Automatic trace adding device based on silicon wafer processing aid

Abstract

The utility model discloses an automatic trace adding device based on silicon wafer processing aids, which relates to the technical field of silicon wafer processing, and comprises an aid mixing box, a trace adding structure for silicon wafer processing aids arranged in the aid mixing box, and a stirring mechanism arranged in the aid mixing box and used for stirring the silicon wafer processing aids. The automatic trace adding device based on the silicon wafer processing aid comprises an aid mixing box used for mixing the silicon wafer processing aid, a stirring and weighing assembly used for the silicon wafer processing aid, a quantitative conveying mechanism arranged in the aid mixing box and used for quantitatively weighing the silicon wafer processing aid, and the quantitative conveying mechanism is arranged at the bottom end of the weighing assembly. Automatic quantitative addition of the auxiliary can be achieved, manual operation is reduced, the continuity and efficiency of the production process are improved, the filter assembly can ensure the purity of the auxiliary, the problems of equipment blockage and performance reduction caused by impurities in the auxiliary are solved, and the stability and reliability of the system are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer processing, and specifically relates to an automatic micro-addition device based on silicon wafer processing aids. Background Art

[0002] Silicon wafer processing aids are a series of chemical solutions used in the semiconductor manufacturing process. They are used for processes such as cleaning silicon wafers, removing contaminants, and improving surface roughness. These aids can effectively improve the quality and performance of silicon wafers and are indispensable materials in semiconductor manufacturing.

[0003] A micro-addition device for automatic addition of trace aids with the publication number of CN210646301U, which relates to the field of chemical products manufacturing, includes a polymerization kettle. There is an aid inlet formed on the polymerization kettle. An aid stirrer is installed above the polymerization kettle. There is a stirring outlet formed below the aid stirrer. The stirring outlet of the aid stirrer leads to the aid inlet. A feeding valve is also connected between the stirring outlet and the aid inlet. There is a stirring inlet formed above the aid stirrer. A frame is installed behind the polymerization kettle. The aid stirrer is installed in front of the frame. An electronic scale, an aid holding cup, a pouring motor, and a rotating frame are installed in front of the frame. The aid holding cup is installed above the electronic scale. The rotating frame is installed to the left of the electronic scale. The pouring motor is installed behind the frame. The rotor of the pouring motor passes through the frame to drive the rotating frame to rotate. An annular material-changing and adding device is installed above the frame to provide different trace aids for the aid holding cup, realizing automatic mixing and dispensing of trace aids.

[0004] As shown in the above device, the existing automatic micro-addition device based on silicon wafer processing aids mostly involves a filtration system. After long-term use, an automatic micro-addition device without filtration will cause blockage of pipelines or nozzles due to impurities in the aids, which will not only affect the continuity and stability of transportation, but also increase the frequency and cost of maintenance and cleaning. Summary of the Utility Model

[0005] Aiming at the deficiencies of the prior art, the utility model provides an automatic micro-addition device based on silicon wafer processing aids, which solves the problems of the prior art.

[0006] To achieve the above purposes, the utility model is realized through the following technical solutions: An automatic micro-addition device based on silicon wafer processing aids, comprising:

[0007] An aid mixing tank, inside which there is a structure for micro-adding aids for silicon wafer processing;

[0008] A stirring mechanism, arranged inside the aid mixing tank, for stirring silicon wafer processing aids;

[0009] The weighing component is arranged inside the additive mixing tank and is used for quantitatively weighing the silicon wafer processing additives;

[0010] The quantitative conveying mechanism is arranged at the bottom end of the weighing component and is used for micro-quantitatively conveying the additives for silicon wafer processing;

[0011] The quantitative conveying mechanism includes a conveying sleeve. The conveying sleeve is arranged below the weighing component. An installation box is connected to the outer wall of the conveying sleeve. A control unit is connected to the inner wall of the installation box. One end of the control unit is connected to a hydraulic rod. One end of the hydraulic rod is connected to a limit seat. A limit rotating shaft is slidably connected to the inner wall of the limit seat. A rotating plate is connected to the bottom end of the limit rotating shaft. A quantitative pipe is arranged at the top end of the conveying sleeve. A filtering component is arranged on the inner wall of the quantitative pipe. A feeding pipe is arranged at the bottom end of the conveying sleeve.

[0012] Preferably, the filtering component includes a filtering box. The filtering box is arranged on the inner wall of the quantitative pipe. A feeding port is opened on the outer wall of the filtering box. A molecular sieve plate is arranged on the inner wall of the filtering box. An adsorption layer is arranged on one side of the molecular sieve plate. A filtering plate is arranged on the other side of the adsorption layer. A rectangular discharge groove is opened on the outer wall of the filtering box.

[0013] Preferably, the stirring mechanism includes a transmission plate. The transmission plate is arranged on the outer wall of the additive mixing tank. A gear C is rotatably connected to the bottom end of the transmission plate. The transmission plate is rotationally connected to a rotating hinge seat through the rotation of the gear C. A gear shaft A is rotatably connected to the outer wall of the rotating hinge seat. The outer wall of the gear shaft A meshes with the gear C. A gear shaft B is rotatably connected to the bottom end of the rotating hinge seat. A crank rocker is fixedly connected to the bottom end of the gear shaft B. A connecting shaft is fixedly connected to the bottom end of the crank rocker. An auxiliary stirring plate is arranged at the bottom end of the connecting shaft.

[0014] Preferably, a support column is fixedly connected to the bottom end of the additive mixing tank. A round groove plate is fixedly connected to the bottom end of the support column.

[0015] Preferably, a partition plate is fixedly connected to the inner wall of the additive mixing tank. A material dropping groove is opened on the outer wall of the partition plate.

[0016] Preferably, a motor is fixedly connected to the top end of the additive mixing tank. A feeding pipe is fixedly connected to the top end of the additive mixing tank. A feeding bin is fixedly connected to the top end of the feeding pipe.

[0017] Beneficial effects

[0018] The present utility model provides an automatic micro-adding device based on silicon wafer processing additives. Compared with the prior art, the following beneficial effects are achieved:

[0019] 1. The automatic micro-addition device based on silicon wafer processing aids is provided with a quantitative conveying mechanism. By cooperating with the weighing component, the quantitative conveying mechanism can achieve automatic quantitative addition of the aids, reduce manual operation, improve the continuity and efficiency of the production process, and the filtering component can ensure the purity of the aids, reduce equipment blockage and performance degradation caused by impurities in the aids, and improve the stability and reliability of the system.

[0020] 2. The automatic micro-addition device based on silicon wafer processing aids is provided with a stirring mechanism. The stirring mechanism can ensure that the aids are fully mixed with other liquids or solutions during the conveying process, avoid stratification or uneven distribution of the aids during the addition to the silicon wafer processing, so as to ensure the consistency of the processing effect. At the same time, stirring can help maintain the fluidity of the conveying medium, prevent the deposition or blockage of the aids in the pipeline, and ensure the stability and reliability of quantitative conveying. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 is the overall structural schematic diagram of the present utility model;

[0022] Figure 2 is the overall structural sectional view of the present utility model;

[0023] Figure 3 is the schematic diagram of the quantitative conveying mechanism of the present utility model;

[0024] Figure 4 is the schematic diagram of the filtering component of the present utility model;

[0025] Figure 5 is the schematic diagram of the stirring mechanism of the present utility model.

[0026] In the figure: 1, aids mixing box; 2, feeding pipe; 3, feeding bin; 4, motor; 5, support column; 6, round groove plate; 7, partition board; 8, stirring mechanism; 81, transmission plate; 82, gear C; 83, gear shaft A; 84, rotating hinge seat; 85, gear shaft B; 86, crank rocker; 87, connecting shaft; 88, stirring plate; 9, quantitative conveying mechanism; 91, conveying sleeve; 92, installation box; 93, control unit; 94, hydraulic rod; 95, limit seat; 96, limit rotating shaft; 97, rotating plate; 98, quantitative pipe; 99, filtering component; 991, filtering box; 992, feeding port; 993, molecular sieve plate; 994, adsorption layer; 995, filter plate; 996, rectangular discharge slot; 910, conveying pipe; 10, weighing component. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0027] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0028] Referring to Figures 1-5 , the present invention provides the following two technical solutions:

[0029] The first implementation mode: An automatic micro-adding device based on a silicon wafer processing aid, comprising:

[0030] An aid mixing tank 1, inside which there is a micro-adding structure for the silicon wafer processing aid;

[0031] A stirring mechanism 8, arranged inside the aid mixing tank 1, for stirring the silicon wafer processing aid;

[0032] A weighing component 10, arranged inside the aid mixing tank 1, for quantitatively weighing the silicon wafer processing aid;

[0033] A quantitative conveying mechanism 9, arranged at the bottom of the weighing component 10, for micro-quantitatively conveying the silicon wafer processing aid;

[0034] The bottom end of the aid mixing tank 1 is fixedly connected to a support column 5, and the bottom end of the support column 5 is fixedly connected to a circular groove plate 6.

[0035] The inner wall of the aid mixing tank 1 is fixedly connected to a partition plate 7, and a material dropping groove is arranged on the outer wall of the partition plate 7.

[0036] The top end of the aid mixing tank 1 is fixedly connected to a motor 4, the top end of the aid mixing tank 1 is fixedly connected to a feeding pipe 2, and the top end of the feeding pipe 2 is fixedly connected to a feeding bin 3.

[0037] The quantitative conveying mechanism 9 includes a conveying sleeve 91, which is arranged below the weighing component 10. The outer wall of the conveying sleeve 91 is connected to an installation box 92. The inner wall of the installation box 92 is connected to a control unit 93. One end of the control unit 93 is connected to a hydraulic rod 94. One end of the hydraulic rod 94 is connected to a limit seat 95. The inner wall of the limit seat 95 is slidably connected to a limit rotating shaft 96. The bottom end of the limit rotating shaft 96 is connected to a rotating plate 97. The top end of the conveying sleeve 91 is provided with a quantitative pipe 98. The inner wall of the quantitative pipe 98 is provided with a filtering component 99. The bottom end of the conveying sleeve 91 is provided with a feeding pipe 910.

[0038] The filtering component 99 includes a filtering box 991 which is arranged on the inner wall of the metering pipe 98. The outer wall of the filtering box 991 is provided with a feeding port 992. The inner wall of the filtering box 991 is provided with a molecular sieve plate 993. One side of the molecular sieve plate 993 is provided with an adsorption layer 994. The other side of the adsorption layer 994 is provided with a filtering plate 995. The outer wall of the filtering box 991 is provided with a rectangular discharge slot 996.

[0039] The automatic micro-addition device based on silicon wafer processing aids is provided with a metering and conveying mechanism 9. By cooperating with the weighing component 10, the metering and conveying mechanism 9 can achieve automatic quantitative addition of the aids, reduce manual operation, improve the continuity and efficiency of the production process. Moreover, the filtering component 99 can ensure the purity of the aids, reduce problems such as equipment blockage and performance degradation caused by impurities in the aids, and improve the stability and reliability of the system.

[0040] In the second embodiment, the main difference from the first embodiment is that the stirring mechanism 8 includes a transmission plate 81 which is arranged on the outer wall of the aid mixing box 1. The bottom end of the transmission plate 81 is rotatably connected with a gear C82. The transmission plate 81 is rotatably connected with a rotating hinge seat 84 through the rotation of the gear C82. The outer wall of the rotating hinge seat 84 is rotatably connected with a gear shaft A83. The outer wall of the gear shaft A83 meshes with the gear C82. The bottom end of the rotating hinge seat 84 is rotatably connected with a gear shaft B85. The bottom end of the gear shaft B85 is fixedly connected with a crank rocker 86. The bottom end of the crank rocker 86 is fixedly connected with a connecting shaft 87. The bottom end of the connecting shaft 87 is provided with an auxiliary stirring plate 88.

[0041] The automatic micro-addition device based on silicon wafer processing aids is provided with a stirring mechanism 8. The stirring mechanism 8 can ensure that the aids are fully mixed with other liquids or solutions during the conveying process, avoid stratification or uneven distribution of the aids when added to the silicon wafer processing, so as to ensure the consistency of the processing effect. At the same time, stirring can help maintain the fluidity of the conveying medium, prevent the deposition or blockage of the aids in the pipeline, and ensure the stability and reliability of metering and conveying.

[0042] Meanwhile, the content not described in detail in this specification belongs to the prior art well-known to those skilled in the art, and the model parameters of each electrical appliance are not specifically limited, and conventional equipment can be used.

[0043] When the device is in use, first pour the additives for silicon wafer processing into the feeding bin 3. Then, the additives for silicon wafer processing enter the additive mixing box 1 through the feeding pipe 2. After that, start the motor 4. Through the operation of the motor 4, the rotating hinge seat 84 connected to the bottom end is driven to rotate by means of the transmission plate 81. Through the rotation of the rotating hinge seat 84, the gear shaft A83 rotatably connected to its outer wall moves on the outer wall of the gear. Through the movement of the gear shaft A83 on the outer wall of the gear, the gear shaft B85 meshed with its outer wall is driven to move and rotate. Through the movement and rotation of the gear shaft B85, the crank rocker 86 connected to its bottom end is driven to rotate. Through the rotation of the crank rocker 86, the connecting shaft 87 connected to its bottom end is driven to move and rotate. Through the movement and rotation of the connecting shaft 87, the stirring plate 88 connected to the bottom end of the connecting shaft 87 is driven to move and rotate. The additives for silicon wafer processing can be stirred by the movement and rotation of the stirring plate 88. After the stirring is completed, the stirred additives for silicon wafer processing enter the weighing assembly 10 through the blanking chute. After being weighed by the weighing assembly 10, a small amount of additives for silicon wafer processing will enter the metering pipe 98. Then, the small amount of additives for silicon wafer processing enters the interior of the filter box 991 through the feed port 992 opened on the outer wall of the filter box 991. The small amount of additives for silicon wafer processing first passes through the molecular sieve plate 993 fixedly installed on the inner wall of the filter box 991 for the first layer of filtration. After passing through the molecular sieve plate 993 for the first layer of filtration, it then passes through the adsorption layer 994 provided on one side of the molecular sieve plate 993 for the second layer of adsorption filtration. After the small amount of additives for silicon wafer processing passes through the adsorption layer 994 for the second layer of filtration, it then passes through the filter plate 995 provided on one side of the adsorption layer 994 for the third layer of filtration. After the small amount of additives for silicon wafer processing passes through the filter plate 995 for the third layer of filtration, it then passes through the molecular sieve plate 993 provided on the other side of the filter plate 995 for the fourth layer of filtration. After passing through the four layers of filtration, the impurities in the small amount of additives for silicon wafer processing can be filtered out. Then, by starting the control unit 93 of the metering and conveying mechanism 9, the hydraulic rod 94 connected to one end can be driven to operate. Through the telescopic operation of the hydraulic rod 94, the limiting seat 95 connected to one end is driven to slide inside the installation box 92. Through the sliding of the limiting seat 95 inside the installation box 92, the limiting rotating shaft 96 slidably connected to its inner wall is driven to rotate. Through the rotation of the limiting rotating shaft 96, the rotating plate 97 connected to its bottom end is driven to rotate. When the rotating plate 97 rotates and opens, the filtered small amount of additives for silicon wafer processing will be output through the conveying pipe 910.

[0044] It should be noted that in this text, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, such that a process, method, article or device comprising a series of elements not only includes those elements but also includes other elements not expressly listed, or further includes elements inherent to such process, method, article or device.

[0045] Although embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An automatic micro-addition device based on silicon wafer processing aids, characterized in that: include: An additive mixing box (1), wherein a micro-addition structure for additives used for silicon wafer processing is arranged inside the additive mixing box (1); A stirring mechanism (8), arranged inside the additive mixing box (1), for stirring the silicon wafer processing additive; A weighing component (10) is arranged inside the additive mixing box (1) and is used for quantitative weighing of silicon wafer processing additives; A quantitative delivery mechanism (9), arranged at the bottom end of the weighing component (10), is used for quantitative delivery of a trace amount of an auxiliary agent for silicon wafer processing; The quantitative conveying mechanism (9) comprises a conveying sleeve (91), the conveying sleeve (91) is arranged below the weighing assembly (10), the outer wall of the conveying sleeve (91) is connected to a mounting box (92), the inner wall of the mounting box (92) is connected to a control unit (93), one end of the control unit (93) is connected to a hydraulic rod (94), one end of the hydraulic rod (94) is connected to a limit seat (95), the inner wall of the limit seat (95) is slidably connected to a limit rotating shaft (96), the bottom end of the limit rotating shaft (96) is connected to a rotating plate (97), the top end of the conveying sleeve (91) is provided with a quantitative tube (98), the inner wall of the quantitative tube (98) is provided with a filter assembly (99), and the bottom end of the conveying sleeve (91) is provided with a conveying pipe (910).

2. The automatic micro-addition device based on silicon wafer processing aid according to claim 1, characterized in that: The filter assembly (99) comprises a filter box (991), wherein the filter box (991) is arranged on the inner wall of the quantitative tube (98), an inlet (992) is provided on the outer wall of the filter box (991), a molecular sieve plate (993) is provided on the inner wall of the filter box (991), an adsorption layer (994) is provided on one side of the molecular sieve plate (993), a filter plate (995) is provided on the other side of the adsorption layer (994), and a rectangular discharge trough (996) is provided on the outer wall of the filter box (991).

3. The automatic micro-addition device based on silicon wafer processing aid according to claim 1, characterized in that: The stirring mechanism (8) comprises a transmission plate (81), wherein the transmission plate (81) is arranged on the outer wall of the auxiliary agent mixing box (1), the bottom end of the transmission plate (81) is rotatably connected to a gear C (82), the transmission plate (81) is connected to a rotating hinge seat (84) through the rotation of the gear C (82), the outer wall of the rotating hinge seat (84) is rotatably connected to a gear shaft A (83), the outer wall of the gear shaft A (83) is meshed with the gear C (82), the bottom end of the rotating hinge seat (84) is rotatably connected to a gear shaft B (85), the bottom end of the gear shaft B (85) is fixedly connected to a crank rocker (86), the bottom end of the crank rocker (86) is fixedly connected to a connecting shaft (87), and the bottom end of the connecting shaft (87) is provided with an auxiliary stirring plate (88).

4. The automatic micro-addition device based on silicon wafer processing aid according to claim 1, characterized in that: The bottom end of the auxiliary agent mixing box (1) is fixedly connected to a support column (5), and the bottom end of the support column (5) is fixedly connected to a circular groove plate (6).

5. The automatic micro-addition device based on silicon wafer processing aid according to claim 1, characterized in that: The inner wall of the auxiliary agent mixing box (1) is fixedly connected with a partition (7), and the outer wall of the partition (7) is provided with a material dropping groove.

6. The automatic micro-addition device based on silicon wafer processing aid according to claim 1, characterized in that: The top of the auxiliary agent mixing box (1) is fixedly connected to a motor (4), the top of the auxiliary agent mixing box (1) is fixedly connected to a feed pipe (2), and the top of the feed pipe (2) is fixedly connected to a feed bin (3).

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