Low-dislocation single crystal growth device

Abstract

The utility model discloses a low dislocation single crystal growth device which comprises a fixing frame, a single crystal furnace, a base, an objective table, a concentric circle piece, a first adjusting assembly and a second adjusting assembly, the single crystal furnace comprises a furnace body and a quartz tube assembly, the quartz tube assembly is arranged in the furnace body, and the fixing frame is installed on the base. A containing space for mounting the single crystal furnace is defined by the fixing frame, one end of the first adjusting assembly penetrates through the base, extends into the containing space and is connected with the objective table so as to adjust the height of the objective table, and one end of the second adjusting assembly penetrates through the base, extends into the containing space and is connected with the concentric circle piece so as to adjust the height of the concentric circle piece. The concentric circle piece is located in the center of the containing space. According to the utility model, the centering of the quartz tube assembly is realized through the concentric circle piece, the quartz tube assembly is ensured to be upright in the middle of the furnace body, and materials in the quartz tube assembly are ensured to be uniformly heated, so that the thermal stress in the crystal growth process is reduced, the generation of dislocation is reduced, and the crystal forming rate of single crystals is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, and particularly to a low-dislocation single crystal growth device. Background Art

[0002] In the field of semiconductor materials, dislocation is one of the inevitable defects in the process of growing single crystals by the method of directional solidification of melt. For compound semiconductors, due to the high growth temperature, low thermal conductivity, and small critical shear stress of the crystal, the crystal is more likely to undergo plastic deformation under the action of thermal stress, resulting in high-density dislocations.

[0003] When the packaged quartz material tube is loaded into the furnace chamber for single crystal growth, since the quartz material tube is not erected in the middle of the furnace chamber, and even the quartz material tube is significantly inclined, the material contained in the quartz tube is unevenly heated, resulting in too large a temperature gradient inside the crystal, generating a large thermal stress inside the crystal. Under the action of the thermal stress, a large amount of movement and proliferation of dislocations occur inside the crystal, greatly reducing the crystal formation rate of the single crystal. Summary of the Utility Model

[0004] The technical problem to be solved by the utility model is that the quartz material tube is not erected in the middle of the furnace chamber, resulting in uneven heating of the material contained in the quartz tube, so that the temperature gradient inside the crystal is too large, greatly reducing the crystal formation rate of the single crystal.

[0005] To solve the above technical problem, the utility model provides a low-dislocation single crystal growth device, including a fixing frame, a single crystal furnace, a base, a carrier table, a concentric circle member, a first adjusting component, and a second adjusting component. The single crystal furnace includes a furnace body and a quartz tube assembly. The quartz tube assembly is arranged inside the furnace body. The fixing frame is installed on the base, and the fixing frame encloses a containing space for installing the single crystal furnace. One end of the first adjusting component passes through the base and extends into the containing space, and is connected to the carrier table to adjust the height of the carrier table. One end of the second adjusting component passes through the base and extends into the containing space, and is connected to the concentric circle member to adjust the height of the concentric circle member. The concentric circle member is located at the center of the containing space.

[0006] In some embodiments, the first adjusting component includes a first adjusting handle, a first screw rod, an adjusting shaft, and a first transmission structure. The first adjusting handle is connected to one end of the first screw rod through the first transmission structure. The other end of the first screw rod is connected to the adjusting shaft. The adjusting shaft is connected to the carrier table to drive the adjusting shaft to drive the carrier table to move up and down.

[0007] In some embodiments, the first transmission structure includes a first helical gear and a second helical gear. The first adjusting handle is connected to the first helical gear. One end of the first screw rod is connected to the second helical gear. The first helical gear meshes with the second helical gear, and the axis of the first helical gear is perpendicular to the axis of the second helical gear.

[0008] In some embodiments, the first adjusting handle includes a first handle portion and a first connecting portion. The first handle portion is nested and linked with the first connecting portion. One end of the first connecting portion away from the first handle portion is connected to the first helical gear.

[0009] In some embodiments, a fixed shaft is further included. A fixed shaft is provided between the stage and the base.

[0010] In some embodiments, the second adjusting assembly includes a second adjusting handle, a second screw rod, and a second transmission structure. The second adjusting handle is connected to one end of the second screw rod through the second transmission structure. The other end of the second screw rod is connected to the concentric circle member to drive the concentric circle member to move up and down.

[0011] In some embodiments, the second transmission structure includes a third helical gear and a fourth helical gear. The second adjusting handle is connected to the third helical gear. One end of the second screw rod is connected to the fourth helical gear. The third helical gear meshes with the fourth helical gear, and the axis of the third helical gear is perpendicular to the axis of the fourth helical gear.

[0012] In some embodiments, the second adjusting handle includes a second handle portion and a second connecting portion. The second handle portion is nested and linked with the second connecting portion. One end of the second connecting portion away from the second handle portion is connected to the third helical gear.

[0013] In some embodiments, a suspension rod is further included. The suspension rod is connected to the fixed frame and is arranged in the accommodation space. The suspension rod is connected to the single crystal furnace.

[0014] In some embodiments, the single crystal furnace includes a crucible and quartz wool. The quartz tube assembly includes the support structure and the quartz tube. The furnace body forms a hearth. The support structure is located at the bottom of the hearth and is connected and matched with the concentric circle member. The quartz tube is placed on the support structure, and the crucible is placed in the quartz tube. The quartz wool is arranged at the other end of the hearth.

[0015] Compared with the prior art, the beneficial effects of the low dislocation single crystal growth device according to the embodiments of the present invention are as follows:

[0016] In the embodiment of the present utility model, the height of the loading platform is adjusted through the first adjusting component to adjust the height of the single crystal furnace. Subsequently, the first adjusting component controls the loading platform to descend. Immediately afterwards, the second adjusting component is used to control the movement of the concentric circle component so that it moves to be connected to the single crystal furnace. The quartz tube component is placed into the furnace body and aligned with the concentric circle component and clamped on the concentric circle component to achieve the centering of the quartz tube component, ensuring that the quartz tube component stands upright in the middle of the furnace body, ensuring that the material inside the quartz tube component is heated evenly, reducing the thermal stress during the crystal growth process, thereby reducing the generation of dislocations and improving the crystal formation rate of the single crystal. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is a schematic structural view of a low dislocation single crystal growth device provided by an embodiment of the present utility model;

[0018] Figure 2 is a top view of a low dislocation single crystal growth device provided by an embodiment of the present utility model;

[0019] In the figure, 1, fixing frame; 2, single crystal furnace; 21, furnace body; 211, hearth; 22, quartz tube component; 221, support structure; 222, quartz tube; 23, crucible; 24, quartz wool; 3, base; 4, loading platform; 5, concentric circle component; 6, first adjusting component; 61, first adjusting handle; 611, first handle part; 612, first connecting part; 62, first screw; 63, adjusting shaft; 7, second adjusting component; 71, second adjusting handle; 711, second handle part; 712, second connecting part; 72, second screw; 8, accommodating space; 9, fixing shaft; 10, suspension rod. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0020] The following will further describe in detail the specific embodiments of the present utility model in conjunction with the drawings and embodiments. The following embodiments are used to illustrate the present utility model but are not used to limit the scope of the present utility model.

[0021] As Figure 1 and Figure 2 shown, the present utility model provides a low dislocation single crystal growth device, including a fixing frame 1, a single crystal furnace 2, a base 3, a loading platform 4, a concentric circle component 5, a first adjusting component 6 and a second adjusting component 7. The single crystal furnace 2 includes a furnace body 21 and a quartz tube component 22. The quartz tube component 22 is arranged inside the furnace body 21. The fixing frame 1 is installed on the base 3, and the fixing frame 1 encloses to form an accommodating space 8 for installing the single crystal furnace 2. One end of the first adjusting component 6 passes through the base 3 and extends into the accommodating space 8 and is connected to the loading platform 4 to adjust the height of the loading platform 4. One end of the second adjusting component 7 passes through the base 3 and extends into the accommodating space 8 and is connected to the concentric circle component 5 to adjust the height of the concentric circle component 5. The concentric circle component 5 is located at the center of the accommodating space 8.

[0022] Based on the above structure, the height of the stage 4 is adjusted by the first adjusting component 6 to adjust the height of the single crystal furnace 2. Subsequently, the first adjusting component 6 controls the stage 4 to descend. Immediately afterwards, the second adjusting component 7 is used to control the movement of the concentric circle component 5 so that it moves to be connected with the single crystal furnace 2. The quartz tube component 22 is placed into the furnace body 21 and aligned with the concentric circle component 5 and clamped on the concentric circle component 5 to achieve the centering of the quartz tube component 22, ensuring that the quartz tube component 22 stands upright in the middle of the furnace body 21, ensuring that the material inside the quartz tube component 22 is heated evenly, reducing the thermal stress during the crystal growth process, thereby reducing the generation of dislocations and improving the crystal formation rate of the single crystal.

[0023] It should be noted that for the sake of understanding, Figure 1 the single crystal furnace 2 shown is a sectional view for illustration.

[0024] In some embodiments, the first adjusting component 6 includes a first adjusting handle 61, a first screw 62, an adjusting shaft 63 and a first transmission structure. The first adjusting handle 61 is connected to one end of the first screw 62 through the first transmission structure. The other end of the first screw 62 is connected to the adjusting shaft 63, and the adjusting shaft 63 is connected to the stage 4 to drive the adjusting shaft 63 to drive the stage 4 to perform lifting and lowering movements.

[0025] Based on the above structure, when the user rotates the first adjusting handle 61, the first transmission structure converts this action into the rotation of the first screw 62. Since the first screw 62 is connected to the adjusting shaft 63, the adjusting shaft 63 will rise or fall according to the rotation direction of the first screw 62, and the stage 4 connected to the adjusting shaft 63 will rise and fall accordingly, enabling the user to adjust the height of the stage 4 through simple manual operations.

[0026] In some embodiments, the first transmission structure includes a first bevel gear and a second bevel gear. The first adjusting handle 61 is connected to the first bevel gear. When the first adjusting handle 61 rotates, the first bevel gear will also rotate accordingly. One end of the first screw 62 is connected to the second bevel gear. The first bevel gear and the second bevel gear are meshed, and the axis of the first bevel gear is perpendicularly arranged to the axis of the second bevel gear.

[0027] In this embodiment, when the user rotates the first adjusting handle 61, the first helical gear rotates accordingly. Since the first helical gear meshes with the second helical gear and their axes are perpendicular to each other, the rotation of the first helical gear drives the second helical gear to rotate. The rotation of the second helical gear drives the first screw 62 connected thereto to rotate. The first screw 62 is connected to the adjusting shaft 63. Therefore, as the first screw 62 rotates, the adjusting shaft 63 moves axially, thereby driving the carrier 4 to rise or fall. In this embodiment, the direction of the force can be changed by 90 degrees through the helical gears, so that the rotational motion of the first adjusting handle 61 can be converted into the rotational motion of the first screw 62, and further the lifting of the carrier 4 can be controlled.

[0028] In some embodiments, the first adjusting handle 61 includes a first handle portion 611 and a first connecting portion 612. The first handle portion 611 and the first connecting portion 612 are nested and linked so that they can rotate relative to each other but will not separate. This connection method can ensure that when the operator rotates the first handle portion 611, the first connecting portion 612 can stably transmit the rotational force. One end of the first connecting portion 612 away from the first handle portion 611 is connected to the first helical gear to transmit the rotational force of the first handle portion 611 to the first helical gear.

[0029] In this embodiment, when the operator rotates the first handle portion 611, the first connecting portion 612 rotates accordingly. The first connecting portion 612 is connected to the first helical gear, so the first helical gear also rotates accordingly. Since the first helical gear meshes with the second helical gear and the axes are perpendicularly arranged, the rotation of the first helical gear drives the second helical gear to rotate. The rotation of the second helical gear drives the first screw 62 connected thereto to rotate, and further the carrier 4 rises or falls through the adjusting shaft 63.

[0030] In some embodiments, a fixed shaft 9 is further included. A fixed shaft 9 is arranged between the carrier 4 and the base 3 for connecting the carrier 4 and the base 3 to ensure that the carrier 4 can remain stable when adjusting the height. When the first adjusting assembly 6 drives the carrier 4 to rise and fall, the fixed shaft 9 ensures that the carrier 4 can move smoothly along a predetermined trajectory without tilting or shaking.

[0031] In addition, it can be understood that the fixed shaft 9 of this embodiment can also be rotatably connected to the carrier 4 to realize the single-sided inclined lifting movement of the carrier 4.

[0032] In some embodiments, the second adjusting assembly 7 includes a second adjusting handle 71, a second screw 72 and a second transmission structure. The second adjusting handle 71 is connected to one end of the second screw 72 through the second transmission structure, and the other end of the second screw 72 is connected to the concentric member 5 to drive the concentric member 5 to perform a lifting movement.

[0033] Based on the above structure, when the operator rotates the second adjusting handle 71, the second transmission structure converts this action into the rotation of the second screw rod 72. Since the second screw rod 72 is connected to the concentric circle part 5, as the second screw rod 72 rotates, the concentric circle part 5 will be pushed or pulled, so that the concentric circle part 5 rises or falls. In this way, the operator can finely adjust the height of the concentric circle part 5 through simple manual operation, and further ensure that the quartz material tube is kept at the central position of the single crystal furnace 2.

[0034] In some embodiments, the second transmission structure includes a third bevel gear and a fourth bevel gear. The second adjusting handle 71 is connected to the third bevel gear. When the operator rotates the second adjusting handle 71, the third bevel gear also rotates accordingly. One end of the second screw rod 72 is connected to the fourth bevel gear. The third bevel gear meshes with the fourth bevel gear, and the axis of the third bevel gear is perpendicular to the axis of the fourth bevel gear. When the third bevel gear rotates, it drives the fourth bevel gear meshing with it to rotate.

[0035] When the user rotates the second adjusting handle 71, the third bevel gear rotates accordingly. Since the third bevel gear meshes with the fourth bevel gear and their axes are perpendicular to each other, the rotation of the third bevel gear drives the fourth bevel gear to rotate. The rotation of the third bevel gear drives the second screw rod 72 connected to it to rotate. The second screw rod 72 is connected to the concentric circle part 5. Therefore, as the second screw rod 72 rotates, the concentric circle part 5 will move axially, realizing rising or falling. In this embodiment, the bevel gears enable the direction of force to be changed by 90 degrees, so that the rotational movement of the second adjusting handle 71 can be converted into the rotational movement of the second screw rod 72, and further control the lifting of the concentric circle part 5.

[0036] In some embodiments, the second adjusting handle 71 includes a second handle part 711 and a second connecting part 712. The second handle part 711 and the second connecting part 712 are nested and linked so that they can rotate relative to each other but will not separate, ensuring that when the operator rotates the second handle part 711, the second connecting part 712 can stably transmit the rotational force. One end of the second connecting part 712 away from the second handle part 711 is connected to the third bevel gear, for transmitting the rotational force of the second handle part 711 to the third bevel gear.

[0037] Based on the above structure, when the operator rotates the second handle part 711, the second connecting part 712 rotates accordingly. The second connecting part 712 is connected to the third bevel gear, so the third bevel gear also rotates accordingly. Since the third bevel gear meshes with the fourth bevel gear and their axes are perpendicular, the rotation of the third bevel gear drives the fourth bevel gear to rotate. The rotation of the fourth bevel gear drives the second screw rod 72 connected to it to rotate, and further makes the concentric circle part 5 rise or fall through the adjusting shaft 63.

[0038] In some embodiments, it further includes a suspension rod 10. The suspension rod 10 is connected to the fixed frame 1 and is arranged in the accommodation space 8. The suspension rod 10 is connected to the single crystal furnace 2, so that the suspension rod 10 is not only fixed on the fixed frame 1, but also plays a role in supporting the single crystal furnace 2, ensuring the stable position of the single crystal furnace 2 in the accommodation space 8.

[0039] In some embodiments, the single crystal furnace 2 further includes a crucible 23 and quartz wool 24. The quartz tube assembly 22 includes a support structure 221 and a quartz tube 222. The furnace body 21 forms a furnace chamber 211. The support structure 221 is located at the bottom of the furnace chamber 211 and is used to support the position of the quartz tube 222 to ensure that it is stably located in the furnace chamber 211. And the support structure 221 is connected and matched with the concentric circle member 5. The quartz tube 222 is placed on the support structure 221, ensuring the precise positioning of the quartz tube assembly 22, which helps to achieve better temperature control and uniformity. And the crucible 23 is placed in the quartz tube 222 and is used to load the raw materials to be melted. The quartz tube 222 serves as an outer protection to further isolate external pollution and maintain the purity of the internal environment. The quartz wool 24 is arranged at the other end of the furnace chamber 211 and is used to control the heat dissipation to form a suitable temperature gradient, which helps the temperature conditions required during the single crystal growth process.

[0040] In summary, the embodiment of the present utility model provides a low dislocation single crystal growth device. It adjusts the height of the single crystal furnace 2 by adjusting the height of the carrier table 4 through the first adjustment component 6. Subsequently, the first adjustment component 6 controls the carrier table 4 to descend. Immediately afterwards, the second adjustment component 7 is used to control the movement of the concentric circle member 5 to move it to be connected to the single crystal furnace 2. The quartz tube assembly 22 is placed into the furnace body 21 and aligned with the concentric circle member 5 and clamped on the concentric circle member 5 to achieve the centering of the quartz tube assembly 22, ensuring that the quartz tube assembly 22 stands upright in the middle of the furnace body 21, ensuring that the materials inside the quartz tube assembly 22 are heated evenly, reducing the thermal stress during the crystal growth process, thereby reducing the generation of dislocations and improving the crystallization rate of the single crystal.

[0041] The above are only the preferred embodiments of the present utility model. It should be noted that for those of ordinary skill in the art, without departing from the technical principle of the present utility model, several improvements and replacements can still be made, and these improvements and replacements should also be regarded as the protection scope of the present utility model.

Claims

1. A low dislocation single crystal growth device, characterized in that: It includes a fixed frame, a single crystal furnace, a base, a stage, a concentric circle member, a first adjustment component and a second adjustment component. The single crystal furnace includes a furnace body and a quartz tube assembly. The quartz tube assembly is arranged in the furnace body. The fixed frame is installed on the base, and the fixed frame encloses a receiving space for installing the single crystal furnace. One end of the first adjustment component extends into the receiving space through the base and is connected to the stage to adjust the height of the stage. One end of the second adjustment component extends into the receiving space through the base and is connected to the concentric circle member to adjust the height of the concentric circle member. The concentric circle member is located at the center of the receiving space.

2. The low dislocation single crystal growth device according to claim 1, characterized in that: The first adjustment component includes a first adjustment handle, a first screw, an adjustment shaft and a first transmission structure. The first adjustment handle is connected to one end of the first screw through the first transmission structure, the other end of the first screw is connected to the adjustment shaft, and the adjustment shaft is connected to the stage to drive the adjustment shaft to drive the stage to move up and down.

3. The low dislocation single crystal growth device according to claim 2, characterized in that: The first transmission structure includes a first bevel gear and a second bevel gear, the first adjustment handle is connected to the first bevel gear, one end of the first screw is connected to the second bevel gear, the first bevel gear is meshed with the second bevel gear, and the axis of the first bevel gear is perpendicular to the axis of the second bevel gear.

4. The low dislocation single crystal growth device according to claim 3, characterized in that: The first adjustment handle includes a first handle portion and a first connecting portion. The first handle portion is nested and linked with the first connecting portion. An end of the first connecting portion away from the first handle portion is connected to the first bevel gear.

5. The low dislocation single crystal growth device according to claim 1, characterized in that: It also includes a fixed shaft, which is arranged between the loading platform and the base.

6. The low dislocation single crystal growth device according to claim 1, characterized in that: The second adjustment component includes a second adjustment handle, a second screw rod and a second transmission structure. The second adjustment handle is connected to one end of the second screw rod through the second transmission structure, and the other end of the second screw rod is connected to the concentric circle member to drive the concentric circle member to perform lifting and lowering movements.

7. The low dislocation single crystal growth device according to claim 6, characterized in that: The second transmission structure includes a third bevel gear and a fourth bevel gear, the second adjustment handle is connected to the third bevel gear, one end of the second screw is connected to the fourth bevel gear, the third bevel gear is meshed with the fourth bevel gear, and the axis of the third bevel gear is perpendicular to the axis of the fourth bevel gear.

8. The low dislocation single crystal growth device according to claim 7, characterized in that: The second adjustment handle includes a second handle portion and a second connecting portion. The second handle portion is nested and linked with the second connecting portion. An end of the second connecting portion away from the second handle portion is connected to the third bevel gear.

9. The low dislocation single crystal growth device according to claim 1, characterized in that: It also includes a suspension rod, which is connected to the fixing frame and is mounted in the accommodating space, and the suspension rod is connected to the single crystal furnace.

10. The low dislocation single crystal growth device according to claim 1, characterized in that: The single crystal furnace includes a crucible and quartz wool, the quartz tube assembly includes a supporting structure and the quartz tube, the furnace body forms a furnace chamber, the supporting structure is located at the bottom of the furnace chamber and is connected with the concentric circular parts, the quartz tube is placed on the supporting structure, and the crucible is placed in the quartz tube, and the quartz wool is arranged at the other end of the furnace chamber.

Images