first top wall; the first top wall is arranged on the side, away from the second end, of the first peripheral wall, the first top wall is opposite to the stator part of the first radial magnetic bearing, and a first hole which penetrates through the first top wall and is opposite to the first circuit board is formed in the first top wall. The beneficial effect is that the maintenance efficiency of the magnetic suspension motor is improved.

Description

Technical Field

[0001] This application relates to the field of molecular pumps, and in particular, to a magnetic levitation motor and a molecular pump. Background Art

[0002] With the continuous improvement of industrialization and automation levels, the requirements for motor performance are also getting higher and higher. As a new type of motor technology, magnetic levitation motors have received increasing attention. Due to reasons such as testing or maintenance, the rotating shaft assembly on the magnetic levitation motor will be disassembled and assembled multiple times. The outer diameter distance between the first radial sensor and the rotating shaft assembly is small, and the diameter of the connection line between the first radial sensor and the first circuit board is small, so it is very easy to be damaged during the assembly process of the rotating shaft assembly, resulting in the connection line between the first circuit board and the first radial sensor being broken and causing an open circuit phenomenon. However, in the related art, since the pump core assembly of the magnetic levitation motor is integrally potted and forms an integral body with the stator housing, it is not easy to disassemble and repair. The breakage of the connection line between the first circuit board and the first radial sensor may cause the entire magnetic levitation motor to be scrapped. Summary of the Invention

[0003] This application provides a magnetic levitation motor and a molecular pump, which solve the technical problem of the difficult maintenance of the magnetic levitation motor and achieve the technical effect of improving the maintenance efficiency of the magnetic levitation motor.

[0004] To achieve the above object, the main technical solutions adopted in this application include:

[0005] In a first aspect, an embodiment of this application provides a magnetic levitation motor, including a housing, a rotating shaft assembly, a first radial magnetic bearing stator, a second radial magnetic bearing stator, a first circuit board, and a first radial sensor. The rotating shaft assembly is disposed inside the housing. Along the axial direction of the rotating shaft assembly, the housing has a first end and a second end. The first radial bearing stator is fixed to the inner side of the first end, and the second radial bearing stator is fixed to the inner side of the second end. The first circuit board and the first radial sensor are provided. The first circuit board is disposed on the inner side of the first end, and the first radial sensor is electrically connected to the first circuit board. Along the axial direction of the rotating shaft assembly, the first circuit board is disposed on the side of the first radial magnetic bearing stator away from the second radial magnetic bearing stator. Among them, the first end includes a first peripheral wall and a first top wall. Along the axial direction of the rotating shaft assembly, the first top wall is disposed on the side of the first peripheral wall away from the second end, and the first top wall is partially opposite to the first radial magnetic bearing stator. A first hole penetrating the first top wall and opposite to the first circuit board is provided on the first top wall.

[0006] A first hole is provided on the first top wall, which passes through the first top wall and is opposite to the first circuit board, so that maintenance equipment such as welding guns and hot air guns can be directly extended into the area to be repaired, which reduces the difficulty of repairing the magnetic levitation motor and improves the maintenance efficiency of the magnetic levitation motor. For the welding process, on the one hand, since the welding gun can directly contact the welding part, the welding process can be more precise, the welding error and unnecessary rework can be reduced, and the welding efficiency can be improved. On the other hand, since the first hole is opened above the welded area, the heat distribution and welding material flow during the welding process can be better controlled, thereby reducing the occurrence of welding defects such as pores and slag inclusions. Moreover, the welder can observe the welding process more conveniently through the first hole, discover and deal with potential problems in time, ensure the welding quality, and then improve the stability and reliability of the operation of the magnetic levitation motor.

[0007] Optionally, the first circuit board has a first connection area, the first connection area is connected to the first radial sensor through a first wiring harness, and along the axial direction of the rotating shaft assembly, the first connection area is opposite to the first hole.

[0008] The first connection area is the area on the first circuit board that is directly connected to the first wiring harness, so the connection stability of the first connection area needs to be guaranteed. Therefore, placing the first connection area opposite to the first hole allows maintenance equipment such as a welding gun and a hot air gun to directly extend into the first connection area and / or contact the first connection area, thereby enabling maintenance equipment such as a welding gun and a hot air gun to more accurately and conveniently repair the magnetic levitation motor, thereby improving the maintenance quality of the magnetic levitation motor.

[0009] Optionally, along the radial direction of the rotating shaft assembly, the first radial sensor is arranged opposite to the first connecting area.

[0010] The first radial sensor and the first connecting area are arranged relative to each other, and the first radial sensor can also be arranged relative to the first hole along the axial direction of the rotating shaft assembly. Therefore, when the first radial sensor fails, it is helpful to use maintenance equipment such as welding guns and hot air guns to repair the first radial sensor, thereby reducing the maintenance cost of the magnetic levitation motor and improving the maintenance efficiency of the magnetic levitation motor.

[0011] Optionally, there are multiple first radial sensors, first connecting areas and first holes. Along the circumference of the rotating shaft assembly, multiple first radial sensors are spaced apart, multiple first connecting areas are spaced apart, and multiple first holes are spaced apart. Along the axial direction of the rotating shaft assembly, each first hole is arranged opposite to the corresponding first connecting area.

[0012] Each first hole is arranged opposite to the corresponding first connecting area. Along the axial direction of the rotating shaft assembly, each first hole is also arranged opposite to the first radial sensor. Therefore, each first connecting area has a special first hole for welding guns, hot air guns and other equipment to extend into, thereby improving the maintenance efficiency of the staff.

[0013] Optionally, the first top wall is configured to be annular. The inner peripheral edge of the first top wall defines a second hole for the rotation shaft assembly to extend out. The outer peripheral edge of the first top wall is connected to the first peripheral wall, and the second hole penetrates the inner peripheral edge of the first top wall.

[0014] The second hole penetrates the inner peripheral edge of the first top wall, enabling maintenance equipment such as welding guns and hot air guns to extend into the first connection area and the first radial sensor more accurately and conveniently, thereby improving the maintenance efficiency of the magnetic levitation motor.

[0015] Optionally, the first bracket is configured to be annular. Along the radial direction of the rotation shaft assembly, the first radial sensor is disposed on the inner peripheral edge of the first bracket.

[0016] Configuring the first bracket to be annular can provide a larger layout space for the first circuit board, making the wiring more flexible and convenient.

[0017] Optionally, along the radial direction of the rotation shaft assembly, the first radial sensor protrudes from the inner peripheral edge of the first bracket.

[0018] The first radial sensor protruding from the inner peripheral edge of the first bracket can make the distance between the first radial sensor and the rotation shaft assembly closer, thereby improving the detection accuracy of the first radial sensor for the rotation shaft and enhancing the stability and reliability of the operation of the magnetic levitation motor.

[0019] Optionally, the magnetic levitation motor further includes a first mounting block. The first mounting block includes a body and a first protrusion. Along the radial direction of the rotation shaft assembly, the first protrusion is disposed on the side of the body facing the rotation shaft assembly. A first groove is provided on the inner peripheral edge of the first bracket, and at least a part of the body is received in the first groove. The first radial sensor is sleeved on the first protrusion.

[0020] The body of the first mounting block can be arranged in the first groove, which can make the internal structure of the magnetic levitation motor more compact and improve the space utilization rate inside the magnetic levitation motor. The first radial sensor is sleeved on the first protrusion. On the one hand, it can simplify the internal structure design of the magnetic levitation motor and fix the first radial sensor with a simple structure. On the other hand, since the first protrusion is disposed on the side of the body facing the rotation shaft assembly, it can also make the distance between the first radial sensor and the rotation shaft closer, thereby improving the detection accuracy of the first radial sensor for the rotation shaft and enhancing the stability and reliability of the operation of the magnetic levitation motor.

[0021] In a second aspect, an embodiment of the present application further provides a molecular pump, including the magnetic levitation motor according to any one of the embodiments of the present application.

[0022] The molecular pump provided in the embodiment of the present application has a first hole on the first top wall that passes through the first top wall and is opposite to the first circuit board, so that maintenance equipment such as welding guns and hot air guns can be directly extended into the area to be repaired, reducing the difficulty of repairing the magnetic levitation motor and improving the maintenance efficiency of the magnetic levitation motor. For the welding process, on the one hand, since the welding gun can directly contact the welding part, the welding process can be made more precise, reducing welding errors and unnecessary rework, and improving welding efficiency. On the other hand, since the first hole is opened above the welded area, the heat distribution and welding material flow during the welding process can be better controlled, thereby reducing the occurrence of welding defects such as pores and slag inclusions. In addition, the welding personnel can more conveniently observe the welding process through the first hole, promptly discover and deal with potential problems, ensure welding quality, and thus improve the stability and reliability of the operation of the magnetic levitation motor. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the specific implementation methods of the present application or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0024] Figure 1 A part of a magnetic levitation motor provided in one embodiment of the present application;

[0025] Figure 2 A magnetic levitation motor provided in one embodiment of the present application;

[0026] Figure 3 for Figure 2 A top view of

[0027] Figure 4 for Figure 3 Section view in AA direction;

[0028] Figure 5 A part of a magnetic levitation motor provided in one embodiment of the present application;

[0029] Figure 6 for Figure 5 A top view of

[0030] Figure 7 for Figure 6 Section view in the AA direction;

[0031] Figure 8 A schematic diagram of the structure of a magnetic levitation motor at a circuit board provided in one embodiment of the present application.

[0032] [Description of Reference Numerals]

[0033] Magnetic levitation motor 100;

[0034] Housing 110;

[0035] First end 111;

[0036] Second end 112;

[0037] First circumferential wall 1110;

[0038] First top wall 1111;

[0039] Rotating shaft assembly 120;

[0040] First radial magnetic bearing stator 130;

[0041] Second radial magnetic bearing stator 140;

[0042] First circuit board 150;

[0043] First radial sensor 160;

[0044] First hole 170;

[0045] First connection area 180;

[0046] Second hole 190;

[0047] First bracket 200;

[0048] First mounting block 210;

[0049] First protrusion 220;

[0050] First groove 230. Detailed implementation manners

[0051] To make the objectives, technical solutions and advantages of the embodiments of this application clearer, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of this application. Apparently, the described embodiments are some but not all of the embodiments of this application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of this application without creative efforts shall fall within the protection scope of this application.

[0052] Unless otherwise defined, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains; the terms used in the specification of this application are for the purpose of describing specific embodiments only and are not intended to limit this application; the terms "including" and "having" and any variations thereof in the specification and claims of this application and the above drawings are intended to cover non-exclusive inclusion. The terms "first", "second", etc. in the specification and claims of this application or the above drawings are used to distinguish different objects and not to describe a specific order or primary-secondary relationship.

[0053] Reference to "embodiment" in this application means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of this application. The phrase appearing in various places in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described in this application can be combined with other embodiments.

[0054] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "coupled", "attached" shall be construed broadly, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0055] The term "and / or" in this application is merely a description of the association relationship of associated objects, indicating that three relationships can exist. For example, A and / or B can represent: A exists alone, A and B exist simultaneously, and B exists alone. In addition, the character " / " in this application generally represents an "or" relationship between the associated objects before and after.

[0056] The "plurality" mentioned in this application refers to two or more (including two). Similarly, "multiple groups" refers to two or more groups (including two groups), and "multiple pieces" refers to two or more pieces (including two pieces).

[0057] With the continuous improvement of industrialization and automation, the requirements for the performance of motors are also getting higher and higher. As a new type of motor technology, magnetic levitation motors are attracting more and more attention. Due to reasons such as testing or maintenance, the rotating shaft assembly on the magnetic levitation motor will be disassembled and assembled multiple times. The distance between the first radial sensor and the outer diameter of the rotating shaft assembly is small, usually 0.7 mm, and the diameter of the connection line between the first radial sensor and the first circuit board is small. During the assembly or disassembly of the rotating shaft assembly, the connection line between the first circuit board and the first radial sensor may be broken, resulting in an open circuit phenomenon, and further causing the magnetic levitation motor to malfunction.

[0058] However, in the related art, since the pump core assembly of the magnetic levitation motor is integrally potted and forms an integral body with the stator housing, it is not easy to disassemble the pump core assembly for maintenance. The breakage of the connection line between the first circuit board and the first radial sensor may cause the entire magnetic levitation motor to be scrapped.

[0059] In view of this, the embodiments of the present application propose a magnetic levitation motor and a molecular pump. The magnetic levitation motor includes a housing, a rotating shaft assembly, a first radial magnetic bearing stator, a second radial magnetic bearing stator, a first circuit board, and a first radial sensor. The rotating shaft assembly is disposed in the housing. Along the axial direction of the rotating shaft assembly, the housing has a first end and a second end. The first radial bearing stator is fixed to the inner side of the first end, and the second radial bearing stator is fixed to the inner side of the second end. The first circuit board and the first radial sensor are provided. The first circuit board is disposed on the inner side of the first end, and the first radial sensor is electrically connected to the first circuit board. Along the axial direction of the rotating shaft assembly, the first circuit board is disposed on the side of the first radial magnetic bearing stator away from the second radial magnetic bearing stator. Wherein, the first end includes a first peripheral wall and a first top wall. Along the axial direction of the rotating shaft assembly, the first top wall is disposed on the side of the first peripheral wall away from the second end. The first top wall is partially opposite to the first radial magnetic bearing stator, and a first hole penetrating the first top wall and opposite to the first circuit board is provided on the first top wall. This can repair the connection line between the first radial sensor and the first circuit board without disassembling the pump core assembly.

[0060] For the convenience of description, the following embodiments will take a magnetic levitation motor according to an embodiment of the present application as an example for description.

[0061] Please refer to Figures 1 to 8 , Figure 1 which is a part of the magnetic levitation motor 100 provided by an embodiment of the present application; Figure 2 which is the magnetic levitation motor 100 provided by an embodiment of the present application; Figure 3 is Figure 2 the top view of Figure 4 is Figure 3 the cross-sectional view in the A-A direction of Figure 5 which is a part of the magnetic levitation motor 100 provided by an embodiment of the present application;Figure 6 is Figure 5 the top view of; Figure 7 is Figure 6 the sectional view in the A-A direction; Figure 8 is a schematic structural view of the magnetic levitation motor 100 provided by an embodiment of the present application at the circuit board.

[0062] In this embodiment, the magnetic levitation motor 100 includes a housing 110, a rotating shaft assembly 120, a first radial magnetic bearing stator 130, a second radial magnetic bearing stator 140, a first circuit board 150, and a first radial sensor 160. The rotating shaft assembly 120 is disposed inside the housing 110. Along the axial direction of the rotating shaft assembly 120, the housing 110 has a first end 111 and a second end 112. The first radial bearing stator is fixed to the inner side of the first end 111, and the second radial bearing stator is fixed to the inner side of the second end 112. The first circuit board 150 and the first radial sensor 160. The first circuit board 150 is disposed on the inner side of the first end 111. The first radial sensor 160 is electrically connected to the first circuit board 150. Along the axial direction of the rotating shaft assembly 120, the first circuit board 150 is disposed on the side of the first radial magnetic bearing stator 130 away from the second radial magnetic bearing stator 140. Among them, the first end 111 includes a first peripheral wall 1110 and a first top wall 1111. Along the axial direction of the rotating shaft assembly 120, the first top wall 1111 is disposed on the side of the first peripheral wall 1110 away from the second end 112. The first top wall 1111 is partially opposite to the first radial magnetic bearing stator 130. A first hole 170 penetrating the first top wall 1111 and opposite to the first circuit board 150 is provided on the first top wall 1111.

[0063] During the process of assembling or disassembling the rotating shaft assembly 120, the rotating shaft assembly 120 is usually inserted into or removed from the housing 110 from the first end 111 of the housing 110. The first radial magnetic bearing stator 130 is arranged inside the first end 111. Along the axial direction of the rotating shaft assembly 120, the first circuit board 150 is arranged on the side of the first radial magnetic bearing stator 130 away from the second radial magnetic bearing stator 140. That is to say, the first circuit board 150 is arranged inside the first end 111 of the housing 110. Along the axial direction of the rotating shaft assembly 120, the first circuit board 150 is closer to the first end 111 of the housing. The first radial sensor 160 is electrically connected to the first circuit board 150. Exemplarily, the electrical connection can be achieved through a wire connection. In the internal structure of the magnetic levitation motor 100, along the radial direction of the rotating shaft assembly 120, the distance between the first radial sensor 160 and the rotating shaft assembly 120 is relatively small. Exemplarily, the distance between the first radial sensor 160 and the rotating shaft assembly 120 can be 0.7 mm. Along the axial direction of the rotating shaft assembly 120, the first top wall 1111 is arranged on the side of the first peripheral wall 1110 away from the second end 112. There is a hole passing through the first top wall 1111 and opposite to the first circuit board 150 on the first top wall 1111. Exemplarily, along the axial direction of the rotating shaft assembly 120, the first hole 170 can also pass through the first peripheral wall 1110.

[0064] When the connecting wire between the first radial sensor 160 and the first circuit board 150 is damaged, repair components such as a soldering gun and a hot air gun can be used to repair the connecting wire of the first radial sensor 160. Since repair equipment such as a soldering gun or a hot air gun usually needs to be inserted close to the area to be repaired. For example, when the wire connecting the first radial sensor 160 and the first circuit board 150 is damaged, a hot air gun can be used to blow and melt the potting glue at the solder joints on the first radial sensor 160 and the first circuit board 150, and then re-weld the wire between the first radial sensor 160 and the first circuit board 150 to restore the electrical connection between the first radial sensor 160 and the first circuit board 150.

[0065] The first top wall 1111 is provided with a first hole 170 that passes through the first top wall 1111 and is opposite to the first circuit board 150, so that maintenance equipment such as a welding gun and a hot air gun can be directly extended into the area to be repaired, thereby reducing the difficulty of repairing the magnetic levitation motor 100 and improving the maintenance efficiency of the magnetic levitation motor 100. For the welding process, on the one hand, since the welding gun can directly contact the welding part, the welding process can be made more accurate, the welding error and unnecessary rework can be reduced, and the welding efficiency can be improved. On the other hand, since the first hole 170 is opened above the welded area, the heat distribution and welding material flow during the welding process can be better controlled, thereby reducing the occurrence of welding defects such as pores and slag inclusions. Moreover, the welding personnel can observe the welding process more conveniently through the first hole 170, timely discover and deal with potential problems, ensure the welding quality, and thus improve the stability and reliability of the operation of the magnetic levitation motor 100.

[0066] In some embodiments, the shape of the first hole 170 can be circular, rectangular or other shapes. It should be noted that the size of the first hole 170 can vary according to the specific parameters of different magnetic levitation motors 100 and the sizes of maintenance equipment such as welding guns and hot air guns. The size of the first hole 170 can at least ensure that maintenance equipment such as welding guns and hot air guns can extend into the area to be repaired and contact the first circuit board 150.

[0067] Please refer to Figures 1 to 8 In this embodiment, the first circuit board 150 has a first connection area 180 , and the first connection area 180 is connected to the first radial sensor 160 through a first wiring harness. Along the axial direction of the shaft assembly 120 , the first connection area 180 is opposite to the first hole 170 .

[0068] The first radial sensor 160 is connected to the first circuit board 150 through the first connection area 180, and the first wiring harness is arranged on the first connection area 180. That is to say, when the first wiring harness in the magnetic levitation motor 100 is damaged, the first wiring harness can be disconnected from the first connection area 180 on the first circuit board 150 and the first wiring harness can be disconnected from the first radial sensor 160 on the first radial sensor 160 by using maintenance equipment such as a welding gun and a hot air gun. Then, the first radial sensor 160 and the first circuit board 150 are reconnected through the second wiring harness by using maintenance equipment.

[0069] The first connection area 180 is the area on the first circuit board 150 that is connected to the first wire harness. Therefore, the connection stability of the first connection area 180 needs to be ensured. Thus, by aligning the first connection area 180 with the first hole 170, repair equipment such as a soldering gun and a hot air gun can directly extend into the first connection area 180 and / or come into contact with the first connection area 180. As a result, repair equipment such as a soldering gun and a hot air gun can more accurately and conveniently repair the maglev motor 100, improving the repair quality of the maglev motor 100. Moreover, since the first connection area 180 is opposite to the first hole 170, it only needs to be ensured that the first hole 170 in the first connection area 180 can allow repair equipment such as a soldering gun and a hot air gun to extend into the first connection area 180, without having to penetrate the area of the first circuit board 150 corresponding to the entire first top wall 1111. On the one hand, this can effectively reduce the area of the first hole 170 or the through - area opened on the first top wall 1111, reducing the manufacturing cost. On the other hand, it can also help improve the stability of the overall structure of the maglev motor 100, reduce the risk of stress concentration, and decrease the probability of the maglev motor 100 malfunctioning.

[0070] Please refer to Figures 1 to 8 , in this embodiment, along the radial direction of the rotating shaft assembly 120, the first radial sensor 160 is disposed opposite to the first connection area 180.

[0071] Since the first radial sensor 160 and the first connection area 180 are connected by the first wire harness, disposing the first radial sensor 160 opposite to the first connection area 180 can reduce the distance between the first radial sensor 160 and the first connection area 180, thereby reducing the length of the first wire harness and lowering the manufacturing cost of the maglev motor 100. Moreover, along the radial direction of the rotating shaft assembly 120, with the first radial sensor 160 and the first connection area 180 disposed opposite to each other, the first radial sensor 160 can also be disposed opposite to the first hole 170 along the axial direction of the rotating shaft assembly 120. Thus, when the first radial sensor 160 malfunctions, it is also beneficial for repair equipment such as a soldering gun and a hot air gun to repair the first radial sensor 160, reducing the repair cost of the maglev motor 100 and improving the repair efficiency of the maglev motor 100.

[0072] It should be noted that when the first radial sensor 160 is disposed opposite to the first connection area 180 along the radial direction of the rotating shaft assembly 120, the first radial sensor 160 can be in a straight line with the first connection area 180, or the first radial sensor 160 can also have a certain angular deviation from the first connection area 180. Exemplarily, the magnitude of the angular deviation can be 20 degrees.

[0073] Please refer to Figures 1 to 8, in this embodiment, the first radial sensors 160, the first connection areas 180, and the first holes 170 are all multiple. Along the circumferential direction of the rotating shaft assembly 120, the multiple first radial sensors 160 are arranged at intervals, the multiple first connection areas 180 are arranged at intervals, and the multiple first holes 170 are arranged at intervals. Along the axial direction of the rotating shaft assembly 120, each first hole 170 is disposed opposite to the corresponding first connection area 180.

[0074] Along the circumferential direction of the rotating shaft assembly 120, arranging multiple first radial sensors 160 can provide multiple sets of measurement data for the operating conditions of the magnetic levitation motor 100. When one of the radial sensors fails or the measurement is inaccurate, the other sensors can still work normally, thus ensuring the continuous and stable operation of the system. Moreover, by averaging or weighting the measurement values of the multiple first radial sensors 160, the influence of random errors and noise can be reduced, and the stability and reliability of the detection results can be improved. Along the circumferential direction of the rotating shaft assembly 120, the multiple first holes 170 are arranged at intervals. On the one hand, the multiple first holes 170 are evenly distributed on the magnetic levitation motor 100, which can reduce the overall weight of the magnetic levitation motor 100 and make the magnetic levitation motor 100 more lightweight. On the other hand, it can reduce the probability of stress concentration in the magnetic levitation motor 100 and improve the stability of the operation of the magnetic levitation motor 100.

[0075] Each first hole 170 is disposed opposite to the corresponding first connection area 180. That is to say, along the axial direction of the rotating shaft assembly 120, each first hole 170 is also disposed opposite to the first radial sensor 160. Thus, each first connection area 180 has a dedicated first hole 170 for equipment such as welding guns and hot air guns to extend into, improving the maintenance efficiency of the staff.

[0076] Please refer to Figures 1 to 8 , in this embodiment, the first top wall 1111 is configured as an annular shape. The inner peripheral edge of the first top wall 1111 defines a second hole 190 for the rotating shaft assembly 120 to extend out. The outer peripheral edge of the first top wall 1111 is connected to the first peripheral wall 1110, and the second hole 190 penetrates the inner peripheral edge of the first top wall 1111.

[0077] The inner peripheral edge of the first top wall 1111 has the second hole 190, and the rotating shaft assembly 120 can extend out of the second hole 190. This is beneficial to the rotation of the rotating shaft assembly 120, reduces the probability of collision between the rotating shaft assembly 120 and the first top wall 1111, decreases the possibility of damage to the rotating shaft assembly 120, and improves the stability of the operation of the magnetic levitation motor 100. The second hole 190 penetrates the inner peripheral edge of the first top wall 1111, enabling maintenance equipment such as welding guns and hot air guns to extend into the first connection area 180 and the first radial sensor 160 more accurately and conveniently, thereby improving the maintenance efficiency of the magnetic levitation motor 100.

[0078] Please refer toFigures 1 to 8 In this embodiment, the magnetic levitation motor 100 also includes a first bracket 200, which is fixed to the inner side of the first circumferential wall 1110. Along the axial direction of the rotating shaft assembly 120, the first circuit board 150 is arranged on the side of the first bracket 200 away from the first radial magnetic bearing stator 130.

[0079] The first bracket 200 can provide a stable support for the first circuit board 150, ensuring that the first circuit board 150 will not be deformed or damaged due to external force or its own weight during operation. By fixing the first circuit board 150 by the first bracket 200, the first circuit board 150 can maintain a stable position, reducing the performance degradation or failure of the first circuit board 150 caused by vibration or impact. In addition, arranging the first circuit board 150 on the first bracket 200 can make the installation, removal and replacement of the first circuit board 150 more convenient, reducing maintenance costs and time.

[0080] Please refer to Figures 1 to 8 In this embodiment, the first bracket 200 is constructed in a ring shape, and the first radial sensor 160 is disposed on the inner circumference of the first bracket 200 along the radial direction of the shaft assembly 120 .

[0081] Setting the first bracket 200 in a ring shape can, on the one hand, provide more uniform support for the first circuit board 150. Compared with brackets of other shapes, the ring bracket can better disperse the pressure when subjected to force, reduce local stress concentration, and thus improve the stability of the overall structure. On the other hand, if the magnetic levitation motor 100 encounters vibration or impact, the ring bracket can effectively absorb and disperse these forces to protect the first circuit board 150 from damage. Moreover, setting the first bracket 200 in a ring shape can provide a larger layout space for the first circuit board 150, making wiring more flexible and convenient.

[0082] Since the first radial sensor 160 is mainly used in the magnetic levitation motor 100 to measure the displacement of the rotating shaft assembly 120 in the radial direction of the rotating shaft assembly 120, so as to maintain the rotating shaft stable in the corresponding suspended state, the first radial sensor 160 is arranged on the inner circumference of the first bracket 200, so that the distance between the first radial sensor 160 and the rotating shaft assembly 120 can be closer, thereby improving the detection accuracy of the first radial sensor 160 for the rotating shaft assembly 120, and improving the stability and reliability of the operation of the magnetic levitation motor 100.

[0083] Please refer to Figures 1 to 8 In the embodiment of the present application, along the radial direction of the shaft assembly 120 , the first radial sensor 160 protrudes from the inner circumference of the first bracket 200 .

[0084] Protruding the first radial sensor 160 beyond the inner peripheral edge of the first bracket 200 can bring the first radial sensor 160 closer to the rotating shaft assembly 120, thereby improving the detection accuracy of the first radial sensor 160 for the rotating shaft and enhancing the stability and reliability of the operation of the magnetic levitation motor 100.

[0085] Please refer to Figures 1 to 8 In the embodiment of the present application, the magnetic levitation motor 100 further includes a first mounting block 210. The first mounting block 210 includes a body and a first protrusion 220. Along the radial direction of the rotating shaft assembly 120, the first protrusion 220 is disposed on the side of the body facing the rotating shaft assembly 120. A first groove 230 is provided on the inner peripheral edge of the first bracket 200, and at least a part of the body is received in the first groove 230. The first radial sensor 160 is sleeved on the first protrusion 220.

[0086] The first mounting block 210 is disposed on the first bracket 200. The inner peripheral edge of the first bracket 200 has a first groove 230, and at least a part of the body of the first mounting block 210 is received in the first groove 230. That is to say, the body of the first mounting block 210 can be disposed in the first groove 230, which can make the internal structure of the magnetic levitation motor 100 more compact and improve the space utilization rate inside the magnetic levitation motor 100. The first radial sensor 160 is sleeved on the first protrusion 220. On the one hand, it can simplify the internal structure design of the magnetic levitation motor 100, and the first radial sensor 160 can be fixed by using a simple structure. On the other hand, since the first protrusion 220 is disposed on the side of the body facing the rotating shaft assembly 120, it can also bring the first radial sensor 160 closer to the rotating shaft assembly 120, thereby improving the detection accuracy of the first radial sensor 160 for the rotating shaft assembly 120 and enhancing the stability and reliability of the operation of the magnetic levitation motor 100.

[0087] It should also be noted that the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, such that a process, method, commodity or device including a series of elements not only includes those elements but also includes other elements not expressly listed, or elements inherent to such process, method, commodity or device. Without further limitation, an element defined by the statement "including a..." does not exclude the existence of additional identical elements in the process, method, commodity or device including the said element.

[0088] Each embodiment in this specification is described in a progressive manner. The same or similar parts among the embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the system embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the relevant parts can refer to the partial description of the method embodiment.

[0089] The above are only embodiments of the present application and are not intended to limit the present application. For those skilled in the art, various changes and modifications can be made to the present application. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present application shall be included within the scope of the claims of the present application.

[0090] Although the embodiments of the present application have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present application, and such modifications and variations fall within the scope defined by the appended claims.

Claims

1. A magnetic levitation motor, characterized in that: include: case; A shaft assembly is disposed in the housing, and along the axial direction of the shaft assembly, the housing has a first end and a second end; A first radial magnetic bearing stator and a second radial magnetic bearing stator, wherein the first radial magnetic bearing stator is fixed to the inner side of the first end, and the second radial magnetic bearing stator is fixed to the inner side of the second end; A first circuit board and a first radial sensor, wherein the first circuit board is disposed on the inner side of the first end, the first radial sensor is electrically connected to the first circuit board, and along the axial direction of the rotating shaft assembly, the first circuit board is disposed on a side of the first radial magnetic bearing stator away from the second radial magnetic bearing stator; Among them, the first end includes a first circumferential wall and a first top wall. Along the axial direction of the rotating shaft assembly, the first top wall is arranged on the side of the first circumferential wall away from the second end. The first top wall is opposite to the stator part of the first radial magnetic bearing. The first top wall is provided with a first hole that passes through the first top wall and is opposite to the first circuit board.

2. The magnetic levitation motor according to claim 1, characterized in that: The first circuit board has a first connection area, and the first connection area is connected to the first radial sensor through a first wiring harness; Along the axial direction of the rotating shaft assembly, the first connecting area is opposite to the first hole.

3. The magnetic levitation motor according to claim 2, characterized in that: Along the radial direction of the rotating shaft assembly, the first radial sensor is arranged opposite to the first connecting area.

4. The magnetic levitation motor according to claim 2, characterized in that: There are multiple first radial sensors, multiple first connection areas, and multiple first holes. Along the circumference of the shaft assembly, multiple first radial sensors are arranged at intervals, multiple first connection areas are arranged at intervals, and multiple first holes are arranged at intervals. Along the axial direction of the rotating shaft assembly, each of the first holes is arranged opposite to the corresponding first connecting area.

5. The magnetic levitation motor according to any one of claims 1 to 4, characterized in that: The first top wall is constructed in an annular shape, the inner circumference of the first top wall defines a second hole for the shaft assembly to extend out, the outer circumference of the first top wall is connected to the first peripheral wall, and the second hole passes through the inner circumference of the first top wall.

6. The magnetic levitation motor according to claim 1, characterized in that: The magnetic levitation motor also includes a first bracket, which is fixed to the inner side of the first peripheral wall. Along the axial direction of the rotating shaft assembly, the first circuit board is arranged on the side of the first bracket away from the first radial magnetic bearing stator.

7. The magnetic levitation motor according to claim 6, characterized in that: The first bracket is constructed in a ring shape, and along the radial direction of the rotating shaft assembly, the first radial sensor is arranged on the inner circumference of the first bracket.

8. The magnetic levitation motor according to claim 7, characterized in that: Along the radial direction of the rotating shaft assembly, the first radial sensor protrudes from the inner circumference of the first bracket.

9. The magnetic levitation motor according to claim 8, characterized in that: The magnetic levitation motor further comprises a first mounting block, the first mounting block comprising a body and a first protrusion, and along the radial direction of the rotating shaft assembly, the first protrusion is arranged on a side of the body facing the rotating shaft assembly; A first groove is arranged on the inner circumference of the first bracket, the first groove accommodates at least a part of the body, and the first radial sensor is sleeved on the first protrusion.

10. A molecular pump, characterized in that: It comprises the magnetic levitation motor as claimed in any one of claims 1 to 9.

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