Storage cabinet device for storing wafer cassettes

Abstract

The utility model discloses a storage cabinet body device for storing wafer cassettes, which comprises a cabinet body with an electric control unit, the internal space of the cabinet body is divided into a plurality of storage cavities, one side of each storage cavity is provided with a door plate, and each door plate can be automatically opened and closed; a radio frequency positioning layer plate is arranged at the bottom of each storage cavity, a placing station is arranged on each radio frequency positioning layer plate, and each placing station is provided with a plurality of positioning pins; the induction microswitch is used for being in contact with the wafer box to detect whether the wafer box is stored in place or not; and the RFID electronic tag is attached to the radio frequency positioning layer plate. Through the automatic opening and closing functions of the door plate and the radio frequency identification positioning layer plate, automatic storage and taking-out can be achieved in cooperation with a mechanical arm, manpower is saved, personnel operation mistakes are avoided, meanwhile, time efficiency and first-in first-out can be ensured, the situation that objects cannot be kept dry or wet due to the fact that the objects are stored for too long or too short is avoided, and the working efficiency is improved. Meanwhile, the method can be used as an important link for realizing black lamp factories.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor storage cabinets, and specifically, it is a storage cabinet device for storing wafer boxes. Background Art

[0002] A wafer box is a container for storing and transporting wafers, which plays a role in protecting the wafers, can simplify transportation and minimize the risk of wafer contamination as much as possible. The wafer box is generally made of wear-resistant, high-temperature-resistant, and anti-static translucent plastic material, which has an effect of protecting the wafers.

[0003] The existing 12-inch wafer box storage cabinets mainly focus on single humidity control. Operators manually store the wafer boxes, without corresponding material control, unable to achieve first-in, first-out, unable to record the storage time of the wafer boxes, and the storage time cannot be guaranteed; with the development of the industry and technological upgrading, the factory's demand for automated operations is increasing day by day, and the requirements for fine control of materials are higher, which are difficult to achieve with current ordinary drying cabinets and nitrogen cabinets.

[0004] The authorized announcement number is CN221352713U. This patent discloses a wafer box storage cabinet, which includes a cabinet body, a gas charging and discharging module, an identification module, and an information display screen. The cabinet body includes a housing, a plurality of partitions horizontally arranged in the housing, and at least one cabinet door opened on the front of the cabinet body. The partition includes a partition main body, a plurality of ventilation holes opened on the partition main body, and at least one installation opening opened on the partition main body. The identification module includes an identification module main body and an information processing and control module arranged on the cabinet body, and each identification module main body is respectively clamped in an installation opening.

[0005] However, the defects of the existing technology are obvious: firstly, the opening and closing of the cabinet door need to be manually operated, which cannot match the scenario of automated operations; secondly, operators need to manually store the wafer boxes. Summary of the Utility Model

[0006] The purpose of the utility model is to provide a storage cabinet device for storing wafer boxes to solve the problems existing in the prior art.

[0007] The purpose of the utility model is realized as follows: A storage cabinet device for storing wafer boxes includes a cabinet body with an electric control unit. The internal space of the cabinet body is divided into several storage chambers, and one side of each storage chamber is an open structure and is provided with an openable / closable door panel.

[0008] Each door panel is configured with an automatic opening and closing driving component, and the automatic opening and closing driving component is installed in the cabinet body and is in transmission cooperation with the door panel.

[0009] The bottom of each storage cavity is provided with a radio frequency positioning layer board, and one or more placement stations are arranged on the radio frequency positioning layer board. The placement stations are provided with:

[0010] A number of positioning pins fixed on the radio frequency positioning layer board, and the positioning pins are used for inserting and mating with the positioning holes arranged at the bottom of the wafer cassette;

[0011] An inductive microswitch used to contact the wafer cassette to detect whether the wafer cassette is stored in place. It is installed on the radio frequency positioning layer board and is electrically connected to the electric control unit;

[0012] An RFID electronic tag used to identify the storage information of the wafer cassette and cooperate with the code scanning device. It is mounted on the radio frequency positioning layer board.

[0013] The beneficial effects of the present utility model are as follows:

[0014] Through the automatic opening and closing functions of the door panel and the radio frequency identification positioning layer board, the present utility model can cooperate with on-site automation equipment (such as a robotic arm) to achieve automatic storage and retrieval, save labor, avoid mistakes in personnel operations, ensure timeliness, first in first out, avoid the items being stored for too long or too short a time to fail to achieve the purpose of maintaining relative dryness or relative humidity, and can also be an important link in realizing a black light factory. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 is a three-dimensional product schematic diagram of the present utility model.

[0016] Figure 2 is an internal schematic diagram of the present utility model.

[0017] Figure 3 is an interface schematic diagram of the back of the cabinet.

[0018] Figure 4 is a schematic diagram of the driving scheme of the door panel.

[0019] Figure 5 is a schematic diagram of the door panel structure.

[0020] Figure 6 is a schematic diagram of the placement station of the radio frequency positioning layer board. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0021] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the attached Figure 1-6 . Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0022] As Figure 1 , 2 shown, a storage cabinet device for storing wafer boxes is proposed, including a cabinet body 1 with an electric control unit. Nitrogen is filled inside the cabinet body 1 to achieve ultra-low humidity storage. The electric control unit is docked with the MES system of the client. The internal space of the cabinet body 1 is divided into several storage chambers 1a, and the quantity can be determined according to project requirements; one side of each storage chamber 1a is an open structure, and a door panel 2 that can be opened / closed is provided.

[0023] As Figure 1 , 4 shown, each door panel 2 is configured with an automatic opening and closing drive component controlled by the electric control unit. The automatic opening and closing drive component is installed in the cabinet body 1 and is in transmission cooperation with the door panel 2 to control the opening and closing actions of the door panel 2.

[0024] This embodiment can be used in conjunction with an intelligent robot (such as an AGV robot), and can achieve the function of first-in, first-out management, better meeting the requirements of factory automation operations.

[0025] As Figure 2 , 6 shown, the bottom of each storage chamber 1a is provided as a radio frequency positioning laminate 8. One or more placement stations are provided on the radio frequency positioning laminate 8, and the placement stations are provided with:

[0026] Several positioning pins 9 fixed on the radio frequency positioning laminate 8, and the positioning pins 9 are used for inserting and matching with the positioning holes provided at the bottom of the wafer box;

[0027] An inductive micro switch 10 that is in contact with the bottom of the wafer box and is electrically connected to the electric control unit, which is used to detect whether the wafer box is stored in place, and is installed on the radio frequency positioning laminate 8;

[0028] An RFID electronic tag 11 that is used to identify the storage information of the wafer box and cooperate with a scanning device, which is mounted on the radio frequency positioning laminate 8. The RFID electronic tag 11 is staggered from the stored wafer box so that the scanning device at the end of the robotic arm can perform scanning and induction;

[0029] Two opposed safety light curtains 13 respectively located on the left and right sides of the front of the cabinet body 1. The safety light curtains 13 are electrically connected to the electric control unit. The internal space of the cabinet body 1 is between the two safety light curtains 13, and is used to stop the movement of the door panel 2 when an object or person suddenly intervenes when the door panel is automatically opened or closed, causing the safety light curtains 13 to send an abnormal signal to the electric control unit.

[0030] Among them, as Figure 4As shown, the automatic opening and closing driving components include a driving stepper motor 4, a driving gear 5, and a driving rack 6. The driving stepper motor 4 is installed in the cabinet 1, and the driving stepper motor 4 is controlled by the electronic control unit. The driving gear 5 is mounted on the output spindle of the driving stepper motor 4, and the driving rack 6 is fixedly connected to the door panel 2 and meshes with the driving gear 5. The driving stepper motor 4, the driving gear 5, and the driving rack 6 are sequentially driven and matched to drive the door panel 2 to smoothly open and close the storage chamber 1a; when the door panel 2 is opened, the robot arm can extend into the storage chamber 1a to take out / place the wafer box.

[0031] The left and right sides of the door panel 2 are both equipped with limit micro switches 7 connected to the electrical signal of the electronic control unit, which are used to limit the open / closed position of the door panel 2. The driving rack 6 touches the limit micro switches 7 on the left and right sides, and the triggered signal is transmitted to the electronic control unit. The electronic control unit sends a signal to the driving stepper motor 4 to stop driving the driving stepper motor 4, so that the door panel 2 stops at the open / closed position.

[0032] In order to guide the opening and closing direction of the door panel 2, the upper and lower sides of the door panel 2 are both provided with slide rails 3 which are horizontally slidably matched with the door panel 2. The slide rails 3 are fixedly connected to the cabinet body 1, and the driving rack 6 is parallel to the length direction of the slide rails 3.

[0033] As a solution to prevent frictional static electricity, when the humidity in the cabinet is low, considering that the friction of the door panel 2 is prone to static electricity, such as Figure 5 As shown, the edge of the door panel 2 is covered with an antistatic edging 2a, the slide rail 3 is made of an antistatic POM board, and the door panel 2 is made of an antistatic acrylic material.

[0034] The placement station of the above-mentioned RF positioning layer plate 8 is also equipped with a status indicator light 12 for identifying the storage status of the wafer box. The status indicator light 12 is controlled by the electronic control unit. The number and color of the status indicator light 12 can be set according to the specific situation. The configuration of three red, green and yellow indicator lights can quickly identify the storage position information; when the wafer box is stored, taken out, or empty, the status indicator light 12 of the corresponding color will light up to indicate the status of the current placement station.

[0035] Regarding the setting of the electronic control unit, the specific plan is as follows:

[0036] like Figure 1 As shown, a power distribution control compartment 17 is provided on the right side of the storage space of the cabinet 1, and the electric control unit is provided in the power distribution control compartment 17. An emergency stop switch 16 is also installed to stop the opening and closing action of the door panel 2 and the driving stepper motor 4 of the automatic opening and closing drive component. A control panel 15 and a warning light 14 (and an alarm) connected to the electrical signal thereof are provided above the power distribution control compartment 17. The control panel 15 can manually control the door panel to be opened or closed.

[0037] like Figure 3As shown, a network interface 18 , a power output interface 20 , a power access interface 21 , and a gas interface 19 , which are electrically connected to the power distribution control compartment 17 , are provided at the back of the cabinet 1 .

[0038] When the device of this embodiment is used in conjunction with a robot, the following process is followed: the robot receives an instruction to store or retrieve a 12-inch wafer box → the system gives the storage location information of the cabinet 1 → the intelligent robot moves to the specified position → sends an instruction to open the corresponding door panel 2 → after the door panel 2 is fully opened → the intelligent robot (robotic arm) reads the storage location information in the cabinet 1 (the execution end of the robot is equipped with a scanning device, which scans and senses the RFID electronic tag 11 when taking and placing, thereby updating the storage location information in real time, that is, whether there is a wafer box stored in the corresponding storage location) → after confirmation, the intelligent robot uses the robotic arm to store or take out the wafer box → the wafer box storage information is uploaded to the client's MES system.

[0039] Since the door panel 2 is equipped with a driving stepper motor 4, the door panel 2 can be automatically opened or closed through the transmission of the motor and gear rack. Micro limit switches 7 are installed on the left and right sides of the door panel 2 to limit the open or closed position of the door panel 2. The host computer can send an opening or closing command to control the door panel 2 to open or close. The robot arm can store or take out the 12-inch wafer box by itself, realizing the automatic storage or removal operation of the wafer box.

[0040] As a cabinet operation safety solution, two opposing-type safety gratings 13 are installed on the left and right sides of the front of the cabinet 1. When the door panel 2 is automatically opened or closed, if an object or a person suddenly intervenes, the safety grating 13 will send a signal to the electronic control unit to stop the movement of the door panel 2, and the warning light 14 will light up red (the alarm will sound), so that relevant personnel can check the situation and cancel the alarm in time.

[0041] In the description of the present utility model, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "front", "back" and the like indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present utility model; in the present utility model, it should also be noted that the terms "installation" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, an integrally formed connection, a mechanical connection, or an indirect connection through an intermediate connecting component, and the specific meaning of the terms in the present utility model can be understood according to the specific circumstances.

[0042] For those skilled in the art, it is obvious that the present utility model is not limited to the details of the above-described exemplary embodiments, and the present utility model can be implemented in other specific forms without departing from the spirit or basic characteristics of the present utility model. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting. The scope of the present utility model is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be embraced within the present utility model, and any reference signs in the claims should not be regarded as limiting the claims involved.

[0043] In addition, it should be understood that although this specification is described in terms of embodiments, not every embodiment only contains an independent technical solution. This narrative manner of the specification is only for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A storage cabinet device for storing wafer boxes, comprising a cabinet (1) having an electric control unit, wherein the interior space of the cabinet (1) is divided into a plurality of storage chambers (1a), and each storage chamber (1a) has an opening structure on one side and is provided with an openable / closable door panel (2); It is characterized in that Each door panel (2) is provided with an automatic opening and closing driving component, wherein the automatic opening and closing driving component is installed in the cabinet (1) and is in driving cooperation with the door panel (2); The bottom of each storage cavity (1a) is provided with a radio frequency positioning layer plate (8), and one or more placement stations are provided on the radio frequency positioning layer plate (8), and the placement stations are provided with: A plurality of positioning pins (9) fixed on the radio frequency positioning layer plate (8), wherein the positioning pins (9) are used to be inserted into positioning holes provided at the bottom of the wafer box; An inductive micro switch (10) for contacting with the wafer box to detect whether the wafer box is stored in place, which is installed on the radio frequency positioning layer plate (8) and is connected to the electric control unit by electrical signals; An RFID electronic tag (11) for identifying wafer box storage information and cooperating with a code scanning device is mounted on a radio frequency positioning layer plate (8).

2. A storage cabinet device for storing wafer boxes according to claim 1, characterized in that: It also includes two opposing-type safety gratings (13) respectively located on the left and right sides of the front of the cabinet (1), which are used to stop the movement of the door panel (2) when an object or a person suddenly intervenes when the door panel is automatically opened or closed, causing the safety grating (13) to send an abnormal signal to the electric control unit.

3. A storage cabinet device for storing wafer boxes according to claim 1, characterized in that: The automatic opening and closing driving component comprises a driving stepping motor (4), a driving gear (5), and a driving rack (6); the driving stepping motor (4) is installed in the cabinet (1); the driving stepping motor (4) is controlled by an electronic control unit; the driving gear (5) is mounted on the output spindle of the driving stepping motor (4); and the driving rack (6) is fixedly connected to the door panel (2) and meshes with the driving gear (5).

4. A storage cabinet device for storing wafer boxes according to claim 3, characterized in that: Limit micro switches (7) are installed on both the left and right sides of the door panel (2) to limit the open / closed position of the door panel (2).

5. A storage cabinet device for storing wafer boxes according to claim 3, characterized in that: The upper and lower sides of the door panel (2) are both provided with slide rails (3) that are horizontally slidably matched with the door panel (2); the slide rails (3) are fixedly connected to the cabinet body (1); and the driving rack (6) is parallel to the length direction of the slide rails (3).

6. A storage cabinet device for storing wafer boxes according to claim 5, characterized in that: The edge of the door panel (2) is covered with an antistatic edging (2a), and the slide rail (3) is made of an antistatic POM board.

7. A storage cabinet device for storing wafer boxes according to claim 1, characterized in that: The placement station of the radio frequency positioning layer plate (8) is also equipped with a status indicator light (12) for indicating the storage status of the wafer box, and the status indicator light (12) is controlled by an electric control unit.

8. A storage cabinet device for storing wafer boxes according to any one of claims 1 to 7, characterized in that: The door panel (2) is made of antistatic acrylic material.

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