Double-sided aluminizing evaporation winding coating equipment for lithium battery preparation

Abstract

The utility model discloses double-sided aluminizing evaporation winding coating equipment for preparing a lithium battery. The double-sided aluminizing evaporation winding coating equipment comprises a vacuum coating chamber, an unwinding roller, two sets of evaporation mechanisms, two sets of wire feeding mechanisms, two coating rollers, a winding roller, a guide roller system, a flattening roller and a tension detection roller, in the film coating process, a film base material is guided by the guide roller system to start from the unwinding roller, film coating is conducted on the A face of the film base material through the first film coating roller, then film coating is conducted on the B face of the film base material through the second film coating roller under the guide roller system, and finally the film base material is recycled through the winding roller. Flattening rollers are arranged at the base material output end close to the unwinding roller, the base material input ends close to the two coating rollers and the base material input end close to the winding roller, and tension detection rollers are arranged between the unwinding roller and the first coating roller, between the two coating rollers and between the second coating roller and the winding roller. According to the utility model, through one-time clamping and one-time tape conveying of the film base material, film layers are evaporated and plated on the two surfaces of the film base material.

Description

Technical Field

[0001] The utility model relates to the field of vacuum coating equipment, in particular to a double-sided aluminum evaporation winding coating equipment for lithium battery preparation. Background Art

[0002] With the continuous development of lithium battery technology, whether it is a lithium battery for digital products or an electric vehicle, there are process requirements such as high energy, long service life, light weight, strong temperature adaptability, and environmental friendliness. People especially hope that the energy density of the battery is as high as possible and the weight of the battery is getting lighter and lighter. The key requirement is to reduce the thickness and weight of the current collector in the lithium battery, thereby greatly reducing the volume and weight of the battery.

[0003] Regarding the above requirements for lithium batteries, one of the recent research and development directions is to achieve rapid evaporation aluminizing on ultra-thin films for the positive electrode layer material. The current ideal goal is to achieve double-sided evaporation coating of a 1μm-thick metal aluminum conductive layer on a 4-8μm ultra-thin PET film. This is very difficult. First, it is necessary to overcome the key equipment technology for rapid evaporation winding coating of large-area flexible films, then solve the coating process, and further improve the equipment and realize industrialization.

[0004] Currently, the domestic mainly adopts the traditional vacuum evaporation aluminizing coating technology with a single coating roller arrangement, which only has one set of evaporation mechanism and wire feeding mechanism. During the process of the film from unwinding to winding, when the substrate passes through the coating roller, the wire feeding mechanism continuously sends aluminum wire to the evaporation crucible of the evaporation mechanism for melting, gasification, and deposition on the film substrate. However, when it is necessary to complete double-sided coating deposition, only after the entire roll of film substrate is completely coated, the vacuum is broken, the entire roll of film substrate is taken out, reinstalled and clamped on the unwinding roller, and the evaporation coating is restarted to complete the evaporation coating deposition on the other side of the film substrate.

[0005] The above structural design can ensure the full evaporation of aluminum wire during the coating process and can complete single-sided coating deposition. However, when completing double-sided coating deposition, because it is necessary to reinstall and unload the film substrate to complete the coating on the other side, the coated film layer is easily scratched, damaged, or destroyed, the substrate wrinkles, deforms, etc., resulting in unqualified quality, seriously affecting the production efficiency and economic benefits of the product. This technical weakness and deficiency make the promotion and application of the above vacuum winding coating equipment scheme in the specific field of double-sided evaporation aluminizing products not ideal. Therefore, it is an urgent need in the development and application industry of lithium battery current collector films to improve and innovate the evaporation technology of vacuum winding coating and improve the application quality of vacuum double-sided evaporation aluminizing winding coating equipment.

[0006] Therefore, we propose a double-sided aluminized evaporation winding coating equipment for ultra-thin films, which can realize the preparation of high-quality and strongly bonded aluminum metal films on both surfaces of a flexible substrate in one pass of the tape. Summary of the Invention

[0007] The purpose of the present invention is to provide a double-sided aluminized evaporation winding coating equipment for lithium battery preparation, which can realize the evaporation coating of aluminum metal conductive layers on both sides of an ultra-thin flexible film substrate by clamping and feeding the film substrate once.

[0008] The purpose of the present invention is achieved by the following technical solutions:

[0009] A double-sided aluminized evaporation winding coating equipment for lithium battery preparation, characterized in that it includes a vacuum coating chamber, an unwinding roller arranged at the top of the vacuum coating chamber, two evaporation mechanisms arranged at the bottom of the vacuum coating chamber with a certain distance between them, a wire feeding mechanism arranged on the side of the two evaporation mechanisms, two coating rollers arranged above the two evaporation mechanisms, a winding roller arranged between the two evaporation mechanisms, a guide roller system for guiding the film substrate, a flattening roller and a tension detection roller; during coating, the film substrate will start from the unwinding roller under the guidance of the guide roller system, pass through the first coating roller to coat the A surface of the film substrate, then the film substrate is guided by the guide roller system to pass through the second coating roller to coat the B surface of the film substrate, and finally is recovered by the winding roller;

[0010] Flattening rollers are provided at the output end of the substrate near the unwinding roller, the input ends of the substrate near the two coating rollers, and the input end of the substrate near the winding roller, and tension detection rollers are provided between the unwinding roller and the first coating roller, between the two coating rollers, and between the second coating roller and the winding roller.

[0011] The utility model is provided with flattening rollers at multiple key positions. Through the flattening design of multiple flattening rollers, the ultrathin film substrate can be flattened multiple times, ensuring the non-deformation and flatness of the film substrate before and after, and overcoming the problems of wrinkling, bursting of ribs or other deformations of the 4um-thick PET ultrathin substrate due to heat and deviation during winding transmission and evaporation coating processes. The 4um-thick PET ultrathin substrate is very soft and has low stiffness. Moreover, during the winding transmission process, it is affected by factors such as the processing and installation accuracy of the roller system, which will cause the PET ultrathin substrate to deviate and wrinkle. At the same time, due to the winding operation tension, heat radiation during the evaporation coating process, etc., it is easy to cause stretching, deformation, and even quality defects such as wrinkling and bursting of ribs of the PET ultrathin substrate. According to the traditional process or the practices of peers, it is not enough to only design flattening rollers at the unwinding and winding sections to flatten the film substrate, and it is also very difficult to prevent the film substrate from deforming and wrinkling. In the equipment of the utility model, flattening rollers are arranged in each section, and the film substrate is flattened multiple times after unwinding, before coating, and before winding respectively. First, it is pre-flattened after unwinding to overcome the problem of uneven incoming material of the substrate itself. The flattening before coating and before winding ensures the flatness of the PET ultrathin substrate during the coating process, overcomes the generation of uncoated lines, and meets the requirement of rapid evaporation deposition of aluminum film without being affected.

[0012] The utility model not only sets tension detection rollers between the unwinding roller and the first coating roller, and between the second coating roller and the winding roller, but also designs an intermediate tension detection roller in the middle of the whole set of roller systems, that is, between the two coating rollers, to realize segmented tension detection and feedback. According to the feedback tension, it is better to control the tension of the film substrate by controlling the rotation of the unwinding roller, coating rollers and winding roller, so as to achieve a constant micro-tension, meet the transmission requirements of constant micro-tension and consistent linear speed for the winding transmission of the film substrate, and overcome the wrinkling, bursting of ribs and even film breakage of the 4um-thick PET ultrathin substrate caused by tension fluctuation during winding transmission. Because two coating rollers, two sets of evaporation mechanisms and wire feeding mechanisms are designed to complete the coating of the A and B sides of the ultrathin film substrate, it is very difficult to achieve constant tension according to the previous traditional or peer's ideas of unwinding and winding tension control. Because after being driven by two coating rollers, there will be a change in linear speed between the two coating rollers. The PET of the ultrathin film substrate has very little tensile deformation, but there will also be deformation or stretching phenomena, resulting in a change in the tension of the PET ultrathin film substrate between the two coating rollers, affecting the accuracy of unwinding and winding tension control, and seriously causing the PET ultrathin film substrate to wrinkle or break. Therefore, in addition to setting tension detection rollers at the unwinding and winding positions for tension detection and control, an intermediate tension detection roller is designed at the same time to realize segmented detection, feedback and control, meeting the transmission requirements of constant micro-tension and consistent linear speed for the winding transmission of the ultrathin substrate.

[0013] A further technical solution of the present utility model is as follows: EB electron guns are respectively provided at the input ends of the base materials near the two coating rollers. The EB electron gun near the input end of the base material of the first coating roller is installed facing the A side of the thin film base material, and the EB electron gun near the input end of the base material of the second coating roller is installed facing the B side of the thin film base material.

[0014] The setting of the ion source treatment device and the EB electron gun can perform a cleaning and activation treatment on the surface of the thin film base material, enhance the adhesion of the film layer, improve the deposition efficiency, meet the requirements of the coating speed and coating thickness, and also ensure the high-standard requirements of the coating quality. The trial production results prove that this structural design achieves the expected effect and fully meets the design technical requirements.

[0015] A further technical solution of the present utility model is as follows: It includes a bias voltage device, and the bias voltage device applies bias voltages to the two coating rollers respectively.

[0016] A further technical solution of the present utility model is as follows: Ion source treatment devices are respectively provided at the positions of the input ends of the base materials near the two coating rollers. The ion source treatment device at the input end of the base material of the first coating roller is installed facing the A side of the thin film base material, and the ion source treatment device at the input end of the base material of the second coating roller is installed facing the B side of the thin film base material.

[0017] A further technical solution of the present utility model is as follows: Partition plates are respectively arranged between the two evaporation mechanisms and the winding roller.

[0018] A further technical solution of the present utility model is as follows: The guide roller system includes guide rollers, and guide rollers are respectively provided at the output end of the base material of the unwinding roller, the input ends and output ends of the base materials of the two coating rollers, and the input end of the base material of the winding roller.

[0019] A further technical solution of the present utility model is as follows: The guide rollers at the input end of the base material of the coating roller, the flattening roller, and the guide rollers at the output end of the base material of the coating roller are all located above the coating roller.

[0020] A further technical solution of the present utility model is as follows: Electrostatic eliminators are provided between the two coating rollers and between the second coating roller and the winding roller.

[0021] A further technical solution of the present utility model is as follows: The two evaporation mechanisms and the wire feeding mechanisms are respectively arranged on both sides at the bottom of the vacuum coating chamber, and the winding roller is arranged in the middle at the bottom of the vacuum coating chamber.

[0022] The present utility model designs an ion source treatment device and an EB electron gun to perform a cleaning and activation treatment on the surface of the thin film base material before coating, and applies a bias voltage to the coating roller, so as to enhance the adhesion of the film layer, improve the deposition efficiency, prevent the thin film base material from being deformed by heat, meet the requirements of the coating speed and coating thickness, and realize the deposition of a 1-μm thick aluminized film layer.

[0023] In practice, it is very difficult to achieve double-sided evaporation coating of a 1-μm-thick aluminum metal conductive layer on a 4-μm-thin PET film. The key lies in the technology of rapid evaporation deposition of thick aluminum coatings on large-area flexible ultra-thin films. Evaporation efficiency, film adhesion, etc. are all "sticking points". Simply increasing the wire feeding speed, raising the evaporation power, and reducing the winding speed are all limited and cannot achieve the goal of depositing a 1-μm-thick aluminum metal conductive layer. In the present utility model, an ion source treatment device and an EB electron gun are designed in a double-sided aluminized evaporation winding coating equipment to clean and activate the surface of the film substrate before coating, enhancing the film adhesion; applying a negative bias voltage enables the vaporized aluminum molecules or ions to quickly move and gather towards the surface of the film substrate, significantly improving the deposition efficiency and meeting the requirements of coating speed and coating thickness; at the same time, the coating roller is applied with a bias voltage to generate an electrostatic adsorption force between the substrate and the roller surface, ensuring full contact between the substrate and the coating roller, increasing the film cooling effect, preventing the substrate from deforming due to heat, and meeting the requirements of improving the coating deposition efficiency. Finally, the goal of depositing a 1-μm-thick aluminized film layer is achieved.

[0024] Compared with the prior art, the present utility model has the following beneficial effects:

[0025] 1. The present utility model is provided with two sets of evaporation mechanisms, two sets of wire feeding mechanisms, and two coating rollers. Under the guidance of the guide roller system, the A side and B side of the film substrate are continuously coated on the two coating rollers, thereby realizing one-time clamping and one-time tape running of the film substrate, and double-sided evaporation coating of the aluminum metal conductive layer on the ultra-thin flexible film substrate.

[0026] 2. The present utility model is provided with flattening rollers at the substrate output end of the unwind roller, the substrate input ends of the two coating rollers, and the substrate input end of the winding roller. By flattening the film substrate multiple times through the flattening rollers, it can ensure the non-deformation and flatness effect before and after coating, and overcome the problems of wrinkling, bursting ribs, or other deformations of the 4-μm-thick PET ultra-thin film substrate during winding transmission and evaporation coating due to heat and deviation.

[0027] 3. The present utility model is provided with tension detection rollers between the unwind roller and the first coating roller, between the two coating rollers, and between the second coating roller and the winding roller, realizing segmented detection and feedback of tension, so as to better control the tension of the film substrate, achieve a constant micro-tension, meet the transmission requirements of constant micro-tension and consistent linear speed for the winding transmission of the ultra-thin film substrate, and overcome the wrinkles, bursting ribs, and even film breakage caused by tension fluctuations of the 4-μm-thick PET ultra-thin film substrate during winding transmission.

[0028] 4. The layout of the double-sided aluminized evaporation winding coating equipment of the present utility model is more reasonable, which can avoid the influence between evaporation mechanisms and the influence of evaporation mechanisms on other components during coating.

[0029] 5. The utility model can realize the double-sided evaporation coating of a 1-μm-thick aluminum metal conductive layer on a 4- to 8-μm-thick ultra-thin flexible film substrate (ultra-thin film substrate PET).

[0030] 6. The utility model further sets an EB electron gun to enhance the adhesion of the film substrate, so that the film substrate can better adhere to the coating roller, enhancing the cooling and evaporation coating effects on the film substrate. The utility model also further sets a bias device to apply biases to the two coating rollers respectively, so that an electrostatic adsorption force is generated between the film substrate and the roller surface of the coating roller, ensuring full adhesion between the film substrate and the coating roller, increasing the cooling effect of the film substrate, preventing the film substrate from deforming due to heat, and meeting the requirements for improving the coating deposition efficiency. Description of the Drawings

[0031] Figure 1 It is a schematic structural diagram of an embodiment of the utility model.

[0032] The meanings of the reference numerals in the drawings are as follows:

[0033] 1 - unwind roller; 2 - coating roller; 3 - wind-up roller; 4 - evaporation mechanism; 5 - wire feeding mechanism; 61 - first guide roller; 62 - second guide roller; 63 - third guide roller; 64 - fourth guide roller; 65 - fifth guide roller; 66 - sixth guide roller; 67 - seventh guide roller; 68 - eighth guide roller; 69 - ninth guide roller; 610 - tenth guide roller; 71 - first flattening roller; 72 - second flattening roller; 73 - third flattening roller; 74 - fourth flattening roller; 81 - first tension detection roller; 82 - second tension detection roller; 83 - third tension detection roller; 91 - ion source treatment device; 92 - EB electron gun; 93 - static eliminator; 100 - vacuum coating chamber; 101 - partition board. Detailed Embodiments

[0034] The following further describes the utility model in conjunction with embodiments.

[0035] In the description of the present utility model, it should be understood that for the orientation description, such as the orientation or positional relationship indicated by up, down, front, back, left, right, etc., is based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model.

[0036] In the description of the present utility model, the meaning of "several" is one or more, the meaning of "multiple" is more than two, and understandings such as "greater than", "less than", "exceeding", etc. do not include the base number, and understandings such as "above", "below", "within", etc. include the base number. If there is a description of "first" and "second", it is only for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features or implicitly indicating the sequence relationship of the indicated technical features.

[0037] In the description of the present utility model, unless otherwise clearly defined, words such as "set", "installed", "connected", etc. should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above words in the present utility model in combination with the specific content of the technical solution.

[0038] Embodiment:

[0039] Such as Figure 1 As shown, the double-sided aluminized evaporation winding coating equipment for lithium battery preparation in this embodiment includes a vacuum coating chamber 100, an unwinding roller 1, two sets of evaporation mechanisms 4, two sets of wire feeding mechanisms 5, two coating rollers 2, a winding roller 3, a guide roller system, a flattening roller and a tension detection roller.

[0040] The vacuum coating chamber 100 of this embodiment is a chamber with a narrower top, a wider bottom, and a conical middle part. The unwinding roller 1 is arranged at the top of the vacuum coating chamber 100, and the unwinding roller 1 is used for discharging the film substrate.

[0041] Two sets of evaporation mechanisms 4 are arranged on both sides at the bottom of the vacuum coating chamber 100, and there is a distance between the two sets of evaporation mechanisms 4, which can minimize the mutual influence between the two sets of evaporation mechanisms 4 during use, and facilitate the layout and operation of the two sets of evaporation mechanisms 4 and the wire feeding mechanism 5. Two sets of wire feeding mechanisms 5 are arranged in cooperation on the sides of the two sets of evaporation mechanisms 4. During the coating process, the wire feeding mechanism 5 continuously sends aluminum wire to the evaporation crucible of the evaporation mechanism 4 for melting, gasification, and deposition on the film substrate.

[0042] Two coating rollers 2 are arranged in cooperation above the two sets of evaporation mechanisms 4, facing the output ports of the evaporation mechanisms 4 for outputting vapor. The coating roller 2 is a cooling coating roller, and the film substrate attached to it during coating can be cooled by it. In this embodiment, a very thin and smooth insulating ceramic layer is particularly added to the metal roller surface of the coating roller 2, and a bias voltage device is set. By the bias voltage device, bias voltages are applied to the two coating rollers 2 respectively, so that an electrostatic adsorption force can be generated between the film substrate and the roller surface of the coating roller 2, ensuring full adhesion between the film substrate and the coating roller 2, increasing the cooling effect of the film substrate, preventing the film substrate from being deformed by heat, and meeting the requirements of improving the coating deposition efficiency. After the bias voltage is applied to the coating roller 2 in this embodiment, its roller surface shows a positive charge through the polarization effect of polarization displacement or polarization orientation.

[0043] The winding roll 3 is arranged between two sets of evaporation mechanisms 4. Partition plates 101 are respectively arranged between the two sets of evaporation mechanisms 4 and the winding roll 3 to separate the evaporation mechanisms 4 from the winding roll 3, so as to avoid contaminating the winding roll 3 during the coating process.

[0044] The guide roll system is used to guide the film substrate, and it includes guide rolls. In this embodiment, ten guide rolls are provided, namely the first to tenth guide rolls 61-610. As Figure 1 shown, among them, the first guide roll 61 is arranged at the substrate output end of the unwinding roll 1, on the side of the unwinding roll 1, and is used to guide the output of the film substrate; the second guide roll 62 is arranged below the first guide roll 61; the third guide roll 63 is arranged at the substrate input end of the first coating roll 2 ( Figure 1 the left coating roll in the figure is the first coating roll referred to in this embodiment), and is used to guide the film substrate into the first coating roll 2; the fourth guide roll 64 is arranged at the substrate output end of the first coating roll 2, and is used to guide the film substrate to output from the first coating roll 2; the fifth guide roll 65 is arranged above the side of the fourth guide roll 64, and is used to guide the film substrate to transition to the second coating roll 2 ( Figure 1 the right coating roll in the figure is the second coating roll referred to in this embodiment); the sixth guide roll 66 is arranged at the substrate input end of the second coating roll 2, and is used to guide the film substrate into the second coating roll 2; the seventh guide roll 67 is arranged at the substrate output end of the second coating roll 2, and is used to guide the film substrate to output from the second coating roll 2; the eighth guide roll 68 is arranged above the winding roll 3, and is used to guide the film substrate to transition to the winding roll 3; the ninth guide roll 69 and the tenth guide roll 610 are sequentially arranged on the side of the winding roll 3, and are used to guide the film substrate to be wound onto the winding roll 3.

[0045] The flattening roll is used to flatten the film substrate. Flattening rolls are arranged at multiple key positions, and multiple flattenings of the film substrate can be achieved. In this embodiment, four flattening rolls are specifically provided, namely the first to fourth flattening rolls 71-74. Among them, the first flattening roll 71 is arranged at a position close to the substrate output end of the unwinding roll 1, on the side of the unwinding roll 1, and first pre-flattens the film substrate output from the unwinding roll 1; the second flattening roll 72 is arranged at a position close to the substrate input end of the first coating roll 2, and is used to flatten the film substrate again before it enters the first coating roll 2; the third flattening roll 73 is arranged at a position close to the substrate input end of the second coating roll 2, and is used to flatten the film substrate again before it enters the second coating roll 2; the fourth flattening roll 74 is arranged at a position close to the substrate input end of the winding roll 3, and is used to finally flatten the film substrate that is finally wound onto the winding roll 3.

[0046] Design of multiple flattening rollers to achieve multiple flattenings of ultra-thin film substrates, ensuring the non-deformation and flatness of the film substrates before and after, and overcoming the wrinkling, bursting of ribs or other deformations of 4um-thick PET ultra-thin substrates due to heat and deviation during winding transmission and evaporation coating processes. The 4um-thick PET ultra-thin substrate itself is very soft and has low stiffness. Moreover, during the winding transmission process, affected by factors such as the processing and installation accuracy of the roller system, the PET ultra-thin substrate will deviate and wrinkle. At the same time, due to the winding running tension, heat radiation during the evaporation coating process, etc., it is easy to cause stretching, deformation, and even quality defects such as wrinkling and bursting of ribs of the PET ultra-thin substrate. According to the traditional process or the practices of peers, it is not enough to only design flattening rollers at the winding and unwinding sections to flatten the film substrate, and it is also very difficult to prevent the film substrate from deforming and wrinkling. In the equipment of this embodiment, flattening rollers are provided in each section, and four flattening rollers flatten the film substrate multiple times after unwinding, before coating, and before winding respectively. The first flattening roller 71 first pre-flattens the substrate after unwinding, overcoming the problem of uneven incoming material of the substrate itself. The second to fourth flattening rollers 72-74 ensure the flatness of the 4um-thick PET ultra-thin substrate during the coating process, overcome the generation of uncoated lines, and meet the requirement that the rapid evaporation deposition of aluminum film is not affected.

[0047] The tension detection roller is used to detect the tension of the film substrate during the coating process. In this embodiment, three tension detection rollers are specifically provided, namely the first to third tension detection rollers 81-83. Among them, the first tension detection roller 81 is arranged between the second guide roller 62 and the second flattening roller 72, that is, located between the unwinding roller 1 and the first coating roller 2; the second tension detection roller 82 is arranged between the fifth guide roller 65 and the third flattening roller 73, that is, located between the two coating rollers 2; the third tension detection roller 83 is arranged between the eighth guide roller 68 and the ninth guide roller 69, that is, located between the second coating roller 2 and the winding roller 3.

[0048] In this embodiment, tension detection rollers are provided not only between the unwinding roller 1 and the first coating roller 2, and between the second coating roller 2 and the winding roller 3, but also an intermediate tension detection roller is designed in the middle of the entire roller system, that is, between the two coating rollers 2, to achieve segmented tension detection and feedback. According to the feedback tension, it is possible to better control the tension of the film substrate by controlling the rotation of the unwinding roller 1, the coating roller 2, and the winding roller 3, so as to achieve a constant micro-tension, meet the requirements of constant micro-tension and consistent linear speed for the winding drive of the film substrate, and overcome the wrinkles, bursting of ribs, and even film breakage caused by tension fluctuations during the winding drive of the 4um-thick PET ultra-thin substrate. Since two coating rollers 2, two evaporation mechanisms 4, and a wire feeding mechanism 5 are designed to complete the coating of both sides A and B of the ultra-thin film substrate, it is very difficult to achieve constant tension according to the previous traditional or peer's winding and unwinding tension control ideas. Because the film substrate is driven by the two coating rollers 2, there will be a change in linear speed between the two coating rollers 2. The ultra-thin film substrate PET has very little tensile deformation, but there will also be deformation or stretching phenomena, resulting in a change in the tension of the ultra-thin film substrate PET between the two coating rollers, affecting the accuracy of the winding and unwinding tension control, and seriously causing the ultra-thin film substrate PET to wrinkle or break. Therefore, in addition to setting tension detection rollers at the unwinding and winding positions for tension detection and control, an intermediate tension detection roller is designed at the same time to achieve segmented detection, feedback, and control, meeting the requirements of constant micro-tension and consistent linear speed for the winding drive of the ultra-thin substrate. The second tension detection roller 82 in this embodiment is the intermediate tension detection roller.

[0049] Among them, the second flattening roller 72, the third guide roller 63, the fourth guide roller 64, the third flattening roller 73, the sixth flattening roller 66, and the seventh guide roller 67 located at the substrate input end and the substrate output end of the coating roller 2 are all located above the coating roller 2, which can better avoid being contaminated by the evaporation mechanism 4 during coating.

[0050] In this embodiment, EB electron guns 92 are respectively provided near the substrate input ends of the two coating rollers 2. The EB electron gun 92 near the substrate input end of the first coating roller 2 is installed facing the A side of the film substrate, and the A side of the film substrate on the first coating roller 2 will face outward. The EB electron gun 92 near the substrate input end of the second coating roller 2 is installed facing the B side of the film substrate, and the B side of the film substrate on the second coating roller 2 will face outward. The EB electron gun 92 is used to emit electrons to the surface of the film substrate, making the surface of the film substrate negatively charged, and making the side of the film substrate facing the roller surface negatively charged through the substrate polarization effect. The adhesion of the film substrate is enhanced, so that the film substrate can better adhere to the coating roller 2, and the cooling and evaporation coating effects of the coating roller 2 on the film substrate are enhanced.

[0051] In this embodiment, ion source treatment devices 91 are respectively provided at the positions of the substrate input ends close to the two coating rollers 2. The ion source treatment device 91 near the substrate input end of the first coating roller 2 is installed facing the A side of the thin film substrate. The A side of the thin film substrate on the first coating roller 2 will face outward. The ion source treatment device 91 near the substrate input end of the second coating roller 2 is installed facing the B side of the thin film substrate. The B side of the thin film substrate on the second coating roller 2 will face outward. The ion beam generated by the ion source treatment device 91 can bombard and clean the surface of the thin film substrate and perform activation treatment, and the function is to improve the film / substrate bonding force.

[0052] In this embodiment, static eliminators 93 are respectively provided between the fifth guide roller 65 and the second tension detection roller 82, and between the third tension detection roller 83 and the ninth guide roller 69.

[0053] The usage process of the double-sided aluminized evaporation winding coating equipment in this embodiment is as follows:

[0054] Load the whole roll of uncoated substrate into the unwind roller 2, lead out the thin film substrate, bypass the whole set of roller systems in sequence, and finally wind it onto the winding roller 3 for fixation. After everything is normal, close the hatch of the vacuum coating chamber 100, evacuate, and start the double-sided coating operation after the vacuum reaches the standard.

[0055] During the thin film process, the thin film substrate is continuously released from the unwind roller 1, passes through the first guide roller 61, the first flattening roller 71, the second guide roller 62, the first tension detection roller 81, the ion source treatment device 91, the second flattening roller 72, the EB electron gun 92, and the third guide roller 63, and then enters the first coating roller 2. The A side of the thin film substrate on the first coating roller 2 will face outward. At this time, the wire feeding mechanism 5 continuously sends aluminum wire to the evaporation crucible of the evaporation mechanism 4 for melting, gasification, and deposition on the A side of the thin film substrate; then the thin film substrate continues to pass through the fourth guide roller 64, the fifth guide roller 65, the static eliminator 93, the second tension detection roller 82, the ion source treatment device 91, the third flattening roller 73, the EB electron gun 92, and the sixth guide roller 66, and then enters the second coating roller 2. The B side of the thin film substrate on the second coating roller 2 will face outward. At this time, the wire feeding mechanism 5 continuously sends aluminum wire to the evaporation crucible of the evaporation mechanism 4 for melting, gasification, and deposition on the B side of the thin film substrate; between the first coating roller and the second coating roller, in this embodiment, the fourth guide roller 64, the fifth guide roller 65, the second tension detection roller 82, the third flattening roller 73, and the sixth guide roller 66 cooperate to guide the thin film substrate to change direction, so that when the thin film substrate is wound around the second coating roller 2, the B side of the thin film substrate is facing outward; after that, the thin film substrate passes through the seventh guide roller 67, the eighth guide roller 68, the third tension detection roller 83, the static eliminator 93, the ninth guide roller 69, the fourth flattening roller 74, and the tenth guide roller 610 and is wound into the winding roller 3.

[0056] The entire process completes the coating of both sides A and B of the thin film substrate in one pass. The double-sided aluminum evaporation winding coating equipment in this embodiment can achieve the double-sided evaporation coating of a 1-μm-thick metal aluminum conductive layer on an ultra-thin flexible film substrate (ultra-thin film substrate PET) with a thickness of 4-8 μm.

[0057] The above embodiments of the present invention do not limit the protection scope of the present invention. The implementation manners of the present invention are not limited thereto. All kinds of modifications, substitutions or changes made to the above structure of the present invention according to the above content of the present invention, in accordance with the common general knowledge and customary means in the art, without departing from the above basic technical idea of the present invention, shall fall within the protection scope of the present invention.

Claims

1. A double-sided aluminum evaporation winding coating equipment for lithium battery preparation, characterized in that: It comprises a vacuum coating chamber, an unwinding roller arranged at the top of the vacuum coating chamber, two sets of evaporation mechanisms arranged at the bottom of the vacuum coating chamber and spaced apart, a wire feeding mechanism arranged on the sides of the two sets of evaporation mechanisms, two coating rollers arranged above the two sets of evaporation mechanisms, a winding roller arranged between the two sets of evaporation mechanisms, a guide roller system for guiding a film substrate, a flattening roller and a tension detection roller; during coating, the film substrate will start from the unwinding roller under the guidance of the guide roller system, pass through the first coating roller to coat the A side of the film substrate, and then pass through the second coating roller under the guidance of the guide roller system to coat the B side of the film substrate, and finally be recovered by the winding roller; The flattening rollers are provided at the substrate output end close to the unwinding roller, the substrate input end close to the two coating rollers, and the substrate input end close to the winding roller. The tension detection rollers are provided between the unwinding roller and the first coating roller, between the two coating rollers, and between the second coating roller and the winding roller.

2. The double-sided aluminum evaporation winding coating equipment for lithium battery preparation according to claim 1 is characterized in that: EB electron guns are respectively provided at the substrate input ends near the two coating rollers. The EB electron gun near the substrate input end of the first coating roller is installed facing the A surface of the film substrate, and the EB electron gun near the substrate input end of the second coating roller is installed facing the B surface of the film substrate.

3. The double-sided aluminum evaporation winding coating equipment for lithium battery preparation according to claim 2 is characterized in that: It comprises a biasing device, and the biasing device applies bias to the two coating rollers respectively.

4. The double-sided aluminum evaporation winding coating equipment for lithium battery preparation according to claim 1, characterized in that: Ion source processing devices are respectively provided near the substrate input ends of the two coating rollers. The ion source processing device at the substrate input end of the first coating roller is installed facing the A surface of the thin film substrate, and the ion source processing device at the substrate input end of the second coating roller is installed facing the B surface of the thin film substrate.

5. The double-sided aluminum evaporation winding coating equipment for lithium battery preparation according to claim 1, characterized in that: Partition plates are respectively arranged between the two sets of the evaporation mechanisms and the winding rollers.

6. The double-sided aluminum evaporation winding coating equipment for lithium battery preparation according to claim 1, characterized in that: The guide roller system comprises guide rollers, which are respectively arranged at the substrate output end of the unwinding roller, the substrate input end and substrate output end of the two coating rollers, and the substrate input end of the winding roller.

7. The double-sided aluminum evaporation winding coating equipment for lithium battery preparation according to claim 6, characterized in that: The guide roller and the flattening roller at the substrate input end of the coating roller and the guide roller at the substrate output end of the coating roller are all located above the coating roller.

8. The double-sided aluminum evaporation winding coating equipment for lithium battery preparation according to claim 1, characterized in that: A static electricity removal device is provided between the two coating rollers and between the second coating roller and the winding roller.

9. The double-sided aluminum evaporation winding coating equipment for lithium battery preparation according to claim 1, characterized in that: The two sets of evaporation mechanisms and wire feeding mechanisms are respectively arranged on both sides of the bottom of the vacuum coating chamber, and the winding roller is arranged in the middle of the bottom of the vacuum coating chamber.

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