Hydrofluoric acid evaporator

Abstract

The utility model relates to a hydrofluoric acid evaporator which comprises a heating mechanism, an evaporating mechanism and a collecting mechanism, in the actual hydrofluoric acid processing process, when hydrofluoric acid mixed liquid needs to be evaporated, the mixed liquid can be guided into the feeding pipe, enters the liquid separation part, then is discharged through the liquid separation channel in the liquid separation part, is sprayed to the inner wall of the evaporation tank and slides off from the inner wall of the evaporation tank, meanwhile, the heating mechanism is operated, and the hydrofluoric acid mixed liquid is evaporated. The heating mechanism heats the evaporation tank, the evaporation tank heats and evaporates the sliding mixed liquid, meanwhile, evaporated gaseous hydrofluoric acid penetrates through the avoiding gap and enters the gas collection ring through the exhaust hole, and then the gaseous hydrofluoric acid in the gas collection ring enters the collection mechanism through the exhaust pipe to be stored; therefore, hydrofluoric acid can form a film better, the evaporation efficiency of hydrofluoric acid is improved, liquid blockage caused by mutual feeling of gas and liquid is avoided, and equipment can operate normally.

Description

Technical Field

[0001] The utility model relates to the technical field of chemical engineering, in particular to a hydrofluoric acid evaporator. Background Art

[0002] Hydrofluoric acid is an important chemical raw material. With the development of the chemical industry, especially the rise of the semiconductor industry, the requirements for the purity of hydrofluoric acid are increasing day by day. In the purification process of hydrofluoric acid, rectification is an important process. Falling film evaporators are increasingly widely used in the rectification process of hydrofluoric acid due to their small required material flow rate and high heat transfer efficiency.

[0003] At present, the top of a conventional falling film evaporator adopts an overflow method to enter the heat exchange tubes, and the film formation effect inside the tubes is poor. The liquid flow rate per unit heat exchange length is large. To meet the heat exchange requirements, the length of the heat exchange tubes will be relatively long. Under normal pressure conditions, since the gas flow direction is opposite to the liquid flow rate, the liquid will affect the discharge of the gas when entering, easily causing liquid blockage and affecting the normal operation of the equipment. Summary of the Utility Model

[0004] (1) Technical Problems to be Solved

[0005] In order to solve the above problems of the prior art, the utility model provides a hydrofluoric acid evaporator, which can make hydrofluoric acid form a better film, improve the evaporation efficiency of hydrofluoric acid, and avoid the mutual influence of gas and liquid resulting in liquid blockage, so that the equipment operates normally.

[0006] (2) Technical Solutions

[0007] To achieve the above purpose, the main technical solutions adopted by the utility model include:

[0008] A hydrofluoric acid evaporator includes a heating mechanism, an evaporation mechanism and a collection mechanism. The heating mechanism is arranged on one side of the evaporation mechanism, and the heating mechanism is externally connected to the evaporation mechanism. The collection mechanism is arranged on the other side of the evaporation mechanism;

[0009] The evaporation mechanism includes an evaporation tank, a feed pipe, a liquid distribution member and a gas collection ring. The heating mechanism is connected to the outer surface of the evaporation tank. The feed pipe is arranged at the top of the evaporation tank. The liquid distribution member is arranged inside the evaporation tank. The liquid distribution member is connected to one end of the feed pipe. A liquid distribution channel is arranged inside the liquid distribution member, and an avoidance gap is arranged between adjacent liquid distribution channels. A plurality of exhaust holes are arranged around the upper part of the evaporation tank. The gas collection ring is sleeved on the upper part of the evaporation tank. The exhaust holes are all communicated with the gas collection ring. The gas collection ring is connected to the collection mechanism through an exhaust pipe.

[0010] Further, it further includes a liquid collection box. The bottom of the evaporation tank is fixedly connected to the liquid collection box. The liquid collection box is communicated with the evaporation tank, and a liquid discharge pipe is arranged on the liquid collection box.

[0011] Further, the evaporation mechanism further includes a guiding platform. The guiding platform is fixedly connected inside the evaporation tank. The guiding platform is arranged around the outside of the liquid separation member, and the inner surface of the guiding platform is recessed inward in an arc shape.

[0012] Further, a guiding pipe is flange-connected to the feed pipe.

[0013] Further, the heating mechanism includes a heating box, a heating element, a heating liquid, a pump body and a heating pipe. The middle of the heating pipe is wound around the outer surface of the evaporation tank. One end of the heating pipe is connected to the upper part of the heating box, and the other end of the heating pipe is connected to the lower part of the heating box. The heating pipe is communicated with the heating box. The pump body is arranged inside the heating box. The pump body is connected to the other end of the heating pipe. The heating element is arranged inside the heating box, and the heating liquid is filled inside the heating box.

[0014] Further, the collection mechanism includes a collection box and a lead-out pipe. One side of the collection box is connected to the gas collection ring through the exhaust pipe. The other side of the collection box is provided with the lead-out pipe, and a sealing cover is arranged on the lead-out pipe.

[0015] Further, it further includes a base. The liquid collection box, the heating box and the collection box are all fixedly connected to the base.

[0016] Further, it further includes a controller. The controller is electrically connected to the heating mechanism and the evaporation mechanism respectively.

[0017] (III) Advantageous Effects

[0018] The advantageous effects of the present utility model are as follows: During the actual hydrofluoric acid processing, when it is necessary to evaporate the hydrofluoric acid mixture, the mixture can be introduced into the feed pipe, and the mixture enters the inside of the liquid separation member. Subsequently, the mixture is discharged through the liquid separation channel inside the liquid separation member and sprayed onto the inner wall of the evaporation tank. Then, the mixture slides down along the inner wall of the evaporation tank. At the same time, the heating mechanism is operated to heat the evaporation tank, so that the evaporation tank heats the sliding mixture for evaporation. At the same time, the evaporated gaseous hydrofluoric acid passes through the avoidance gap and enters the gas collection ring through the exhaust hole. Subsequently, the gaseous hydrofluoric acid in the gas collection ring enters the collection mechanism through the exhaust pipe for storage. Thereby, it can make the hydrofluoric acid form a film better, improve the evaporation efficiency of the hydrofluoric acid, and avoid the liquid being blocked due to the interaction between the gas and the liquid, enabling the equipment to operate normally. Description of the Drawings

[0019] Figure 1 Schematic diagram of the overall structure of the hydrofluoric acid evaporator according to an embodiment of the present utility model;

[0020] Figure 2 Front view of the overall structure of the hydrofluoric acid evaporator according to an embodiment of the present utility model;

[0021] Figure 3 Cross-sectional view of the overall structure of the hydrofluoric acid evaporator according to an embodiment of the present utility model;

[0022] Figure 4 Cross-sectional view of the liquid separation member structure in the hydrofluoric acid evaporator according to an embodiment of the present utility model;

[0023]

Explanation of reference numerals

[0024] Heating box 1, controller 2, heating tube 3, evaporation tank 4, gas collecting ring 5, feed pipe 6, guide pipe 7, exhaust pipe 8, collection box 9, base 10, drain pipe 11, liquid collection box 12, lead-out pipe 13, liquid separation member 14, pump body 15, heating member 16, guiding platform 17, liquid separation channel 18. Specific embodiments

[0025] In order to better explain the present utility model for easy understanding, the present utility model will be described in detail below with reference to the accompanying drawings through specific embodiments.

[0026] Please refer to Figures 1 to 4 As shown, a hydrofluoric acid evaporator of the present utility model includes a heating mechanism, an evaporation mechanism, and a collection mechanism. The heating mechanism is disposed on one side of the evaporation mechanism, and the heating mechanism is externally connected to the evaporation mechanism. The collection mechanism is disposed on the other side of the evaporation mechanism;

[0027] The evaporation mechanism includes an evaporation tank 4, a feed pipe 6, a liquid separation member 14, and a gas collecting ring 5. The heating mechanism is connected to the outer surface of the evaporation tank 4. The feed pipe 6 is disposed at the top of the evaporation tank 4. The liquid separation member 14 is disposed inside the evaporation tank 4. The liquid separation member 14 is connected to one end of the feed pipe 6. A liquid separation channel 18 is disposed inside the liquid separation member 14. An avoidance gap is provided between adjacent liquid separation channels 18. A plurality of exhaust holes are disposed around the upper part of the evaporation tank 4. The gas collecting ring 5 is sleeved on the upper part of the evaporation tank 4. The exhaust holes are all connected to the gas collecting ring 5. The gas collecting ring 5 is connected to the collection mechanism through an exhaust pipe 8.

[0028] The working principle of the present utility model is as follows: During the actual hydrofluoric acid processing, when it is necessary to evaporate the hydrofluoric acid mixture, the mixture can be introduced into the feed pipe 6, and the mixture enters the interior of the liquid separation member 14. Subsequently, the mixture is discharged through the liquid separation channel 18 in the liquid separation member 14 and sprayed onto the inner wall of the evaporation tank 4. Then, the mixture slides down the inner wall of the evaporation tank 4. At the same time, the heating mechanism is operated to heat the evaporation tank 4, so that the evaporation tank 4 heats the sliding mixture for evaporation. At the same time, the evaporated gaseous hydrofluoric acid passes through the avoidance gap and enters the gas collection ring 5 through the exhaust hole. Subsequently, the gaseous hydrofluoric acid in the gas collection ring 5 enters the collection mechanism through the exhaust pipe 8 for storage.

[0029] Further, it further includes a liquid collection box 12. The bottom of the evaporation tank 4 is fixedly connected with the liquid collection box 12. The liquid collection box 12 is communicated with the evaporation tank 4, and a drain pipe 11 is arranged on the liquid collection box 12.

[0030] From the above description, it is beneficial for the unevaporated hydrofluoric acid to flow into the liquid collection box 12 through the inner wall of the evaporation tank 4 for storage, and continue to evaporate under the guidance of the temperature in the evaporation tank 4. When the hydrofluoric acid in the liquid collection box 12 is too much, it can be discharged through the drain pipe 11 and evaporated again.

[0031] Further, the evaporation mechanism further includes a guiding platform 17. The guiding platform 17 is fixedly connected inside the evaporation tank 4. The guiding platform 17 is arranged around the outside of the liquid separation member 14, and the inner surface of the guiding platform 17 is recessed inward in an arc shape.

[0032] From the above description, it is beneficial for the mixture to be discharged through the liquid separation channel 18 in the liquid separation member 14 and sprayed onto the arc of the guiding platform 17, so that the mixture slides down the arc of the guiding platform 17 to the inner wall of the evaporation tank 4, avoiding the mixture from splashing everywhere and better performing evaporation.

[0033] Further, a guiding pipe 7 is flange-connected to the feed pipe 6.

[0034] From the above description, it is beneficial to introduce the hydrofluoric acid mixture into the feed pipe 6 through the guiding pipe 7.

[0035] Further, the heating mechanism includes a heating box 1, a heating element 16, a heating liquid, a pump body 15, and a heating pipe 3. The middle of the heating pipe 3 is wound around the outer surface of the evaporation tank 4. One end of the heating pipe 3 is connected to the upper part of the heating box 1, and the other end of the heating pipe 3 is connected to the lower part of the heating box 1. The heating pipe 3 is communicated with the heating box 1. The pump body 15 is arranged inside the heating box 1, and the pump body 15 is connected to the other end of the heating pipe 3. The heating element 16 is arranged inside the heating box 1, and the heating liquid is filled inside the heating box 1.

[0036] As can be seen from the above description, it is beneficial for the heating element 16 to heat the heating liquid in the heating box 1. Subsequently, the heating liquid is introduced from the other end of the heating pipe 3 through the pump body 15, and the heating liquid flows in the heating pipe 3. At the same time, the heating pipe 3 heats the evaporation tank 4. Subsequently, the heating liquid flows back into the heating box 1 from one end of the heating pipe 3 for circulating heating.

[0037] Further, the collection mechanism includes a collection box 9 and a discharge pipe 13. One side of the collection box 9 is connected to the gas collection ring 5 through the exhaust pipe 8. The other side of the collection box 9 is provided with the discharge pipe 13, and a sealing cover is arranged on the discharge pipe 13.

[0038] As can be seen from the above description, it is beneficial for gaseous hydrofluoric acid to enter the interior of the collection box 9 through the exhaust pipe 8 and be discharged through the discharge pipe 13.

[0039] Further, it further includes a base 10, and the liquid collection box 12, the heating box 1, and the collection box 9 are all fixedly connected to the base 10.

[0040] As can be seen from the above description, it is beneficial for better installation of the overall device.

[0041] Further, it further includes a controller 2, and the controller 2 is electrically connected to the heating mechanism and the evaporation mechanism respectively.

[0042] As can be seen from the above description, it is beneficial for the user to be more convenient when controlling the overall device.

[0043] Embodiment 1

[0044] Please refer to Figures 1 to 4 , a hydrofluoric acid evaporator, including a heating mechanism, an evaporation mechanism, and a collection mechanism. The heating mechanism is arranged on one side of the evaporation mechanism, the heating mechanism is externally connected to the evaporation mechanism, and the collection mechanism is arranged on the other side of the evaporation mechanism;

[0045] The evaporation mechanism includes an evaporation tank 4, a feed pipe 6, a liquid separation member 14, and a gas collection ring 5. The heating mechanism is connected to the outer surface of the evaporation tank 4. The feed pipe 6 is provided at the top of the evaporation tank 4 and is welded. The liquid separation member 14 is disposed inside the evaporation tank 4. The liquid separation member 14 is connected to one end of the feed pipe 6. A plurality of liquid separation channels 18 are provided inside the liquid separation member 14, and an avoidance gap is provided between adjacent liquid separation channels 18. A plurality of exhaust holes are provided around the upper part of the evaporation tank 4. The gas collection ring 5 is sleeved on the upper part of the evaporation tank 4. The exhaust holes are all communicated with the gas collection ring 5. The gas collection ring 5 is connected to the collection mechanism through an exhaust pipe 8;

[0046] All the liquid separation channels 18 are communicated with the feed pipe 6;

[0047] It further includes a liquid collection box 12. The bottom of the evaporation tank 4 is fixedly connected to the liquid collection box 12 and is welded. The liquid collection box 12 is communicated with the evaporation tank 4. A drain pipe 11 is provided on the liquid collection box 12;

[0048] The evaporation mechanism further includes a guiding platform 17. The guiding platform 17 is fixedly connected inside the evaporation tank 4 and is welded. The guiding platform 17 is provided around the outside of the liquid separation member 14. The inner surface of the guiding platform 17 is recessed inward in an arc shape;

[0049] A guiding pipe 7 is flange-connected to the feed pipe 6;

[0050] The heating mechanism includes a heating box 1, a heating element 16, a heating liquid, a pump body 15, and a heating pipe 3. The middle of the heating pipe 3 is wound around the outer surface of the evaporation tank 4 and is welded. One end of the heating pipe 3 is connected to the upper part of the heating box 1. The other end of the heating pipe 3 is connected to the lower part of the heating box 1. The heating pipe 3 is communicated with the heating box 1. The pump body 15 is disposed inside the heating box 1. The pump body 15 is connected to the other end of the heating pipe 3. The heating element 16 is disposed inside the heating box 1. The heating box 1 is filled with the heating liquid;

[0051] The heating liquid is pure water;

[0052] The heating element 16 is an electric heater;

[0053] The collection mechanism includes a collection box 9 and a lead-out pipe 13. One side of the collection box 9 is connected to the gas collection ring 5 through the exhaust pipe 8. The other side of the collection box 9 is provided with the lead-out pipe 13. A sealing cover is provided on the lead-out pipe 13;

[0054] It further includes a base 10, and the liquid collecting box 12, the heating box 1 and the collection box 9 are all fixedly connected to the base 10 and are welded.

[0055] It further includes a controller 2, and the controller 2 is electrically connected to the heating mechanism and the evaporation mechanism respectively.

[0056] The model of the controller 2 is DATA-7311.

[0057] The controller 2 is electrically connected to the heating element 16 and the pump body 15 respectively.

[0058] The above shows and describes the basic principles, main features and advantages of the present invention. The standard parts used in the present invention can be purchased from the market. The special-shaped parts can be customized according to the description in the specification and the drawings. The specific connection methods of each part all adopt the mature conventional means such as bolts, rivets and welding in the prior art. The machines, parts and equipment all adopt the conventional models in the prior art, and the circuit connection adopts the conventional connection method in the prior art, which will not be elaborated here.

[0059] The above are only the embodiments of the present invention, and do not limit the patent scope of the present invention accordingly. All equivalent transformations made by using the content of the specification and drawings of the present invention, or directly or indirectly applied in the relevant technical fields, are equally included in the patent protection scope of the present invention.

Claims

1. A hydrofluoric acid evaporator, characterized in that: It comprises a heating mechanism, an evaporation mechanism and a collection mechanism, wherein the heating mechanism is arranged on one side of the evaporation mechanism, the heating mechanism is connected to the outside of the evaporation mechanism, and the collection mechanism is arranged on the other side of the evaporation mechanism; The evaporation mechanism includes an evaporation tank, a feed pipe, a liquid separator and an air collecting ring. The heating mechanism is connected to the outer surface of the evaporation tank. The feed pipe is provided on the top of the evaporation tank. The liquid separator is provided inside the evaporation tank. The liquid separator is connected to one end of the feed pipe. A liquid separator channel is provided inside the liquid separator. An avoidance gap is provided between adjacent liquid separator channels. A plurality of exhaust holes are provided around the upper part of the evaporation tank. The air collecting ring is sleeved on the upper part of the evaporation tank. The exhaust holes are all communicated with the air collecting ring. The air collecting ring is connected to the collecting mechanism through an exhaust pipe.

2. The hydrofluoric acid evaporator according to claim 1, characterized in that: It also includes a liquid collecting box, which is fixedly connected to the bottom of the evaporation tank, the liquid collecting box is communicated with the evaporation tank, and a liquid drain pipe is arranged on the liquid collecting box.

3. The hydrofluoric acid evaporator according to claim 1, characterized in that: The evaporation mechanism further comprises a guide platform, which is fixedly connected to the inside of the evaporation tank and is arranged around the outside of the liquid separation member. The inner surface of the guide platform is concave inwardly in an arc shape.

4. The hydrofluoric acid evaporator according to claim 1, characterized in that: The feed pipe is flange-connected with a material guide pipe.

5. The hydrofluoric acid evaporator according to claim 2, characterized in that: The heating mechanism includes a heating box, a heating element, a heating liquid, a pump body and a heating pipe, the middle portion of the heating pipe is wound around the outer surface of the evaporator, one end of the heating pipe is connected to the upper portion of the heating box, the other end of the heating pipe is connected to the lower portion of the heating box, the heating pipe is communicated with the heating box, the pump body is arranged inside the heating box, the pump body is connected to the other end of the heating pipe, the heating element is arranged inside the heating box, and the interior of the heating box is filled with the heating liquid.

6. The hydrofluoric acid evaporator according to claim 5, characterized in that: The collecting mechanism comprises a collecting box and an outlet pipe. One side of the collecting box is connected to the gas collecting ring through the exhaust pipe. The other side of the collecting box is provided with the outlet pipe, and a sealing cover is provided on the outlet pipe.

7. The hydrofluoric acid evaporator according to claim 6, characterized in that: It also includes a base, and the liquid collecting box, the heating box and the collecting box are all fixedly connected to the base.

8. The hydrofluoric acid evaporator according to claim 1, characterized in that: It also includes a controller, which is electrically connected to the heating mechanism and the evaporation mechanism respectively.

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