Formic acid system and vacuum furnace

Abstract

The utility model relates to the technical field of vacuum sintering, in particular to an formic acid system which comprises a first formic acid barrel, a formic acid pump, a second formic acid barrel, a gas injection assembly, an electronic scale and a mixed gas outlet pipe. The inlet end of the formic acid pump is arranged at the top of the first formic acid barrel, a formic acid outlet pipe of the formic acid pump is arranged at the bottom of the second formic acid barrel, the top of the second formic acid barrel is provided with the mixed gas outlet pipe, the top of the second formic acid barrel is provided with the gas injection assembly, and the gas injection assembly is arranged at the bottom of the second formic acid barrel. And the electronic scale is arranged below the second formic acid barrel. Formic acid is injected into the second formic acid barrel from the bottom, so that full and uniform mixing of nitrogen and formic acid is facilitated.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum sintering, in particular to a formic acid system and a vacuum furnace. Background Art

[0002] Formic acid, commonly known as formic acid, is a colorless, pungent-smelling, volatile liquid, a weak electrolyte, with a melting point of 8.6 °C, a boiling point of 100.8 °C, strong acidity, corrosiveness, and can stimulate the skin to blister. It is an organic chemical raw material. Formic acid is a strong reducing agent. Formic acid gas itself can consume oxygen through a chemical reaction at high temperature to form an anaerobic welding, and can also reduce the oxidized metal surface through a reduction reaction to form a clean metal surface. Therefore, in the semiconductor field and other welding and packaging fields, as a cleaning agent or reducing agent, more and more equipment using formic acid technology is emerging. The existing formic acid system has poor mixing uniformity of formic acid and nitrogen and has potential safety hazards. Summary of the Invention

[0003] The utility model provides a formic acid system to solve the problems that the mixing uniformity of formic acid and nitrogen in the formic acid system of the existing vacuum furnace is poor and there are potential safety hazards.

[0004] The utility model provides a formic acid system, including a first formic acid barrel, a formic acid pump, a second formic acid barrel, a gas injection component, an electronic scale, and a mixed gas outlet pipe; the inlet end of the formic acid pump is arranged at the top of the first formic acid barrel, the formic acid outlet pipe of the formic acid pump is arranged at the bottom of the second formic acid barrel, the mixed gas outlet pipe is arranged at the top of the second formic acid barrel, the gas injection component is arranged at the top of the second formic acid barrel, and the electronic scale is arranged below the second formic acid barrel.

[0005] According to the formic acid system of the utility model, it further includes a first low liquid level sensor and a formic acid injection port; the first low liquid level sensor is arranged at the bottom of the first formic acid barrel, and the formic acid injection port is arranged at the top of the first formic acid barrel.

[0006] According to the formic acid system of the utility model, it further includes a second low liquid level sensor and a high liquid level sensor; the second low liquid level sensor is arranged at the bottom side of the second formic acid barrel, and the high liquid level sensor is arranged in the middle of the second formic acid barrel.

[0007] According to the formic acid system of the utility model, the gas injection component includes a first one-way valve, a first mini ball valve, a connecting pipe, and a circular pipe; the first one-way valve is sequentially connected to the first mini ball valve, the connecting pipe, and the circular pipe, and the circular pipe is arranged at the inner bottom of the second formic acid barrel.

[0008] According to the formic acid system of the utility model, it further includes a pressure sensor, and the pressure sensor is arranged at the top of the second formic acid barrel.

[0009] According to the formic acid system of the present utility model, it further includes a safety relief valve, and the safety relief valve is arranged at the top of the second formic acid barrel.

[0010] According to the formic acid system of the present utility model, it further includes an electronic scale, and the electronic scale is arranged below the second formic acid barrel.

[0011] A vacuum furnace includes the formic acid system described above.

[0012] Injecting formic acid into the second formic acid barrel from the bottom is beneficial to the full and uniform mixing of nitrogen and formic acid, reducing the potential dangerous situations such as splashing that may occur when formic acid is injected from the top, and reducing potential safety hazards. The formic acid pump has corrosion resistance, good sealing performance, and precise flow control, ensuring the safety and efficiency of formic acid injection. The circular nitrogen pipe is arranged at the bottom of the second formic acid barrel, making the formic acid composition more uniform and avoiding concentration stratification. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the following drawings are some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0014] Figure 1 It is a front view structural schematic diagram of the formic acid system;

[0015] Figure 2 It is a three-dimensional structural schematic diagram of the formic acid system;

[0016] Figure 3 It is a three-dimensional structural schematic diagram of the gas injection assembly;

[0017] Reference numerals: 1, the first formic acid barrel; 2, the formic acid pump; 3, the second formic acid barrel; 11, the first low liquid level sensor; 12, the formic acid injection port; 21, the formic acid outlet pipe; 31, the high liquid level sensor; 32, the second low liquid level sensor; 33, the gas injection assembly; 34, the pressure sensor; 35, the safety relief valve; 36, the mixed gas outlet pipe; 331, the first one-way valve; 332, the connecting pipe; 333, the circular pipe; 334, the first mini ball valve; 361, the second mini ball valve. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0018] The following will further describe in detail the embodiments of the present utility model in conjunction with the drawings and embodiments. The following embodiments are used to illustrate the present utility model, but cannot be used to limit the scope of the present utility model.

[0019] In the description of the embodiments of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the embodiments of the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the embodiments of the present utility model. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0020] In the description of the embodiments of the present utility model, it should be noted that unless otherwise clearly specified and defined, the terms "connected" and "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present utility model can be understood according to specific situations.

[0021] In the embodiments of the present utility model, unless otherwise clearly specified and defined, the first feature being "on" or "under" the second feature can be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature can be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "below" and "beneath" the second feature can be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0022] In the description of this specification, the description with reference to terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the embodiments of the present utility model. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0023] The following is combined with Figures 1-3Describe a formic acid system, including a first formic acid barrel 1, a formic acid pump 2, a second formic acid barrel 3, a gas injection component 33 and a mixed gas outlet pipe 36; the inlet end of the formic acid pump 2 is arranged at the top of the first formic acid barrel 1, the formic acid outlet pipe 21 of the formic acid pump 2 is arranged at the bottom of the second formic acid barrel 3, the mixed gas outlet pipe 36 is arranged at the top of the second formic acid barrel 3, and the gas injection component 33 is arranged at the top of the second formic acid barrel 3. The mixed gas outlet pipe 36 is also connected to a second mini ball valve 361. The formic acid pump 2 replenishes automatically. It fills automatically at low liquid level and stops automatically at high liquid level.

[0024] In some embodiments, it further includes a first low liquid level sensor 11 and a formic acid injection port 12; the first low liquid level sensor 11 is arranged at the bottom of the first formic acid barrel 1, and the formic acid injection port 12 is arranged at the top of the first formic acid barrel 1.

[0025] In some embodiments, it further includes a second low liquid level sensor 32 and a high liquid level sensor 31; the second low liquid level sensor 32 is arranged at the bottom of the side of the second formic acid barrel 2, and the high liquid level sensor 31 is arranged in the middle of the second formic acid barrel 3.

[0026] In some embodiments, the gas injection component 33 includes a first one-way valve 331, a first mini ball valve 334, a connecting pipe 332 and a circular pipe 333; the first one-way valve 331 is sequentially connected to the first mini ball valve 334, the connecting pipe 332 and the circular pipe 333, and the circular pipe 333 is arranged at the inner bottom of the second formic acid barrel 3.

[0027] In some embodiments, it further includes a pressure sensor 34, and the pressure sensor 34 is arranged at the top of the second formic acid barrel 3.

[0028] In some embodiments, it further includes a safety relief valve 35, and the safety relief valve 35 is arranged at the top of the second formic acid barrel 3.

[0029] In some embodiments, it further includes an electronic scale, and the electronic scale is arranged below the second formic acid barrel 3. The electronic scale is used to weigh the weight of the second formic acid barrel before and after use, and the difference between the two is the used weight, for automatic replenishment. Quantitative automatic replenishment is achieved.

[0030] A vacuum furnace includes the above-mentioned formic acid system.

[0031] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements for some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A formic acid system, characterized in that: The invention comprises a first formic acid barrel, a formic acid pump, a second formic acid barrel, a gas injection assembly, an electronic scale and a mixed gas outlet pipe; the inlet end of the formic acid pump is arranged at the top of the first formic acid barrel, the formic acid outlet pipe of the formic acid pump is arranged at the bottom of the second formic acid barrel, the mixed gas outlet pipe is arranged at the top of the second formic acid barrel, the gas injection assembly is arranged at the top of the second formic acid barrel, and the electronic scale is arranged below the second formic acid barrel.

2. The formic acid system according to claim 1, characterized in that: It also includes a first low liquid level sensor and a formic acid injection port; the first low liquid level sensor is arranged at the bottom of the first formic acid barrel, and the formic acid injection port is arranged at the top of the first formic acid barrel.

3. The formic acid system according to claim 1, characterized in that: It also includes a second low liquid level sensor and a high liquid level sensor. The second low liquid level sensor is arranged at the bottom of the side of the second formic acid barrel, and the high liquid level sensor is arranged in the middle of the second formic acid barrel.

4. The formic acid system according to claim 1, characterized in that: The gas injection assembly includes a first one-way valve, a first mini ball valve, a connecting pipe and a circular pipe; the first one-way valve is connected to the first mini ball valve, the connecting pipe and the circular pipe in sequence, and the circular pipe is arranged at the inner bottom of the second formic acid barrel.

5. The formic acid system according to claim 1, characterized in that: It also includes a pressure sensor, which is arranged on the top of the second formic acid barrel.

6. The formic acid system according to claim 1, characterized in that: It also includes a safety pressure relief valve, which is arranged on the top of the second formic acid barrel.

7. A vacuum furnace, characterized in that: The formic acid system comprises any one of claims 1 to 6.

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