Sealing adjusting structure of cooling device

Abstract

The utility model provides a sealing adjusting structure of a cooling device. The sealing adjusting structure comprises a valve seat, a sealing ring and a pressing ring. A bearing plate is arranged at one end of the valve seat, and a placing groove is formed in the bearing plate; the sealing ring comprises an outer ring and an inner ring which are integrally formed, the bottom surfaces of the outer ring and the inner ring are flush, the outer ring is thicker than the inner ring, the outer ring is placed in the placing groove, and the bottom surface of the outer ring abuts against the bearing plate; the pressing ring is placed in the outer ring and abuts against the top face of the inner ring, and the pressing ring is detachably connected with the bearing plate. The bearing plate is provided with the containing groove, the outer ring is placed in the containing groove, the bottom face of the outer ring abuts against the bearing plate, the pressing ring is placed in the outer ring and abuts against the top face of the inner ring, the pressing ring is detachably connected with the bearing plate, and the sealing ring is tightly pressed between the pressing ring and the valve seat, so that in the long-time back-and-forth braking process of the cooling device, the sealing ring cannot fall off; the problems that the temperature of a cooling system cannot be controlled and a channel cannot be completely closed due to separation of the sealing ring are avoided, cooling capacity loss is reduced, and reliability and stability are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a sealing and adjusting structure of a cooling device. Background Technique

[0002] The semiconductor integrated circuit manufacturing process is numerous and complex. Among them, lithography, etching, and thin film deposition are the three core steps of semiconductor manufacturing. The silicon carbide material coating is an important technology with complex raw material usage conditions and operation processes during chip manufacturing. Therefore, the quality of the material coating equipment and the system auxiliary parameters directly determine the performance of the final device. During the wafer coating manufacturing process, when the wafer rotates at a high temperature of 1200°C in a vacuum furnace, our cooling system is required to assist the vacuum furnace to maintain a constant temperature to protect the equipment, personnel safety, and product quality. The cooling system plays a very important role in the coating equipment. It is essential to control the cooling flow accuracy and achieve zero failure rate.

[0003] In the existing cooling system, the sealing ring is simply placed in the groove of the cooling control device. After the cooling control device brakes back and forth for a long time, the sealing ring will fall off, resulting in the inability to control the temperature of the cooling system and the inability to completely close the channel, wasting more cooling capacity. Summary of the Utility Model

[0004] In view of this, the utility model provides a sealing and adjusting structure of a cooling device to solve the technical problem that the sealing ring is simply placed in the groove of the cooling control device in the above background technique. After the cooling control device brakes back and forth for a long time, the sealing ring will fall off, resulting in the inability to control the temperature of the cooling system and the inability to completely close the channel, wasting more cooling capacity.

[0005] The technical solution of the utility model is realized as follows:

[0006] The utility model provides a sealing and adjusting structure of a cooling device, including a valve seat, a sealing ring, and a pressing ring, wherein:

[0007] One end of the valve seat is provided with a bearing plate, and a placement groove is arranged on the bearing plate;

[0008] The sealing ring includes an outer ring and an inner ring that are integrally formed and have flush bottom surfaces. The thickness of the outer ring is greater than that of the inner ring. The outer ring is placed in the placement groove and its bottom surface abuts against the bearing plate;

[0009] The pressing ring is placed in the outer ring and abuts against the top surface of the inner ring. The pressing ring is detachably connected to the bearing plate.

[0010] Based on the above technical solutions, preferably, the pressing ring includes a pressing ring body and a convex ring. The pressing ring body is inserted into the outer ring and is detachably connected to the bearing plate. The convex ring is arranged at one end of the pressing ring body connected to the bearing plate and is used for being inserted into the inner ring.

[0011] Based on the above technical solutions, preferably, the pressing ring body is a hollow cylinder, and a connecting plate is arranged inside the pressing ring body. The connecting plate is used for detachably connecting with the bearing plate.

[0012] Based on the above technical solutions, preferably, a hollowed-out part is arranged on the bearing plate, so that limiting blocks arranged in a staggered manner are formed in the middle of the bearing plate; limiting grooves matched with the limiting blocks are arranged on the connecting plate.

[0013] Based on the above technical solutions, preferably, alignment blocks corresponding to the limiting blocks are arranged on the connecting plate, and limiting plates are arranged on both sides of the alignment blocks. The two limiting plates and the alignment block form the limiting groove.

[0014] Based on the above technical solutions, preferably, it further includes a valve stem and a connecting bolt. Threads are arranged on the valve stem;

[0015] First connecting holes are arranged on the limiting blocks, second connecting holes are arranged on the alignment blocks. The valve stem passes through the first connecting hole and the second connecting hole and is respectively connected with the connecting bolts at both ends.

[0016] Based on the above technical solutions, preferably, the outer diameter of the pressing ring body is smaller than the inner diameter of the outer ring, and the inner diameter of the pressing ring body is larger than the inner diameter of the inner ring.

[0017] Based on the above technical solutions, preferably, the height of the convex ring is less than or equal to the thickness of the inner ring.

[0018] The sealing adjustment structure of the cooling device of the present utility model has the following beneficial effects compared with the prior art:

[0019] (1) By arranging a placing groove on the bearing plate, placing the outer ring in the placing groove and the bottom surface abuts against the bearing plate, placing the pressing ring in the outer ring and the top surface abuts against the inner ring, and the pressing ring is detachably connected with the bearing plate, the sealing ring is pressed tightly between the pressing ring and the valve seat, so that during the long-term reciprocating braking process of the cooling device, the sealing ring will not fall off, avoiding the inability to control the temperature of the cooling system and the inability to completely close the channel due to the detachment of the sealing ring, reducing the loss of cold quantity, and improving the reliability and stability;

[0020] (2) The pressing ring includes a pressing ring body and a convex ring. The pressing ring body is inserted into the outer ring and is detachably connected to the bearing plate. The convex ring is arranged at one end of the pressing ring body connected to the bearing plate and is used for being inserted into the inner ring. The pressing ring body and the convex ring form a double-layer nested structure. The outer ring can position the pressing ring body, and the convex ring is inserted into the inner ring, which can position the convex ring. The installation is convenient and fast, and the fixing effect on the sealing ring is good, improving the reliability and stability.

[0021] (3) The bearing plate is provided with a hollowed-out part so that limiting blocks arranged in a staggered manner are formed in the middle of the bearing plate. The connecting plate is provided with limiting grooves matching with the limiting blocks. The hollowed-out part can make the structure lighter, and the formed limiting blocks cooperate with the limiting grooves, which can prevent relative rotation between the bearing plate and the connecting plate from damaging the sealing ring, improving the service life of the sealing ring, and thus improving the reliability and stability of the device.

[0022] (4) The connecting plate is provided with alignment blocks corresponding to the limiting blocks. Limiting plates are arranged on both sides of the alignment blocks, and the two limiting plates and the alignment block form the limiting grooves. When the limiting grooves cooperate with the limiting blocks, the alignment blocks are aligned and abutted against the limiting blocks. During the assembly process, the cooperation between the limiting grooves and the limiting blocks can be carried out by whether the alignment blocks and the limiting blocks are aligned, improving the convenience of installation, and the alignment blocks and the limiting blocks can bear the opposite forces between each other, improving the reliability.

[0023] (5) The valve stem is provided with threads, the limiting block is provided with a first connection hole, the alignment block is provided with a second connection hole, the valve stem passes through the first connection hole and the second connection hole, and both ends are respectively connected to the connecting bolts, realizing the detachable connection between the support plate and the connecting plate, and using the original valve stem for connection can reduce the number of parts, making the structure more compact. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0025] Figure 1 It is an exploded view of the sealing adjustment structure of the cooling device of the present invention;

[0026] Figure 2 It is a three-dimensional view of the valve seat of the present invention;

[0027] Figure 3Cross-sectional view of the sealing ring of the present utility model;

[0028] Figure 4 Stereogram of the pressure ring of the present utility model Figure 1 ;

[0029] Figure 5 Stereogram of the pressure ring of the present utility model Figure 2 ;

[0030] Figure 6 Stereogram of the valve stem of the present utility model.

[0031] Explanation of reference numerals in the drawings: 1-valve seat, 2-sealing ring, 3-pressure ring, 4-valve stem;

[0032] 11-bearing plate, 111-placement groove, 112-hollowed-out part, 113-limiting block, 1131-first connection hole;

[0033] 21-outer ring, 22-inner ring;

[0034] 31-pressure ring body, 311-connection plate, 312-limiting groove, 313-aligning block, 3131-second connection hole, 314-limiting plate, 32-convex ring;

[0035] 41-thread. Specific implementation manners

[0036] Next, in combination with the embodiments of the present utility model, the technical solutions in the embodiments of the present utility model will be clearly and completely described. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments in the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0037] Referring to Figures 1-6 as shown, an embodiment of the present utility model provides a sealing adjustment structure for a cooling device, including a valve seat 1, a sealing ring 2 and a pressure ring 3, wherein:

[0038] One end of the valve seat 1 is provided with a bearing plate 11, and a placement groove 111 is arranged on the bearing plate 11; the valve seat 1 is a hollow cylinder, the bearing plate 11 is connected to one end of the valve seat 1 and is located inside the valve seat 1, the cross-section of the bearing plate 11 is circular, and the placement groove 111 is a circular blind hole;

[0039] The sealing ring 2 includes an outer ring 21 and an inner ring 22 which are integrally formed with flush bottom surfaces. The thickness of the outer ring 21 is greater than that of the inner ring 22. The outer ring 21 is placed in the placement groove 111 and its bottom surface abuts against the bearing plate 11; the bottom surfaces of the outer ring 21 and the inner ring 22 are flush, the inner wall of the outer ring 21 and the outer wall of the inner ring 22 are integrally connected, and the top surface of the outer ring 21 is higher than the top surface of the inner ring 22;

[0040] The pressing ring 3 is placed inside the outer ring 21 and abuts against the top surface of the inner ring 22. The pressing ring 3 is detachably connected to the bearing plate 11.

[0041] In the sealing and adjusting structure of the cooling device proposed in this embodiment, by providing a placement groove 111 on the bearing plate 11, the outer ring 21 is placed in the placement groove 111 and its bottom surface abuts against the bearing plate 11, the pressing ring 3 is placed inside the outer ring 21 and abuts against the top surface of the inner ring 22, and the pressing ring 3 is detachably connected to the bearing plate 11, the inner ring 22 of the sealing ring 2 is pressed between the pressing ring 3 and the valve seat 1, so that during the long-term reciprocating braking of the cooling device, the sealing ring 2 will not fall off, avoiding the inability to control the temperature of the cooling system and the inability to completely close the channel due to the detachment of the sealing ring 2, reducing the loss of cooling capacity, and improving reliability and stability.

[0042] In some embodiments, the pressing ring 3 includes a pressing ring body 31 and a convex ring 32. The pressing ring body 31 is inserted into the outer ring 21 and is detachably connected to the bearing plate 11. The convex ring 32 is provided at one end of the pressing ring body 31 connected to the bearing plate 11 for insertion into the inner ring 22. By inserting the pressing ring body 31 into the outer ring 21, the convex ring 32 is provided at one end of the pressing ring body 31 connected to the bearing plate 11, and the convex ring 32 is inserted into the inner ring 22, the pressing ring body 31 and the convex ring 32 form a double-layer nested structure. The pressing ring body 31 is detachably connected to the bearing plate 11. The outer ring 21 can position the pressing ring body 31, and the convex ring 32 is inserted into the inner ring 22, which can position the convex ring 32. The installation is relatively convenient and fast, and the fixing effect on the sealing ring 2 is good, improving reliability and stability. In actual design, the pressing ring body 31 and the outer ring 21 can adopt an interference fit. The interference fit allows a gap between the pressing ring body 31 and the outer ring 21, which is convenient for placing the pressing ring body 31. The convex ring 32 and the inner ring 22 can adopt a transition fit. The transition fit is used for a relatively stationary connection that requires precise positioning and disassembly.

[0043] In some embodiments, the pressing ring body 31 is a hollow cylinder, and a connecting plate 311 is arranged inside the pressing ring body 31. The connecting plate 311 is used for detachably connecting with the bearing plate 11. By arranging the connecting plate 311 inside the pressing ring body 31 and detachably connecting the connecting plate 311 with the bearing plate 11, the detachable connection between the pressing ring body 31 and the bearing plate 11 is realized, which is convenient for installation and disassembly, and makes assembly and maintenance more convenient.

[0044] In some embodiments, a hollowed-out portion 112 is arranged on the bearing plate 11 so that limiting blocks 113 arranged in a staggered manner are formed in the middle of the bearing plate 11; a limiting groove 312 matched with the limiting blocks 113 is arranged on the connecting plate 311. By arranging the hollowed-out portion 112 on the bearing plate 11 so that the limiting blocks 113 arranged in a staggered manner are formed in the middle of the bearing plate 11, and the limiting groove 312 matched with the limiting blocks 113 is arranged on the connecting plate 311, the structure can be made lighter through the hollowed-out portion 112, and the formed limiting blocks 113 and the limiting groove 312 are matched, which can prevent relative rotation between the bearing plate 11 and the connecting plate 311 from damaging the sealing ring 2, improve the service life of the sealing ring 2, and thus improve the reliability and stability of the device.

[0045] In some embodiments, an alignment block 313 corresponding to the limiting block 113 is arranged on the connecting plate 311, and limiting plates 314 are arranged on both sides of the alignment block 313. The two limiting plates 314 and the alignment block 313 form the limiting groove 312. By arranging the alignment block 313 corresponding to the limiting block 113 on the connecting plate 311, and arranging the limiting plates 314 on both sides of the alignment block 313, and the two limiting plates 314 and the alignment block 313 form the limiting groove 312, when the limiting groove 312 is matched with the limiting block 113, the alignment block 313 is aligned with and abuts against the limiting block 113. During the assembly process, the matching between the limiting groove 312 and the limiting block 113 can be carried out by whether the alignment block 313 and the limiting block 113 are aligned, which improves the convenience of installation, and the alignment block 313 and the limiting block 113 can bear the opposite force with each other, improving the reliability.

[0046] In some embodiments, the sealing adjustment structure of the cooling device further includes a valve stem 4 and a connecting bolt. A thread 41 is provided on the valve stem 4; a first connection hole 1131 is provided on the limiting block 113, and a second connection hole 3131 is provided on the alignment block 313. The valve stem 4 passes through the first connection hole 1131 and the second connection hole 3131, and both ends are respectively connected to the connecting bolt. By providing the thread 41 on the valve stem 4, the first connection hole 1131 on the limiting block 113, the second connection hole 3131 on the alignment block 313, and the valve stem 4 passing through the first connection hole 1131 and the second connection hole 3131 and being respectively connected to the connecting bolt at both ends, the detachable connection between the support plate and the connecting plate 311 is realized, and the original valve stem 4 can be used for connection, which can reduce the number of components and make the structure more compact and small.

[0047] In some embodiments, the outer diameter of the pressing ring body 31 is smaller than the inner diameter of the outer ring 21, and the inner diameter of the pressing ring body 31 is larger than the inner diameter of the inner ring 22. By the outer diameter of the pressing ring body 31 being smaller than the inner diameter of the outer ring 21, the pressing ring body 31 can be easily placed into the outer ring 21, and by the inner diameter of the pressing ring body 31 being larger than the inner diameter of the inner ring 22, the pressing ring body 31 can press the top surface of the inner ring 22, thereby improving the reliability of the device.

[0048] In some embodiments, the height of the convex ring 32 is less than or equal to the thickness of the inner ring 22. By setting the height of the convex ring 32 to be less than or equal to the thickness of the inner ring 22, after the convex ring 32 abuts against the support plate, the inner ring 22 can be pressed tightly between the pressing ring body 31 and the support plate, improving the reliability and stability of the device.

[0049] The working principle of the sealing adjustment structure of the cooling device is as follows: Place the outer ring 21 in the placement groove 111 and make its bottom surface abut against the bearing plate 11. Place the pressing ring 3 in the outer ring 21 and make it abut against the top surface of the inner ring 22. Connect the pressing ring 3 to the bearing plate 11. The inner ring 22 of the sealing ring 2 is pressed tightly between the pressing ring 3 and the valve seat 1, so that during the long-term reciprocating braking process of the cooling device, the sealing ring 2 will not fall off, avoiding the inability to control the temperature of the cooling system and the inability to completely close the channel due to the detachment of the sealing ring 2, reducing the loss of cooling capacity, and improving the reliability and stability.

[0050] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A cooling device sealing adjustment structure, characterized in that: It includes valve seat, sealing ring and pressure ring, among which: A bearing plate is provided at one end of the valve seat, and a placement groove is provided on the bearing plate; The sealing ring comprises an outer ring and an inner ring which are integrally formed and have flush bottom surfaces, the thickness of the outer ring is greater than the thickness of the inner ring, the outer ring is placed in the placement groove and the bottom surface abuts against the bearing plate; The pressure ring is placed inside the outer ring and abuts against the top surface of the inner ring, and the pressure ring is detachably connected to the bearing plate.

2. The cooling device sealing adjustment structure according to claim 1, characterized in that: The pressure ring includes a pressure ring body and a convex ring. The pressure ring body is inserted in the outer ring and detachably connected to the bearing plate. The convex ring is arranged at one end of the pressure ring body connected to the bearing plate and is used to be inserted in the inner ring.

3. The cooling device sealing adjustment structure according to claim 2, characterized in that: The pressing ring body is a hollow cylinder, and a connecting plate is arranged inside the pressing ring body. The connecting plate is used for detachably connecting with the bearing plate.

4. The cooling device sealing adjustment structure according to claim 3, characterized in that: The support plate is provided with a hollowed-out portion so that staggered limit blocks are formed in the middle of the support plate; and the connection plate is provided with limit grooves that cooperate with the limit blocks.

5. The cooling device sealing adjustment structure according to claim 4, characterized in that: The connecting plate is provided with an alignment block corresponding to the limit block, and limit plates are provided on both sides of the alignment block, and the two limit plates and the alignment block form the limit groove.

6. The cooling device sealing adjustment structure according to claim 5, characterized in that: It also includes a valve stem and a connecting bolt, wherein the valve stem is provided with threads; The limiting block is provided with a first connecting hole, the alignment block is provided with a second connecting hole, the valve stem passes through the first connecting hole and the second connecting hole, and both ends are respectively connected to the connecting bolts.

7. The cooling device sealing adjustment structure according to any one of claims 2 to 6, characterized in that: The outer diameter of the pressure ring body is smaller than the inner diameter of the outer ring, and the inner diameter of the pressure ring body is larger than the inner diameter of the inner ring.

8. The cooling device sealing adjustment structure according to claim 7, characterized in that: The height of the convex ring is less than or equal to the thickness of the inner ring.

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