Heating component and semiconductor processing equipment

Abstract

The utility model discloses a heating component and semiconductor processing equipment, the heating component comprises a heating pipe, two ends of which are respectively connected with a power supply through leads; first binding posts are arranged at the two ends of the heating pipe, a second binding post is arranged at the end, connected with the heating pipe, of the wire, and the first binding posts and the second binding post are connected through metal welding. The crimping terminal covers the outer sides of the first binding post and the second binding post; two ends of the crimping terminal are respectively connected with the first binding post and the second binding post in a crimping manner; the connector shell comprises an insulating layer, and the outer side of the crimping terminal is coated with the insulating layer; and the protective sleeve is sleeved on the outer side of the insulating layer. According to the utility model, through the cooperation of crimping and metal welding, the connection strength of the first binding post of the heating tube and the second binding post of the lead can be ensured, and the resistance at the connection part of the first binding post and the second binding post can be effectively reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor preparation, in particular to a heating component and a semiconductor processing device. Background Art

[0002] During the semiconductor preparation process, the temperature control of the substrate is particularly important. With the continuous development of semiconductor preparation technology, various heaters are applied to process equipment to meet the temperature control requirements of the substrate. In the use of heaters, problems are most likely to occur at the joint between the cold-end lead of the heater and the wire of the power supply, affecting the reliability of the process equipment.

[0003] In the prior art, the cold-end lead of the heater and the wire of the power supply are mainly connected in the following two ways: One connection method is screw connection, that is, a screw terminal is welded on the cold-end lead, a crimping terminal is provided on the wire, and the cold-end lead and the wire are connected together by screws; However, when the screw is not tightened or after long-term use, the contact resistance will increase, resulting in heat generation at the contact point and burning out the joint. Another connection method is that the cold-end lead and the wire are respectively crimped at both ends of the same crimping terminal to form a whole. This connection method works well for heaters with low power (below 2000W), but when the joint is subjected to external force, the crimping part of the joint is prone to damage, resulting in too large a crimping resistance, causing the joint to overheat and burn out; In addition, the failure probability of this connection method will greatly increase when the power rises to a higher level (above 4500W). Therefore, it is necessary to adjust the connection method between the cold-end lead and the wire in the heater. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a heating component and a semiconductor processing device to reduce the resistance at the connection between the first terminal and the second terminal.

[0005] To achieve the above purpose, the utility model is realized through the following technical solutions:

[0006] A heating component includes:

[0007] A heating tube, the two ends of which are respectively connected to a power supply through wires; and first terminals are provided at both ends of the heating tube, a second terminal is provided at one end of the wire connecting the heating tube, and the first terminal and the second terminal are connected by metal welding;

[0008] A crimping terminal, covering the outside of the first terminal and the second terminal; and both ends of the crimping terminal are respectively connected to the first terminal and the second terminal by crimping; and

[0009] A connector housing, which includes: an insulating layer covering the outside of the crimping terminal; a protective sleeve sleeved on the outside of the insulating layer.

[0010] Optionally, the metal welding is silver brazing.

[0011] Optionally, at least one through hole is provided on the crimp terminal to fill silver brazing material between the crimp terminal and the first terminal, between the first terminal and the second terminal, and between the crimp terminal and the second terminal.

[0012] Optionally, the metal welding is silver welding, and the first terminal and the second terminal are respectively fusion welded with silver solder.

[0013] Optionally, the heating component further includes: a bourdon tube sleeved outside the wire and fixedly connected to one end of the connector housing away from the heating tube for dispersing the bending stress of the wire.

[0014] Optionally, the bourdon tube extends along the wire direction from the connector housing by a preset length, and the preset length is not less than 3 cm.

[0015] Optionally, a terminal or a plug is provided at one end of the wire connecting to the power supply.

[0016] Optionally, the heating tube is an armored heating tube.

[0017] On the other hand, the present utility model further provides a semiconductor processing device, including:

[0018] A reaction chamber;

[0019] Components disposed in the reaction chamber; and

[0020] The heating component as described above for heating the components.

[0021] Optionally, the component is a base disposed at the inner bottom of the reaction chamber; the heating component is disposed in the base.

[0022] Optionally, the component is a liner disposed around the inner sidewall of the reaction chamber; the heating component is disposed inside or on the inner sidewall of the liner.

[0023] Optionally, the component is a restraint ring disposed around the base located in the reaction chamber; the heating component is disposed below the restraint ring.

[0024] The present utility model has at least one of the following advantages compared with the prior art:

[0025] A heating component and a semiconductor processing device provided by the present utility model. The first terminal of the heating tube in the heating component is connected to the second terminal of the wire through metal welding. This can not only ensure the connection strength between the first terminal and the second terminal, but also effectively reduce the contact resistance at the connection between the first terminal and the second terminal. In addition, the outer sides of the first terminal and the second terminal are covered with crimp terminals, so that the pulling force applied to the first terminal or the second terminal is directly applied to the crimp terminals, thereby preventing the pulling force from being applied to the metal welding head between the first terminal and the second terminal, and further ensuring the connection strength between the first terminal and the second terminal; and through the cooperation of crimping and metal welding, the resistance at the connection between the first terminal and the second terminal can be further reduced.

[0026] The present utility model can effectively prevent the connection between the first terminal and the second terminal from breaking or burning due to excessive resistance, and thus can ensure the connection reliability and safety of the first terminal and the second terminal under the conditions of high transmission power and long service time of the heating component.

[0027] In the present utility model, the metal welding is silver brazing or silver soldering, which can make the metal welding head formed between the first terminal and the second terminal have good electrical conductivity, so as to ensure the transmission power and transmission efficiency of the power supply to the heating tube.

[0028] In the present utility model, a spring tube is sleeved outside the wire. The spring tube can disperse the bending stress of the wire when the wire is subjected to a bending force, thereby preventing the wire from breaking due to stress, and further ensuring the reliability and service life of the wire, so as to ensure the transmission power and transmission efficiency of the power supply to the heating tube. Description of the Drawings

[0029] Figure 1 is a schematic structural diagram of a heating component provided by the present utility model;

[0030] Figure 2 is a schematic structural diagram of a heating tube in a heating component provided by the present utility model;

[0031] Figure 3 is a schematic cross-sectional view when the metal welding in a heating component provided by the present utility model is silver brazing;

[0032] Figure 4 is a schematic cross-sectional view when the metal welding in a heating component provided by the present utility model is silver soldering;

[0033] Figure 5 is a schematic structural diagram of a semiconductor processing device provided by the present utility model. Detailed Embodiments

[0034] The following further elaborates on a heating component and a semiconductor processing device proposed by the present utility model in conjunction with the accompanying drawings and specific embodiments. According to the following description, the advantages and features of the present utility model will be clearer. It should be noted that the accompanying drawings are in a very simplified form and use non-precise scales, only for conveniently and clearly assisting in explaining the purpose of the embodiments of the present utility model. In order to make the purpose, features, and advantages of the present utility model more obvious and understandable, please refer to the accompanying drawings. It should be noted that the structures, scales, sizes, etc. shown in the drawings of this specification are only used to cooperate with the content disclosed in the specification for those familiar with this technology to understand and read, and are not used to limit the limiting conditions for the implementation of the present utility model. Therefore, they do not have technical substance significance. Any modification of the structure, change in the proportional relationship, or adjustment of the size, without affecting the efficacy that the present utility model can produce and the purpose that can be achieved, should still fall within the scope covered by the technical content disclosed by the present utility model.

[0035] It should be noted that in this text, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the term "comprising", "including", or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article, or device including a series of elements not only includes those elements but also includes other elements not explicitly listed, or further includes elements inherent to such process, method, article, or device. Without further limitation, an element defined by the statement "including one..." does not exclude the existence of additional identical elements in the process, method, article, or device including the said element.

[0036] Combined with the attached Figures 1 to 4 As shown, this embodiment provides a heating component 10, including: a heating tube 110, a crimp terminal 130 (see Figure 3 and Figure 4 ), and a connector housing 140. Both ends of the heating tube 110 are respectively connected to a power supply (not shown in the figure) through wires 120; and first connection terminals 1101 are respectively provided at both ends of the heating tube 110 (see Figure 2 ), and a second connection terminal 1201 is provided at one end of the wire 120 connecting the heating tube 110 (see Figure 3 and Figure 4In (the figure), the first terminal 1101 and the second terminal 1201 are connected by metal welding. The crimp terminal 130 is covered on the outside of the first terminal 1101 and the second terminal 1201; and both ends of the crimp terminal 130 are connected to the first terminal 1101 and the second terminal 1201 by crimping respectively. The connector housing 140 includes an insulating layer 1401 and a protective sleeve 1402; the insulating layer 1401 is covered on the outside of the crimp terminal 130; the protective sleeve 1402 is sleeved on the outside of the insulating layer 1401.

[0037] Specifically, the power supply supplies electric energy to the heating tube 110 through the connected second terminal 1201 and first terminal 1101, so that the heating tube 110 can convert electric energy into heat energy to heat the parts to be heated, thereby realizing the heating function of the heating tube 110. More specifically, the power transmission power and efficiency of the power supply to the heating tube 110 are directly related to the stability and contact resistance at the connection between the second terminal 1201 and the first terminal 1101. In this embodiment, the first terminal 1101 and the second terminal 1201 are connected by metal welding, that is, a metal welding joint is formed between the first terminal 1101 and the second terminal 1201. This can not only ensure the connection strength between the first terminal 1101 and the second terminal 1102, but also effectively reduce the contact resistance at the connection between the first terminal 1101 and the second terminal 1102, thereby preventing the connection between the first terminal 1101 and the second terminal 1102 from breaking or burning due to excessive resistance. Furthermore, it can ensure the connection reliability and safety of the first terminal 1101 and the second terminal 1102 under the condition of high power transmission and long service time of the heating component.

[0038] Optionally, the heating tube 110 is an armored heating tube to ensure the reliability and service life of the heating tube 110 itself. Optionally, one end of the wire 120 connected to the power supply is provided with a terminal 121 (see Figure 1 in the figure) or a plug to facilitate the electrical connection between the wire 120 and the power supply, so as to facilitate the power supply to supply electric energy to the heating tube 110, but the present invention is not limited thereto.

[0039] Specifically, covering the outside of the first terminal 1101 and the second terminal 1201 with the crimping terminal 130 can directly apply the pulling force received by the first terminal 1101 or the second terminal 1201 to the crimping terminal 130, thereby preventing the pulling force from being applied to the metal welding joint between the first terminal 1101 and the second terminal 1201, and further ensuring the connection strength between the first terminal 1101 and the second terminal 1201. More specifically, by means of the cooperation of crimping and metal welding, the resistance at the connection between the first terminal 1101 and the second terminal 1201 can be further reduced to ensure the power transmission power and power transmission efficiency of the power supply to the heating tube 110.

[0040] Specifically, the outside of the crimping terminal 130 is sequentially covered with the insulating layer 1401 and the protective sleeve 1402; wherein, the insulating layer 1401 can insulate the crimping terminal 130 and isolate the crimping terminal 130 from the outside air, thereby preventing the crimping terminal 130, the first terminal 1101 and the second terminal 1201 located inside the crimping terminal 130, and the metal welding joint between the two from being oxidized and causing an increase in resistance. The outermost protective sleeve 1402 can directly bear the pulling force when the first terminal 1101 or the second terminal is subjected to a pulling force, that is, in the case where the protective sleeve 1402 is provided, the pulling force will be first applied to the protective sleeve 1402, further preventing the pulling force from being applied to the metal welding joint between the first terminal 1101 and the second terminal 1201, thereby ensuring the connection strength between the first terminal 1101 and the second terminal 1201. Optionally, the protective sleeve 1402 can be made of a stainless steel sleeve. Optionally, the insulating layer 1401 can be formed by filling a heat-curing adhesive between the protective sleeve 1402 and the crimping terminal 130, but the present invention is not limited thereto.

[0041] Please refer to Figure 3 , the metal welding is silver brazing, so that the metal welding joint 111 between the first terminal 1101 and the second terminal 1201 has good electrical conductivity, thereby ensuring the power transmission power and power transmission efficiency of the power supply to the heating tube 110.

[0042] In one embodiment, at least one through hole 131 is formed in the crimping terminal 130 to facilitate filling silver brazing filler metal between the crimping terminal 130 and the first terminal 1101, between the first terminal 1101 and the second terminal 1201, and between the crimping terminal 130 and the second terminal 1201. Further, after the silver brazing filler metal is filled, welding of the first terminal 1101 and the second terminal 1201 can be achieved through a high-temperature process to form a metal welded joint 111.

[0043] In other embodiments, the silver brazing filler metal can also be filled between the crimping terminal 130 and the first terminal 1101, between the first terminal 1101 and the second terminal 1201, and between the crimping terminal 130 and the second terminal 1201 through the gap between the crimping terminal 130 and the first terminal 1101 or the gap between the crimping terminal 130 and the second terminal 1201, but the present invention is not limited thereto.

[0044] Please refer to Figure 4 , in some other embodiments, the metal welding is silver welding, which can also make the metal welded joint 111' between the first terminal 1101 and the second terminal 1201 have good electrical conductivity, thereby ensuring the power transmission power and power transmission efficiency of the power supply to the heating tube 110. Further, the first terminal 1101 and the second terminal 1201 are respectively fusion-welded with silver solder to achieve welding of the first terminal 1101 and the second terminal 1201 and form a metal welded joint 111'.

[0045] Please also refer to Figure 1 , Figure 3 and Figure 4 , the heating component 10 further includes: a spring tube 160 sleeved outside the wire 120 and fixedly connected to one end of the connector housing 140 away from the heating tube 110 for dispersing the bending stress of the wire 120.

[0046] Specifically, during the process of the power supply delivering electrical energy to the heating tube 110, the position of the wire 120 may shift, causing the wire 120 to be bent under force. The bellows 160 can disperse the bending stress of the wire 120 when the wire 120 is subjected to a bending force, thereby preventing the wire 120 from breaking under force, and further ensuring the reliability and service life of the wire 120. Optionally, the bellows 160 extends from the connector housing 140 along the direction of the wire 120 by a preset length, and the preset length is not less than 3 cm, so that the bellows 160 at least covers the easily bendable portion of the wire 120 (such as the connection between the wire 120 and the connector housing 140), which can not only ensure the reliability of the wire 120 but also reduce the economic cost, but the present utility model is not limited thereto.

[0047] Based on the same inventive concept, when the metal welding is silver brazing, the preparation process of the heating component is as follows: First, both ends of the crimp terminal 130 are respectively crimped to the first terminal 1101 and the second terminal 1201; then, silver brazing filler metal is filled between the crimp terminal 130 and the first terminal 1101, between the first terminal 1101 and the second terminal 1201, and between the crimp terminal 130 and the second terminal 1201; subsequently, the first terminal 1101 and the second terminal 1201 are welded through a high-temperature process to form a metal welding joint 111; then, the protective sleeve 1402 is sleeved outside the crimp terminal 130; after that, a heat-curing adhesive is filled between the protective sleeve 1402 and the crimp terminal 130 to form the insulating layer 1401; finally, the bellows 160 is sleeved outside the wire 120.

[0048] When the metal welding is silver welding, the preparation process of the heating component is as follows: First, the first terminal 1101 and the second terminal 1201 are fusion-welded with silver solder to form a metal welding joint 111'; then, both ends of the crimp terminal 130 are respectively crimped to the first terminal 1101 and the second terminal 1201; subsequently, the protective sleeve 1402 is sleeved outside the crimp terminal 130; after that, a heat-curing adhesive is filled between the protective sleeve 1402 and the crimp terminal 130 to form the insulating layer 1401; finally, the bellows 160 is sleeved outside the wire 120.

[0049] On the other hand, in combination with the attached Figure 5As shown, this embodiment also provides a semiconductor processing device, including: a reaction chamber 210; components disposed within the reaction chamber 210; and the heating component 10 as described above for heating the components. In this embodiment, the semiconductor processing device is taken as an inductively coupled plasma processing device as an example for illustration. In fact, the semiconductor processing device can also be a capacitively coupled plasma processing device.

[0050] In one embodiment, the component can be a susceptor 220, and the susceptor 220 is disposed at the inner bottom of the reaction chamber 210 for carrying a substrate 200. The heating component 10 can be disposed within the susceptor 220 for heating the susceptor 220 and the substrate 200 to regulate the temperature of the substrate 200, so that the temperature of the substrate 200 meets the process requirements, but the present invention is not limited thereto.

[0051] In another embodiment, the component can be a liner 230, and the liner 230 is disposed around the inner sidewall of the reaction chamber 210. The heating component 10 can be disposed inside or on the inner sidewall of the liner 230 to heat the liner 230, thereby preventing deposits from accumulating on the liner 230. Preferably, the heating component 10 is disposed inside the liner 230 to avoid the plasma formed during the process from corroding the heating component 10, thereby extending the service life of the heating component 10, but the present invention is not limited thereto.

[0052] In yet another embodiment, the component can be a confinement ring 240, and the confinement ring 240 is disposed around the susceptor 220 within the reaction chamber 210. The heating component 10 can be disposed below the confinement ring 240 to heat the confinement ring 240, thereby preventing deposits from accumulating on the confinement ring 240, but the present invention is not limited thereto.

[0053] In summary, for the heating component and semiconductor processing equipment provided in this embodiment, the first terminal of the heating tube in the heating component and the second terminal of the wire are connected by metal welding. In this way, both the connection strength between the first terminal and the second terminal can be ensured, and the contact resistance at the connection between the first terminal and the second terminal can be effectively reduced. In addition, the outer sides of the first terminal and the second terminal are covered with crimp terminals, so that the pulling force applied to the first terminal or the second terminal is directly applied to the crimp terminals, thereby preventing the pulling force from being applied to the metal welding head between the first terminal and the second terminal, and further ensuring the connection strength between the first terminal and the second terminal. Moreover, in this embodiment, by combining crimping and metal welding, the resistance at the connection between the first terminal and the second terminal can be further reduced. In this embodiment, the metal welding is silver brazing or silver soldering, which can make the metal welding head formed between the first terminal and the second terminal have good electrical conductivity, thereby ensuring the power transmission power and power transmission efficiency of the power supply to the heating tube. In addition, in this embodiment, a spring tube is sleeved outside the wire. The spring tube can disperse the bending stress of the wire when the wire is subjected to a bending force, thereby preventing the wire from breaking due to stress, and further ensuring the reliability and service life of the wire, so as to ensure the power transmission power and power transmission efficiency of the power supply to the heating tube.

[0054] Although the content of the present utility model has been introduced in detail through the above preferred embodiments, it should be recognized that the above description should not be considered as a limitation of the present utility model. After those skilled in the art have read the above content, various modifications and substitutions to the present utility model will be obvious. Therefore, the protection scope of the present utility model should be defined by the appended claims.

Claims

1. A heating component, characterized in that: include: A heating tube, both ends of which are connected to a power source through wires; and first terminals are provided at both ends of the heating tube, and a second terminal is provided at one end of the wire connected to the heating tube, and the first terminal and the second terminal are connected by metal welding; A crimping terminal, covering the outer sides of the first terminal and the second terminal; and two ends of the crimping terminal are respectively connected to the first terminal and the second terminal by crimping; as well as A connector housing, comprising: an insulating layer covering the outer side of the crimping terminal; The protective cover is sleeved on the outer side of the insulating layer.

2. The heating element according to claim 1, characterized in that The metal welding is silver brazing.

3. The heating element according to claim 2, characterized in that At least one through hole is formed on the crimping terminal to fill silver solder between the crimping terminal and the first binding post, between the first binding post and the second binding post, and between the crimping terminal and the second binding post.

4. The heating element according to claim 1, characterized in that The metal welding is silver welding, and the first terminal and the second terminal are welded with silver solder respectively.

5. The heating element according to claim 1, characterized in that Also includes: The spring tube is sleeved on the outside of the wire and fixedly connected to one end of the connector housing away from the heating tube, so as to disperse the bending stress of the wire.

6. The heating element according to claim 5, characterized in that The spring tube extends from the connector housing along the direction of the wire for a preset length, and the preset length is not less than 3 cm.

7. The heating element according to claim 1, characterized in that One end of the wire connected to the power source is provided with a wiring terminal or a plug.

8. The heating element according to claim 1, characterized in that The heating tube is an armored heating tube.

9. A semiconductor processing device, characterized in that: include: Reaction chamber; Parts, arranged in the reaction chamber; The heating component according to any one of claims 1 to 8, used for heating the component.

10. The semiconductor processing equipment according to claim 9, wherein: The component is a base, and the base is arranged at the inner bottom of the reaction chamber; the heating component is arranged in the base.

11. The semiconductor processing equipment according to claim 9, wherein: The component is a liner, which is arranged around the inner wall of the reaction chamber; the heating component is arranged inside or on the inner wall of the liner.

12. The semiconductor processing equipment according to claim 9, wherein: The component is a confinement ring, which is arranged around the base in the reaction chamber; the heating component is arranged below the confinement ring.

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